平板NO_x传感器氧泵电极的烧结工艺对电极性能的影响
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摘要
本文采用HTCC工艺制备了NO_x传感器片芯,研究了烧结工艺中升温速率、峰值烧结温度、峰值保温时间和烧结气氛对传感器氧泵电极性能的影响。结果表明,在排胶阶段采用空气烧结,设定升温速率为2℃/min,306.6℃保温7h,在高温阶段采用氩气保护,峰值烧结温度1500℃保温3h烧结后的氧泵电极导电能力最强。SEM结果显示,电极的稳定性得到了明显改善,且制备的片芯截面无裂纹、翘曲和分层现象。气敏测试结果表明氩气烧结显著提高了氧泵电极的灵敏度和稳定性。
The NO_x sensors were prepared by HTCC.The influence of temperature rise rate,sintering atmosphere,peak sintering temperature and holding time was researched.The results show that the conductive ability of pump oxygen electrode is the strongest after the NO_x sensors were sintered at 306.6 ℃ for 7h with heating rate 2℃/min at the organic removal stage,and then,the sensors were sintered at 1500℃ for 3h with Argon at the high temperature sintering stage.The results of SEM show that the stability of the pump oxygen electrode is also improved.There is no crack warping and delamination on the sensor cross section.The results of gas sensing test show that the sensitivity and stability of the oxygen pump electrode are improved by Argon gas sintering.
引文
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