阳极氧化Ta_2O_5薄膜电容制作工艺研究
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- 英文论文题名：Research on Fabrication of Thin Film Capacitor with Anodizing Ta_2O_5 as Dielectric Layer
- 论文作者：宋振国 ; 王斌
- 英文论文作者：Song Zhenguo ; Wang Bin ; The 41st Research Institute of CETC
- 年：2017
- 作者机构：中国电子科技集团公司第四十一研究所;
- 论文关键词：薄膜电容 ; 阳极氧化 ; Ta_2O_5薄膜 ; 击穿电压
- 英文论文关键词：Thin Film Capacitor ; Anodizing ; Ta_2O_5 Thin Film ; Breakdown Voltage
- 会议召开时间：2017-05-08
- 会议录名称：2017年全国微波毫米波会议论文集（中册）
- 英文会议录名称：Proceedings of 2017 National Conference on Microwave and Millimeter Waves(NCMMW2017)
- 语种：中文
- 分类号：TM53
- 学会代码：ZDWB
- 会议名称：2017年全国微波毫米波会议
- 会议地点：中国浙江杭州
- 主办单位：中国电子学会
- 学会名称：中国电子学会微波分会
- 页数：4
- 文件大小：1182k
- 原文格式：D
- 会议级别：全国
摘要
本文采用厚光刻胶作为阳极氧化掩膜对磁控溅射Ta薄膜进行阳极氧化,阳极氧化电压可达到200VDC,增加了介质层的厚度从而提高薄膜电容的击穿电压。并根据测试结果计算了阳极氧化Ta_2O_5薄膜的厚度和阳极氧化电压之间的关系、阳极氧化Ta_2O_5薄膜的介电常数,为电路设计者提供依据。
Sputtered Ta thin film was anodized using thick photoresist as mask, the applied DC anodizing voltage can be as high as 200 V, this increases the thickness of the dielectric layer, leading to a higher breakdown voltage of the thin film capacitor. The relationship between thickness of Ta_2O_5 thin film and applied anodizing voltage was calculated, also was the dielectric constant of Ta_2O_5 thin film, which can help engineers in circuits design.
Sputtered Ta thin film was anodized using thick photoresist as mask, the applied DC anodizing voltage can be as high as 200 V, this increases the thickness of the dielectric layer, leading to a higher breakdown voltage of the thin film capacitor. The relationship between thickness of Ta_2O_5 thin film and applied anodizing voltage was calculated, also was the dielectric constant of Ta_2O_5 thin film, which can help engineers in circuits design.
引文
[1]NG C H,et al.MIM capacitor integration for mixed-signal/RF applications.IEEE Trans Electron Devices,2005,52(7):1399-1409.
[2]余为国等.氮化硅薄膜MIM电容器的制备与性能研究.电子元件与材料.2010,29(5):45-47
[3]刘卓佳,姜贵云,等.高比容低损耗Ta2O5薄膜电容的试制.第十八界全国混合集成电路学术会议论文集,2013:114-118
[2]余为国等.氮化硅薄膜MIM电容器的制备与性能研究.电子元件与材料.2010,29(5):45-47
[3]刘卓佳,姜贵云,等.高比容低损耗Ta2O5薄膜电容的试制.第十八界全国混合集成电路学术会议论文集,2013:114-118