基于硅MEMS工艺的窄带带通滤波器的设计
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- 英文论文题名：Design of the Narrow-Band Bandpass Filters Based on the Sillion MEMS Technology
- 论文作者：孙洪铮 ; 王志刚
- 英文论文作者：SUN Hong-zheng ; WANG Zhi-gang ; College of Electronics Engineering ; University of Electronic Science and Technology of China
- 年：2016
- 作者机构：电子科技大学电子工程学院;
- 论文关键词：硅MEMS技术 ; 窄带 ; 小型化 ; 电磁屏蔽
- 英文论文关键词：sillion MEMS technology ; narrow-band ; compact ; EMI shielding
- 会议召开时间：2016-08-17
- 会议录名称：2016年全国军事微波、太赫兹、电磁兼容技术学术会议论文集
- 语种：中文
- 分类号：TN713.5
- 学会代码：WBXB
- 会议名称：2016年全国军事微波、太赫兹、电磁兼容技术学术会议
- 会议地点：中国陕西西安
- 主办单位：中国电子学会微波分会、天线与微波技术重点实验室
- 学会名称：《微波学报》编辑部
- 页数：3
- 文件大小：422k
- 原文格式：D
- 会议级别：全国
摘要
微波带通滤波器是微波通信系统中的关键器件。本文设计了一种利用硅MEMS腔体技术制作的微波窄带带通滤波器。采用交指结构四分之一波长短路谐振器级联结构,利用电磁场仿真设计软件HFSS进行了设计、建模、仿真和优化,得到了一款具有小型化、高抑制度、低插损、好的电磁屏蔽且易于集成等优点的硅MEMS腔体带通滤波器。
Microwave bandpass filters are the key devices in microwave communication systems. In this paper, a narrow band bandpass filter based on the sillion MEMS cavity technology is proposed. The microwave bandpass filter consisting of the cascaded resonators with the 1/4 wave length interdigital structure was designed, modeled, simulated and optimized by the electromagnetic field simulation and design software. The bandpass filter proposed has many advantages such as compact, high suppression degree, low loss, good EMI shielding and being easily integrated.
Microwave bandpass filters are the key devices in microwave communication systems. In this paper, a narrow band bandpass filter based on the sillion MEMS cavity technology is proposed. The microwave bandpass filter consisting of the cascaded resonators with the 1/4 wave length interdigital structure was designed, modeled, simulated and optimized by the electromagnetic field simulation and design software. The bandpass filter proposed has many advantages such as compact, high suppression degree, low loss, good EMI shielding and being easily integrated.
引文
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[4]陈熙,李丰,马文涛,李宏军.基于硅MEMS腔体技术的微波带通滤波器[J].微纳电子技术.2015,5.299-303.
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[2]Hai H T,Anh-VU P.Compact wide stopband bandpass filter on multilayer organic substrate[J].IEEE Microwave and Wireless Components Letters,2014,15(1):161-163.
[3]Amir E,Withawat W,Said F,et al.Compact dual-mode wideband filter based on complementary split-ring resonator[J].IEEE Microwave and Wireless Components Letters,2014,24(3):152-154.
[4]陈熙,李丰,马文涛,李宏军.基于硅MEMS腔体技术的微波带通滤波器[J].微纳电子技术.2015,5.299-303.
[5]朱健.RF MEMS器件设计、加工和应用[M].北京:国防工业出版社,2012:70-71