PVDF压电薄膜及其传感器的制备与性能研究
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摘要
聚偏二氟乙烯(Polyvinylidene Fluoride,简称PVDF)压电薄膜是一种高分子薄膜,因其具有体积小、质量轻、耐化学腐蚀、柔性和加工性能好、声阻抗低、频响宽、介电强度高、稳定性好等特性,以其为核心的产品被广泛的应用于工业生产和日常生活的多个领域,如日常生活的麦克风、显示器,医学方面的心率测试仪,声学方面的超声显微镜、超声发送及接收器等。鉴于易粘贴于结构表面,对结构的力学性能影响小等优点,PVDF在传感方面有着很大的优势,它可作为智能材料与结构中理想的传感元件。基于PVDF压电薄膜的传感器在结构监测方面有着非常广阔的应用前景。本文研究了PVDF压电薄膜的制备工艺、PVDF传感器的封装工艺及其动态响应特性,主要内容如下:
(1)研究了PVDF压电薄膜的溶液流延法制备工艺,重点分析和表征了制备过程中流延温度、拉伸比、极化电压等多种因素对薄膜性能的影响,为制备性能良好的压电薄膜奠定了基础。
(2)利用磁控溅射、丝网印刷和手涂三种工艺对PVDF压电薄膜进行了电极涂覆并进行了对比,研究了PVDF压电薄膜的封装工艺,完成了PVDF压电传感器的制作。
(3)完成了PVDF传感器的动态循环实验研究,验证了电磁屏蔽的必要性,通过与高精度电阻应变片的测试结果的对比研究了PVDF压电传感器的动态响应特性。
The Polyvinylidene fluoride(PVDF) pizeo-film is a macromolecule film. Due to its virtues of small size, light weight, high chemical corrosion resistance, flexibility and processability, wide fequency range, high dielectric strength and stability, PVDF is widely applied for industrial and civilian use. It is easily attached to the smart structures as sensing element with little structural influence. The PVDF Sensor has a promising application to the structural health monitoring.
In this thesis, the fabrication of PVDF pizeo-film and sensor and the dynamic sensing properties of self-made sensor were investigated. The main contents are detailed as follows:
(1) The fabrication of PVDF film, including film deposition by solution cast method, uniaxial stretching and polarization under high temperature, was studied. Various factors impact on the film preparation were analyzed and characterized for better film performance.
(2) The electrode coating and packaging process of the PVDF film were investigated, the PVDF sensor fabrication and films assembling differently were explored.
(3) Compared with results of the resistance strain gauge, the dynamic response characteristics of PVDF sensor were tested and verified.
(1)研究了PVDF压电薄膜的溶液流延法制备工艺,重点分析和表征了制备过程中流延温度、拉伸比、极化电压等多种因素对薄膜性能的影响,为制备性能良好的压电薄膜奠定了基础。
(2)利用磁控溅射、丝网印刷和手涂三种工艺对PVDF压电薄膜进行了电极涂覆并进行了对比,研究了PVDF压电薄膜的封装工艺,完成了PVDF压电传感器的制作。
(3)完成了PVDF传感器的动态循环实验研究,验证了电磁屏蔽的必要性,通过与高精度电阻应变片的测试结果的对比研究了PVDF压电传感器的动态响应特性。
The Polyvinylidene fluoride(PVDF) pizeo-film is a macromolecule film. Due to its virtues of small size, light weight, high chemical corrosion resistance, flexibility and processability, wide fequency range, high dielectric strength and stability, PVDF is widely applied for industrial and civilian use. It is easily attached to the smart structures as sensing element with little structural influence. The PVDF Sensor has a promising application to the structural health monitoring.
In this thesis, the fabrication of PVDF pizeo-film and sensor and the dynamic sensing properties of self-made sensor were investigated. The main contents are detailed as follows:
(1) The fabrication of PVDF film, including film deposition by solution cast method, uniaxial stretching and polarization under high temperature, was studied. Various factors impact on the film preparation were analyzed and characterized for better film performance.
(2) The electrode coating and packaging process of the PVDF film were investigated, the PVDF sensor fabrication and films assembling differently were explored.
(3) Compared with results of the resistance strain gauge, the dynamic response characteristics of PVDF sensor were tested and verified.
引文
[1]周洋,万建国,陶宝祺. PVDF压电薄膜的结构、机理与应用[J].材料导报,1996,5.
[2] Lovinger A. J. Development in Crystalline Polymers[J]. Bassett D C Ed, Applied Science, London, 1982: 195
[3]李波.聚偏氟乙烯/层状硅酸盐纳米复合材料的形态结构及结晶动力学研究[D].吉林大学硕士学位论文,2007,15.
[4] Y. Takahashi, Y. Mastsubara and H. Tadokoro. Crystal structure of form II of poly(vinylidene fluoride) [J]. Macromolecules, 1983(16): 1588-1592.
[5] J. B. Lando, H. G. Olf and A. Peterlin. Nuclear magnetic resonance and x-ray determination of the structure of poly(vinylidene fluoride) [J]. Journal of Polymer Science Part A-1: Polymer Chemistry, 1966(40): 941-951.
[6] N. Murayama, T. Olkawa, T. Katto and K. Nakamura. Persistent polarization in poly(vinylidene fluoride). [J]. Journal of Polymer Science: Polymer Physics Edition, 1975(13): 929-946.
[7] Y. Takahashi and H. Tadokoro. Crystal Structure of Form III of Poly(vinylidene fluoride) [J]. Macromolecules, 1980(13): 1317-1318.
[8] S. Weinhold, M. H. Litt and J. B. Lando. Oriented phase III poly(vinylidene fluoride)[ J]. Polym. Sci. Polym. Lett. Ed, 1979(17): 585-589.
[9] M. Bachmann and W. L. Gordon, et al. The crystal structure of phase IV of poly(vinylidene fluoride)[J]. Appl.Phys, 1980(51): 5095-5099.
[10] Farmer B. L.,Hopefinger A. J.,Lando J. B.,J. APPI. Phys.,1972; 43:4293
[11] Doll W. W.,Lando J. B.,J. Waeromol. Sci. Phys., 1970; B4:309
[12] Weinhold S., Litt M. H., Lando J. B., J. Polym. Sci., Polym. Phys. Ed., 1979(17): 585.
[13]毛艳平.不同尺寸BaTiO3纳米颗粒的制备及0-3型BaTiO3/PVDF压电材料铁电、介电性能的研究[D].厦门大学硕士学位论文,2009.
[14] Wang C.M. , Kao M.C. , Chen Y.C. Preparation and Electrical Property ofβ-PVDF/PbTiO3 Thin Films[J]. Application of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on, 2002: 175-178.
[15] Davis. M, etc. Appl Phys, 1980, 51: 5095 - 5099
[16] Behzad Mohammadi,etc. Effect of tensile strain rate and elongation on crystalline structure and piezoelectric properties of PVDF thin films [J]. Polymer Testing, 2007(26): 42-50.
[17]徐任信等.拉伸速率对PVDF薄膜介电压电性能的影响[J].功能材料, 2004增(35)卷.
[18]胡友旺,郇彦,刘雅言,贾宏光,吴一辉.溶液法PVDF压电薄膜极化工艺研究[J].功能材料,2006增(37)卷.
[19]郭伟国,褚世永.不同力和温度对PVDF压电薄膜压电系数的影响[J].科学技术与工程,2008.8(2).
[20]叶芸.聚偏氟乙烯薄膜及超薄膜的制备及特性研究[D].电子科大博士论文2007.
[21]惠迎雪等.β相聚偏二氟乙烯PVDF薄膜的制备和热光效应研究[J].红外与激光工程,2006.35增.
[22]惠迎雪,樊慧庆,刘卫国. PVDF薄膜的低维化制备和结构研究[J].材料导报,2010.24(3).
[23] P. Audrain, P. Masson, A. Berry, etc. The use of PVDF strain sensing in active control of structural intensity in beams[J]. Journal of Intelligent Material Systems and Structures, 2004(15): 319-327.
[24] Seung-Chan Choi, Jae-Sang Park, i-Hwan Kim. Active damping of rotating composite thin-walled beams using MFC actuators and PVDF sensors[J]. Composite Struetures, 2006 (76): 362-374.
[25] S. Hurlebaus, U. Sto bener, L. Gaul. Vibration reduction of curved Panels by active modal control[J]. Computers and Structures, 2008 (86): 251-57.
[26]具典淑,周智,欧进萍.基于PVDF的金属构件裂纹监测研究[J].压电与声光,2004 (6): 245-248.
[27]赵东升. PVDF压电传感器的设计及其试验研究[D].江苏大学硕士学位论文,2005:l-5.
[28]万舟,纪涛.基于PVDF的金属结构损伤裂纹监测研究[C]//中国智能自动化会议论文集,2009.
[29]张景森等. PVDF薄膜在金属层裂现象研究中的初步应用[J].力学与实践, 2010.32(1).
[30]王术新,朱志伟.一种用于振动测量的新型PVDF传感器[J].传感器技术, 2003.8.
[31]王术新,李以哲. PVDF传感器的设计及在振动测量中的应用[J].压电与声光,2004.26(5).
[32]孙宇.基于压电薄膜的结构应变与损伤检测研究[D].大连理工大学硕士学位论文,2006:1.
[33]孙宇,刘刚,汪姗.基于PVDF的船舶与海洋结构物应变测量技术研究[C]//全国钢结构学术年会论文集,2009.
[34]孟一,易伟建. PVDF应力传感器的设计、标定及其在混凝土冲击试验中的应用[J].湖南大学学报(自然科学版),2009,36(12).
[35] J. Dargahi, W. F. Xie, Peng Ji. An experimental teletaction system for sensing and teleperception of human pulse[J]. Mechatronics, 2008: 1-13.
[36] Mohammadreza Ramezanifard, Saeed Sokhanvar, Javad Dargahi, Wen-Fang Xie, Muthukumaran Packirisamy. Graphical Reproduction of Tactile Information of Embedded Lumps for MIS Applications[J]. Symposium on Haptic Interfaces for Virtual Environments and Teleoperator Systems. March13-14, 2008: 247-252.
[37] Weiting Liu, A.Menciassi, S.Scapellato, P. Dario and Yuquan Chen. A biomimetic sensor for a crawling minirobot[J]. Robotics and Autonomous Systems, 2006 (54): 513-528.
[38]刘伟庭,朱丹华,陈裕泉等.具有外体和本体感知能力智能蠕动模块[J].传感技术学报,2006(23): 1157-1161.
[39]刘伟庭.软体蠕动机器人系统之研究[D].浙江大学硕士学位论文,2006:35.
[40]罗志增,王人成.仿生假手触滑觉研究[J].传感技术学报,2003(3):233-237.
[41]姜明文,王人成,罗志增等.具有触滑觉功能的肌电假手[J].清华大学学报(自然科学版),2004(44):1051-1053.
[42]冯玉军,井晓天,楼秉哲等. PVDF及其共聚物的压电性和制备[J].材料工程,1999(7):18-20.
[43] Lando J B, Peterlin A. [J] polym Sci, Part A-1, 1966(4): 94l.
[44] Matsushige K, Nagata K, Imada S, et al. [J]. Polymer, 1980(21): 1391-1397.
[45] McGrath J C, Ward l M. [J]. Polym, 1980(21): 855-857.
[46]戚晓芳,余琨等.拉伸工艺对聚偏二氟乙烯结构性能的影响[J].东南大学学报,1999增(29).
[47]戚晓芳,余琨.拉伸法制备β型聚偏二氟乙烯薄膜工艺研究[J].机械工程材料,2004,28(12).
[48] Sajkiewicz P, Wasiak A, Goclowski Z. [J]. European polymer Journal, 1999, 35: 42-429.
[49] Takase Y, Scheinbeim J I,Newman B A,J Pelym Sci: Part B:Polym Phys, 1989,27:2347-2359
[50]仝金雨,姜胜林,等.退火温度对PVDF薄膜结构的影响及其性能研究[J].材料导报,2006,10(37).
[51]叶芸,蒋亚东等.电场作用下PVDF薄膜的结构相变与剩余极化特性研究[J].功能材料,2005, 12(36).
[52] T. Furukawa. Ferroelectric properities of vinylidene fluoride copolymers[J]. Phase Transitions, 1989(18): 137-140.
[53]王永. PVDF/BaTiO3复合薄膜的制备及特性研究[D].电子科技大学硕士学位论文,2007: 21.
[54] P. Sajkiewicz, A.Wasiak, Z. Golclowski. Phase transitions during stretching of poly (vinylidene flouride) [J]. European Polym, 1999(35): 423-429.
[55]彭建邦,邓添泉等.极化方式对聚偏氟乙烯(PVDF)驻极体压电性的影响[J].高分子通讯,1982,5.
[56]彭建邦,吴昆裕,等.γ晶型转变为β晶型的聚偏氟乙烯(PVDF)的压电性[J].中国科学技术大学学报,1985, 15(2).
[57]任萍.具有压电性和热释电性的PVDF纤维的研究[D].天津工业大学硕士学位论文,2003:16.
[58]李蕊.基于PVDF的全有机介电材料制备、结构与性能[D].武汉理工大学博士学位论文,2010:8.
[59] Broadhurst M. G.,Davis G.T.,Ferroelectrics,1984,60:3.
[60]李远,秦自楷,周志刚.压电与铁电材料的测量[M].北京:科学出版社,1984:38.
[61]具典淑,周智,欧进萍. PVDF压电薄膜的应变传感特性研究[J].功能材料. 2004, 7(4): 450-456
[62]白石. PVDF动态应变感知特性及其结构监测应用[D].哈尔滨工业大学硕士论文,2006:20.
[2] Lovinger A. J. Development in Crystalline Polymers[J]. Bassett D C Ed, Applied Science, London, 1982: 195
[3]李波.聚偏氟乙烯/层状硅酸盐纳米复合材料的形态结构及结晶动力学研究[D].吉林大学硕士学位论文,2007,15.
[4] Y. Takahashi, Y. Mastsubara and H. Tadokoro. Crystal structure of form II of poly(vinylidene fluoride) [J]. Macromolecules, 1983(16): 1588-1592.
[5] J. B. Lando, H. G. Olf and A. Peterlin. Nuclear magnetic resonance and x-ray determination of the structure of poly(vinylidene fluoride) [J]. Journal of Polymer Science Part A-1: Polymer Chemistry, 1966(40): 941-951.
[6] N. Murayama, T. Olkawa, T. Katto and K. Nakamura. Persistent polarization in poly(vinylidene fluoride). [J]. Journal of Polymer Science: Polymer Physics Edition, 1975(13): 929-946.
[7] Y. Takahashi and H. Tadokoro. Crystal Structure of Form III of Poly(vinylidene fluoride) [J]. Macromolecules, 1980(13): 1317-1318.
[8] S. Weinhold, M. H. Litt and J. B. Lando. Oriented phase III poly(vinylidene fluoride)[ J]. Polym. Sci. Polym. Lett. Ed, 1979(17): 585-589.
[9] M. Bachmann and W. L. Gordon, et al. The crystal structure of phase IV of poly(vinylidene fluoride)[J]. Appl.Phys, 1980(51): 5095-5099.
[10] Farmer B. L.,Hopefinger A. J.,Lando J. B.,J. APPI. Phys.,1972; 43:4293
[11] Doll W. W.,Lando J. B.,J. Waeromol. Sci. Phys., 1970; B4:309
[12] Weinhold S., Litt M. H., Lando J. B., J. Polym. Sci., Polym. Phys. Ed., 1979(17): 585.
[13]毛艳平.不同尺寸BaTiO3纳米颗粒的制备及0-3型BaTiO3/PVDF压电材料铁电、介电性能的研究[D].厦门大学硕士学位论文,2009.
[14] Wang C.M. , Kao M.C. , Chen Y.C. Preparation and Electrical Property ofβ-PVDF/PbTiO3 Thin Films[J]. Application of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on, 2002: 175-178.
[15] Davis. M, etc. Appl Phys, 1980, 51: 5095 - 5099
[16] Behzad Mohammadi,etc. Effect of tensile strain rate and elongation on crystalline structure and piezoelectric properties of PVDF thin films [J]. Polymer Testing, 2007(26): 42-50.
[17]徐任信等.拉伸速率对PVDF薄膜介电压电性能的影响[J].功能材料, 2004增(35)卷.
[18]胡友旺,郇彦,刘雅言,贾宏光,吴一辉.溶液法PVDF压电薄膜极化工艺研究[J].功能材料,2006增(37)卷.
[19]郭伟国,褚世永.不同力和温度对PVDF压电薄膜压电系数的影响[J].科学技术与工程,2008.8(2).
[20]叶芸.聚偏氟乙烯薄膜及超薄膜的制备及特性研究[D].电子科大博士论文2007.
[21]惠迎雪等.β相聚偏二氟乙烯PVDF薄膜的制备和热光效应研究[J].红外与激光工程,2006.35增.
[22]惠迎雪,樊慧庆,刘卫国. PVDF薄膜的低维化制备和结构研究[J].材料导报,2010.24(3).
[23] P. Audrain, P. Masson, A. Berry, etc. The use of PVDF strain sensing in active control of structural intensity in beams[J]. Journal of Intelligent Material Systems and Structures, 2004(15): 319-327.
[24] Seung-Chan Choi, Jae-Sang Park, i-Hwan Kim. Active damping of rotating composite thin-walled beams using MFC actuators and PVDF sensors[J]. Composite Struetures, 2006 (76): 362-374.
[25] S. Hurlebaus, U. Sto bener, L. Gaul. Vibration reduction of curved Panels by active modal control[J]. Computers and Structures, 2008 (86): 251-57.
[26]具典淑,周智,欧进萍.基于PVDF的金属构件裂纹监测研究[J].压电与声光,2004 (6): 245-248.
[27]赵东升. PVDF压电传感器的设计及其试验研究[D].江苏大学硕士学位论文,2005:l-5.
[28]万舟,纪涛.基于PVDF的金属结构损伤裂纹监测研究[C]//中国智能自动化会议论文集,2009.
[29]张景森等. PVDF薄膜在金属层裂现象研究中的初步应用[J].力学与实践, 2010.32(1).
[30]王术新,朱志伟.一种用于振动测量的新型PVDF传感器[J].传感器技术, 2003.8.
[31]王术新,李以哲. PVDF传感器的设计及在振动测量中的应用[J].压电与声光,2004.26(5).
[32]孙宇.基于压电薄膜的结构应变与损伤检测研究[D].大连理工大学硕士学位论文,2006:1.
[33]孙宇,刘刚,汪姗.基于PVDF的船舶与海洋结构物应变测量技术研究[C]//全国钢结构学术年会论文集,2009.
[34]孟一,易伟建. PVDF应力传感器的设计、标定及其在混凝土冲击试验中的应用[J].湖南大学学报(自然科学版),2009,36(12).
[35] J. Dargahi, W. F. Xie, Peng Ji. An experimental teletaction system for sensing and teleperception of human pulse[J]. Mechatronics, 2008: 1-13.
[36] Mohammadreza Ramezanifard, Saeed Sokhanvar, Javad Dargahi, Wen-Fang Xie, Muthukumaran Packirisamy. Graphical Reproduction of Tactile Information of Embedded Lumps for MIS Applications[J]. Symposium on Haptic Interfaces for Virtual Environments and Teleoperator Systems. March13-14, 2008: 247-252.
[37] Weiting Liu, A.Menciassi, S.Scapellato, P. Dario and Yuquan Chen. A biomimetic sensor for a crawling minirobot[J]. Robotics and Autonomous Systems, 2006 (54): 513-528.
[38]刘伟庭,朱丹华,陈裕泉等.具有外体和本体感知能力智能蠕动模块[J].传感技术学报,2006(23): 1157-1161.
[39]刘伟庭.软体蠕动机器人系统之研究[D].浙江大学硕士学位论文,2006:35.
[40]罗志增,王人成.仿生假手触滑觉研究[J].传感技术学报,2003(3):233-237.
[41]姜明文,王人成,罗志增等.具有触滑觉功能的肌电假手[J].清华大学学报(自然科学版),2004(44):1051-1053.
[42]冯玉军,井晓天,楼秉哲等. PVDF及其共聚物的压电性和制备[J].材料工程,1999(7):18-20.
[43] Lando J B, Peterlin A. [J] polym Sci, Part A-1, 1966(4): 94l.
[44] Matsushige K, Nagata K, Imada S, et al. [J]. Polymer, 1980(21): 1391-1397.
[45] McGrath J C, Ward l M. [J]. Polym, 1980(21): 855-857.
[46]戚晓芳,余琨等.拉伸工艺对聚偏二氟乙烯结构性能的影响[J].东南大学学报,1999增(29).
[47]戚晓芳,余琨.拉伸法制备β型聚偏二氟乙烯薄膜工艺研究[J].机械工程材料,2004,28(12).
[48] Sajkiewicz P, Wasiak A, Goclowski Z. [J]. European polymer Journal, 1999, 35: 42-429.
[49] Takase Y, Scheinbeim J I,Newman B A,J Pelym Sci: Part B:Polym Phys, 1989,27:2347-2359
[50]仝金雨,姜胜林,等.退火温度对PVDF薄膜结构的影响及其性能研究[J].材料导报,2006,10(37).
[51]叶芸,蒋亚东等.电场作用下PVDF薄膜的结构相变与剩余极化特性研究[J].功能材料,2005, 12(36).
[52] T. Furukawa. Ferroelectric properities of vinylidene fluoride copolymers[J]. Phase Transitions, 1989(18): 137-140.
[53]王永. PVDF/BaTiO3复合薄膜的制备及特性研究[D].电子科技大学硕士学位论文,2007: 21.
[54] P. Sajkiewicz, A.Wasiak, Z. Golclowski. Phase transitions during stretching of poly (vinylidene flouride) [J]. European Polym, 1999(35): 423-429.
[55]彭建邦,邓添泉等.极化方式对聚偏氟乙烯(PVDF)驻极体压电性的影响[J].高分子通讯,1982,5.
[56]彭建邦,吴昆裕,等.γ晶型转变为β晶型的聚偏氟乙烯(PVDF)的压电性[J].中国科学技术大学学报,1985, 15(2).
[57]任萍.具有压电性和热释电性的PVDF纤维的研究[D].天津工业大学硕士学位论文,2003:16.
[58]李蕊.基于PVDF的全有机介电材料制备、结构与性能[D].武汉理工大学博士学位论文,2010:8.
[59] Broadhurst M. G.,Davis G.T.,Ferroelectrics,1984,60:3.
[60]李远,秦自楷,周志刚.压电与铁电材料的测量[M].北京:科学出版社,1984:38.
[61]具典淑,周智,欧进萍. PVDF压电薄膜的应变传感特性研究[J].功能材料. 2004, 7(4): 450-456
[62]白石. PVDF动态应变感知特性及其结构监测应用[D].哈尔滨工业大学硕士论文,2006:20.