材料相位延迟校准技术研究
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摘要
在偏振光学和晶体光学领域,尤其在偏光器件应用上,波片(相位延迟器)是光学调制系统中的重要器件,它能对一定波长的光产生特定的相位延迟,进而改变光的偏振态。在这些系统中,波片与其他种类的偏光器件一起控制光的偏振态。由于波片特殊的光学特性,在应用光学的许多场合都需要波片的参与。本文在分析已有测量方法的基础上,利用实验室现有条件,提出延迟量测量的可靠方案,建立了延迟量自动测量装置,实现了延迟量量值的独立复现。延迟量复现所采用的波长为532nm,复现量值的量值范围为0～180°。波片延迟量测量结果的不确定度为U=0.16°(k=2)。
本论文涉及延迟量校准装置的建立,量值复现,方法研究,测量结果不确定度的分析与评定,校准装置性能评估,量值传递方法等。本文主要分为六章：
第一章介绍了延迟量的应用领域、研究现状、课题研究内容和意义；
第二章介绍了偏振基本理论和延迟量测量原理及常用方法；
第三章详细介绍了延迟量校准装置的光路系统、控制系统及控制方案；
第四章描述了装置各部分的性能检验方法,及装置总体性能的考察结果；
第五章进行了延迟量测量结果的不确定度分析；
第六章描述了延迟量的量值准确度的验证方法,并与国外仪器对比测量结果,验证结果的可靠性；
第七章对本文进行总结及展望。
本文的主要创新点是：利用矩阵光学的基本理论(琼斯矩阵和米勒矩阵)与测量方法,设计并建立了延迟量的自动测量装置；利用蒙特卡罗法分析了该系统的不确定度；通过旁证实验验证测量结果的有效性。
In the field of ploarization optics and crystal optics, especially in the field of polarizing device application,wave plate (phase retardance) is the key functional component in optical modulation system which can be used to change the polarization states. In many polarization optics applications, wave plates are used to change the polarization states of light with other polarizing device. Under exiting laboratory conditions, based on the analysis of the existing methods of measuring retardation, a reliable solution for the retardation measurement is proposed in this paper. An automatic measurement standard device was set up for realizing the value of retardation. The light beam wavelength for the absolute realization is532nm. The polarization retardation angle range of the realization of is0-180°.The uncertainty of measurement results is U=0.16°(k=2).
The work in this includes setting up an automatic measurement system, calibration of the value of retadation,the reasearch of the measurement methods, the uncertainty of measurement results analysis,, the performance evaluation of the system, the measurement method of transmission of polarization light, etc.
This paper involves7chapters:
The first chapter mainly introduce the application of retardation, current situation and the purpose of research;
The second chapter mainly introduce basic theory of polarization and measuring principle, and measurement methods;
The third chapter mainly introduce the optic system, the control system,and control project of calibration device;
The fourth chapter mainly introduce the each part performance of the system;
The fifth chapter mainly analysis the uncertainty of measurement results;
The sixth chapter mainly validate the accuracy of results, compared the results in this work with imported commercial instruments to prove it's availability;
The seventh chapter gives the summarization of the whole works and prospect.
The innovation of this paper lies in:using Jones Matrix and Mueller Matrix analysis, the principle of measurement methods, design and set-up of an automatic measurement device, analysis of the uncertainty of measurement result with Monte Carlo method, indirect the availability by other equipment.
本论文涉及延迟量校准装置的建立,量值复现,方法研究,测量结果不确定度的分析与评定,校准装置性能评估,量值传递方法等。本文主要分为六章：
第一章介绍了延迟量的应用领域、研究现状、课题研究内容和意义；
第二章介绍了偏振基本理论和延迟量测量原理及常用方法；
第三章详细介绍了延迟量校准装置的光路系统、控制系统及控制方案；
第四章描述了装置各部分的性能检验方法,及装置总体性能的考察结果；
第五章进行了延迟量测量结果的不确定度分析；
第六章描述了延迟量的量值准确度的验证方法,并与国外仪器对比测量结果,验证结果的可靠性；
第七章对本文进行总结及展望。
本文的主要创新点是：利用矩阵光学的基本理论(琼斯矩阵和米勒矩阵)与测量方法,设计并建立了延迟量的自动测量装置；利用蒙特卡罗法分析了该系统的不确定度；通过旁证实验验证测量结果的有效性。
In the field of ploarization optics and crystal optics, especially in the field of polarizing device application,wave plate (phase retardance) is the key functional component in optical modulation system which can be used to change the polarization states. In many polarization optics applications, wave plates are used to change the polarization states of light with other polarizing device. Under exiting laboratory conditions, based on the analysis of the existing methods of measuring retardation, a reliable solution for the retardation measurement is proposed in this paper. An automatic measurement standard device was set up for realizing the value of retardation. The light beam wavelength for the absolute realization is532nm. The polarization retardation angle range of the realization of is0-180°.The uncertainty of measurement results is U=0.16°(k=2).
The work in this includes setting up an automatic measurement system, calibration of the value of retadation,the reasearch of the measurement methods, the uncertainty of measurement results analysis,, the performance evaluation of the system, the measurement method of transmission of polarization light, etc.
This paper involves7chapters:
The first chapter mainly introduce the application of retardation, current situation and the purpose of research;
The second chapter mainly introduce basic theory of polarization and measuring principle, and measurement methods;
The third chapter mainly introduce the optic system, the control system,and control project of calibration device;
The fourth chapter mainly introduce the each part performance of the system;
The fifth chapter mainly analysis the uncertainty of measurement results;
The sixth chapter mainly validate the accuracy of results, compared the results in this work with imported commercial instruments to prove it's availability;
The seventh chapter gives the summarization of the whole works and prospect.
The innovation of this paper lies in:using Jones Matrix and Mueller Matrix analysis, the principle of measurement methods, design and set-up of an automatic measurement device, analysis of the uncertainty of measurement result with Monte Carlo method, indirect the availability by other equipment.
引文
1李高明,相干偏振矩阵测量系统的研制,福建师范大学硕士学位论文,2006.
2徐文莉,透明注塑件材料残余应力与光学性能的研究,郑州大学硕士学位论文,2006.
3徐均琪,冯小利,多层薄膜光学常数的椭偏法研究,光电工程,2009.36(2):P29-33.
4.赵廷生,波片延迟量自动化测量系统的研究.2008.
5薛庆文,李国华,半阴法测量λ/4波片的相位延迟[J].光电子·激光,1998.9(2):P150-151.
6王晓,石顺祥,马琳,部分偏振光的表示方法,电子科技,2009.22(6):P.78-80.
7 R.M.A.Azzam, N.M.Bashara, Ellipsometry and Polarizer Light,North-Holland Publishing Company,1977.
8孔伟金,李国华,偏振器件Jones矩阵的特征值和特征矢量,曲阜师范大学学报,2002.28(2):P.60-62.
9雒志秀,斯托克斯空间偏振模色散矢量叠加的研究,西安文理学院·自然科学版,2011.14(3)：P.66-68.
10吴福全,云母1/4波片光谱性能分析.光电子·激光,2006.17(4)：p.434-437.
11吴晓,浮法玻璃在线应力检测及相关退火概念.玻璃,2005.32(1):P.18-21,30.
12夏立峰,用于多色光的波片的设计.光电工程,2001.28(4):P.57-59.
13消文渊,浮法玻璃在线应力检测与退火,1998年全国玻璃学术会议论文集.1998.
14肖鹏军,在线玻璃应力检测系统的设计与实现,2006中国玻璃行业年会暨技术研讨会.2006.
15张大伟,云母1/4波片偏振干涉谱的研究.光谱学与光谱分析,2002.22(2):P.195-197.
16张大伟,云母波片属性的分光光度计标定法.光电子·激光,2002.13(7):P.757-758.
17张剑,波片延迟误差校正的理论与技术.激光技术,2006.30(3):p. 274-276.
18张丽君,基于移相法的光学玻璃应力等倾角全场数字化测量.光学技术,2004.30(2)：P.199-200,203.
19张为权,双折射滤波片的优化参量.光学学报,2005.25(10):P.1420-1424.
20张旭,椭偏光谱法测量波片相位延迟量.2007.
21张志勇,几种波片位相延迟测量方法的比较.光学精密工程,2007.15(11)：P.1678-1685.
22赵培,吴福全,1/4波片延迟量的相位调制椭偏测量法,光学学报,2006.26(3):P.379-382.
23 B.R.Grunstra,H.B.Perkins, A method for the measurement of optical retardation angles near 90 degrees, Applied Optics,1966.5(4):P.585-588.
24赵培,1/4波片延迟量的相位调制椭偏测量法.光学学报,2006.26(3):P. 379-382.
25 R.C.Reader, Working Notes On the Principles and Users of Strain Viewers and Standard Strain Discs,B.S.S.G.Journal.13(1):P.10-14.
26张志勇,邓元勇,王东光,等,几种波片位相延迟测量方法的比较,光学精密工程,2007.15(11):P.1679-1685.
27马英麒,浮法玻璃在线应力测试技术研究,北京理工大学硕士学位论文,2006.
28 Lih-Horng Shyu,Chieh-LiChen,Der-Chin Su, Method for measuring the retardation of a wave plate, Applied Optics,1993.32(22):P.4228-4230.
29苏美开,宋连科,李艺,等,波片测量中的补偿法[J].应用激光,1990.10(5):P.220-222.
30 P.A.Williams,A.H.Rose,C.M.Wang, Rotating-polarizer polarimeter for accurate retardance measurement,Applied Optics,1997.36(25):P.6466-6472.
31孙英姿,工东光,张志勇,等,波片相位延迟的光强测量法研究,天文研究与技术,2008.5(1)：P.74-82.
32赵爽,1/2波片快慢轴方位等效性的研究.激光杂志,2005.26(5)：P.44-45.
33赵廷生,精确确定光路中四分之一波片光轴方位的新方法.光学学报,2008.28(3)：P.487-491.
34周天辉,玻璃应力测量方法,建筑玻璃与工业玻璃,2002.No.2:P27-30.
35 ASTM, C 978-04,Photoelastic Determination of Residual Stress.
36国家机械工业局,JB/T9495.4-1999光学晶体应力双折射测量方法,中华人民共和国机械行业标准,1999.
37任广军,李国华,偏光器件的Jones矩阵研究,光学技术,2003.29(5):P578-580.
38孔超,李国华,测量晶体延迟量的λ/4波片法研究,曲阜师范大学学报,2007.33(1):P.69.
39 ASTM,C 770-98, Measurement of Glass Stress Optical Coefficient,2003.
40何勇,王娉婷,光学玻璃应力的自动测量,玻璃与搪瓷,2005.33(5):P40-43.
41王兰,宋连科,旋光法测量波片相位延迟,曲阜师范大学学报,2007.33(4):P65-67.
42 Dennis H.Goldstein, Mueller matrix dual-rotating retarder polarimeter,Applied Optics,1992.32(32):P.6676-6683.
43范树海,宋连科.光相位延迟的二维测量及系统设计,激光杂志,2003.24(1):P.12-14.
44孙英姿,波片相位延迟的光强测量法研究.天文研究与技术—国家天文台台刊,2008.5(1)：P.74-82.
45孔伟金,利用Stokes矢量和Muller矩阵确定椭圆偏振光的方位角和长短轴之比.应用光学,2002.23(2)：P.42-44.
46谢楠,Visual Basic与Matlab的几种接口编程技术.仪器仪表学报,2004.25(3).
47黎高平,王雷,谢毅,光学镜头偏振度测试技术研究.宇航计测技术,2009.29(5)：P. 4.
48梁青,楔形晶体波片消偏器的性能分析.光通信研究,2007(1:P.57-59.
49薛冬,复合消色差1/4波片的再研究.激光技术,2004.28(2)：P.184-185,192.
50薄峰,朱健强,康俊,波片相位延迟的精确测量及影响因素分析,中国激光,2007.34(6)：P.851-856.
51薄锋,波片相位延迟的精确测量及影响因素分析.中国激光,2007.34(6):P.851-856.
52孔庆典,石英波片延迟量的温度效应研究.激光技术,2008.32(4): P.374-376.
53孔庆典,波片延迟量的温度效应研究.2008.
54 M.Born,E.Wolf,Principles Of Optics(5th),1975
55李维红,玻璃材料在双向应力下失效分析的数值模拟与失效准则的验证.2005.
56国家质量技术监督局,JJG1059-1999测量不确定度评定与表示.中华人民共和国国家计量技术规范,1999.
2徐文莉,透明注塑件材料残余应力与光学性能的研究,郑州大学硕士学位论文,2006.
3徐均琪,冯小利,多层薄膜光学常数的椭偏法研究,光电工程,2009.36(2):P29-33.
4.赵廷生,波片延迟量自动化测量系统的研究.2008.
5薛庆文,李国华,半阴法测量λ/4波片的相位延迟[J].光电子·激光,1998.9(2):P150-151.
6王晓,石顺祥,马琳,部分偏振光的表示方法,电子科技,2009.22(6):P.78-80.
7 R.M.A.Azzam, N.M.Bashara, Ellipsometry and Polarizer Light,North-Holland Publishing Company,1977.
8孔伟金,李国华,偏振器件Jones矩阵的特征值和特征矢量,曲阜师范大学学报,2002.28(2):P.60-62.
9雒志秀,斯托克斯空间偏振模色散矢量叠加的研究,西安文理学院·自然科学版,2011.14(3)：P.66-68.
10吴福全,云母1/4波片光谱性能分析.光电子·激光,2006.17(4)：p.434-437.
11吴晓,浮法玻璃在线应力检测及相关退火概念.玻璃,2005.32(1):P.18-21,30.
12夏立峰,用于多色光的波片的设计.光电工程,2001.28(4):P.57-59.
13消文渊,浮法玻璃在线应力检测与退火,1998年全国玻璃学术会议论文集.1998.
14肖鹏军,在线玻璃应力检测系统的设计与实现,2006中国玻璃行业年会暨技术研讨会.2006.
15张大伟,云母1/4波片偏振干涉谱的研究.光谱学与光谱分析,2002.22(2):P.195-197.
16张大伟,云母波片属性的分光光度计标定法.光电子·激光,2002.13(7):P.757-758.
17张剑,波片延迟误差校正的理论与技术.激光技术,2006.30(3):p. 274-276.
18张丽君,基于移相法的光学玻璃应力等倾角全场数字化测量.光学技术,2004.30(2)：P.199-200,203.
19张为权,双折射滤波片的优化参量.光学学报,2005.25(10):P.1420-1424.
20张旭,椭偏光谱法测量波片相位延迟量.2007.
21张志勇,几种波片位相延迟测量方法的比较.光学精密工程,2007.15(11)：P.1678-1685.
22赵培,吴福全,1/4波片延迟量的相位调制椭偏测量法,光学学报,2006.26(3):P.379-382.
23 B.R.Grunstra,H.B.Perkins, A method for the measurement of optical retardation angles near 90 degrees, Applied Optics,1966.5(4):P.585-588.
24赵培,1/4波片延迟量的相位调制椭偏测量法.光学学报,2006.26(3):P. 379-382.
25 R.C.Reader, Working Notes On the Principles and Users of Strain Viewers and Standard Strain Discs,B.S.S.G.Journal.13(1):P.10-14.
26张志勇,邓元勇,王东光,等,几种波片位相延迟测量方法的比较,光学精密工程,2007.15(11):P.1679-1685.
27马英麒,浮法玻璃在线应力测试技术研究,北京理工大学硕士学位论文,2006.
28 Lih-Horng Shyu,Chieh-LiChen,Der-Chin Su, Method for measuring the retardation of a wave plate, Applied Optics,1993.32(22):P.4228-4230.
29苏美开,宋连科,李艺,等,波片测量中的补偿法[J].应用激光,1990.10(5):P.220-222.
30 P.A.Williams,A.H.Rose,C.M.Wang, Rotating-polarizer polarimeter for accurate retardance measurement,Applied Optics,1997.36(25):P.6466-6472.
31孙英姿,工东光,张志勇,等,波片相位延迟的光强测量法研究,天文研究与技术,2008.5(1)：P.74-82.
32赵爽,1/2波片快慢轴方位等效性的研究.激光杂志,2005.26(5)：P.44-45.
33赵廷生,精确确定光路中四分之一波片光轴方位的新方法.光学学报,2008.28(3)：P.487-491.
34周天辉,玻璃应力测量方法,建筑玻璃与工业玻璃,2002.No.2:P27-30.
35 ASTM, C 978-04,Photoelastic Determination of Residual Stress.
36国家机械工业局,JB/T9495.4-1999光学晶体应力双折射测量方法,中华人民共和国机械行业标准,1999.
37任广军,李国华,偏光器件的Jones矩阵研究,光学技术,2003.29(5):P578-580.
38孔超,李国华,测量晶体延迟量的λ/4波片法研究,曲阜师范大学学报,2007.33(1):P.69.
39 ASTM,C 770-98, Measurement of Glass Stress Optical Coefficient,2003.
40何勇,王娉婷,光学玻璃应力的自动测量,玻璃与搪瓷,2005.33(5):P40-43.
41王兰,宋连科,旋光法测量波片相位延迟,曲阜师范大学学报,2007.33(4):P65-67.
42 Dennis H.Goldstein, Mueller matrix dual-rotating retarder polarimeter,Applied Optics,1992.32(32):P.6676-6683.
43范树海,宋连科.光相位延迟的二维测量及系统设计,激光杂志,2003.24(1):P.12-14.
44孙英姿,波片相位延迟的光强测量法研究.天文研究与技术—国家天文台台刊,2008.5(1)：P.74-82.
45孔伟金,利用Stokes矢量和Muller矩阵确定椭圆偏振光的方位角和长短轴之比.应用光学,2002.23(2)：P.42-44.
46谢楠,Visual Basic与Matlab的几种接口编程技术.仪器仪表学报,2004.25(3).
47黎高平,王雷,谢毅,光学镜头偏振度测试技术研究.宇航计测技术,2009.29(5)：P. 4.
48梁青,楔形晶体波片消偏器的性能分析.光通信研究,2007(1:P.57-59.
49薛冬,复合消色差1/4波片的再研究.激光技术,2004.28(2)：P.184-185,192.
50薄峰,朱健强,康俊,波片相位延迟的精确测量及影响因素分析,中国激光,2007.34(6)：P.851-856.
51薄锋,波片相位延迟的精确测量及影响因素分析.中国激光,2007.34(6):P.851-856.
52孔庆典,石英波片延迟量的温度效应研究.激光技术,2008.32(4): P.374-376.
53孔庆典,波片延迟量的温度效应研究.2008.
54 M.Born,E.Wolf,Principles Of Optics(5th),1975
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