高精度线性衍射光栅干涉仪系统的研制
|
摘要
随着微电子产业的发展,对在长行程范围内具有微米级甚至纳米级分辨率的定位系统的要求愈发迫切,工业界中应用较多的是各类激光干涉仪,虽然激光干涉仪具有高精度,高分辨率,测量范围大的优点,但是其价格昂贵且测量精度易受环境的影响。于是开发具有微型化、高分辨率、低成本、易使用等优点的位移传感器,是计量学中一个重要的课题。
本文提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率。由于光栅干涉仪测量系统以精密光栅栅距作为测量基准,相对于传统干涉仪,光栅尺系统受环境因素所造成的测量误差影响较小。
光学架构上,本光学尺利用偏振光学元件,能大幅改善光栅与光学读数头之间的对位公差;避免了零级衍射光的回馈,提高了光学尺输出的信噪比。
本文也同时开发出一套信号处理流程。经由信号处理电路,可有效补偿因光学元件调整不当或光栅之偏摆所造成的不完美正交信号。
整合本论文创新之光学架构、光学量测原理、信号处理等成果,最后提出一简易流程进行光学读数头之调校与组装,在光学平台上完成微小化线性衍射式光学尺系统的制作。通过与HP5529比对,本光学尺系统在全行程15mm行程范围内,测量结果的标准差优于20nm。
As the development of micro-electronics industry, it is exigent of the position system with micrometer-to-nanometer resolution in large stroke. Laser interferometers are most commonly adopted. Though laser interferometer with high accuracy, high resolution and long measurement range, it's so expensive and the change of the environment should seriously influence the measurement accuracy. Thus, the need to develop compact, high resolution, low cost and easy-to-use displacement sensors is becoming even more indispensable in metrology.A new miniature laser diffraction grating interferometer is developed in this thesis. According to the theory of grating diffraction and polarization optics, associating with the decoding phase theory of quadrature signal, to make the system achieve nanometer resolution. Because of the measurement standard of grating system is the precision grating pitch, compared to usual interferometer, the diffractive grating system reduce the environment influences on measurement accuracy.On the optical frame, the use of polarized optical components can improve the head-to-scale tolerance substantiall,. Furthermore, it can avoid the feedback of the zero-order diffraction beam so as to improve the SNR of the encoder output.A series of signal processing procedure is also developed in this thesis. Errors in quadrature signals caused by misalignment of optical components or the oscillating of the grating can be compensated through the signal processing circuits.After the miniature optical design, measurement principles, signal processing were integrated, the compact laser diffraction encoder system was accomplished through several simple and easy adjustment and fabrication steps in an optical table. Calibration experiment between grating interferometer and HP5529 has implemented, the results show the optical encoder's standard deviation is less than 20nm in the travel of 15mm.
本文提出了一种新型的激光衍射光栅干涉仪测量系统,以光栅衍射原理和偏振光学为理论基础,配合正交信号的解相位细分原理,使得该系统可以达到纳米级分辨率。由于光栅干涉仪测量系统以精密光栅栅距作为测量基准,相对于传统干涉仪,光栅尺系统受环境因素所造成的测量误差影响较小。
光学架构上,本光学尺利用偏振光学元件,能大幅改善光栅与光学读数头之间的对位公差;避免了零级衍射光的回馈,提高了光学尺输出的信噪比。
本文也同时开发出一套信号处理流程。经由信号处理电路,可有效补偿因光学元件调整不当或光栅之偏摆所造成的不完美正交信号。
整合本论文创新之光学架构、光学量测原理、信号处理等成果,最后提出一简易流程进行光学读数头之调校与组装,在光学平台上完成微小化线性衍射式光学尺系统的制作。通过与HP5529比对,本光学尺系统在全行程15mm行程范围内,测量结果的标准差优于20nm。
As the development of micro-electronics industry, it is exigent of the position system with micrometer-to-nanometer resolution in large stroke. Laser interferometers are most commonly adopted. Though laser interferometer with high accuracy, high resolution and long measurement range, it's so expensive and the change of the environment should seriously influence the measurement accuracy. Thus, the need to develop compact, high resolution, low cost and easy-to-use displacement sensors is becoming even more indispensable in metrology.A new miniature laser diffraction grating interferometer is developed in this thesis. According to the theory of grating diffraction and polarization optics, associating with the decoding phase theory of quadrature signal, to make the system achieve nanometer resolution. Because of the measurement standard of grating system is the precision grating pitch, compared to usual interferometer, the diffractive grating system reduce the environment influences on measurement accuracy.On the optical frame, the use of polarized optical components can improve the head-to-scale tolerance substantiall,. Furthermore, it can avoid the feedback of the zero-order diffraction beam so as to improve the SNR of the encoder output.A series of signal processing procedure is also developed in this thesis. Errors in quadrature signals caused by misalignment of optical components or the oscillating of the grating can be compensated through the signal processing circuits.After the miniature optical design, measurement principles, signal processing were integrated, the compact laser diffraction encoder system was accomplished through several simple and easy adjustment and fabrication steps in an optical table. Calibration experiment between grating interferometer and HP5529 has implemented, the results show the optical encoder's standard deviation is less than 20nm in the travel of 15mm.
引文
[1] 林德教,蒋弘,殷纯永,光栅多普勒纳米干涉仪,中国激光,Vol A 27,No.12,(2000).
[2] 卢国钢,现代光栅测量技术,世界制造技术与装备,No.5,(2002)。
[3] Ishii, S., Nishimura, T., Ishizuka, K. and Tsukiji, M, "Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement." U. S. Patent No. 4912320, (1990).
[4] Nishimura, T., Kubota, Y., Ishii, S., Ishizuka, S. and Tsukiji, M., "Encoder incorporating a displaceable diffraction grating," U. S. Patent No. 5038032, (1991).
[5] Ishizuka, K. and Nishimura, T. "Encoder with high resolving power and accuracy," U. S. Patent No. 54164085, (1992).
[6] Dobosz, M. "Application of a divergent laser beam in a grating interferometer for high-resolution displacement measurements," Opt. Eng., 33(3), 897-901, (1994).
[7] Dobosz, M. (1994b), "New style probe with interferometric transducer for surface roughness and form profiling," Opt. Eng., 33(3), 902-907,(1994).
[8] Chiang, W. W. and Lee, C. K., "Wavefront reconstruction optics for use in disk drive position measurement system," U. S. Patent No. 5442172, (1995).
[9] D. H. Mollenhauer, P. G. Ifju, B. Han, "A compact, robust and versatile Moire interferometer," Optics and Lasers in Engineering, 23(1), 29-40, (1995).
[10] 贝斯特,江文威,西兹勒,哈恩及李世光,“用于资料记录磁盘驱动器中之伺服写入系统”,中华民国发明专利,第256914号,(1996)。
[11] Mitchell, D. K. and Thorbum, G., "Apparatus for detecting relative movement wherein a detecting means is positioned in the region of 125 naturnal interference," U. S. Patent No. 5486923, (1996).
[12] Sawada, R., Higurashi, E., Ito, T., Ohguchi, O. and Tsubamoto, M., "Monolithic-integrated microlaser encoder," Appl. Opt, 38(33), 6866-6872, (1999).
[13] Kuroda, A., "Optical displacement measurement system for detecting the relative movement of a machine part," U. S. Patent No. 6166817,(2000).
[14] 苏宗德,超精密绕射干涉接触式探头及系统之研制,国立台湾大学机 械工程学研究所硕士论文,(1998)。
[15] 蓝启峰,以FPGA发展电子细分割及其于光栅干涉仪之应用,国立台湾大学机械工程研究所硕士论文,(1999)。
[16] 吴干埼,绕射式雷射光学尺之研制,国立台湾大学应用力学研究所博士论文,(2001)。
[17] 郭军、王选择、谢铁邦,“一种二维测长单元”,实用新型专利,授权公告号:CN 2599256Y,(2004)。
[18] 高清芬、张中柱、李世光,“一种共轭光路式二维位移量测方法”,中华民国发明专利第479125号,(2002)。
[19] 沈欣懋,高对位公差之微小化雷射绕射式光学尺系统的研制,国力台湾大学机械工程研究所硕士论文,(2005)。
[20] 郁道银,谈恒英,《工程光学》,机械工业出版社,(2002),267-268。
[21] 朱志良,奈米级三次元量测仪之研制,国力台湾大学机械工程研究所博士论文,2002。
[22] 王文生,《干涉测试技术》,兵器工业出版社,(1992)。
[23] 殷纯永,《现代干涉测量技术》,天津大学出版社,(1999)。
[24] 程晓辉,赵洋,李达成,光学纳米测量方法及发展趋势,光学技术,NO.3,1999,73-77。
[25] 廖延彪,《偏振光学》,科学出版社,(2003),49-57。
[26] 阎吉祥,魏光辉,《矩阵光学》,兵器工业出版社,(1995),144-145
[27] 新谷隆一等著,《偏振光》,原子能出版社,(1994),3-5
[28] 祝绍箕,邹海兴,包学诚,郭厚林编著,《衍射光栅》,机械工业出版社,(1986)。
[29] 王庆有主编,《光电技术》,电子工业出版社,(2005),80-81。
[30] 齐永岳,赵美蓉,林玉池,二维纳米激光测量系统的研究,纳米技术与精密工程,Vol.2,No4,(2004),257-260。
[31] 张国雄,沈生培,《精密仪器电路》,机械工业出版社,(1988),46-47。
[32] 张辉等编著,《Motorola单片机应用技术》,北京航空航天大学出版社,(1999)。
[33] 吴良斌,高玉良,李延辉,《现代电子系统的电磁兼容性设计》,国防工业出版社,(2004),88-89。
[34] FAN Kuang-chao, CHENG Fang, CHEN Ye-jin, Nanopositioning Control on a Commercial Linear Stage by Software Error Correction, Vol.4, No. 1,(2006).
[35] K C Fan, Y T Fei, X F Yu et al. Development of a low-cost micro-CMM for
?3D micro/nano measurements. Measurement Science and Technology, (2006), 17:524-532
[2] 卢国钢,现代光栅测量技术,世界制造技术与装备,No.5,(2002)。
[3] Ishii, S., Nishimura, T., Ishizuka, K. and Tsukiji, M, "Optical type encoder including diffraction grating for producing interference fringes that are processed to measure displacement." U. S. Patent No. 4912320, (1990).
[4] Nishimura, T., Kubota, Y., Ishii, S., Ishizuka, S. and Tsukiji, M., "Encoder incorporating a displaceable diffraction grating," U. S. Patent No. 5038032, (1991).
[5] Ishizuka, K. and Nishimura, T. "Encoder with high resolving power and accuracy," U. S. Patent No. 54164085, (1992).
[6] Dobosz, M. "Application of a divergent laser beam in a grating interferometer for high-resolution displacement measurements," Opt. Eng., 33(3), 897-901, (1994).
[7] Dobosz, M. (1994b), "New style probe with interferometric transducer for surface roughness and form profiling," Opt. Eng., 33(3), 902-907,(1994).
[8] Chiang, W. W. and Lee, C. K., "Wavefront reconstruction optics for use in disk drive position measurement system," U. S. Patent No. 5442172, (1995).
[9] D. H. Mollenhauer, P. G. Ifju, B. Han, "A compact, robust and versatile Moire interferometer," Optics and Lasers in Engineering, 23(1), 29-40, (1995).
[10] 贝斯特,江文威,西兹勒,哈恩及李世光,“用于资料记录磁盘驱动器中之伺服写入系统”,中华民国发明专利,第256914号,(1996)。
[11] Mitchell, D. K. and Thorbum, G., "Apparatus for detecting relative movement wherein a detecting means is positioned in the region of 125 naturnal interference," U. S. Patent No. 5486923, (1996).
[12] Sawada, R., Higurashi, E., Ito, T., Ohguchi, O. and Tsubamoto, M., "Monolithic-integrated microlaser encoder," Appl. Opt, 38(33), 6866-6872, (1999).
[13] Kuroda, A., "Optical displacement measurement system for detecting the relative movement of a machine part," U. S. Patent No. 6166817,(2000).
[14] 苏宗德,超精密绕射干涉接触式探头及系统之研制,国立台湾大学机 械工程学研究所硕士论文,(1998)。
[15] 蓝启峰,以FPGA发展电子细分割及其于光栅干涉仪之应用,国立台湾大学机械工程研究所硕士论文,(1999)。
[16] 吴干埼,绕射式雷射光学尺之研制,国立台湾大学应用力学研究所博士论文,(2001)。
[17] 郭军、王选择、谢铁邦,“一种二维测长单元”,实用新型专利,授权公告号:CN 2599256Y,(2004)。
[18] 高清芬、张中柱、李世光,“一种共轭光路式二维位移量测方法”,中华民国发明专利第479125号,(2002)。
[19] 沈欣懋,高对位公差之微小化雷射绕射式光学尺系统的研制,国力台湾大学机械工程研究所硕士论文,(2005)。
[20] 郁道银,谈恒英,《工程光学》,机械工业出版社,(2002),267-268。
[21] 朱志良,奈米级三次元量测仪之研制,国力台湾大学机械工程研究所博士论文,2002。
[22] 王文生,《干涉测试技术》,兵器工业出版社,(1992)。
[23] 殷纯永,《现代干涉测量技术》,天津大学出版社,(1999)。
[24] 程晓辉,赵洋,李达成,光学纳米测量方法及发展趋势,光学技术,NO.3,1999,73-77。
[25] 廖延彪,《偏振光学》,科学出版社,(2003),49-57。
[26] 阎吉祥,魏光辉,《矩阵光学》,兵器工业出版社,(1995),144-145
[27] 新谷隆一等著,《偏振光》,原子能出版社,(1994),3-5
[28] 祝绍箕,邹海兴,包学诚,郭厚林编著,《衍射光栅》,机械工业出版社,(1986)。
[29] 王庆有主编,《光电技术》,电子工业出版社,(2005),80-81。
[30] 齐永岳,赵美蓉,林玉池,二维纳米激光测量系统的研究,纳米技术与精密工程,Vol.2,No4,(2004),257-260。
[31] 张国雄,沈生培,《精密仪器电路》,机械工业出版社,(1988),46-47。
[32] 张辉等编著,《Motorola单片机应用技术》,北京航空航天大学出版社,(1999)。
[33] 吴良斌,高玉良,李延辉,《现代电子系统的电磁兼容性设计》,国防工业出版社,(2004),88-89。
[34] FAN Kuang-chao, CHENG Fang, CHEN Ye-jin, Nanopositioning Control on a Commercial Linear Stage by Software Error Correction, Vol.4, No. 1,(2006).
[35] K C Fan, Y T Fei, X F Yu et al. Development of a low-cost micro-CMM for
?3D micro/nano measurements. Measurement Science and Technology, (2006), 17:524-532