摘要
ScAlMgO_4(SCAM) acts as the promising substrate having a hexagonal crystal structure with lattice constants of a = 0.3246 nm and c = 2.5195 nm [1]. The lattice mismatch between SCAM and ZnO is less than 0.1%. High quality ZnO epilayers have been successfully grown on SCAM substrate [2]. The SCAM substrate is therefore regarded as an ideal candidate for growing wurtzite Zn_(1-x)Mg_xO epilayers with high MgO contents. High quality crystals were grown assisted by structural design and controlling of growth direction. A series of wurtzite ZnO and Zn_(1-x)Mg_xO(x=0.41-0.66) epilayers have been grown on this substrate by plasma-assisted molecular beam epitaxy. X-ray diffraction results indicate that only a barely recognized amount of rocksalt phase exists in the epilayer having the highest MgO content of 66%. The epilayers with 41% and 50% MgO exhibit reasonable full width at half maximum(FWHM) values of 1200-1800 arcsec for the rocking curve of the(0002)_(wz) reflection. However, both the surface morphology and the FWHM value deteriorate with further addition the MgO content to 66%. The bandgap energy of the high MgO content epilayers varies within the range of 4.11-4.33 eV, determined by the transmission spectra and the cathodoluminescence measurement.
ScAlMgO_4(SCAM) acts as the promising substrate having a hexagonal crystal structure with lattice constants of a = 0.3246 nm and c = 2.5195 nm [1]. The lattice mismatch between SCAM and ZnO is less than 0.1%. High quality ZnO epilayers have been successfully grown on SCAM substrate [2]. The SCAM substrate is therefore regarded as an ideal candidate for growing wurtzite Zn_(1-x)Mg_xO epilayers with high MgO contents. High quality crystals were grown assisted by structural design and controlling of growth direction. A series of wurtzite ZnO and Zn_(1-x)Mg_xO(x=0.41-0.66) epilayers have been grown on this substrate by plasma-assisted molecular beam epitaxy. X-ray diffraction results indicate that only a barely recognized amount of rocksalt phase exists in the epilayer having the highest MgO content of 66%. The epilayers with 41% and 50% MgO exhibit reasonable full width at half maximum(FWHM) values of 1200-1800 arcsec for the rocking curve of the(0002)_(wz) reflection. However, both the surface morphology and the FWHM value deteriorate with further addition the MgO content to 66%. The bandgap energy of the high MgO content epilayers varies within the range of 4.11-4.33 eV, determined by the transmission spectra and the cathodoluminescence measurement.
引文
[1]N.Kimizuka and M.Takahiko,Structural classification of RAO3(MO)n compounds(R=Sc,In,Y,or lanthanides;A=Fe(III),Ga,Cr,or Al;M=divalent cation;n=1–11),Journal of Solid State Chemistry,1989,78,98-107.
[2]A.Ohtomo,et al.,Single crystalline ZnO films grown on lattice-matched ScAlMgO4(0001)substrates,Applied physics letters,1999,75,2635-2637.