摘要
Background, Motivation and Objective With the rapid development of micro/nano technologies, precision positioning is becoming increasingly important in many scientific devices. The generic requirement with these devices is the realization of an accurate long-range motion for the mechanical systems. Piezoelectric actuators are widely used in miniature devices to realize an extremely accurate motion because of their small size, high resolution, large force, and rapid response. However, piezoelectric elements themselves have an inherent defect of limited motion stroke, typically below millimeters. Piezoelectric motors effectively alleviate the contradiction between large stroke and high precision, which keep the nanometer level displacement resolution and extend the stroke to be theoretically infinite. Among them, piezoelectric inertia drive motors(PIDMs) are preferred to be used for cross-scale micro precision positioning system, which has outstanding advantages of simple structure, easy control, and high resolution. Although PIDMs have been investigated for many years, their real dynamic responses are still not totally clear. The objective of this paper is to investigate the typical kinematics models of PIDMs and the influence of friction models on dynamic responses of PIDMs. Statement of Contribution/Methods In this paper, dynamic responses of the PIDMs are studied theoretically and numerically. Working principles and kinematics models of two typical kinds of PIDMs are introduced. Motion characteristics of the PIDMs are analyzed numerically by simulation software MATLAB/Simulink. Dynamic responses of the PIDMs with different friction models are compared and discussed. Results In the numerical simulation, two different simplified friction models for the kinematics models of PIDMs are selected. Motion curves of the stator and slider under different stick-slip and slip-slip working conditions are obtained. In addition to the expected inertia-friction motion, two typical high-frequency oscillations can be found in the motion curves of the stator and slider. Dynamic response of the PIDMs appear to be remarkably different with different friction models. Some numerical results are validated with experimental investigation. Discussion and Conclusions Dynamic responses of PIDMs with different friction models are demonstrated with MATLAB/Simulink simulation. The results show that appropriate friction model is a critical issue to guarantee the real motion characteristics between the stator and slider. At the same time, high-frequency oscillations of PIDMs are inevitable due to the impact driving of the spring-mass system.
Background, Motivation and Objective With the rapid development of micro/nano technologies, precision positioning is becoming increasingly important in many scientific devices. The generic requirement with these devices is the realization of an accurate long-range motion for the mechanical systems. Piezoelectric actuators are widely used in miniature devices to realize an extremely accurate motion because of their small size, high resolution, large force, and rapid response. However, piezoelectric elements themselves have an inherent defect of limited motion stroke, typically below millimeters. Piezoelectric motors effectively alleviate the contradiction between large stroke and high precision, which keep the nanometer level displacement resolution and extend the stroke to be theoretically infinite. Among them, piezoelectric inertia drive motors(PIDMs) are preferred to be used for cross-scale micro precision positioning system, which has outstanding advantages of simple structure, easy control, and high resolution. Although PIDMs have been investigated for many years, their real dynamic responses are still not totally clear. The objective of this paper is to investigate the typical kinematics models of PIDMs and the influence of friction models on dynamic responses of PIDMs. Statement of Contribution/Methods In this paper, dynamic responses of the PIDMs are studied theoretically and numerically. Working principles and kinematics models of two typical kinds of PIDMs are introduced. Motion characteristics of the PIDMs are analyzed numerically by simulation software MATLAB/Simulink. Dynamic responses of the PIDMs with different friction models are compared and discussed. Results In the numerical simulation, two different simplified friction models for the kinematics models of PIDMs are selected. Motion curves of the stator and slider under different stick-slip and slip-slip working conditions are obtained. In addition to the expected inertia-friction motion, two typical high-frequency oscillations can be found in the motion curves of the stator and slider. Dynamic response of the PIDMs appear to be remarkably different with different friction models. Some numerical results are validated with experimental investigation. Discussion and Conclusions Dynamic responses of PIDMs with different friction models are demonstrated with MATLAB/Simulink simulation. The results show that appropriate friction model is a critical issue to guarantee the real motion characteristics between the stator and slider. At the same time, high-frequency oscillations of PIDMs are inevitable due to the impact driving of the spring-mass system.
引文