掩模台水平向的二维衍射平面光栅测量模型验证
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摘要
为了降低掩模台位置测量的位置误差,首先阐述了二维衍射平面光栅尺在掩模台上的布局与信号采集模块;然后运用两个二维衍射平面光栅尺建立掩模台位置测量模型;最后以双频激光干涉仪作为参考测量系统,对比两个测量系统的不确定度。实验证明:二维衍射平面光栅尺测量系统的不确定度比较低,可以有效地实现掩模台的三自由度位置超高精密测量。
In order to reduce the position error of the reticle stage's position measurement, this paper first expounds the layout and signal acquisition module of the two-dimensional diffraction plane scale on the reticle stage, and then uses two two-dimensional diffraction plane grating to establish the reticle stage's position measurement. Model; finally, the dual-frequency laser interferometer is used as a reference measurement system to compare the uncertainty of the two measurement systems. The experiment proves that the uncertainty of the two-dimensional diffraction plane grating measuring system is relatively low, which can effectively realize the ultra-high precision measurement of the three-degree-of-freedom displacement of the reticle stage.
In order to reduce the position error of the reticle stage's position measurement, this paper first expounds the layout and signal acquisition module of the two-dimensional diffraction plane scale on the reticle stage, and then uses two two-dimensional diffraction plane grating to establish the reticle stage's position measurement. Model; finally, the dual-frequency laser interferometer is used as a reference measurement system to compare the uncertainty of the two measurement systems. The experiment proves that the uncertainty of the two-dimensional diffraction plane grating measuring system is relatively low, which can effectively realize the ultra-high precision measurement of the three-degree-of-freedom displacement of the reticle stage.
引文
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[5]王静.掩模台三自由度光栅干涉测量模型研究[D].哈尔滨:哈尔滨工业大学,2017.
[6]Liu Y,Yuan M,Cao J,et al.Use of Two Planar Gratings to Measure3-DOF Displacements of Planar Moving Stage[J].IEEE Transactions on Instrumentation and Measurement,2015,64(1):163-169.
[7]尚平,夏豪杰,费业泰.衍射式光栅干涉测量系统发展现状及趋势[J].光学技术,2011,37(03):313-316.
[8]党宝生,熊显名,王献英,等.超精密光栅尺位移测量系统[J].激光杂志,2018,39(09):42-46.
[9]滕伟,周云飞,穆海华,等.超精密运动台激光测量模型及误差补偿算法[J].中国机械工程,2009(6):1492-1497.
[10]张文涛,杜浩,熊显名,等.高误差位置测量系统硬件在环仿真[J].中国激光,2019,46(02):0204001.
[2]程吉水.工件台激光干涉仪测量误差模型研究[D].武汉:华中科技大学,2008.
[3]池峰,朱煜,张志平,等.双频激光干涉测量中的环境补偿技术[J].中国激光,2014,41(04):190-196.
[4]毛帅.基于共测量轨迹的快速外差激光干涉仪动态校准关键技术[D].哈尔滨:哈尔滨工业大学,2017.
[5]王静.掩模台三自由度光栅干涉测量模型研究[D].哈尔滨:哈尔滨工业大学,2017.
[6]Liu Y,Yuan M,Cao J,et al.Use of Two Planar Gratings to Measure3-DOF Displacements of Planar Moving Stage[J].IEEE Transactions on Instrumentation and Measurement,2015,64(1):163-169.
[7]尚平,夏豪杰,费业泰.衍射式光栅干涉测量系统发展现状及趋势[J].光学技术,2011,37(03):313-316.
[8]党宝生,熊显名,王献英,等.超精密光栅尺位移测量系统[J].激光杂志,2018,39(09):42-46.
[9]滕伟,周云飞,穆海华,等.超精密运动台激光测量模型及误差补偿算法[J].中国机械工程,2009(6):1492-1497.
[10]张文涛,杜浩,熊显名,等.高误差位置测量系统硬件在环仿真[J].中国激光,2019,46(02):0204001.