Silica nanocone array as a template for fabricating a plasmon induced hot electron photodetector
|
摘要
Plasmon induced hot electrons have attracted a great deal of interest as a novel route for photodetection and lightenergy harvesting. Herein, we report a hot electron photodetector in which a large array of nanocones deposited sequentially with aluminum, titanium dioxide, and gold films can be integrated functionally with nanophotonics and microelectronics. The device exhibits a strong photoelectric response at around 620 nm with a responsivity of 180 μA/W under short-circuit conditions with a significant increase under 1 V reverse bias to 360 μA/W. The increase in responsivity and a red shift in the peak value with increasing bias voltage indicate that the bias causes an increase in the hot electron tunneling effect. Our approach will be advantageous for the implementation of the proposed architecture on a vast variety of integrated optoelectronic devices.
Plasmon induced hot electrons have attracted a great deal of interest as a novel route for photodetection and lightenergy harvesting. Herein, we report a hot electron photodetector in which a large array of nanocones deposited sequentially with aluminum, titanium dioxide, and gold films can be integrated functionally with nanophotonics and microelectronics. The device exhibits a strong photoelectric response at around 620 nm with a responsivity of 180 μA/W under short-circuit conditions with a significant increase under 1 V reverse bias to 360 μA/W. The increase in responsivity and a red shift in the peak value with increasing bias voltage indicate that the bias causes an increase in the hot electron tunneling effect. Our approach will be advantageous for the implementation of the proposed architecture on a vast variety of integrated optoelectronic devices.
Plasmon induced hot electrons have attracted a great deal of interest as a novel route for photodetection and lightenergy harvesting. Herein, we report a hot electron photodetector in which a large array of nanocones deposited sequentially with aluminum, titanium dioxide, and gold films can be integrated functionally with nanophotonics and microelectronics. The device exhibits a strong photoelectric response at around 620 nm with a responsivity of 180 μA/W under short-circuit conditions with a significant increase under 1 V reverse bias to 360 μA/W. The increase in responsivity and a red shift in the peak value with increasing bias voltage indicate that the bias causes an increase in the hot electron tunneling effect. Our approach will be advantageous for the implementation of the proposed architecture on a vast variety of integrated optoelectronic devices.
引文
1.Y.Takahashi and T.Tatsuma,“Solid state photovoltaic cells based on localized surface plasmon-induced charge separation,”Appl.Phys.Lett.99,182110(2011).
2.Y.K.Lee,H.Lee,C.Lee,E.Hwang,and J.Y.Park,“Hot-electronbased solar energy conversion with metal-semiconductor nanodiodes,”J.Phys.Condens.Matter 28,254006(2016).
3.J.M.Stern,J.Stanfeld,W.Kabbani,J.-T.Hsieh,and J.A.Cadeddu,“Selective prostate cancer thermal ablation with laser activated gold nanoshells,”J.Urol.179,748-753(2008).
4.S.Mubeen,J.Lee,N.Singh,S.Kramer,G.D.Stucky,and M.Moskovits,“An autonomous photosynthetic device in which all charge carriers derive from surface plasmons,”Nat.Nanotechnol.8,247-251(2013).
5.S.Mukherjee,F.Libisch,N.Large,O.Neumann,L.V.Brown,J.Cheng,J.B.Lassiter,E.A.Carter,P.Nordlander,and N.J.Halas,“Hot electrons do the impossible:plasmon-induced dissociation of H2on Au,”Nano Lett.13,240-247(2013).
6.W.Li and J.G.Valentine,“Harvesting the loss:surface plasmonbased hot electron photodetection,”Nanophotonics 6,177-191(2017).
7.Y.P.Huang and L.A.Wang,“In-line silicon Schottky photodetectors on silicon cored fibers working in 1550 nm wavelength regimes,”Appl.Phys.Lett.106,191106(2015).
8.S.Muehlbrandt,A.Melikyan,T.Harter,K.K?hnle,A.Muslija,P.Vincze,S.Wolf,P.Jakobs,Y.Fedoryshyn,W.Freude,J.Leuthold,C.Koos,and M.Kohl,“Silicon-plasmonic internal-photoemission detector for 40 Gbit/s data reception,”Optica 3,741-747(2016).
9.Z.Yang,M.Liu,S.Liang,W.Zhang,T.Mei,D.Zhang,and S.J.Chua,“Hybrid modes in plasmonic cavity array for enhanced hot-electron photodetection,”Opt.Express 25,20268-20273(2017).
10.T.Gong and J.N.Munday,“Aluminum-based hot carrier plasmonics,”Appl.Phys.Lett.110,021117(2017).
11.Y.Liu,X.Zhang,J.Su,H.Li,Q.Zhang,and Y.Gao,“Ag nanoparticles@ZnO nanowire composite arrays:an absorption enhanced UV photodetector,”Opt.Express 22,30148-30155(2014).
12.H.Li,X.Zhang,N.Liu,L.Ding,J.Tao,S.Wang,J.Su,L.Li,and Y.Gao,“Enhanced photo-response properties of a single ZnO microwire photodetector by coupling effect between localized Schottky barriers and piezoelectric potential,”Opt.Express 23,21204-21212(2015).
13.M.L.Brongersma,N.J.Halas,and P.Nordlander,“Plasmon-induced hot carrier science and technology,”Nat.Nanotechnol.10,25-34(2015).
14.H.Chalabi and M.L.Brongersma,“Plasmonics:harvest season for hot electrons,”Nat.Nanotechnol.8,229-230(2013).
15.I.Goykhman,B.Desiatov,J.Khurgin,J.Shappir,and U.Levy,“Locally oxidized silicon surface-plasmon Schottky detector for telecom regime,”Nano Lett.11,2219-2224(2011).
16.Y.K.Lee,C.H.Jung,J.Park,H.Seo,G.A.Somorjai,and J.Y.Park,“Surface plasmon-driven hot electron flow probed with metalsemiconductor nanodiodes,”Nano Lett.11,4251-4255(2011).
17.B.Desiatov,I.Goykhman,N.Mazurski,J.Shappir,J.B.Khurgin,and U.Levy,“Plasmonic enhanced silicon pyramids for internal photoemission Schottky detectors in the near-infrared regime,”Optica 2,335-338(2015).
18.M.W.Knight,Y.Wang,A.S.Urban,A.Sobhani,B.Y.Zheng,P.Nordlander,and N.J.Halas,“Embedding plasmonic nanostructure diodes enhances hot electron emission,”Nano Lett.13,1687-1692(2013).
19.W.Li,Z.J.Coppens,L.V.Besteiro,W.Wang,A.O.Govorov,and J.Valentine,“Circularly polarized light detection with hot electrons in chiral plasmonic metamaterials,”Nat.Commun.6,8379(2015).
20.M.W.Knight,H.Sobhani,P.Nordlander,and N.J.Halas,“Photodetection with active optical antennas,”Science 332,702-704(2011).
21.A.Sobhani,M.W.Knight,Y.Wang,B.Zheng,N.S.King,L.V.Brown,Z.Fang,P.Nordlander,and N.J.Halas,“Narrowband photodetection in the near-infrared with a plasmon-induced hot electron device,”Nat.Commun.4,1643(2013).
22.K.T.Lin,H.L.Chen,Y.S.Lai,and C.C.Yu,“Silicon-based broadband antenna for high responsivity and polarization-insensitive photodetection at telecommunication wavelengths,”Nat.Commun.5,3288(2014).
23.W.Li and J.Valentine,“Metamaterial perfect absorber based hot electron photodetection,”Nano Lett.14,3510-3514(2014).
24.F.Pelayo García de Arquer,A.Mih,and G.Konstantatos,“Large-area plasmonic-crystal-hot-electron-based photodetectors,”ACS Photon.2,950-957(2015).
25.H.Lee,Y.K.Lee,E.Hwang,and J.Y.Park,“Enhanced surface plasmon effect of Ag/TiO2nanodiodes on internal photoemission,”J.Phys.Chem.C 118,5650-5656(2014).
26.M.G.Ramchandani,“Energy band structure of gold,”J.Phys.C 3,1S(1970).
27.P.Moitra,B.A.Slovick,W.Li,I.I.Kravchencko,D.P.Briggs,S.Krishnamurthy,and J.Valentine,“Large-scale all-dielectric metamaterial perfect reflectors,”ACS Photon.2,692-698(2015).
28.P.Gao,J.He,S.Zhou,X.Yang,S.Li,J.Sheng,D.Wang,T.Yu,J.Ye,and Y.Cui,“Large-area nanosphere self-assembly by a micropropulsive injection method for high throughput periodic surface nanotexturing,”Nano Lett.15,4591-4598(2015).
29.C.-M.Hsu,S.T.Connor,M.X.Tang,and Y.Cui,“Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching,”Appl.Phys.Lett.93,133109(2008).
30.J.Hao,L.Zhou,and M.Qiu,“Nearly total absorption of light and heat generation by plasmonic metamaterials,”Phys.Rev.B 83,165107(2011).
31.R.H.Fowler,“The analysis of photoelectric sensitivity curves for clean metals at various temperatures,”Phys.Rev.38,45-56(1931).
32.C.Scales and P.Berini,“Thin-film Schottky barrier photodetector models,”IEEE J.Quantum Electron.46,633-643(2010).
33.C.Clavero,“Plasmon-induced hot-electron generation at nanoparticle/metal-oxide interfaces for photovoltaic and photocatalytic devices,”Nat.Photonics 8,95-103(2014).
34.H.Chalabi,D.Schoen,and M.L.Brongersma,“Hot-electron photodetection with a plasmonic nanostripe antenna,”Nano Lett.14,1374-1380(2014).
35.T.Gong and J.N.Munday,“Angle-independent hot carrier generation and collection using transparent conducting oxides,”Nano Lett.15,147-152(2015).
36.J.G.Simmons,“Generalized formula for the electric tunnel effect between similar electrodes separated by a thin insulating film,”J.Appl.Phys.34,1793-1803(1963).
37.J.C.Fisher and I.Giaever,“Tunneling through thin insulating layers,”J.Appl.Phys.32,172-177(1961).
2.Y.K.Lee,H.Lee,C.Lee,E.Hwang,and J.Y.Park,“Hot-electronbased solar energy conversion with metal-semiconductor nanodiodes,”J.Phys.Condens.Matter 28,254006(2016).
3.J.M.Stern,J.Stanfeld,W.Kabbani,J.-T.Hsieh,and J.A.Cadeddu,“Selective prostate cancer thermal ablation with laser activated gold nanoshells,”J.Urol.179,748-753(2008).
4.S.Mubeen,J.Lee,N.Singh,S.Kramer,G.D.Stucky,and M.Moskovits,“An autonomous photosynthetic device in which all charge carriers derive from surface plasmons,”Nat.Nanotechnol.8,247-251(2013).
5.S.Mukherjee,F.Libisch,N.Large,O.Neumann,L.V.Brown,J.Cheng,J.B.Lassiter,E.A.Carter,P.Nordlander,and N.J.Halas,“Hot electrons do the impossible:plasmon-induced dissociation of H2on Au,”Nano Lett.13,240-247(2013).
6.W.Li and J.G.Valentine,“Harvesting the loss:surface plasmonbased hot electron photodetection,”Nanophotonics 6,177-191(2017).
7.Y.P.Huang and L.A.Wang,“In-line silicon Schottky photodetectors on silicon cored fibers working in 1550 nm wavelength regimes,”Appl.Phys.Lett.106,191106(2015).
8.S.Muehlbrandt,A.Melikyan,T.Harter,K.K?hnle,A.Muslija,P.Vincze,S.Wolf,P.Jakobs,Y.Fedoryshyn,W.Freude,J.Leuthold,C.Koos,and M.Kohl,“Silicon-plasmonic internal-photoemission detector for 40 Gbit/s data reception,”Optica 3,741-747(2016).
9.Z.Yang,M.Liu,S.Liang,W.Zhang,T.Mei,D.Zhang,and S.J.Chua,“Hybrid modes in plasmonic cavity array for enhanced hot-electron photodetection,”Opt.Express 25,20268-20273(2017).
10.T.Gong and J.N.Munday,“Aluminum-based hot carrier plasmonics,”Appl.Phys.Lett.110,021117(2017).
11.Y.Liu,X.Zhang,J.Su,H.Li,Q.Zhang,and Y.Gao,“Ag nanoparticles@ZnO nanowire composite arrays:an absorption enhanced UV photodetector,”Opt.Express 22,30148-30155(2014).
12.H.Li,X.Zhang,N.Liu,L.Ding,J.Tao,S.Wang,J.Su,L.Li,and Y.Gao,“Enhanced photo-response properties of a single ZnO microwire photodetector by coupling effect between localized Schottky barriers and piezoelectric potential,”Opt.Express 23,21204-21212(2015).
13.M.L.Brongersma,N.J.Halas,and P.Nordlander,“Plasmon-induced hot carrier science and technology,”Nat.Nanotechnol.10,25-34(2015).
14.H.Chalabi and M.L.Brongersma,“Plasmonics:harvest season for hot electrons,”Nat.Nanotechnol.8,229-230(2013).
15.I.Goykhman,B.Desiatov,J.Khurgin,J.Shappir,and U.Levy,“Locally oxidized silicon surface-plasmon Schottky detector for telecom regime,”Nano Lett.11,2219-2224(2011).
16.Y.K.Lee,C.H.Jung,J.Park,H.Seo,G.A.Somorjai,and J.Y.Park,“Surface plasmon-driven hot electron flow probed with metalsemiconductor nanodiodes,”Nano Lett.11,4251-4255(2011).
17.B.Desiatov,I.Goykhman,N.Mazurski,J.Shappir,J.B.Khurgin,and U.Levy,“Plasmonic enhanced silicon pyramids for internal photoemission Schottky detectors in the near-infrared regime,”Optica 2,335-338(2015).
18.M.W.Knight,Y.Wang,A.S.Urban,A.Sobhani,B.Y.Zheng,P.Nordlander,and N.J.Halas,“Embedding plasmonic nanostructure diodes enhances hot electron emission,”Nano Lett.13,1687-1692(2013).
19.W.Li,Z.J.Coppens,L.V.Besteiro,W.Wang,A.O.Govorov,and J.Valentine,“Circularly polarized light detection with hot electrons in chiral plasmonic metamaterials,”Nat.Commun.6,8379(2015).
20.M.W.Knight,H.Sobhani,P.Nordlander,and N.J.Halas,“Photodetection with active optical antennas,”Science 332,702-704(2011).
21.A.Sobhani,M.W.Knight,Y.Wang,B.Zheng,N.S.King,L.V.Brown,Z.Fang,P.Nordlander,and N.J.Halas,“Narrowband photodetection in the near-infrared with a plasmon-induced hot electron device,”Nat.Commun.4,1643(2013).
22.K.T.Lin,H.L.Chen,Y.S.Lai,and C.C.Yu,“Silicon-based broadband antenna for high responsivity and polarization-insensitive photodetection at telecommunication wavelengths,”Nat.Commun.5,3288(2014).
23.W.Li and J.Valentine,“Metamaterial perfect absorber based hot electron photodetection,”Nano Lett.14,3510-3514(2014).
24.F.Pelayo García de Arquer,A.Mih,and G.Konstantatos,“Large-area plasmonic-crystal-hot-electron-based photodetectors,”ACS Photon.2,950-957(2015).
25.H.Lee,Y.K.Lee,E.Hwang,and J.Y.Park,“Enhanced surface plasmon effect of Ag/TiO2nanodiodes on internal photoemission,”J.Phys.Chem.C 118,5650-5656(2014).
26.M.G.Ramchandani,“Energy band structure of gold,”J.Phys.C 3,1S(1970).
27.P.Moitra,B.A.Slovick,W.Li,I.I.Kravchencko,D.P.Briggs,S.Krishnamurthy,and J.Valentine,“Large-scale all-dielectric metamaterial perfect reflectors,”ACS Photon.2,692-698(2015).
28.P.Gao,J.He,S.Zhou,X.Yang,S.Li,J.Sheng,D.Wang,T.Yu,J.Ye,and Y.Cui,“Large-area nanosphere self-assembly by a micropropulsive injection method for high throughput periodic surface nanotexturing,”Nano Lett.15,4591-4598(2015).
29.C.-M.Hsu,S.T.Connor,M.X.Tang,and Y.Cui,“Wafer-scale silicon nanopillars and nanocones by Langmuir-Blodgett assembly and etching,”Appl.Phys.Lett.93,133109(2008).
30.J.Hao,L.Zhou,and M.Qiu,“Nearly total absorption of light and heat generation by plasmonic metamaterials,”Phys.Rev.B 83,165107(2011).
31.R.H.Fowler,“The analysis of photoelectric sensitivity curves for clean metals at various temperatures,”Phys.Rev.38,45-56(1931).
32.C.Scales and P.Berini,“Thin-film Schottky barrier photodetector models,”IEEE J.Quantum Electron.46,633-643(2010).
33.C.Clavero,“Plasmon-induced hot-electron generation at nanoparticle/metal-oxide interfaces for photovoltaic and photocatalytic devices,”Nat.Photonics 8,95-103(2014).
34.H.Chalabi,D.Schoen,and M.L.Brongersma,“Hot-electron photodetection with a plasmonic nanostripe antenna,”Nano Lett.14,1374-1380(2014).
35.T.Gong and J.N.Munday,“Angle-independent hot carrier generation and collection using transparent conducting oxides,”Nano Lett.15,147-152(2015).
36.J.G.Simmons,“Generalized formula for the electric tunnel effect between similar electrodes separated by a thin insulating film,”J.Appl.Phys.34,1793-1803(1963).
37.J.C.Fisher and I.Giaever,“Tunneling through thin insulating layers,”J.Appl.Phys.32,172-177(1961).