磁悬浮转子系统中涡流传感器工作特性研究
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摘要
磁悬浮轴承由于具有一系列独特的性能,被称为是支承技术的一场革命。在磁悬浮转子系统设计中,传感器检测的转子位移信号是控制器对轴承进行主动控制的依据,是整个系统研究的重点和难点之一。本文主要目的是:针对普通涡流位移传感器应用于磁悬浮硬盘、光盘这类微型转子五自由度位移测量时所面临的问题,研究具体工作环境下涡流传感器的工作特性。
在介绍涡流位移传感器的基本理论的基础上,分析了传感器探头线性特性、温度特性、动态特性的影响因素。通过对电涡流的具体特性、涡流损耗、以及探头品质因素Q等方面来分析探头线圈的固有特性;从探头线圈参数对传感器线性特性的影响;探头结构参数对涡流传感器线性特性的影响;探头线圈的动态响应特征;检波电路的动态特征;传感器的温度特性的影响;涡流传感器的电磁场等方面分析,提出了影响涡流传感器探头工作特性的主要因素。
根据磁悬浮转子系统模型,具体分析了磁悬浮铣削转子系统工作时的环境,模拟系统的磁路分布和磁极线圈对系统磁路的影响,以及转子系统工作下的温度场分布、传感器的布置方式以及测量方式,在理论上提出具体环境下影响涡流传感器工作特性的具体因素。
设计磁悬浮转子系统中涡流传感器的温度和磁场下的工作特性的实验,通过具体实验和对试验数据的分析,验证了系统中影响涡流传感器工作特性的环境因素主要是系统的温度和磁场特性,确定了涡流传感器在具体工作环境下测量误差范围,在磁悬浮转子系统设计过程中需要加以考虑。
提出了涡流传感器在磁悬浮铣削转子系统中的温度场的差动测量的补偿和直接测量时的补偿;提出补偿思想:根据控制系统的需要以及磁力轴承线圈输入信号特性,引出元素法,根据具体环境因素的设置补偿模块来补偿磁悬浮转子系统的磁场影响。
Active Magnetic Bearings (AMB) is called a technology revolution in the bearings for a lot of advantages. The signal of the magnetic suspended spindle measured by the eddy cunent sensor is the basis to carry on the control to the bearing, is one of the whole point of the system research and crux in system design process. Purpose of this paper is aiming at the problem of displacement measuring about HDD rotor suspended AMB as a five degree of freedom system, research the work characteristic of eddy current sensor in concrete work environment.The probe's linearity, temperature and dynamic characteristics are analyzed base on principal theory of eddy-current sensor, from the character of the eddy current, loss of eddy current and the coil Q value to the probe characteristic, aspect to analyze of the influence of the diameter of coil and the structure parameter of probe to the linearity characteristic, the dynamic state of the coil to characteristics, dynamic state characteristic of the demodulation circuit, temperature and magnetism characteristic of the eddy current, putting forward influences to work characteristic of the eddy current.Concretely analyzed the environment of the magnetic bearing according to the system model, the magnetism distribution and the influence of the pole coil to the magnetic, the temperature distribution, disposal method and measuring of eddy current sensors are simulated, finally put forward the influence to work characteristic of the concrete factor in the concrete environment theoretically.Designed the experiment of the work characteristic of eddy current sensor, passed a concrete experiment and analysis experiments a data, verified the factors that influence to the characteristic of eddy current by system temperature and magnetism, confirmed the error margin of the measuring system, which should be considered in the design process.Put forward the temperature compensation of direct and differs measuring;According to the demand and the magnetic force bearings coil importation signal characteristic of the control system, bring in the element method, compensate the magnetism influence of concrete environment factor from the constitution mold pieces.
在介绍涡流位移传感器的基本理论的基础上,分析了传感器探头线性特性、温度特性、动态特性的影响因素。通过对电涡流的具体特性、涡流损耗、以及探头品质因素Q等方面来分析探头线圈的固有特性;从探头线圈参数对传感器线性特性的影响;探头结构参数对涡流传感器线性特性的影响;探头线圈的动态响应特征;检波电路的动态特征;传感器的温度特性的影响;涡流传感器的电磁场等方面分析,提出了影响涡流传感器探头工作特性的主要因素。
根据磁悬浮转子系统模型,具体分析了磁悬浮铣削转子系统工作时的环境,模拟系统的磁路分布和磁极线圈对系统磁路的影响,以及转子系统工作下的温度场分布、传感器的布置方式以及测量方式,在理论上提出具体环境下影响涡流传感器工作特性的具体因素。
设计磁悬浮转子系统中涡流传感器的温度和磁场下的工作特性的实验,通过具体实验和对试验数据的分析,验证了系统中影响涡流传感器工作特性的环境因素主要是系统的温度和磁场特性,确定了涡流传感器在具体工作环境下测量误差范围,在磁悬浮转子系统设计过程中需要加以考虑。
提出了涡流传感器在磁悬浮铣削转子系统中的温度场的差动测量的补偿和直接测量时的补偿;提出补偿思想:根据控制系统的需要以及磁力轴承线圈输入信号特性,引出元素法,根据具体环境因素的设置补偿模块来补偿磁悬浮转子系统的磁场影响。
Active Magnetic Bearings (AMB) is called a technology revolution in the bearings for a lot of advantages. The signal of the magnetic suspended spindle measured by the eddy cunent sensor is the basis to carry on the control to the bearing, is one of the whole point of the system research and crux in system design process. Purpose of this paper is aiming at the problem of displacement measuring about HDD rotor suspended AMB as a five degree of freedom system, research the work characteristic of eddy current sensor in concrete work environment.The probe's linearity, temperature and dynamic characteristics are analyzed base on principal theory of eddy-current sensor, from the character of the eddy current, loss of eddy current and the coil Q value to the probe characteristic, aspect to analyze of the influence of the diameter of coil and the structure parameter of probe to the linearity characteristic, the dynamic state of the coil to characteristics, dynamic state characteristic of the demodulation circuit, temperature and magnetism characteristic of the eddy current, putting forward influences to work characteristic of the eddy current.Concretely analyzed the environment of the magnetic bearing according to the system model, the magnetism distribution and the influence of the pole coil to the magnetic, the temperature distribution, disposal method and measuring of eddy current sensors are simulated, finally put forward the influence to work characteristic of the concrete factor in the concrete environment theoretically.Designed the experiment of the work characteristic of eddy current sensor, passed a concrete experiment and analysis experiments a data, verified the factors that influence to the characteristic of eddy current by system temperature and magnetism, confirmed the error margin of the measuring system, which should be considered in the design process.Put forward the temperature compensation of direct and differs measuring;According to the demand and the magnetic force bearings coil importation signal characteristic of the control system, bring in the element method, compensate the magnetism influence of concrete environment factor from the constitution mold pieces.
引文
[1] Johann Wassermann, Alexander Schulz, Manfred Schneeberger. Active magnetic bearings of high reliability. In Proc. Of ICIT'03. International Conference on Industrial Technology. Maribor Slovenia, December 10-12. 2003 IEEE.
[2] 张祖明,温诗铸.关于直流控制式磁力轴承的控制稳定性分析.第一届全国机械零件计算方法学术会议论文集,1982.
[3] G.Schweitzer. Proceedings of First International Symposium on Magnetic Bearings. Zurich, Switzerland, June, 1988.
[4] Proceedings of Second International Symposium on Magnetic Bearings. Tokoy, Japan, June, 1990.
[5] 李璐.高速磁悬浮列车间隙传感器的设计与研究:〔硕士学位论文〕.长沙:国防科技大学,2002年(涡流传感器)
[6] 李希南,王凤翔.无轴承磁悬浮电机系统中的非接触传感器.微特电机.2005(3):36-40.
[7] 曹洁.电磁轴承系统位移传感器的分析与研究.传感器技术.2001(12):9-11.
[8] 蒋启龙,姚卫丰,连级三.差动变压器式电磁轴承位置检测传感器研究.传感器技术.2005(5):8-10
[9] Boehm J, Gerber R, Kiley N R C. Sensors fox magnetic bearings. IEEE Trans on Magn, 1993, 29(6): 2962-2964.
[10] 汪希平,崔卫东.电磁轴承用非接触式位移传感器的研究.上海大学学报.1998(1):54-60.
[11] 薛亚琴,刘奕平.电涡流传感器特性曲线拟合的新方法.传感器技术.2003(7):42-44.
[12] 刘兆琦,杨建忠.电涡流传感器及求特性曲线拟合方程的新方法.西安石油学院学报.1998(3):38-42.
[13] 丛华,张德魁,安钢.电涡流传感器动态响应特性研究.传感器技术.1999(9):1-3.
[14] 谭明娟,马新山.涡流传感器中传递函数方法研究.[J].电工技术学报,1998,13(5):42-46.
[15] 徐科军著.传感器动态特性研究的实用方法.中国科学技术出版社.1999:78-99.
[16] 贾林,传感器动态非线性建模和补偿的研究,合肥工业大学,(硕士学位论文),2003.
[17] 王肖芬,徐科军,沈峰.小波滤波器幅频特性的研究.合肥工业大学学报,2003,26(2):171-175.
[18] XiaoMei Pei, Hongsheng Liang. A Frequency Analysis Method For Eddy Current Nondestructive Testing. The First International Conference On Machine Learning And Cybernetics, Beijing, China, 2002: 1194-1197.
[19] 樊树江,吴峻,杨光等.电涡流传感器温度漂移分析及补偿实现.传感技术学报.2004(3):427-430.
[20] 杜保强,叶会英.电涡流传感器温漂的综合补偿.半导体技术(支撑技术).2004(10):52-56.
[21] 肖茂森.PIC单片机芯片在电涡流传感器温度补偿中的应用.西安建筑科技大学.(硕士学位论文).2005.
[22] 丛华,张德魁,赵鸿宾.电涡流传感器温度稳定性研究,清华大学学报(自然科学版).1999(10):65-68.
[23] 王军平,王安,樊文侠.电涡流传感器线圈参数对传感器性能的影响.自动化仪表.2001(12):22-25
[25] 唐旭晖,孙宇.涡流传感器电损耗的研究.研究动态.2002(4):9-13.
[26] 左建国.涡流传感器中检测线圈的有效直径及其应用.传感器技术.1997(6):48-51.
[27] 王军平.大量程电涡流传感器的研制.西北工业大学.(硕士学位论文).2001.
[28] 吴峻,李璐,樊树江等.基于DSP的电涡流传感器的设计.自动化仪表.2004(10):9-13.
[30] 林俊明,李同滨,林发炳等.相控阵涡流传感器的研制及其应用.无损检测.2002(1):9-12.
[31] 刘迎春编.传感器原理、设计与应用.届防科技大学出版社.1989
[32] 何斌,岳继光,杨灿军等,探头参数对变涡流传感器的影响及仿真研究.传感器技术.1999(2):7-10
[33] 王海,磁悬浮硬盘转子动态位移涡流检测系统研究,武汉理工大学,[硕士学位论文],2004.
[34] 凌保明,诸葛向彬,凌云.电涡流传感器的温度稳定性研究.仪器仪表学报,1994.15(4)
[35] 胡嫒嫒,罗飞路,曹雄恒等,交变磁场测量系统数值仿真分析,仪表技术与传感器,2003(6):48-50
[36] 蒋齐密,张新访,刘土光等,电涡流检测系统中的电磁场仿真,计算机仿真,2000(5):36-40
[37] 于亚婷,电涡流传感器电磁场仿真分析,电子科技大学,[硕士学位论文],2005。
[38] 齐玉良,陈国明,张彦廷,交流电磁场检测数值仿真及信号敏感性分析,石油大学学报,2004.28(3):65-71
[39] 武丽梅.径向磁力轴承系统的时间响应特性分析.沈阳航空工业学院学报.2000.17(3):9-11
[40] 李俊华.数控磁悬浮球系统的研究与实现.南京航空航天大学.[硕士学位论文].2004.
[41] Frank-Michael Renner, Jurgen Becker, and Manfred Glesner, an FPGA Implementation of a Magnetic Bearing Controller for Mechatronical Applications. Darmstadt University of Technology, Institute of Microelectronic Systems,
[42] SHI-JING HUANG and LIH-CHANG LIN, Fuzzy Modeling and Control for Conical Magnetic Bearings Using Linear Matrix Inequality, Journal of Intelligent and Robotic Systems 2003.37: 209-232
[43] M. Brune and I. Detomb, APPLICATION OF ACTIVE MAGNETIC BEARINGS IN TURBOCOMPRESSORS AND TURBOEXPANDERS OF THE GAS INDUSTRY, Chemical and Petroleum Engineering, 2002. 38, Nos. 7-8,
[2] 张祖明,温诗铸.关于直流控制式磁力轴承的控制稳定性分析.第一届全国机械零件计算方法学术会议论文集,1982.
[3] G.Schweitzer. Proceedings of First International Symposium on Magnetic Bearings. Zurich, Switzerland, June, 1988.
[4] Proceedings of Second International Symposium on Magnetic Bearings. Tokoy, Japan, June, 1990.
[5] 李璐.高速磁悬浮列车间隙传感器的设计与研究:〔硕士学位论文〕.长沙:国防科技大学,2002年(涡流传感器)
[6] 李希南,王凤翔.无轴承磁悬浮电机系统中的非接触传感器.微特电机.2005(3):36-40.
[7] 曹洁.电磁轴承系统位移传感器的分析与研究.传感器技术.2001(12):9-11.
[8] 蒋启龙,姚卫丰,连级三.差动变压器式电磁轴承位置检测传感器研究.传感器技术.2005(5):8-10
[9] Boehm J, Gerber R, Kiley N R C. Sensors fox magnetic bearings. IEEE Trans on Magn, 1993, 29(6): 2962-2964.
[10] 汪希平,崔卫东.电磁轴承用非接触式位移传感器的研究.上海大学学报.1998(1):54-60.
[11] 薛亚琴,刘奕平.电涡流传感器特性曲线拟合的新方法.传感器技术.2003(7):42-44.
[12] 刘兆琦,杨建忠.电涡流传感器及求特性曲线拟合方程的新方法.西安石油学院学报.1998(3):38-42.
[13] 丛华,张德魁,安钢.电涡流传感器动态响应特性研究.传感器技术.1999(9):1-3.
[14] 谭明娟,马新山.涡流传感器中传递函数方法研究.[J].电工技术学报,1998,13(5):42-46.
[15] 徐科军著.传感器动态特性研究的实用方法.中国科学技术出版社.1999:78-99.
[16] 贾林,传感器动态非线性建模和补偿的研究,合肥工业大学,(硕士学位论文),2003.
[17] 王肖芬,徐科军,沈峰.小波滤波器幅频特性的研究.合肥工业大学学报,2003,26(2):171-175.
[18] XiaoMei Pei, Hongsheng Liang. A Frequency Analysis Method For Eddy Current Nondestructive Testing. The First International Conference On Machine Learning And Cybernetics, Beijing, China, 2002: 1194-1197.
[19] 樊树江,吴峻,杨光等.电涡流传感器温度漂移分析及补偿实现.传感技术学报.2004(3):427-430.
[20] 杜保强,叶会英.电涡流传感器温漂的综合补偿.半导体技术(支撑技术).2004(10):52-56.
[21] 肖茂森.PIC单片机芯片在电涡流传感器温度补偿中的应用.西安建筑科技大学.(硕士学位论文).2005.
[22] 丛华,张德魁,赵鸿宾.电涡流传感器温度稳定性研究,清华大学学报(自然科学版).1999(10):65-68.
[23] 王军平,王安,樊文侠.电涡流传感器线圈参数对传感器性能的影响.自动化仪表.2001(12):22-25
[25] 唐旭晖,孙宇.涡流传感器电损耗的研究.研究动态.2002(4):9-13.
[26] 左建国.涡流传感器中检测线圈的有效直径及其应用.传感器技术.1997(6):48-51.
[27] 王军平.大量程电涡流传感器的研制.西北工业大学.(硕士学位论文).2001.
[28] 吴峻,李璐,樊树江等.基于DSP的电涡流传感器的设计.自动化仪表.2004(10):9-13.
[30] 林俊明,李同滨,林发炳等.相控阵涡流传感器的研制及其应用.无损检测.2002(1):9-12.
[31] 刘迎春编.传感器原理、设计与应用.届防科技大学出版社.1989
[32] 何斌,岳继光,杨灿军等,探头参数对变涡流传感器的影响及仿真研究.传感器技术.1999(2):7-10
[33] 王海,磁悬浮硬盘转子动态位移涡流检测系统研究,武汉理工大学,[硕士学位论文],2004.
[34] 凌保明,诸葛向彬,凌云.电涡流传感器的温度稳定性研究.仪器仪表学报,1994.15(4)
[35] 胡嫒嫒,罗飞路,曹雄恒等,交变磁场测量系统数值仿真分析,仪表技术与传感器,2003(6):48-50
[36] 蒋齐密,张新访,刘土光等,电涡流检测系统中的电磁场仿真,计算机仿真,2000(5):36-40
[37] 于亚婷,电涡流传感器电磁场仿真分析,电子科技大学,[硕士学位论文],2005。
[38] 齐玉良,陈国明,张彦廷,交流电磁场检测数值仿真及信号敏感性分析,石油大学学报,2004.28(3):65-71
[39] 武丽梅.径向磁力轴承系统的时间响应特性分析.沈阳航空工业学院学报.2000.17(3):9-11
[40] 李俊华.数控磁悬浮球系统的研究与实现.南京航空航天大学.[硕士学位论文].2004.
[41] Frank-Michael Renner, Jurgen Becker, and Manfred Glesner, an FPGA Implementation of a Magnetic Bearing Controller for Mechatronical Applications. Darmstadt University of Technology, Institute of Microelectronic Systems,
[42] SHI-JING HUANG and LIH-CHANG LIN, Fuzzy Modeling and Control for Conical Magnetic Bearings Using Linear Matrix Inequality, Journal of Intelligent and Robotic Systems 2003.37: 209-232
[43] M. Brune and I. Detomb, APPLICATION OF ACTIVE MAGNETIC BEARINGS IN TURBOCOMPRESSORS AND TURBOEXPANDERS OF THE GAS INDUSTRY, Chemical and Petroleum Engineering, 2002. 38, Nos. 7-8,