ANALYSIS AND DESIGN OF BRIDGE STRUCTURE FOR A MICRO FABRY-PEROT CAVITY TUNNABLE FILTER
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- 英文论文题名：ANALYSIS AND DESIGN OF BRIDGE STRUCTURE FOR A MICRO FABRY-PEROT CAVITY TUNNABLE FILTER
- 论文作者：Yuan-yuan LI ; Qing-hua MENG ; Si-hai CHEN ; Yi-bo ZENG ; Hang GUO
- 英文论文作者：Yuan-yuan LI ; Qing-hua MENG ; Si-hai CHEN ; Yi-bo ZENG ; Hang GUO ; School of Microelectronic ; Xidian University ; Shenzhen Institute of Advanced Technology ; Chinese Academy of Sciences ; Pen-Tung Sah Institute of Micro-Nano Science and Technology of Xiamen University
- 年：2016
- 作者机构：School of Microelectronic, Xidian University;Shenzhen Institute of Advanced Technology, Chinese Academy of Sciences;Pen-Tung Sah Institute of Micro-Nano Science and Technology of Xiamen University;
- 英文论文关键词：Filter ; Tuning ; Cavity structure ; Cantilever
- 会议召开时间：2016-10-21
- 会议录名称：2016年全国压电和声波理论及器件应用研讨会论文摘要集
- 英文会议录名称：Abstract Book of 2016 Symposium on Piezoelectricity, Acoustic Waves and Device Applications
- 语种：英文
- 分类号：TN713
- 学会代码：AGLU
- 会议名称：2016年全国压电和声波理论及器件应用研讨会
- 会议地点：中国陕西西安
- 主办单位：中国力学学会、中国声学学会、IEEE UFFC分会
- 学会名称：中国力学学会
- 页数：2
- 文件大小：95k
- 原文格式：D
- 会议级别：全国
摘要
Background, Motivation and Objective As an important multiple-beam interference structure, micro Fabry-Perot cavity tunable filters are widely used in the area of hyper spectral imaging and DWDM optical communication system. The development of MEMS technology can be increased by integration of optically active parts. Fabry-Perot micro-cavity-based structures are of great interest because of their versatility. A wavelength-tunable optical filter based on a Fabry-Perot cavity combined with a micro-actuator has been designed, with an emphasis on achieving a wide tuning range. Many designs of MEMS F-P filters with electrostatic actuation have been reported. However, there are some issues. First, present MEMS F-P filters are single element or small array, which is unsuitable for hyperspectral imaging. A new generation of imaging requires more spectral channels at the same time. Second, the F-P structure modeling has only been based on a simplified physical model. Multi-physics field simulation has hardly been considered in filter device modeling. Third, the tuning range of the model is not large enough and bias voltage is high. This paper describes the mechanical design of the bridge structure, small curvature in the top mirror of the Fabry-Perot cavity is accounted for. A simulation of the mechanical behavior was performed based on finite elements, using ANSYS software. We finally establish the L-arm type cantilever to support cavity structure, the micro-bridge can achieve a considerable range of tuning; relatively high fill factor, filter light leakage is avoided; the high ability to keep parallel can achieve high precision filtering effect; structural stability, it can resist the residual stress of manufacture. This MEMS F-P tunable filter can be a potential application in spectroscopic sensing and optical communication system. Statement of Contribution/Methods Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical parameters depend on the optical properties of the mirror's layers and on the displacement of the micromechanical movable element, which can be controlled by applying a specific voltage.Micro F-P cavity is driven by static electricity to change the cavity length and achieve wavelength selective. The bridge supporting structure for the MEMS F-P cavity tunable filter is shown in figure 1. It consists of a top bridge deck and a bottom base. The top mirror is supported by the movable membrane. The top and bottom mirrors are distributed Bragg reflection(DBR) type. The movable membrane is also used as an electrode, while the other electrode is on the bottom base. When a voltage is applied, the movable membrane embedded with the top mirror will move toward the bottom mirror. The F-P cavity length is tuned to achieve the wavelength selectivity. The mirrors of F–P cavity are made of DBR, which can be fabricated by alternately depositing high and low-refractive index dielectric layers. The DBR film is quarter-wave layers of Ge-Al2O3-Ge(250/629/250 nm) in this work. Optical property of the F-P cavity filter was simulated with the TFCalc software. ANSYS simulation software was used for the optimization of the design parameters of the upper movable membrane of the Fabry-Perot filter. Steady-state behavior and dynamic response were considered and the deformation of the central area of the membrane generated by the residual stress gradient. Results The peak transmission of the filter is about 95.8% in the center wavelength of 4 μm at the F-P cavity length of 2.3 μm, and the full width at half-maximum(FWHM) is about 112 nm. The simulation results show that the L-arm structure we design has excellent mechanical characteristics compared to the straight structure for hyperspectral imaging, it has demonstrated the excellent flexibility to remain parallel even at the maximum tuning range and enables a broad spectrum of light covering from 3 to 5 μm. Therefore, the L-arm structure would be ideal for tunable F-P filters. Discussion and Conclusions The novel foldaway L-arm beam structure is the best choice compared to the others that can achieve an excellent parallel structure, a large tunable range, and a high fill factor. The theoretical model has been proven to be useful for improving the performance of the F-P cavity tunable filter. From the simulation, we know that more attention should be paid on arm design rather than the bridge deck of a pattern. For instance, the L-arm structure, the flexible arms occupy a small area with the longer support arm, which is suitable for the compact filter array with a high fill factor.
Background, Motivation and Objective As an important multiple-beam interference structure, micro Fabry-Perot cavity tunable filters are widely used in the area of hyper spectral imaging and DWDM optical communication system. The development of MEMS technology can be increased by integration of optically active parts. Fabry-Perot micro-cavity-based structures are of great interest because of their versatility. A wavelength-tunable optical filter based on a Fabry-Perot cavity combined with a micro-actuator has been designed, with an emphasis on achieving a wide tuning range. Many designs of MEMS F-P filters with electrostatic actuation have been reported. However, there are some issues. First, present MEMS F-P filters are single element or small array, which is unsuitable for hyperspectral imaging. A new generation of imaging requires more spectral channels at the same time. Second, the F-P structure modeling has only been based on a simplified physical model. Multi-physics field simulation has hardly been considered in filter device modeling. Third, the tuning range of the model is not large enough and bias voltage is high. This paper describes the mechanical design of the bridge structure, small curvature in the top mirror of the Fabry-Perot cavity is accounted for. A simulation of the mechanical behavior was performed based on finite elements, using ANSYS software. We finally establish the L-arm type cantilever to support cavity structure, the micro-bridge can achieve a considerable range of tuning; relatively high fill factor, filter light leakage is avoided; the high ability to keep parallel can achieve high precision filtering effect; structural stability, it can resist the residual stress of manufacture. This MEMS F-P tunable filter can be a potential application in spectroscopic sensing and optical communication system. Statement of Contribution/Methods Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical parameters depend on the optical properties of the mirror's layers and on the displacement of the micromechanical movable element, which can be controlled by applying a specific voltage.Micro F-P cavity is driven by static electricity to change the cavity length and achieve wavelength selective. The bridge supporting structure for the MEMS F-P cavity tunable filter is shown in figure 1. It consists of a top bridge deck and a bottom base. The top mirror is supported by the movable membrane. The top and bottom mirrors are distributed Bragg reflection(DBR) type. The movable membrane is also used as an electrode, while the other electrode is on the bottom base. When a voltage is applied, the movable membrane embedded with the top mirror will move toward the bottom mirror. The F-P cavity length is tuned to achieve the wavelength selectivity. The mirrors of F–P cavity are made of DBR, which can be fabricated by alternately depositing high and low-refractive index dielectric layers. The DBR film is quarter-wave layers of Ge-Al2O3-Ge(250/629/250 nm) in this work. Optical property of the F-P cavity filter was simulated with the TFCalc software. ANSYS simulation software was used for the optimization of the design parameters of the upper movable membrane of the Fabry-Perot filter. Steady-state behavior and dynamic response were considered and the deformation of the central area of the membrane generated by the residual stress gradient. Results The peak transmission of the filter is about 95.8% in the center wavelength of 4 μm at the F-P cavity length of 2.3 μm, and the full width at half-maximum(FWHM) is about 112 nm. The simulation results show that the L-arm structure we design has excellent mechanical characteristics compared to the straight structure for hyperspectral imaging, it has demonstrated the excellent flexibility to remain parallel even at the maximum tuning range and enables a broad spectrum of light covering from 3 to 5 μm. Therefore, the L-arm structure would be ideal for tunable F-P filters. Discussion and Conclusions The novel foldaway L-arm beam structure is the best choice compared to the others that can achieve an excellent parallel structure, a large tunable range, and a high fill factor. The theoretical model has been proven to be useful for improving the performance of the F-P cavity tunable filter. From the simulation, we know that more attention should be paid on arm design rather than the bridge deck of a pattern. For instance, the L-arm structure, the flexible arms occupy a small area with the longer support arm, which is suitable for the compact filter array with a high fill factor.
Background, Motivation and Objective As an important multiple-beam interference structure, micro Fabry-Perot cavity tunable filters are widely used in the area of hyper spectral imaging and DWDM optical communication system. The development of MEMS technology can be increased by integration of optically active parts. Fabry-Perot micro-cavity-based structures are of great interest because of their versatility. A wavelength-tunable optical filter based on a Fabry-Perot cavity combined with a micro-actuator has been designed, with an emphasis on achieving a wide tuning range. Many designs of MEMS F-P filters with electrostatic actuation have been reported. However, there are some issues. First, present MEMS F-P filters are single element or small array, which is unsuitable for hyperspectral imaging. A new generation of imaging requires more spectral channels at the same time. Second, the F-P structure modeling has only been based on a simplified physical model. Multi-physics field simulation has hardly been considered in filter device modeling. Third, the tuning range of the model is not large enough and bias voltage is high. This paper describes the mechanical design of the bridge structure, small curvature in the top mirror of the Fabry-Perot cavity is accounted for. A simulation of the mechanical behavior was performed based on finite elements, using ANSYS software. We finally establish the L-arm type cantilever to support cavity structure, the micro-bridge can achieve a considerable range of tuning; relatively high fill factor, filter light leakage is avoided; the high ability to keep parallel can achieve high precision filtering effect; structural stability, it can resist the residual stress of manufacture. This MEMS F-P tunable filter can be a potential application in spectroscopic sensing and optical communication system. Statement of Contribution/Methods Different arrays and shapes for the top mirror, which is movable, were analyzed in order to establish a structural material with low tensile stress. The optical parameters depend on the optical properties of the mirror's layers and on the displacement of the micromechanical movable element, which can be controlled by applying a specific voltage.Micro F-P cavity is driven by static electricity to change the cavity length and achieve wavelength selective. The bridge supporting structure for the MEMS F-P cavity tunable filter is shown in figure 1. It consists of a top bridge deck and a bottom base. The top mirror is supported by the movable membrane. The top and bottom mirrors are distributed Bragg reflection(DBR) type. The movable membrane is also used as an electrode, while the other electrode is on the bottom base. When a voltage is applied, the movable membrane embedded with the top mirror will move toward the bottom mirror. The F-P cavity length is tuned to achieve the wavelength selectivity. The mirrors of F–P cavity are made of DBR, which can be fabricated by alternately depositing high and low-refractive index dielectric layers. The DBR film is quarter-wave layers of Ge-Al2O3-Ge(250/629/250 nm) in this work. Optical property of the F-P cavity filter was simulated with the TFCalc software. ANSYS simulation software was used for the optimization of the design parameters of the upper movable membrane of the Fabry-Perot filter. Steady-state behavior and dynamic response were considered and the deformation of the central area of the membrane generated by the residual stress gradient. Results The peak transmission of the filter is about 95.8% in the center wavelength of 4 μm at the F-P cavity length of 2.3 μm, and the full width at half-maximum(FWHM) is about 112 nm. The simulation results show that the L-arm structure we design has excellent mechanical characteristics compared to the straight structure for hyperspectral imaging, it has demonstrated the excellent flexibility to remain parallel even at the maximum tuning range and enables a broad spectrum of light covering from 3 to 5 μm. Therefore, the L-arm structure would be ideal for tunable F-P filters. Discussion and Conclusions The novel foldaway L-arm beam structure is the best choice compared to the others that can achieve an excellent parallel structure, a large tunable range, and a high fill factor. The theoretical model has been proven to be useful for improving the performance of the F-P cavity tunable filter. From the simulation, we know that more attention should be paid on arm design rather than the bridge deck of a pattern. For instance, the L-arm structure, the flexible arms occupy a small area with the longer support arm, which is suitable for the compact filter array with a high fill factor.
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