基于载流子色散效应的硅基光子器件若干问题研究
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摘要
随着现代信息量的迅猛增长,单核处理器的性能已跟不上人们的需求。因此,现有的处理器大都采用多核结构,而且单片集成的多核处理器的含核数量随着时间的推移而增加。因而,如何在多核处理器之间以及核处理器与外部的存储器之间实现高效的互连成为了关键的技术。
硅是地壳中含量第二大的元素,已成为现代成熟微电子技术的基础材料。硅材料在红外波段有着良好的导波特性,同时其具有很强的载流子色散效应,弥补了没有一阶电光效应的缺陷。以Intel公司为代表的研究与研发单位已进行了卓有成效的研究工作,证实了硅基光子器件在硅基光互连和高速光通信中具有大带宽、低功耗的特性,可为解决互连和通信的瓶颈提供有效的途径。基于此,本论文对基于载流子色散效应硅基光子器件的若干问题作了探索研究。本论文主要贡献在于以下几个方面：
(1)建立起电学结构仿真模型,从物理层面上直观反映硅基光子器件电学结构对硅基光子器件光学性能的影响,改进了其分析计算方法,进而指导硅基光子器件的设计。本文通过Silvaco的器件仿真工具Atlas,对硅基光子器件的电学结构进行静态和动态仿真分析,再建立Atlas与Matlab之间的接口,结合有限差分数值方法分析计算电流引起的器件光学性能的改变,并加以实验验证,为之后的器件设计打下基础。
(2)以上述理论研究为基础,采用0.8μm工艺,设计并制作了基于pin结的硅基光开关及其阵列和模块,改善了传统MZ光开关由载流子色散效应引起,随电流增加而减小的串扰。其中,无阻塞2×2光开关阵列的串扰小于-16.1dB,支持35nm的公共带宽(1525nm-1560nm),且单个2x2MMI-MZ光开关的最小功耗仅为1.40mW。而提出的4端口双工光开关模块中任意连接两个端口的路径都不会对连接另外两个端口的路径有影响作用。该器件的串扰小于-11.8dB,支持40nm的公共带宽(1525nm-1565nm),总的功耗小于42.6mW。
(3)建立基于反向pn结的硅基微环谐振腔结构的光功能器件模型,并利用Optisystem搭建硅基高速有效传输系统的仿真平台,实现了l0Gbit/s基于硅基微环调制器不同调制格式传输系统的模拟,研究了电学结构对系统性能的影响,为实现高速较大规模集成打下了理论与实验基础。
该仿真平台同样适用其他硅基光子集成器件。
Due to the effects of increasing power consumption wire delay and memory latency, multiple processor cores on a die coupled in various ways are used in modern processor architectures to make use of data and thread-level parallelism. Photonic Networks-on-Chip (NoC) architectures and high-speed optical communications capable of achieving efficient connection among cores and memories in chip multiprocessors (CMP) are currently studying. As the prevailing technology, silicon photonics provides an attractive option for realizing low-loss, chip-scale and CMOS-compatible optical interconnects and optical communications.
So, in this thesis, silicon optical waveguide devices and systems based on the FCD effect is theoreticly and experimentally investigated. The main contributions of the thesis are as follows:
(1) In order to study how FCD effect affects the performance of the intergrated optoelectronic devices and systems, a reasonable electrical model is needed to build up. A two-demensional simulation package. Atlas from Silvaco. was employed to achieve the electrical calculations. Then according to the simulation results, FD (Finite-Difference) numerical method was adopted to calculate and analysis the changes of the equivalent refractive index、loss and field. Finally, photonic devices with the same structure were used to experimentally revise the simulation parameters.
(2) As a key component for realizing NoCs, the optical switch should have a broad bandwidth, a low crosstalk level, a fast switching speed. In this thesis, on the basis of the carrier dispersion effect and the electrical model, we designed and demonstrated the Mach-Zender-based optical swithes、optical switch matrix and optical switching module fabricated by a0.8-μm standard commercial CMOS line. The2×2non-blocking switch matrix has low crosstalk level less than-16.1dB and a common spectral bandwidth of35nm. The power consumption of the2x2switching elements is as low as1.40mW. The switching module has a crosstalk lower than-11.8dB under a common spectral bandwidth of40nm.
(3) We builded up the models of optical functional devices, which were based on the micro-ring resonator. Then, the models were employed in forming a silicon-based high-speed optical transmission system simulation platform. On this platform,10Gbit/s silicon-based optical transmission systems using different modulation formats were achieved, and the influence of the FCD in these systems were analyzed. The simulation platform is also applicable to other silicon-based integrated photonic devices.
硅是地壳中含量第二大的元素,已成为现代成熟微电子技术的基础材料。硅材料在红外波段有着良好的导波特性,同时其具有很强的载流子色散效应,弥补了没有一阶电光效应的缺陷。以Intel公司为代表的研究与研发单位已进行了卓有成效的研究工作,证实了硅基光子器件在硅基光互连和高速光通信中具有大带宽、低功耗的特性,可为解决互连和通信的瓶颈提供有效的途径。基于此,本论文对基于载流子色散效应硅基光子器件的若干问题作了探索研究。本论文主要贡献在于以下几个方面：
(1)建立起电学结构仿真模型,从物理层面上直观反映硅基光子器件电学结构对硅基光子器件光学性能的影响,改进了其分析计算方法,进而指导硅基光子器件的设计。本文通过Silvaco的器件仿真工具Atlas,对硅基光子器件的电学结构进行静态和动态仿真分析,再建立Atlas与Matlab之间的接口,结合有限差分数值方法分析计算电流引起的器件光学性能的改变,并加以实验验证,为之后的器件设计打下基础。
(2)以上述理论研究为基础,采用0.8μm工艺,设计并制作了基于pin结的硅基光开关及其阵列和模块,改善了传统MZ光开关由载流子色散效应引起,随电流增加而减小的串扰。其中,无阻塞2×2光开关阵列的串扰小于-16.1dB,支持35nm的公共带宽(1525nm-1560nm),且单个2x2MMI-MZ光开关的最小功耗仅为1.40mW。而提出的4端口双工光开关模块中任意连接两个端口的路径都不会对连接另外两个端口的路径有影响作用。该器件的串扰小于-11.8dB,支持40nm的公共带宽(1525nm-1565nm),总的功耗小于42.6mW。
(3)建立基于反向pn结的硅基微环谐振腔结构的光功能器件模型,并利用Optisystem搭建硅基高速有效传输系统的仿真平台,实现了l0Gbit/s基于硅基微环调制器不同调制格式传输系统的模拟,研究了电学结构对系统性能的影响,为实现高速较大规模集成打下了理论与实验基础。
该仿真平台同样适用其他硅基光子集成器件。
Due to the effects of increasing power consumption wire delay and memory latency, multiple processor cores on a die coupled in various ways are used in modern processor architectures to make use of data and thread-level parallelism. Photonic Networks-on-Chip (NoC) architectures and high-speed optical communications capable of achieving efficient connection among cores and memories in chip multiprocessors (CMP) are currently studying. As the prevailing technology, silicon photonics provides an attractive option for realizing low-loss, chip-scale and CMOS-compatible optical interconnects and optical communications.
So, in this thesis, silicon optical waveguide devices and systems based on the FCD effect is theoreticly and experimentally investigated. The main contributions of the thesis are as follows:
(1) In order to study how FCD effect affects the performance of the intergrated optoelectronic devices and systems, a reasonable electrical model is needed to build up. A two-demensional simulation package. Atlas from Silvaco. was employed to achieve the electrical calculations. Then according to the simulation results, FD (Finite-Difference) numerical method was adopted to calculate and analysis the changes of the equivalent refractive index、loss and field. Finally, photonic devices with the same structure were used to experimentally revise the simulation parameters.
(2) As a key component for realizing NoCs, the optical switch should have a broad bandwidth, a low crosstalk level, a fast switching speed. In this thesis, on the basis of the carrier dispersion effect and the electrical model, we designed and demonstrated the Mach-Zender-based optical swithes、optical switch matrix and optical switching module fabricated by a0.8-μm standard commercial CMOS line. The2×2non-blocking switch matrix has low crosstalk level less than-16.1dB and a common spectral bandwidth of35nm. The power consumption of the2x2switching elements is as low as1.40mW. The switching module has a crosstalk lower than-11.8dB under a common spectral bandwidth of40nm.
(3) We builded up the models of optical functional devices, which were based on the micro-ring resonator. Then, the models were employed in forming a silicon-based high-speed optical transmission system simulation platform. On this platform,10Gbit/s silicon-based optical transmission systems using different modulation formats were achieved, and the influence of the FCD in these systems were analyzed. The simulation platform is also applicable to other silicon-based integrated photonic devices.
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