摘要
以MEMS加速度传感器为主体器件,设计了一种振动加速度实时测量和存储系统,利用串口显示助手读取显示测量系统的存储测量数据,通过振动试验台试验检验系统测量性能和抗过载能力。试验结果表明:该测量系统可完成振动加速度的实时测量,并可承受至少100g的过载冲击。
In this paper,a MEMS acceleration sensor was used as the main device.A real-time vibration acceleration measurement and storage system was designed.The measured data of the display measurement system was read and displayed by the serial port display assistant.The vibration bench was used to test the measurement performance and anti-overload capability.The test results show that the measurement system can perform real-time measurement of vibration acceleration and can withstand overload impact of at least 100g.
引文
[1] CHAKABORTY A,GUPTA B.Development of compact 180° phase shifters based on MEMS technology[J].Sensors & Actuators A Physical,2016,247:187-198.
[2] 梁琴琴,赵志耘,赵蕴华.全球MEMS传感器技术创新现状与趋势[J].科技管理研究,2016 (10):165-169.
[3] 王勇.MEMS技术发展及应用优势[J].飞航导弹,2011 (5):85-89.
[4] 王淑华.MEMS传感器现状及应用[J].微纳电子技术,2011,48(8):516-522.
[5] WANG J,JIANG X J,ZHANG L,et al.Design and fabrication of energetic superlattice like-PTFE/Al with superior performance and application in functional micro-initiator [J].Nano Energy,2015(12):597-605.
[6] 李杰,赵诣,刘俊,等.高旋弹药飞行姿态测量用半捷联MEMS惯性测量装置研究[J].兵工学报,2013,34(11):1398-1403.
[7] 韩盈党,李哲.MEMS加速度传感器的数据采集和预处理[J].仪表技术与传感器,2015(2):16-19.
[8] 文丰,石云波,周振,等.基于MEMS的高g值加速度计及在炮弹侵彻双层钢靶试验中的应用[J].振动与冲击,2013,32(19):165-169.
[9] 陈艳香,石云波,智丹,等.一种高量程加速度传感器的性能测试与分析[J].仪表技术与传感器,2016(5):18-21.