TFT-LCD面板减薄废液循环利用技术探讨
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摘要
通过对TFT-LCD面板减薄废液成分进行分析,提出了减薄液资源化、循环利用的途径,并对资源化利用技术进行了探讨。利用复合沉淀剂,采用分步沉淀的方法,选择性去除液晶面板减薄废液中的氟硅酸(H_2SiF_6)和氟硼酸(HBF_4),使其再生并回用于液晶面板减薄工厂,副产的Na_2SiF_6可以用作制备NaF,KF及白炭黑的原料,KBF_4可直接用于市场销售。
Based on the analysis of the compositions of TFT-LCD panel thinning liquid waste, the ways of resource recovery and recycling of the liquid waste are put forward, and the technology of resource utilization is discussed. With compound precipitant, the fluosilicic acid(H_2SiF_6) and fluoboric acid(HBF_4) in the waste liquid can be removed selectively by using the method of fractional precipitation, and the regenerated thinning liquid can be reused for thinning the TFT-LCD panel. The by-product Na_2SiF_6 can be used as raw material for the preparation of Na F, KF and white carbon, and KBF_4 can be sold directly.
Based on the analysis of the compositions of TFT-LCD panel thinning liquid waste, the ways of resource recovery and recycling of the liquid waste are put forward, and the technology of resource utilization is discussed. With compound precipitant, the fluosilicic acid(H_2SiF_6) and fluoboric acid(HBF_4) in the waste liquid can be removed selectively by using the method of fractional precipitation, and the regenerated thinning liquid can be reused for thinning the TFT-LCD panel. The by-product Na_2SiF_6 can be used as raw material for the preparation of Na F, KF and white carbon, and KBF_4 can be sold directly.
引文
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[8]谭钦德,潘文忠,何明康,等.用氟硅酸钠制取氟化钠和白碳黑[J].工业水处理,1991,11(4):28-30.
[9]张梅.烧碱氟硅酸钠法制冰晶石联产白炭黑工艺研究[J].无机盐工业,2010,42(4):36-38.
[2]李凯华.液晶显示屏刻蚀工艺废液处理及回收技术研究[D].上海:上海交通大学,2013.
[3]汪晓军,何花,万小芳,等.从废蚀刻液中回收资源的应用研究[J].环境工程,2004,22(2):75-77.
[4]陈琛.合肥京东方公司工业废弃物综合利用现状分析[J].中国资源综合利用,2011,29(7):34-36.
[5]KIMJ Y,SHIN C H,CHOI H J,et al.Recovery of phosphoric acid from mixed waste acids of semiconductor industry by diffusion dialysis and vacuum distillation[J].Separation and Purification Technology,2012,90:64-68.
[6]毕亚凡,牟林琳,徐俊虎,等.废刻蚀液与低品位磷矿为原料磷复肥的制备[J].武汉工程大学学报,2013,35(7):27-31.
[7]李凯华,晏乃强,徐亚玲,等.玻璃减薄蚀刻液中氟硅酸的选择性脱除方法[J].环境工程学报,2014,8(3):1079-1085.
[8]谭钦德,潘文忠,何明康,等.用氟硅酸钠制取氟化钠和白碳黑[J].工业水处理,1991,11(4):28-30.
[9]张梅.烧碱氟硅酸钠法制冰晶石联产白炭黑工艺研究[J].无机盐工业,2010,42(4):36-38.