硬质合金涂层的内应力测定及其控制研究
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摘要
为了表征硬质合金工具涂层的内应力状态,利用阴极电弧法沉积制备各类单层和纳米多层硬质涂层,在不同的涂层偏压及反应气体分压的成膜条件下,制备具有不同内应力的涂层样品,我们采用Stoney法设计合适的实验表征系统,成功定量测定了涂层的内应力值。在考察了涂层内应力与成膜条件的关系的同时,比较了涂层内应力与硬度的关系及规律,本实验得到几种低应力高硬度涂层结构,这不同于通常的内应力/硬度规律。我们探讨了内应力的成因及控制方法,以及工具涂层内应力水平,以便指导设计制造更有效的工具涂层。
In order to characterize the internal stress of coatings on tungsten carbide cutting tool, we deposited various monolayer and nano-multilayer coatings by cathode arc evaporation. The coatings with different internal stress were formed by different bias voltage and gas pressure. We succeed in measuring the stress value of coatings by Stoney method with using a special fixture. We studied the internal stress of coatings due to depositing conditions, and compared the relation between the hardness and its stress. We have obtained few of coatings with both lower stress and higher hardness, which is different with usual coatings, we discussed the reason of internal stress and how to control it for designing and manufacturing better tool coatings.
In order to characterize the internal stress of coatings on tungsten carbide cutting tool, we deposited various monolayer and nano-multilayer coatings by cathode arc evaporation. The coatings with different internal stress were formed by different bias voltage and gas pressure. We succeed in measuring the stress value of coatings by Stoney method with using a special fixture. We studied the internal stress of coatings due to depositing conditions, and compared the relation between the hardness and its stress. We have obtained few of coatings with both lower stress and higher hardness, which is different with usual coatings, we discussed the reason of internal stress and how to control it for designing and manufacturing better tool coatings.
引文
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[2] H.Oettel,Wiedemann, Surface and Coatings Technology, 76-77(1995)266.
[3] Bouzakis,K-D., Skordaris,G.,Bouzakis,E.,Tsouknidas,A., etc, CIRP Annals-Manufacturing Technology, 60(2011)587-590.
[4] E.Besozzi, D.Dellasega, A.Pezzoli, etc,Mater. Des., 137(2018)192-203.
[5] J. García, H. Pinto, E. Ramos-Moore, C.Espinoza, J.?stby,R. Coelho, J. Refract. Met. Hard Mater., 56(2016)27-34.
[6] B.Rothera, H.A.Jehna, H.M.Gabrielb,Surface and Coatings Technology, 86-87(1996)207-211.
[7] Ahlgren,M.,Blomqvist,H., Surface and Coatings Technology, 200(2005)157-160.
[8] F.M.d'Heurle, Metall. Trans., 1(1970)725.