基于(110)ZnO/36?YX-LiTaO_3结构Love波的声学特性研究
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- 英文论文题名：Acoustic properties of Love Wave in(110) ZnO/36?YX-LiTaO_3 substrate structure
- 论文作者：谢英才 ; 王艳 ; 张淑仪 ; 兰晓东
- 英文论文作者：XIE Ying-cai ; WANG Yan ; ZHANG Shu-yi ; LAN Xiao-dong ; School of Electronic Science and Engineering ; Nanjing University of Posts and Telecommunications ; Lab of Modern Acoustics ; Institute of Acoustics ; Nanjing University
- 年：2016
- 作者机构：南京邮电大学电子科学与工程学院;南京大学声学研究所近代声学实验室;
- 论文关键词：Love波 ; 机电耦合系数 ; 有限元仿真
- 英文论文关键词：Love wave ; Electromechanical coupling coefficient ; Finite element simulation
- 会议召开时间：2016-10-28
- 会议录名称：2016年全国声学学术会议论文集
- 语种：中文
- 分类号：O422
- 学会代码：OGSM
- 会议名称：2016年全国声学学术会议
- 会议地点：中国湖北武汉
- 主办单位：中国声学学会
- 学会名称：中国声学学会
- 页数：3
- 文件大小：474k
- 原文格式：D
- 会议级别：全国
摘要
建立(110)ZnO/IDT/36?YX-Li Ta O3多层结构延迟线的3D模型,利用有限元方法对该延迟线所激发Love波的传播特性进行仿真研究。结果表明,当声波传播方向与ZnO的c轴垂直且薄膜厚度与波长的比值th/λ=0.044时,Love波机电耦合系数取最大值7.837%。Love波的水平剪切位移分量远大于横向和纵向位移分量,因此基于该结构的Love波传感器可用于液体环境下的传感检测。然后讨论了传播方向对Love波声学特性的影响,分析发现,Love波机电耦合系数随传播方向的变化而变化,当传播方向与ZnO薄膜的c轴夹角θ=30?时,机电耦合系数达到最大值10.054%。
The 3D FEM models have been designed to theoretically investigate the propagation characteristics of Love wave in the multilayered structure of(110) ZnO/IDT/36?YX-Li TaO_3 substrate. The calculated results show that a Love wave, propagated along the direction perpendicular to the c-axis of Zn O, has been excited with the maximum electromechanical coupling coefficient(7.837%) at th/λ=0.044. Meanwhile, the shear horizontal displacement component of the excited Love wave is much larger than the transverse and longitudinal displacement components. It indicates that the model can be used for fabricating SH-SAW sensor to detect changes in liquid circumstance. Moreover, the effects of the propagation direction on the acoustic properties have also been studied. It is interesting to note that the electromechanical coupling coefficient of Love wave changes with the propagation direction. And the electromechanical coupling coefficient of 10.054% has been obtained when θ equals to 30?, which is defined as the angel between the propagation direction and the c axis of Zn O.
The 3D FEM models have been designed to theoretically investigate the propagation characteristics of Love wave in the multilayered structure of(110) ZnO/IDT/36?YX-Li TaO_3 substrate. The calculated results show that a Love wave, propagated along the direction perpendicular to the c-axis of Zn O, has been excited with the maximum electromechanical coupling coefficient(7.837%) at th/λ=0.044. Meanwhile, the shear horizontal displacement component of the excited Love wave is much larger than the transverse and longitudinal displacement components. It indicates that the model can be used for fabricating SH-SAW sensor to detect changes in liquid circumstance. Moreover, the effects of the propagation direction on the acoustic properties have also been studied. It is interesting to note that the electromechanical coupling coefficient of Love wave changes with the propagation direction. And the electromechanical coupling coefficient of 10.054% has been obtained when θ equals to 30?, which is defined as the angel between the propagation direction and the c axis of Zn O.
引文
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[9]Powell D A,Kalantar-Zadeh K,Wlodarski W.Numerical calculation of SAW sensitivity:application to Zn O/Li Ta O3,transducers[J].Sensors&Actuators A Physical,2004,115(2):456-461.
[10]Han K,Yuan Y J.Mass Sensitivity Evaluation and Device Design of a Love Wave Device for Bond Rupture Biosensors Using the Finite Element Method[J].IEEE Sensors Journal,2014,14(8):2601-2608.
[11]Tanaka A,Yanagitani T,Matsukawa M,et al.Propagation characteristics of shear horizontal surface acoustic waves in(11^-20)Zn O film/silica glass substrate structures[J].IEEE Transactions on Ultrasonics Ferroelectrics&Frequency Control,2008,55(12):2709-2713.
[12]姚恒斌,胡芳仁,吴成玲.Zn O单晶声表面波谐振器传播特性的研究[J].压电与声光,2015,37(4):550-553.Yao H B,HU F R,WU C L.Study on Propagation Characteristics SAW Resonator Based on Zn O Single Crystal[J].Piezoelectrics&Acoustooptics,2015,37(4):550-553.
[2]Mchale G,Newton M I,Martin F,et al.Resonant conditions for Love wave guiding layer thickness[J].Applied Physics Letters,2001,79(21):3542-3543.
[3]Zhou F M,Li Z,Fan L,et al.Experimental study of Love-wave immunosensors based on Zn O/Li Ta O3,structures[J].Ultrasonics,2010,50(3):411-415.
[4]Chu S Y,Water W,Liaw J T.An investigation of the dependence of Zn O film on the sensitivity of Love mode sensor in Zn O/quartz structure[J].Ultrasonics,2003,41(2):133-139.
[5]Wang Y,Zhang S Y,Zhou F M,et al.Love wave hydrogen sensors based on Zn O nanorod film/36?YX-Li Ta O3 substrate structures operated at room temperature[J].Sensors&Actuators B Chemical,2011,158(11):97-103.
[6]Fu Y Q,Luo J K,Du X Y,et al.Recent developments on Zn O films for acoustic wave based bio-sensing and microfluidic applications:a review[J].Sensors&Actuators B Chemical,2010,143(2):606-619.
[7]Wu S,Lin Z X,Ro R,et al.Rayleigh and shear horizontal surface acoustic properties of(100)Zn O films on silicon[J].IEEE Transactions on Ultrasonics Ferroelectrics&Frequency Control,2010,57(5):1237-9.
[8]Shoji T,Nakamura K,Yamazaki D.Propagation characteristics of the SH-SAW on(110)Zn O/(012)Li Ta O3[C]//Ultrasonics Symposium.IEEE,2001:215-219 vol.1.
[9]Powell D A,Kalantar-Zadeh K,Wlodarski W.Numerical calculation of SAW sensitivity:application to Zn O/Li Ta O3,transducers[J].Sensors&Actuators A Physical,2004,115(2):456-461.
[10]Han K,Yuan Y J.Mass Sensitivity Evaluation and Device Design of a Love Wave Device for Bond Rupture Biosensors Using the Finite Element Method[J].IEEE Sensors Journal,2014,14(8):2601-2608.
[11]Tanaka A,Yanagitani T,Matsukawa M,et al.Propagation characteristics of shear horizontal surface acoustic waves in(11^-20)Zn O film/silica glass substrate structures[J].IEEE Transactions on Ultrasonics Ferroelectrics&Frequency Control,2008,55(12):2709-2713.
[12]姚恒斌,胡芳仁,吴成玲.Zn O单晶声表面波谐振器传播特性的研究[J].压电与声光,2015,37(4):550-553.Yao H B,HU F R,WU C L.Study on Propagation Characteristics SAW Resonator Based on Zn O Single Crystal[J].Piezoelectrics&Acoustooptics,2015,37(4):550-553.