高真空干泵中旋涡级内部流动及转子体振动特性的研究
摘要
近年来,随着真空技术的飞速发展及相关领域需求的提高,人们开始研制各种类型的能够代替高真空机组工作的高真空直排大气干泵,该泵可以且一部分已经应用于半导体工业、分析仪器、电子工业等各个领域。
本文以一具体的高真空直排大气干泵的设计为例,介绍了该泵的结构组成、工作原理,并主要针对其中的旋涡级进行了内部流动特性的研究。另外,由于该泵工作转速较高且为卧式结构,故有必要对该泵的转动系统进行振动特性研究,并进行适当的结构尺寸调整。
针对于结构设计部分,这里采用牵引抽气及旋涡抽气相结合的结构,传动部分采用直联内置电机的形式。
对于这里的旋涡级抽气结构,由于关于其理论及设计方法的研究目前仍不成熟,因而有必要对旋涡级(或称旋涡泵)抽气结构做近一步的研究,用研究结果来指导实际的设计工作。这部分的主要工作包括：
1.简要介绍了旋涡泵的工作原理及内部流动理论。
2.利用Pro/ENGINEER软件对旋涡泵的流动区域进行三维造型,利用流体力
学软件GAMBIT对旋涡泵内部流动区域进行结构网格划分
3.采用RNG k-ε湍流模型,利用FLUENT软件对不同设计参数的内部三维
湍流流场进行数值模型。研究了旋涡级抽气结构的内部流动规律,掌握了旋
涡泵流动区域内压力场与速度场的分布情况。
4.根据计算结果对旋涡级结构及尺寸进行了结构选型。
对于该泵转动系统的振动特性分析,由于计算对象为一装配体,故这里采用模态综合法计算其各阶的固有频率。这部分包括对模态综合法的介绍及一般求解过程,对该系统进行的模态分析,根据计算结果校验其振动特性是否满足结构要求,并进行适当的修改。
In recent years, as the vacuum technology develop fleetly and the elevation of the customs'needs, the people start to develop various types of high vacuum dry pumps, which can and already widely used in the semiconductor industry, analytical instruments, electronic industries.
Here we take the design of the high vacuum dry pump as an example, and introduced the pump's structures and its working principle, especially studied the performance of vortex. Moreover, because of the high rotating speed and its horizontal structure, it is necessary to study the rotor system's vibrancy and do some modification in dimension.
For the structure designing part,we applied holweck stage and vortex structure For the driven part I applied one axis and put the engine inside.
For the vortex structure, because of there is not enough information about its theory and designing method to catch, so it is necessary to study more of the structure, and we can use the results in designing work. For this part what I have mainly done as follows.
1. Introduced the vortex pump's working principle and flowing theory inside the channel.
2. Make the model of the flowing zone with pro/Engineer, and meshed the zone use GAMBIT.
3. Based on the RNG k-εturbulence model, use FLUENT to calculate the inner flow of vortex pump with different design parameter. Through the numerical simulation, we can study the internal flow law of vortex pump, and learn the pressure and velocity distribution in the channel.
4. Optimized the structure and the dimensions of the vortex pump based on the results.
In the study of the rotor system's vibrancy, because it is a assembly, we need to use the Component Mode Synthesis to get the natural frequency of the system. In this part we introduced what the Component Mode Synthesis is and its common process, the analysis process. At last we check the natural frequency of the system whether allowed for the design rules, if not, we got some changes.
本文以一具体的高真空直排大气干泵的设计为例,介绍了该泵的结构组成、工作原理,并主要针对其中的旋涡级进行了内部流动特性的研究。另外,由于该泵工作转速较高且为卧式结构,故有必要对该泵的转动系统进行振动特性研究,并进行适当的结构尺寸调整。
针对于结构设计部分,这里采用牵引抽气及旋涡抽气相结合的结构,传动部分采用直联内置电机的形式。
对于这里的旋涡级抽气结构,由于关于其理论及设计方法的研究目前仍不成熟,因而有必要对旋涡级(或称旋涡泵)抽气结构做近一步的研究,用研究结果来指导实际的设计工作。这部分的主要工作包括：
1.简要介绍了旋涡泵的工作原理及内部流动理论。
2.利用Pro/ENGINEER软件对旋涡泵的流动区域进行三维造型,利用流体力
学软件GAMBIT对旋涡泵内部流动区域进行结构网格划分
3.采用RNG k-ε湍流模型,利用FLUENT软件对不同设计参数的内部三维
湍流流场进行数值模型。研究了旋涡级抽气结构的内部流动规律,掌握了旋
涡泵流动区域内压力场与速度场的分布情况。
4.根据计算结果对旋涡级结构及尺寸进行了结构选型。
对于该泵转动系统的振动特性分析,由于计算对象为一装配体,故这里采用模态综合法计算其各阶的固有频率。这部分包括对模态综合法的介绍及一般求解过程,对该系统进行的模态分析,根据计算结果校验其振动特性是否满足结构要求,并进行适当的修改。
In recent years, as the vacuum technology develop fleetly and the elevation of the customs'needs, the people start to develop various types of high vacuum dry pumps, which can and already widely used in the semiconductor industry, analytical instruments, electronic industries.
Here we take the design of the high vacuum dry pump as an example, and introduced the pump's structures and its working principle, especially studied the performance of vortex. Moreover, because of the high rotating speed and its horizontal structure, it is necessary to study the rotor system's vibrancy and do some modification in dimension.
For the structure designing part,we applied holweck stage and vortex structure For the driven part I applied one axis and put the engine inside.
For the vortex structure, because of there is not enough information about its theory and designing method to catch, so it is necessary to study more of the structure, and we can use the results in designing work. For this part what I have mainly done as follows.
1. Introduced the vortex pump's working principle and flowing theory inside the channel.
2. Make the model of the flowing zone with pro/Engineer, and meshed the zone use GAMBIT.
3. Based on the RNG k-εturbulence model, use FLUENT to calculate the inner flow of vortex pump with different design parameter. Through the numerical simulation, we can study the internal flow law of vortex pump, and learn the pressure and velocity distribution in the channel.
4. Optimized the structure and the dimensions of the vortex pump based on the results.
In the study of the rotor system's vibrancy, because it is a assembly, we need to use the Component Mode Synthesis to get the natural frequency of the system. In this part we introduced what the Component Mode Synthesis is and its common process, the analysis process. At last we check the natural frequency of the system whether allowed for the design rules, if not, we got some changes.
引文
1.黄丹,翟斌.新型全干式特种真空泵市场潜力巨大,中国新技术新产品精选,2006.4
2.徐成海等.干式机械真空泵及其应用[J],真空电子技术,2002,4
3.姜燮昌等.21世纪真空获得技术的展望[J],通用机械,2002,Z1
4.刘坤,巴德纯,杨乃恒等.国外高真空直排大气干泵的发展现状,2007年全国真空冶金与表面工程学术会议论文摘要集[J],2007.
5. M. Raheel, A. Engeda,D. Hamrin, G. Rouse. The performance characteristics of single-stage and multistage regenerative flow compressors for natural gas compression application [J], Mechanical Engineering Science,2003,217: 1221-1239.
6. Martin Bijker ect., Easy vacuum solution for the load locks in the DEPx coating system, SEMICONDUCTOR FABTECH,27th edition
7. A. Engeda, Y. Elkacimi. A regenerative flow compressor as a secondary air pump for engine emission control [J], Mechanical Engineering Science,2008,222: 1707-1715.
8.刘相臣,王军义.旋涡气泵及其应用[J],化工进展,1991,30-32
9.谢鹏,朱祖超,偶国富,崔宝玲.小流量高扬程离心旋涡泵的设计与试验研究[J],流体机械,2007,35(8):1-4.
10.朱祖超,王乐勤.小流量旋涡泵的理论设计与试验研究[J],浙江：工程热物理学报,2001.7
11.董颖,施卫东.旋涡泵的研究现状与发展趋势,江苏：农机化研究,2004.5.
12. J.W. Song, M. Raheel, A. Engeda. A compressible flow theory for regenerative compressors with aerofoil blades [J], Mechanical Engineering Science,2003,1241-1257.
13. Mukarrum Raheel, Abraham Engeda. Performance Characteristics of Regenerative Flow Compressors for Natural Gas Compression Application[J], Journal of Energy Resources Technology,2005.127 (7)
14.王继常.真空系统设计[M].东北大学.2002
15.薛祖绳,周云龙.工程流体力学[M],北京：中国电力出版社,1997,61-65.
16.王福军.计算流体动力学分析[M].清华大学出版社.2004
17.李志辉,张涵信.稀薄流到连续流的气体运动论模型方程算法研究[J],力学学报,2002,34(2)：145-1 55.
18. H.K.Versteeg,W.Malalasekera, An Introduction to Computational Fluid Dynamics:The Finite Volume Method[J]. Wiley, New York,1995
19. Fluent Inc., FLUENT User's Guide. Fluent Inc.,2003
20. S.V.Patankar,传热和流体流动的数值方法[M],安徽科学技术出版社,1982,23-39.
21. PFEIFFER VACUUM,OnTool Booster Operating Instructions
22.王瑞金,张凯,王刚.FLUENT技术基础及应用实例[M],北京：清华大学出版社,2007.2,49-54.
23.张晓嘉,CIMS环境下柴油机螺旋进气道的CFD分析[D],昆明理工大学,2002.3
24.李忠.轴流泵内部流场数值模拟及实验研究[D],江苏大学,2007
25.陶文铨,数值传热学(第二版)[M],西安交通大学出版社,2001,207-231.
26. Bai.L, Mitra. N. K, Fibig. M, Kost.A. A multigrid method for predicting periodically fully developed flow[J]. Int J Number Methods Fluids,1994, 843-852.
27.周文彬,旋涡泵叶片形状对内部流动及能量性能影响的研究[D],江苏大学流体机械工程技术研究中心,2008,11-12.
28.董颖,施卫东,汪永志.旋涡泵的内部流动研究[J],水泵技术,2004.1
29. Badami, M. Theoretical and experimental analysis of traditional and new periphery pumps [J]. SAE Technical Paper Series, no.971074,1997,45-55.
30.韩占忠,王敬,兰小平.流体工程仿真计算实例与应用[M],北京：北京理工大学出版社,2004,5-6.
31. Wilson, W.A., Santalo, M.A. and Oelrich, J.A.A theory of the fluid-dynamic mechanism of regenerative pumps[J]. Trans. ASME,1955,77,1303-1316.
32. Grabow, G. Influence of the number of vanes and vane angle on the suction behavior of regenerative pumps[J]. Second conference on flow Machines, October 1966,147-166.
33.董颖,旋涡泵的性能研究[D],江苏大学,2003
34. Dewitt,D.P. Rational design and development of the regenerative pump. MS thesis, MIT,1957.
35. Sixsmith, H. and Altmann, H. A Regenerative compressor. Trans. ASME J. Engng for Industry,1977,99,637-647.
36. Senoo, Y. A comparison of regenerative pump theories supported by new performance data. Trans. ASME,1956,78,1091-1102.
37. G. C. Horner and W. D. Pilkey, The Riccati Transfer matrix method[J], Des.Trans ASME,1978,100:297-302
38. N. O. Myklested, A new method for calculating natural modes of uncoupled bending vibration of airplane wings and other types of beam[J], Aero Science,1944,11:153-162
39. M. A. Prohl, Ageneral method for calculating critical speed of flexible rotors[J], Mech.Trans.ASME,1945,12(8):142-148
40.张义民.机械振动[M],清华大学出版社,2007
41.沈鸿等.机械工程手册[M],机械工业出版社,1982:21-68,21-70
42.张义民.机械振动力学[M],吉林科学技术出版社,2000
43.杜平安,甘娥忠,于亚婷.有限元法—原理、建模及应用[M],北京：国防工业出版社,2004:20-26
44.易日.使用ANSYS6.1进行结构力学分析[M],北京大学出版社,2002:305-318
45.许明财.ANSYS模态综合法技术[J],数字化设计Digital Design,2005:90-92
46.殷学刚,等.结构振动分析的子结构方法[M],中国铁道出版社1991.
47.王文亮,杜作润.结构振动与动态子结构方法[M],上海：复旦大学出版社1985.
48.周海亭,陈莲.子结构方法在ANSYS软件中的应用[J],噪声与振动控制,2001.8
49.宋景涛,方明霞.模态综合法在ANSYS中的应用[J],计算机辅助工程,2007.9,1 6(3)：145-148.
50. T. Meakhail, S. O. Park. An improved theory for regenerative pump performance [J], Power and Energy,2005,213-221.
51. J W Song, A Engeda, M K Chung. A modified theory for the flow mechanism in a regenerative flow pump[J], J. Power and Energy,2003,311-321
2.徐成海等.干式机械真空泵及其应用[J],真空电子技术,2002,4
3.姜燮昌等.21世纪真空获得技术的展望[J],通用机械,2002,Z1
4.刘坤,巴德纯,杨乃恒等.国外高真空直排大气干泵的发展现状,2007年全国真空冶金与表面工程学术会议论文摘要集[J],2007.
5. M. Raheel, A. Engeda,D. Hamrin, G. Rouse. The performance characteristics of single-stage and multistage regenerative flow compressors for natural gas compression application [J], Mechanical Engineering Science,2003,217: 1221-1239.
6. Martin Bijker ect., Easy vacuum solution for the load locks in the DEPx coating system, SEMICONDUCTOR FABTECH,27th edition
7. A. Engeda, Y. Elkacimi. A regenerative flow compressor as a secondary air pump for engine emission control [J], Mechanical Engineering Science,2008,222: 1707-1715.
8.刘相臣,王军义.旋涡气泵及其应用[J],化工进展,1991,30-32
9.谢鹏,朱祖超,偶国富,崔宝玲.小流量高扬程离心旋涡泵的设计与试验研究[J],流体机械,2007,35(8):1-4.
10.朱祖超,王乐勤.小流量旋涡泵的理论设计与试验研究[J],浙江：工程热物理学报,2001.7
11.董颖,施卫东.旋涡泵的研究现状与发展趋势,江苏：农机化研究,2004.5.
12. J.W. Song, M. Raheel, A. Engeda. A compressible flow theory for regenerative compressors with aerofoil blades [J], Mechanical Engineering Science,2003,1241-1257.
13. Mukarrum Raheel, Abraham Engeda. Performance Characteristics of Regenerative Flow Compressors for Natural Gas Compression Application[J], Journal of Energy Resources Technology,2005.127 (7)
14.王继常.真空系统设计[M].东北大学.2002
15.薛祖绳,周云龙.工程流体力学[M],北京：中国电力出版社,1997,61-65.
16.王福军.计算流体动力学分析[M].清华大学出版社.2004
17.李志辉,张涵信.稀薄流到连续流的气体运动论模型方程算法研究[J],力学学报,2002,34(2)：145-1 55.
18. H.K.Versteeg,W.Malalasekera, An Introduction to Computational Fluid Dynamics:The Finite Volume Method[J]. Wiley, New York,1995
19. Fluent Inc., FLUENT User's Guide. Fluent Inc.,2003
20. S.V.Patankar,传热和流体流动的数值方法[M],安徽科学技术出版社,1982,23-39.
21. PFEIFFER VACUUM,OnTool Booster Operating Instructions
22.王瑞金,张凯,王刚.FLUENT技术基础及应用实例[M],北京：清华大学出版社,2007.2,49-54.
23.张晓嘉,CIMS环境下柴油机螺旋进气道的CFD分析[D],昆明理工大学,2002.3
24.李忠.轴流泵内部流场数值模拟及实验研究[D],江苏大学,2007
25.陶文铨,数值传热学(第二版)[M],西安交通大学出版社,2001,207-231.
26. Bai.L, Mitra. N. K, Fibig. M, Kost.A. A multigrid method for predicting periodically fully developed flow[J]. Int J Number Methods Fluids,1994, 843-852.
27.周文彬,旋涡泵叶片形状对内部流动及能量性能影响的研究[D],江苏大学流体机械工程技术研究中心,2008,11-12.
28.董颖,施卫东,汪永志.旋涡泵的内部流动研究[J],水泵技术,2004.1
29. Badami, M. Theoretical and experimental analysis of traditional and new periphery pumps [J]. SAE Technical Paper Series, no.971074,1997,45-55.
30.韩占忠,王敬,兰小平.流体工程仿真计算实例与应用[M],北京：北京理工大学出版社,2004,5-6.
31. Wilson, W.A., Santalo, M.A. and Oelrich, J.A.A theory of the fluid-dynamic mechanism of regenerative pumps[J]. Trans. ASME,1955,77,1303-1316.
32. Grabow, G. Influence of the number of vanes and vane angle on the suction behavior of regenerative pumps[J]. Second conference on flow Machines, October 1966,147-166.
33.董颖,旋涡泵的性能研究[D],江苏大学,2003
34. Dewitt,D.P. Rational design and development of the regenerative pump. MS thesis, MIT,1957.
35. Sixsmith, H. and Altmann, H. A Regenerative compressor. Trans. ASME J. Engng for Industry,1977,99,637-647.
36. Senoo, Y. A comparison of regenerative pump theories supported by new performance data. Trans. ASME,1956,78,1091-1102.
37. G. C. Horner and W. D. Pilkey, The Riccati Transfer matrix method[J], Des.Trans ASME,1978,100:297-302
38. N. O. Myklested, A new method for calculating natural modes of uncoupled bending vibration of airplane wings and other types of beam[J], Aero Science,1944,11:153-162
39. M. A. Prohl, Ageneral method for calculating critical speed of flexible rotors[J], Mech.Trans.ASME,1945,12(8):142-148
40.张义民.机械振动[M],清华大学出版社,2007
41.沈鸿等.机械工程手册[M],机械工业出版社,1982:21-68,21-70
42.张义民.机械振动力学[M],吉林科学技术出版社,2000
43.杜平安,甘娥忠,于亚婷.有限元法—原理、建模及应用[M],北京：国防工业出版社,2004:20-26
44.易日.使用ANSYS6.1进行结构力学分析[M],北京大学出版社,2002:305-318
45.许明财.ANSYS模态综合法技术[J],数字化设计Digital Design,2005:90-92
46.殷学刚,等.结构振动分析的子结构方法[M],中国铁道出版社1991.
47.王文亮,杜作润.结构振动与动态子结构方法[M],上海：复旦大学出版社1985.
48.周海亭,陈莲.子结构方法在ANSYS软件中的应用[J],噪声与振动控制,2001.8
49.宋景涛,方明霞.模态综合法在ANSYS中的应用[J],计算机辅助工程,2007.9,1 6(3)：145-148.
50. T. Meakhail, S. O. Park. An improved theory for regenerative pump performance [J], Power and Energy,2005,213-221.
51. J W Song, A Engeda, M K Chung. A modified theory for the flow mechanism in a regenerative flow pump[J], J. Power and Energy,2003,311-321