声表面波加速度传感器关键技术的研究
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摘要
加速度传感器广泛应用于工业生产的很多领域,但是传统的加速度传感器由于其自身的一些缺点使得它无法在一些高精尖领域应用。声表面波加速度传感器作为一种灵敏度极高,线性度好以及抗干扰能力极强的惯性传感器已经在航空航天和汽车制造等领域内得到了广泛应用。因此,深入研究声表面波加速度传感器的传感机理及其检测技术,不仅具有理论意义,而且具有工程实用价值。
本文改进了传统悬臂梁式声表面波加速度传感器的差动结构,并完善了整个声表面波加速度传感器的信号检测系统。本论文在悬臂梁式SAW加速度传感器研究方面取得的具体成果有:
1.为配合后续的混频电路以及全新的频率测量方法,对传统声表面波加速度传感器的差动方案进行了改进,抑制了温度干扰因素对加速度传感器的影响,而且降低了其加工制作的难度。
2.为了使得频率计数单元能正常工作,设计了低通滤波放大电路,使用Multisim10对其进行了仿真研究,仿真结果表明所设计的滤波放大电路完全满足系统要求,各项参数均接近理论值。
3.通过对于系统输出频率的测量可以计算出相应加速度的大小,传统的等精度测频法存在对标准信号计数的±1误差,本文将传统等精度测频法进行了改进消除了±1误差。
4.传统的测频法对于低频信号的测量误差较大,本文提出了利用基于声表面波带通滤波器的一种新的测频法,提高了低频信号的测量精度。
Acceleration sensors are widely used in many areas of industrial production. But due to their own shortcomings, traditional acceleration sensors are impossible in some areas of application of sophisticated. SAW accelerometer as a high sensitivity , excellent linearity, as well as strong anti-interference ability inertial sensors has been widely used in aviation and aerospace and automotive manufacturing field. Therefore, the in-depth study of SAW accelerometer sensing mechanism and detection technology, not only of theoretical significance, but also of practical engineering value.
This paper improves the differential fabric of the traditional cantilever-type SAW acceleration sensor and perfect the whole signal detection system of it. The exact achievements in the cantilever-type SAW acceleration sensor of this paper are following by:
1: To tie in with the follow-up mixer circuit and the brand-new measurement method, the traditional differential programs of the SAW acceleration sensor has been improved, which well restraint the impact on the accelerometer out of the temperature disturbance, and also reduces the difficulty of its manufacture.
2: In order to make frequency count unit can work properly designs low-pass filter amplifier circuit uses Multisim10 for a simulation research of them. The results show that the designed filter amplifier circuit is fully meet the system requirements all the parameters are close to the theoretical value.
3: We can calculate the corresponding acceleration through the measurement of the system output frequency. The traditional method of equivalent precision frequency measurement have±1errors of standard signal, this paper have improved the method to eliminate the error.
4: The traditional frequency measurement has a larger bandwidth for low-frequency signals. This paper presents a new frequency measurement which applied the all-pass filter of SAW to improve the low-frequency signal measurement accuracy.
本文改进了传统悬臂梁式声表面波加速度传感器的差动结构,并完善了整个声表面波加速度传感器的信号检测系统。本论文在悬臂梁式SAW加速度传感器研究方面取得的具体成果有:
1.为配合后续的混频电路以及全新的频率测量方法,对传统声表面波加速度传感器的差动方案进行了改进,抑制了温度干扰因素对加速度传感器的影响,而且降低了其加工制作的难度。
2.为了使得频率计数单元能正常工作,设计了低通滤波放大电路,使用Multisim10对其进行了仿真研究,仿真结果表明所设计的滤波放大电路完全满足系统要求,各项参数均接近理论值。
3.通过对于系统输出频率的测量可以计算出相应加速度的大小,传统的等精度测频法存在对标准信号计数的±1误差,本文将传统等精度测频法进行了改进消除了±1误差。
4.传统的测频法对于低频信号的测量误差较大,本文提出了利用基于声表面波带通滤波器的一种新的测频法,提高了低频信号的测量精度。
Acceleration sensors are widely used in many areas of industrial production. But due to their own shortcomings, traditional acceleration sensors are impossible in some areas of application of sophisticated. SAW accelerometer as a high sensitivity , excellent linearity, as well as strong anti-interference ability inertial sensors has been widely used in aviation and aerospace and automotive manufacturing field. Therefore, the in-depth study of SAW accelerometer sensing mechanism and detection technology, not only of theoretical significance, but also of practical engineering value.
This paper improves the differential fabric of the traditional cantilever-type SAW acceleration sensor and perfect the whole signal detection system of it. The exact achievements in the cantilever-type SAW acceleration sensor of this paper are following by:
1: To tie in with the follow-up mixer circuit and the brand-new measurement method, the traditional differential programs of the SAW acceleration sensor has been improved, which well restraint the impact on the accelerometer out of the temperature disturbance, and also reduces the difficulty of its manufacture.
2: In order to make frequency count unit can work properly designs low-pass filter amplifier circuit uses Multisim10 for a simulation research of them. The results show that the designed filter amplifier circuit is fully meet the system requirements all the parameters are close to the theoretical value.
3: We can calculate the corresponding acceleration through the measurement of the system output frequency. The traditional method of equivalent precision frequency measurement have±1errors of standard signal, this paper have improved the method to eliminate the error.
4: The traditional frequency measurement has a larger bandwidth for low-frequency signals. This paper presents a new frequency measurement which applied the all-pass filter of SAW to improve the low-frequency signal measurement accuracy.
引文
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[47]黄智伟.射频电路设计[M].北京:电子工业出版社,2006
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[2]董景新.微惯性仪表——微机械加速度计[M].清华大学出版社,2003
[3]李志宏,杨振川,武国英.微机械惯性传感器[J].电子科技导报,1999,(8):19~24
[4]顾英.惯导加速度计技术综述[J].控制与制导,2001,(6):78~84
[5]何诈镛.声学理论基础[M].北京:国防工业出版社,1981,(8)
[6]樊尚春,刘广玉.新型传感技术及应用[M].北京:中国电力出版社,2005
[7]徐海林,陈培林.声表面波器件叉指换能器的制作技术[J].电子工程师,2002,(4):19~21
[8]史国伟.声表面波的原理与发展[J].武警技术学院学报,1996,(4): 27~29
[9]张福学,王丽坤.现代压电学[M].北京:科学出版社,2002
[10]吴连法.声表面波器件及其应用[M].北京:人民邮电出版社1983
[11]肖鸣山,宋道仁.声表面波器件基础[M].济南:山东科学技术出版社,1979
[12]郝俊杰,徐廷献.声表面波用基片材料[J].硅酸盐通报,2000年(06):320~360
[13]武以立,邓盛刚,王永德.声表面波原理及其在电子技术中的应用[M].北京:国防工业出版社,1983
[14]李忠诚.现代晶体滤波器设计[M].北京:国防工业出版社,1981
[15] G.Scholl, F.Schmidt , U.Wolff(a). Surface Acoustic Wave Devices for Sensor Applications[J]. Physical Status Solids (a), 2001(Volume 185 Issue 1):47~58,
[16] M. Dierkes, U. Hilleringmann. Telemetric surface acoustic wave sensor for humidity[J]. Advances in Radio Science, 2003 (1): 131~133
[17]刘庆辉.基于MEMS的声表面波器件设计与制作的关键技术研究[D].国防科学技术大学,2005
[18]徐泽善,胡爱民.传感器与压电器件[M].北京:机械工业出版社,1999
[19]朱长纯,卢文科.声表面波式小波变换器件与应用[M].北京:国防工业出版社,2004
[20]毛伟.声表面波传感器及其接口设计的研究[D].浙江大学,2006
[21]肖定全,王民.晶体物理学[M].重庆:四川大学出版社,1989
[22]赵泽宇. MEMS微操作器的悬臂梁和膜桥结构制备[D].中国科学院光电技术研究所,2005
[23]徐芝纶,弹性力学[M].北京:高等教育出版社,1992
[24]刘延柱陈文良陈立群.振动力学[M].北京:高等教育出版社,1998
[25]唐洁.压电微悬臂梁传感技术的研究[D].天津大学,2005
[26]刘骏跃,陈明.悬臂梁式SAW加速度传感器的信号特征及测量方案[J].传感技术学报,2005,(4):733~735
[27]胡寿松.自动控制原理[M].北京:科学技术出版社,2003
[28]许琪楼.矩形悬臂板自由振动精确解法[J].振动与冲击,2001(4)
[29]单成祥.传感器的理论与设计基础及其应用[M].北京:国防工业出版社,1999
[30]王生江,董永贵,冯冠平.谐振式声表面波加速度传感器特性研究[J].压电与声光,1999,(3):278~281
[31]熊嚥.声表面波加速度计阻尼技术研究[D].西北工业大学,2003
[32] Julian W.Gardner, Vijay K.Vardan, Osama O.Awadelkarim微传感器、微机电系统和灵巧器件[M].北京:清华大学出版社,2004
[33]刘骏跃,陈明.用静电力和SAW滤波器对悬臂梁式SAW加速度传感器的扩程及其计量标定[J].传感技术学报,2006,(2):379~382
[34] Varadan, V.K. and Varadan, V.V. IDT, SAW and MEMS sensor for measuring deflection, acceleration and ice detection of aircraft [J]. SPIE, 1999(3046):209~219
[35] Guckel H.. Surface micromachined physical sensors[J]. Sensor and Materials, 1993(4):251~264
[36] J.Wang, YZhao, T.Cui. K.Varahramyan. Synthesis of the modeling and control systems of a tunneling acceleration sensor using the MatLab simulation [J]. Journal of Micromechanics and Microengineering, 2002 (12)
[37]孙传友,孙晓斌.感测技术与系统设计[M].北京:科学技术出版社,2004
[38]苗国耀刘骏跃,悬臂梁式SAW加速度传感器静电力反馈闭环方案的研究[J]纺织高校基础科学学报(增刊),2007(20):94~95
[39] Liu Jun-yao, Miao Guo-yao,Chen Ming. On adjusting measure range & calibration for the SAW accelerometer[J]. The Proceeding of The China Association for Science and Technology,2007(4):318~322
[40] (苏)柯洛特科夫·泰茨.计量学与测量装置准确度理论基础[M].北京:中国标准出版社,1986
[41]康华光,陈大钦.电子技术基础模拟部分(第四版)[M].北京:高等教育出版社,2006
[42]池保勇,余志平,石秉学. CMOS射频集成电路分析与设计[M].北京:清华大学出版社,2006
[43]王树本.高频电子线路原理[M].大连:大连理工大学出版社,1998
[44]石广元.双栅MOSFET工作原理与制造工艺[J].辽宁大学学报,1995(S1):68~71
[45]严国萍,龙占超.通信电子线路著[M].北京:科学出版社,2005
[46] (美)Ramon Pallas.Areny, John G.Webster.传感器和信号调节[M].北京:清华大学出版社,2003
[47]黄智伟.射频电路设计[M].北京:电子工业出版社,2006
[48] (美)ThomasH. Lee. CMOS射频集成电路设计[M].北京:电子工业出版社,2004
[49] (美)Rowan Gilmore,Les Besser现代无线系统射频集成电路实用设计[M].北京:电子工业出版社,2006。
[50]张兴,黄如,刘晓彦等.微电子学概论[M].北京:北京大学出版社,2005
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