MASS SENSITIVITY OF ALUMINUM NITRIDE THIN FILM BASED SURFACE ACOUSTIC WAVE SENSORS PREPARED FOR BIOSENSING APPLICATIONS
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- 英文论文题名：MASS SENSITIVITY OF ALUMINUM NITRIDE THIN FILM BASED SURFACE ACOUSTIC WAVE SENSORS PREPARED FOR BIOSENSING APPLICATIONS
- 论文作者：Ying-ge LI ; Lian-xiang MA ; A.T.TRAN ; G.FIORENTINO ; P.M.SARRO ; Dong-xing DU
- 英文论文作者：Ying-ge LI ; Lian-xiang MA ; A.T.TRAN ; G.FIORENTINO ; P.M.SARRO ; Dong-xing DU ; College of Automation and Electrical Engineering ; Qingdao University of Science and Technology ; College of Electromechanical Engineering ; Qingdao University of Science and Technology ; Department of Precision and Microsystems Engineering ; Delft University of Technology ; Department of Microelectronics ; Delft University of Technology
- 年：2016
- 作者机构：College of Automation and Electrical Engineering, Qingdao University of Science and Technology;College of Electromechanical Engineering, Qingdao University of Science and Technology;Department of Precision and Microsystems Engineering, Delft University of Technology;Department of Microelectronics, Delft University of Technology;
- 英文论文关键词：SAW sensor ; AlN thin film ; Mass sensitivity ; Contact angle ; Biosensing
- 会议召开时间：2016-10-21
- 会议录名称：2016年全国压电和声波理论及器件应用研讨会论文摘要集
- 英文会议录名称：Abstract Book of 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications
- 语种：英文
- 分类号：TB383.2;TP212.3
- 学会代码：AGLU
- 会议名称：2016年全国压电和声波理论及器件应用研讨会
- 会议地点：中国陕西西安
- 主办单位：中国力学学会、中国声学学会、IEEE UFFC分会
- 学会名称：中国力学学会
- 页数：2
- 文件大小：93k
- 原文格式：D
- 会议级别：全国
摘要
Background, Motivation and Objective Aluminum Nitride(AlN) thin film piezoelectric materials based surface acoustic wave resonators have attracted great interests in the sensing applications, especially serving as biosensors. Many studies on microfluidic applications using ZnO based SAW devices have been reported recently. However, ZnO films present potential issues for biomedical and microfluidic applications, making them less ideal materials for microfluidic applications than other thin film piezoelectric materials such as AlN. Therefore in this paper, the mass sensitivity of AIN thin film based SAW sensors is studied for its potential biosensing applications. Statement of Contribution/Methods The mass sensitivity of surface acoustic wave sensors, which are based on Si/Aluminum Nitride(AlN) structure by depositing aluminum oxide(Al_2O_3) thin films on the active area between two Aluminum IDTs, which schematically depicted in Fig.1 & Fig.2, are experimentally investigated.Results Fig.3 is the typical tesing result for Sample 1. From Table 1 and Table 2, the mass sensitivity of the fabricated SAW resonators is calculated to be 2.628 KHz/μg.Discussion and Conclusions 1. The mass sensitivity of the fabricated SAW resonators in this paper is 2.628 KHz/μg, which indicates the SAW devices could be employed in liquid sensing or biosensing applications; 2. The contact angle is 45 degree, indicating the hydrophilic behaviors. Based on the research results in this paper, we prove the feasibility of the fabricated AIN SAW devices for biosensing applications.
Background, Motivation and Objective Aluminum Nitride(AlN) thin film piezoelectric materials based surface acoustic wave resonators have attracted great interests in the sensing applications, especially serving as biosensors. Many studies on microfluidic applications using ZnO based SAW devices have been reported recently. However, ZnO films present potential issues for biomedical and microfluidic applications, making them less ideal materials for microfluidic applications than other thin film piezoelectric materials such as AlN. Therefore in this paper, the mass sensitivity of AIN thin film based SAW sensors is studied for its potential biosensing applications. Statement of Contribution/Methods The mass sensitivity of surface acoustic wave sensors, which are based on Si/Aluminum Nitride(AlN) structure by depositing aluminum oxide(Al_2O_3) thin films on the active area between two Aluminum IDTs, which schematically depicted in Fig.1 & Fig.2, are experimentally investigated.Results Fig.3 is the typical tesing result for Sample 1. From Table 1 and Table 2, the mass sensitivity of the fabricated SAW resonators is calculated to be 2.628 KHz/μg.Discussion and Conclusions 1. The mass sensitivity of the fabricated SAW resonators in this paper is 2.628 KHz/μg, which indicates the SAW devices could be employed in liquid sensing or biosensing applications; 2. The contact angle is 45 degree, indicating the hydrophilic behaviors. Based on the research results in this paper, we prove the feasibility of the fabricated AIN SAW devices for biosensing applications.
Background, Motivation and Objective Aluminum Nitride(AlN) thin film piezoelectric materials based surface acoustic wave resonators have attracted great interests in the sensing applications, especially serving as biosensors. Many studies on microfluidic applications using ZnO based SAW devices have been reported recently. However, ZnO films present potential issues for biomedical and microfluidic applications, making them less ideal materials for microfluidic applications than other thin film piezoelectric materials such as AlN. Therefore in this paper, the mass sensitivity of AIN thin film based SAW sensors is studied for its potential biosensing applications. Statement of Contribution/Methods The mass sensitivity of surface acoustic wave sensors, which are based on Si/Aluminum Nitride(AlN) structure by depositing aluminum oxide(Al_2O_3) thin films on the active area between two Aluminum IDTs, which schematically depicted in Fig.1 & Fig.2, are experimentally investigated.Results Fig.3 is the typical tesing result for Sample 1. From Table 1 and Table 2, the mass sensitivity of the fabricated SAW resonators is calculated to be 2.628 KHz/μg.Discussion and Conclusions 1. The mass sensitivity of the fabricated SAW resonators in this paper is 2.628 KHz/μg, which indicates the SAW devices could be employed in liquid sensing or biosensing applications; 2. The contact angle is 45 degree, indicating the hydrophilic behaviors. Based on the research results in this paper, we prove the feasibility of the fabricated AIN SAW devices for biosensing applications.
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