离子镀沉积TiSiCN单层和TiSiCN/TiSiN多层涂层的微观形貌及摩擦学行为
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摘要
采用多弧离子镀技术在钛合金表面制备了TiSiCN单层涂层和TiSiCN/TiSiN多层涂层,对比研究了两种涂层的微观形貌、硬度、结合性能和摩擦磨损性能。结果表明:两种涂层的组织结构均致密均匀;与TiSiCN单层涂层相比,TiSiCN/TiSiN多层涂层的硬度更高;TiSiCN/TiSiN多层涂层与基体的结合强度小于TiSiCN单层涂层的;TiSiCN/TiSiN多层涂层在大气中和人工海水中的摩擦因数分别为0.32和0.30,TiSiCN单层涂层在大气中和人工海水中的摩擦因数和磨损率均低于TiSiCN/TiSiN多层涂层的,TiSiCN单层涂层的耐磨性能更优。
TiSiCN monolayer and TiSiCN/TiSiN multilayer coatings were deposited on titanium alloy by multi arc ion plating.The microstructure,hardness,bonding property and friction and wear property of the two coatings were investigated comparatively.The results show that the composing structure of the two coatings were compact and homogeneous.The hardness of the TiSiCN/TiSiN multilayer coating was much higher than that of the TiSiCN monolayer coating.The bonding strength between the TiSiCN/TiSiN multilayer coating and the substrate was smaller than that between the TiSiCN monolayer coating and the substrate.The friction coefficient of the TiSiCN/TiSiN multilayer coating in atmosphere and artificial seawater were 0.32 and 0.30,respectively.The friction coefficient and wear rate of the TiSiCN monolayer coating in atmosphere or artificial seawater were lower than those of the TiSiCN/TiSiN multilayer coating.The wear resistance of the TiSiCN monolayer coating was relatively good.
TiSiCN monolayer and TiSiCN/TiSiN multilayer coatings were deposited on titanium alloy by multi arc ion plating.The microstructure,hardness,bonding property and friction and wear property of the two coatings were investigated comparatively.The results show that the composing structure of the two coatings were compact and homogeneous.The hardness of the TiSiCN/TiSiN multilayer coating was much higher than that of the TiSiCN monolayer coating.The bonding strength between the TiSiCN/TiSiN multilayer coating and the substrate was smaller than that between the TiSiCN monolayer coating and the substrate.The friction coefficient of the TiSiCN/TiSiN multilayer coating in atmosphere and artificial seawater were 0.32 and 0.30,respectively.The friction coefficient and wear rate of the TiSiCN monolayer coating in atmosphere or artificial seawater were lower than those of the TiSiCN/TiSiN multilayer coating.The wear resistance of the TiSiCN monolayer coating was relatively good.
引文
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[3]LI J L,ZHANG S H,LI M X.Influence of the C2H2flow rate on gradient TiCN films deposited by multi-arc ion plating[J].Applied Surface Science,2013,283(14):134-144.
[4]SUN Y,LU C,YU H L,et al.Nanomechanical properties of TiCN and TiCN/Ti coatings on Ti prepared by filtered arc deposition[J].Materials Science and Engineering:A,2015,625:56-64.
[5]LEE S,BHARATHY P V,ELANGOVAN T,et al.Synthesis and characterization of Ti-Si-C-N nanocomposite coatings prepared by a filtered vacuum arc with organosilane precursors[J].Nanocomposites:New Trends and Developments,2012,17:437-456.
[6]YAO Y R,LI J L,WANG Y X,et al.Influence of the negative bias in ion plating on the microstructural and tribological performances of Ti-Si-N coatings in seawater[J].Surface and Coatings Technology,2015,280:154-162.
[7]ZHANG Y J,YANG Y Z,ZHAI Y H,et al.Effect of negative substrate bias on the microstructure and mechanical properties of Ti-Si-N films deposited by a hybrid filtered cathodic arc and ion beam sputtering technique[J].Applied Surface Science,2012,258(18):6897-6901.
[8]ZHANG Y J,YANG Y Z,DING H W,et al.Combining magnetic filtered cathodic arc deposition with ion beam sputtering to afford superhard TiSiN multilayer composite films with tunable microstructure and mechanical properties[J].Vacuum,2016,125:6-12.
[9]DANG C Q,LI J L,WANG Y,et al.Structure,mechanical and tribological properties of self-toughening TiSiN/Ag multilayer coatings on Ti6Al4Vprepared by arc ion plating[J].Applied Surface Science,2016,386:224-233.
[10]THANGAVEL E,LEE S,NAM K S,et al.Synthesis and characterization of Ti-Si-C-N nanocomposite coatings prepared by a filtered vacuum arc method[J].Applied Surface Science,2013,265(1):60-65.
[11]MA S L,MA D Y,GUO Y,et al.Synthesis and characterization of super hard,self-lubricating Ti-Si-C-Nnanocomposite coatings[J].Acta Materialia,2007,55(18):6350-6355.
[12]ABD EL-RAHMAN A M,WEI R H.Effect of ion bombardment on structural,mechanical,erosion and corrosion properties of Ti-Si-C-N nanocomposite coatings[J].Surface and Coatings Technology,2014,258:320-328.
[13]WANG Y,LI J L,DANG C Q,et al.Influence of carbon contents on the structure and tribocorrosion properties of TiSiCN coatings on Ti6Al4V[J].Tribology International,2017,109:285-296.
[14]WANG Y,LI J L,DANG C Q,et al.Influence of bias voltage on structure and tribocorrosion properties of TiSiCNcoating in artificial seawater[J].Materials Characterization,2017,127:198-208.
[15]LIN H M,DUH J G,WEI R H,et al.The effect of microstructure and composition on mechanical properties in thick-layered nanocomposite Ti-Si-C-N coatings[J].Surface and Coatings Technology,2010,205(5):1460-1464.
[16]QIN C P,ZHENG Y G,WEI R.Cavitation erosion behavior of nanocomposite Ti-Si-C-N and Ti/Ti-Si-C-N coatings deposited on 2Cr13stainless steel using aplasma enhanced magnetron sputtering process[J].Surface and Coatings Technology,2010,204(21/22):3530-3538.
[17]CHIM Y C,DING X Z,ZENG X T,et al.Oxidation resistance of TiN,CrN,TiAlN and CrAlN coatings deposited by lateral rotating cathode arc[J].Thin Solid Films,2009,517(17):4845-4849.