基于U型电极的铁电纳米纤维柔性能量收集器件制备研究
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摘要
主要研究基于聚偏氟乙烯-三氟乙烯[P(VDF-TrFE)]铁电纳米纤维的柔性能量收集器件.通过利用MEMS加工技术和湿法刻蚀工艺在聚酰亚胺(PI)膜上制备多对U型交叉金电极,并且利用静电纺丝技术在U型电极对的表面收集排列有序的P(VDF-TrFE)纳米纤维,最后利用聚二甲基硅氧烷(PDMS)整体封装制备成柔性能量回收器件.经过测试,能量回收器件拥有不错的电学输出性能,其输出电压可以达到0. 9 V,短路电流可以达到100 nA,展现了其在可穿戴应用和自供电器件方向的应用潜力.
We fabricated a kind of energy harvestor based on poly( vinylidene fluoride trifluoroethylene)[P( VDF-TrFE) ]fibers and U-shaped electrodes. MEMS processing technology and wet etching were used to fabricate U-shaped Au electrodes on Polyimide( PI) substrate,following which the aligned P( VDF-TrFE)nanofibers were deposited on the U-shaped electrodes by eletrospinning,the final NG based on the resulting PI substrate was packaged with elastic polydimethylsiloxane. The energy harvestor performs well,with a peak output voltage of 0. 9 V and a peak short-circuit current of 100 nA,which could facilitate practical application in wearable and self-powered devices.
We fabricated a kind of energy harvestor based on poly( vinylidene fluoride trifluoroethylene)[P( VDF-TrFE) ]fibers and U-shaped electrodes. MEMS processing technology and wet etching were used to fabricate U-shaped Au electrodes on Polyimide( PI) substrate,following which the aligned P( VDF-TrFE)nanofibers were deposited on the U-shaped electrodes by eletrospinning,the final NG based on the resulting PI substrate was packaged with elastic polydimethylsiloxane. The energy harvestor performs well,with a peak output voltage of 0. 9 V and a peak short-circuit current of 100 nA,which could facilitate practical application in wearable and self-powered devices.
引文
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[2]Karan S K,Bera R,Paria S,et al.An approach to design highly durable piezoelectric nanogenerator based on self-poled PVDF/Al O-rGO flexible nanocomposite with high power density and energy conversion efficiency[J].Advanced Energy Materials,2016,6(20):1601016.
[3]Ma M,Xia S,Li Z,et al.Enhanced energy harvesting performance of the piezoelectric unimorph with perpendicular electrodes[J].Applied Physics Letters,2014,105(4):043905.
[4]Bhavanasi V,Kumar V,Parida K,et al.Enhanced piezoelectric energy harvesting performance of flexible PVDF-TrFEbilayer films with graphene oxide[J].ACS Applied Materials&Interfaces,2016,8:521-529.
[5]Xu C W,Zhang L,Xu Y L,et al.Filling the holes in piezopolymers with a solid electrolyte:a new paradigm of poling-free dynamic electrets for energy harvesting[J].Journal of Materials Chemistry A,2017,5:189-200.
[6]Fuh Y K,Wang B S.Near field sequentially electrospun three-dimensional piezoelectric fibers arrays for self-powered sensors of human gesture recognition[J].Nano Energy,2016,30:677-683.
[7]Liu C,Hua B,You S J,et al.Self-amplified piezoelectric nanogenerator with enhanced output performance:The synergistic effect of micropatterned polymer film and interweaved silver nanowires[J].Applied Physics Letters,2016,106,(16):163901.
[8]Wang Z L,Song J H.Piezoelectric nanogenerators based on zinc oxide nanowire arrays[J].Science,2006,312(5771):242-246.
[9]Chen X,Xu S,Yao N,et al.1.6 V nanogenerator for mechanical energy harvesting using PZT nanofibers[J].Nano Letters,2010,10(6):2133-2137.
[10]Stassi S,Cauda V,Ottone C,et al.Flexible piezoelectric energy nanogenerator based on Zn O nanotubes hosted in a polycarbonate membrane[J].Nano Energy,2015,13:474-481.
[11]Park K I,Xu S,Liu Y,et al.Piezoelectric Ba Ti O3Thin film nanogenerator on plastic substrates[J].Nano Letters,2010,10(12):4939-4943.
[12]Lin Y F,Song J H,Ding Y,et al.Piezoelectric nanogenerator using Cd S nanowires[J].Applied Physics Letters,2008,92(2):022105.
[13]张玲玲,国世上.铁电高分子PVDF及其共聚物研究进展[J].物理学进展,2016,36(2):35-45.
[14]Beringer L T,Xu X,Shih W,et al.An electrospun PVDF-TrFe fiber sensor platform for biological applications[J].Sensors and Actuators A:Physical,2015,222:293-300.
[15]You S,Shi H,Wu J,et al.A flexible,wave-shaped P(VDF-TrFE)/metglas piezoelectric composite for wearable applications[J].Journal of Applied Physics,2016,120(23):234103.
[16]Fuh Y K,Huang Z M,Wang B S,et al.Self-powered active sensor with concentric topography of piezoelectric fibers[J].Nanoscale Research Letters,2017,12(1):44.
[17]Baniasadi M,Huang J,Xu Z,et al.High-performance coils and yarns of polymeric piezoelectric nanofibers[J].ACSApplied Materials&Interfaces,2015,7(9):5358-5366.
[18]Beringer L T,Xu X,Shih W,et al.An electrospun PVDF-TrFe fiber sensor platform for biological applications[J].Sensors and Actuators A:Physical,2015,222:293-300.
[19]Sharma T,Naik S,Langevine J,et al.Aligned PVDF-TrFE nanofibers with high-density PVDF nanofibers and PVDF coreshell structures for endovascular pressure sensing[J].IEEE Transactions on Biomedical Engineering,2014,62(1):188-195.
[20]Liu Z H,Pan C T,Su C Y,et al.A flexible sensing device based on a PVDF/MWCNT composite nanofiber array with an interdigital electrode[J].Sensors&Actuators A Physical,2014,211(5):78-88.
[21]Salimi A,Yousefi A A.Analysis method:FT-IR studies ofβ-phase crystal formation in stretched PVDF films[J].Polymer Testing,2003,22(6):699-704.