摘要
采用四乙氧基硅烷(Tetraethylorthosilicate,TEOS),在chemical vapor deposition(CVD)体系中制备二氧化硅薄膜,退火形成Si O2纳米粒子生长SWNTs。通过改变各种实验条件,如温度、催化剂纳米粒子、碳源及载气流量等,对非金属纳米粒子诱导生长SWNTs阵列进行系统研究。
A silicon dioxide film was prepared by a chemical vapor deposition(CVD) system with tetraethylorthosilicate(TEOS), and annealed to form SiO_2 nanoparticles to grow SWNTs. The SWNTs arrays induced by non-metallic nanoparticles were systematically studied by changing the experimental conditions such as temperature, catalyst nanoparticles, carbon source and carrier gas flow.
引文
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