光相位延迟的测量方法与技术研究
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摘要
在激光偏光技术与信息技术的应用中，光相位延迟器是光学调制系统的重要器件。光相位延迟器能对某一特定波长或一段波长范围的入射偏振光产生特定的相位延迟，从而使出射光的偏振态改变。它和其他的偏光器件相结合，可以实现光各种偏振态的转换或偏振面的旋转。波片是主要的光相位延迟器，可分为单波片和复合波片，被广泛应用于光学精密测量、光调制、生物医学等领域的测量中。光相位延迟器的主要光学技术参量是相位延迟量，它与测量光源波长有直接关系，目前对特定波长下的延迟量测量有多种办法，如偏光干涉法、补偿法、椭偏测量法、电光调制法、光学外差法等测定波片的延迟量方法，虽然这些方法的原理不同，实现的难易程度和系统复杂程度相差较大，但基本能够满足单波长测量的需要。在激光和偏光技术飞速发展的情况下，对相位延迟器的精度和消色差性能等要求也日益提高，这不但要求了测量相位延迟量的精确性，也对其测量方法的多样性和方便性提出了更高的要求。
资料显示相位延迟量的宽光谱测量一直是个难点，以前的研究人员也曾对双折射材料的偏光干涉谱进行了探讨，主要是针对材料特性的研究，没能给出测量范围内器件的任意波长处的相位延迟量。本文通过对石英单波片的连续偏光干涉谱的测量分析，发现偏光干涉谱中不仅包涵了吸收及双折射等材料特性，而且结合器件结构特性，可以获得宽光谱范围内的器件光相位的延迟信息，由此提出了一种新的测量分析方法。进一步利用这种新方法，探索其在消色差复合波片相位延迟量方面的应用，通过理论分析和实验仿真证明，连续偏光干涉谱对于表征消色差复合波片技术参量具有精确、直观、简单的优点，特别适合指导波片的加工检测和器件的选择使用，具有非常重要的实际意义。本论文主要从以下章来详细说明。
第一章绪论主要介绍了波片及其相位延迟量测量的发展历史和研究现状，并阐述了本文的内容、目的及意义。
第二章主要介绍了波片和偏振的基础知识。首先通过波片相位延迟器的原理，分类详细介绍了不同波片的主要性质。然后，介绍了偏振和偏振光的知识，并描述了偏振光的几种表述方法，为后续章节的分析和理解做基础。
第三章主要介绍了几种常见的光相位延迟量测量方案：偏光干涉法、补偿法、椭偏测量法等。
第四章针对常用相位延迟量测量方法不能宽波段测量的不足，提出连续偏光干涉法测量的理论，并付诸实践利用石英波片进行了实验测量，获得了已知厚度的石英波片300nm-800nm波段的连续偏光干涉谱；分析显示实验曲线和理论曲线吻合较好，测量平均误差不大于2o。
第五章在利用连续偏光干涉法测量单波片的基础上，提出测量消色差波片的设想，并通过实验仿真数据与理论值吻合甚好，证明了有效性。
本文的主要创新点：
一、根据连续偏光干涉原理，首次提出了一种测量石英波片宽光谱下相位延迟量的新方法，并给出了相应波长的延迟量数据处理办法。
二、理论上探讨了通过偏光干涉谱测量消色差复合片的相位延迟量的可行性，并通过模拟仿真验证，与初始理论值复合很好，证明方法的行之有效，为消色差延迟器件研究奠定了基础。
In the application fields of polarizing technology and information technology, the opticalphase retarders are important components in optical modulation system. They can produce aspecific phase retardation of incident polarized light to a specific wavelength or a wavelengthrange, which make the incident light polarization state change. Phase retarder can achieve thelight polarization state conversion or the plane of polarization rotation used with other polarizeddevices. Wave-plates are the main optical phase retarder which can be divided into singlewave-plate and the composite wave-plate. They are widely used in precision opticalmeasurements, optical modulation and measurements of biomedical and other fields. Its mainoptical technological parameter is the phase retardation; it has a direct relationship with themeasurement of light wavelength. The retardation measurements in a specific wavelength have anumber of ways, such as the compensation method, the electro-optic modulation, opticalheterodyning,1/4wave-plate method. Although the principle of these methods, the degree ofdifficulty to achieve and complexity of the system are quite different, they can basically meet theneed for single wavelength measurements. The accuracy of the wave plate, in the case of therapid development of technology of laser and polarized technology, also increasing, whichrequires not only the accuracy of measuring the retardation but also the diversity and the ease ofthe metrical methods.
Refer to reference literature, wave plate retardation of wide spectral measurements havebeen a difficult problem, previous researchers have discussed birefringent material of thepolarizing interference spectrum, it was mainly for the study of material properties and did notgive the phase retardation of the device corresponding each wavelength within the measuringrange. In this paper, through the measurement and analysis of continuous polarizationinterference spectrum of a single quartz wave plate, we found that the spectrum included notonly the material properties such as absorption and birefringence but also wide spectral rangeoptical phase delay information which proposed a new measurement and analysismethods. Further using this new approach, its application to measure the retardation ofachromatic composite wave plate was tested, Theoretical analysis and simulation showed thatcontinuous polarization interference spectrum described accurately, clearly, easily the achromaticcomposite wave plate parameters, especially for the guidance of wave plate processing to detectand choosing to use the device, the method has a very important practical significance. Thispaper is divided into the following chapters to elaborate.
The first chapter, the developing history and the research actualities of the wave plates andthe phase retarders’ measurements was introduced. This chapter also described the paper’s content, purpose and meaning.
The second chapter introduces the basic knowledge of the wave plate and polarization.Firstly, though principle of the wave plate retarder, we detailed introduced the main properties ofthe different wave plate. Secondly, knowledge of polarization and polarized light and severalformulation descriptions in polarized light was introduced.
The third chapter introduced several common optical phase retardation measurementmethods, including: polarization interference method, compensation method, ellipsometrymeasurements.
The fourth chapter, based on the common phase retardation measurement methods,proposed a theory of continuous polarization interference measurement to overcome broad-bandmeasurement deficiencies. The method used double light alignment measuring method of theShimadzu UV-3101pc spectrophotometer to increase the stable reliability of the data collection,and get the continuous polarization interference spectrum of the quartz wave plate for the knownthickness of300nm-800nm wave band. The analysis shows that the experimental curve andtheoretical curve fit well, and the measurement of the average error is less than2o.
The fifth chapter, based on continuous polarization interference in the use of measuringsingle-wave plate, proposed the idea of measuring the achromatic wave plate. Throughexperimental simulation, experimental and theoretical values coincided very well. That provedthe validity.
The main innovations of this paper:
First, According to the principle of continuous polarization interference, we proposed a newmethod to measure the wide-band phase retardation variation of the quartz wave plate, and thedata processing method for the corresponding retardation variation of each wavelength.
Second, we theoretically discussed the feasibility of measuring the phase retardation ofachromatic composite wave plate by polarization interference spectrum. Through simulation andverification, the experimental curve and theoretical curve fit well. It proved that the method iseffective. This laid the foundation for the achromatic delay device research.
资料显示相位延迟量的宽光谱测量一直是个难点，以前的研究人员也曾对双折射材料的偏光干涉谱进行了探讨，主要是针对材料特性的研究，没能给出测量范围内器件的任意波长处的相位延迟量。本文通过对石英单波片的连续偏光干涉谱的测量分析，发现偏光干涉谱中不仅包涵了吸收及双折射等材料特性，而且结合器件结构特性，可以获得宽光谱范围内的器件光相位的延迟信息，由此提出了一种新的测量分析方法。进一步利用这种新方法，探索其在消色差复合波片相位延迟量方面的应用，通过理论分析和实验仿真证明，连续偏光干涉谱对于表征消色差复合波片技术参量具有精确、直观、简单的优点，特别适合指导波片的加工检测和器件的选择使用，具有非常重要的实际意义。本论文主要从以下章来详细说明。
第一章绪论主要介绍了波片及其相位延迟量测量的发展历史和研究现状，并阐述了本文的内容、目的及意义。
第二章主要介绍了波片和偏振的基础知识。首先通过波片相位延迟器的原理，分类详细介绍了不同波片的主要性质。然后，介绍了偏振和偏振光的知识，并描述了偏振光的几种表述方法，为后续章节的分析和理解做基础。
第三章主要介绍了几种常见的光相位延迟量测量方案：偏光干涉法、补偿法、椭偏测量法等。
第四章针对常用相位延迟量测量方法不能宽波段测量的不足，提出连续偏光干涉法测量的理论，并付诸实践利用石英波片进行了实验测量，获得了已知厚度的石英波片300nm-800nm波段的连续偏光干涉谱；分析显示实验曲线和理论曲线吻合较好，测量平均误差不大于2o。
第五章在利用连续偏光干涉法测量单波片的基础上，提出测量消色差波片的设想，并通过实验仿真数据与理论值吻合甚好，证明了有效性。
本文的主要创新点：
一、根据连续偏光干涉原理，首次提出了一种测量石英波片宽光谱下相位延迟量的新方法，并给出了相应波长的延迟量数据处理办法。
二、理论上探讨了通过偏光干涉谱测量消色差复合片的相位延迟量的可行性，并通过模拟仿真验证，与初始理论值复合很好，证明方法的行之有效，为消色差延迟器件研究奠定了基础。
In the application fields of polarizing technology and information technology, the opticalphase retarders are important components in optical modulation system. They can produce aspecific phase retardation of incident polarized light to a specific wavelength or a wavelengthrange, which make the incident light polarization state change. Phase retarder can achieve thelight polarization state conversion or the plane of polarization rotation used with other polarizeddevices. Wave-plates are the main optical phase retarder which can be divided into singlewave-plate and the composite wave-plate. They are widely used in precision opticalmeasurements, optical modulation and measurements of biomedical and other fields. Its mainoptical technological parameter is the phase retardation; it has a direct relationship with themeasurement of light wavelength. The retardation measurements in a specific wavelength have anumber of ways, such as the compensation method, the electro-optic modulation, opticalheterodyning,1/4wave-plate method. Although the principle of these methods, the degree ofdifficulty to achieve and complexity of the system are quite different, they can basically meet theneed for single wavelength measurements. The accuracy of the wave plate, in the case of therapid development of technology of laser and polarized technology, also increasing, whichrequires not only the accuracy of measuring the retardation but also the diversity and the ease ofthe metrical methods.
Refer to reference literature, wave plate retardation of wide spectral measurements havebeen a difficult problem, previous researchers have discussed birefringent material of thepolarizing interference spectrum, it was mainly for the study of material properties and did notgive the phase retardation of the device corresponding each wavelength within the measuringrange. In this paper, through the measurement and analysis of continuous polarizationinterference spectrum of a single quartz wave plate, we found that the spectrum included notonly the material properties such as absorption and birefringence but also wide spectral rangeoptical phase delay information which proposed a new measurement and analysismethods. Further using this new approach, its application to measure the retardation ofachromatic composite wave plate was tested, Theoretical analysis and simulation showed thatcontinuous polarization interference spectrum described accurately, clearly, easily the achromaticcomposite wave plate parameters, especially for the guidance of wave plate processing to detectand choosing to use the device, the method has a very important practical significance. Thispaper is divided into the following chapters to elaborate.
The first chapter, the developing history and the research actualities of the wave plates andthe phase retarders’ measurements was introduced. This chapter also described the paper’s content, purpose and meaning.
The second chapter introduces the basic knowledge of the wave plate and polarization.Firstly, though principle of the wave plate retarder, we detailed introduced the main properties ofthe different wave plate. Secondly, knowledge of polarization and polarized light and severalformulation descriptions in polarized light was introduced.
The third chapter introduced several common optical phase retardation measurementmethods, including: polarization interference method, compensation method, ellipsometrymeasurements.
The fourth chapter, based on the common phase retardation measurement methods,proposed a theory of continuous polarization interference measurement to overcome broad-bandmeasurement deficiencies. The method used double light alignment measuring method of theShimadzu UV-3101pc spectrophotometer to increase the stable reliability of the data collection,and get the continuous polarization interference spectrum of the quartz wave plate for the knownthickness of300nm-800nm wave band. The analysis shows that the experimental curve andtheoretical curve fit well, and the measurement of the average error is less than2o.
The fifth chapter, based on continuous polarization interference in the use of measuringsingle-wave plate, proposed the idea of measuring the achromatic wave plate. Throughexperimental simulation, experimental and theoretical values coincided very well. That provedthe validity.
The main innovations of this paper:
First, According to the principle of continuous polarization interference, we proposed a newmethod to measure the wide-band phase retardation variation of the quartz wave plate, and thedata processing method for the corresponding retardation variation of each wavelength.
Second, we theoretically discussed the feasibility of measuring the phase retardation ofachromatic composite wave plate by polarization interference spectrum. Through simulation andverification, the experimental curve and theoretical curve fit well. It proved that the method iseffective. This laid the foundation for the achromatic delay device research.
引文
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[2] R.M.A阿查姆N.M巴夏拉.椭圆偏振测量术和偏振光[M].北京.科学出版社,1986,50-85.
[3] Stewart R.M.Robertson. Measuring birefringence properties using a wave plateand an analyzer[J]. Appl. Opt.,1983,22(14):2213-2216.
[4]郁道银,谈恒英.工程光学[M].北京:机械工业出版社,1998.
[5] C.M.Mcintyre, S.E.Harris. Achromatic wave plates for the visible spectrum [J].J. Opt. Soc. Am.,1968,58(12):1575-1580.
[6]严明,高志山.移相法测量波片的相位延迟量[J].光电子·激光,2005,16(2):183～187.
[7]余春日.利用λ/4波片确定任意波片的相位延迟量[J].激光技术,2003,24(4):383～384.
[8]汪桂霞,徐昌杰,王青松.一种确定快慢轴方位的新方法[J].激光与红外,2006,36(8):699～702.
[9]程笑天,李银柱,刘诚等.波片位相延迟的测量方法[J].中国激光,2003,30(7):651～654.
[10]王伟,李国华,吴福全等.测量波片延迟量和快轴方位的新方法[J].中国激光,2003,30(12):1121～1123.
[11]任洪亮,王久扬,楼立人等.利用迈克尔逊干涉仪测量波片相位延迟量和快慢轴[J].中国激光,2008,35(2):249-253.
[12]王宁;李国华;张大伟;一种测定波片相位延迟角的简便方法[J].曲阜师范大学学报,2001,27:47-49.
[13]徐文东,李锡善.波片相位延迟量精密测量新方法[J].光学学报,1994,14(10):1096-1101
[14]Yu Lung Lo, Jing Fung Lin, Sen Yung Lee. Polariscope for simul at aneousmeasurement of principle axis and the phase retardation by use of two phaselocked ext ractions[J].Appl.Opt.,2004,43(34):6248-6254.
[15] Lih-Horng Shyu,Chieh-Li Chen, Der-Chin Su. Method for measuring theretardation of a wave plate [J]. Applied Optics,1993,32(17):4228-4230.
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