面向显示基于MEMS光栅光调制器光学分析和实验
摘要
投影显示器件正向多元化方向发展,随着MEMS技术的成熟,使得面向显示基于MEMS的光调制器已成为世界各国研发的热点,其中部分产品已经进入市场,以其优异的性能成为带动下一代显示产业发展的一个重要分支。但国内对这类器件研究较晚,且受到国外专利限制,因此开发一种具有自主知识产权的面向显示基于MEMS技术的光调制器具有重要的科学意义和潜在的应用价值。
本文在综述国内外面向显示基于MEMS光调制器的基础上,首次提出了基于MEMS的反射镜平动式光栅光调制器(RMGLM)和光栅平动式光调制器(GMLM)。对这两种调制器建立了理论模型,并利用标量衍射理论进行了光学分析和仿真;设计了器件的结构参数;结合协作单位的工艺平台,对关键参数进行了优化;讨论了加工误差对器件性能的影响;对光栅平动式光调制器进行了工艺研究和加工制作;提出了一种测量微小间距的非接触的波长扫描式光谱分析方法;同时进行了GMLM衍射实验和光学处理系统实验研究。具体研究内容如下:
①通过分析基于MEMS光调制器及其相关研究的现状,指出了目前基于MEMS光调制器存在的问题,提出了本论文的研究工作要点。
②分析了基于MEMS光栅光调制器显示系统,表明光栅光调制器的性能决定着显示系统的关键性能,是显示系统的核心器件。
③首次提出了反射镜平动式光栅光调制器的基本结构;利用标量衍射理论,分析了反射镜平动式光栅光调制器的光学原理。
④首次提出了光栅平动式光调制器的基本结构,GMLM主要依靠可动光栅和下反射镜之间的间距变化来实现光调制作用;建立光学模型,利用标量衍射理论进行了器件单象素和面阵结构的光学原理分析,理论分析与CoventorWare仿真结果一致;重点讨论了光栅平动式光调制器的几何参数、可动光栅和下反射面间距、加工误差等对对比度的影响。采用不等厚光栅边距、正方形电极、阶梯型电极、减薄悬臂梁,分别将可动光栅的有效光学面积由约50%提高至60%,70%,75%,85%。
⑤在4f系统中分析了GMLM单象素、GMLM面阵在物面、频谱面和像面的分布情况。分析表明:要得到高的对比度和图像占空比,结构上需满足可动光栅占空比为0.5和减小边框和悬臂梁的尺寸。
⑥确定GMLM的加工几何参数,单象素的面积为52×52μm~2。制作了4×4,2×16,16×16GMLM阵列测试样品。提出了采用非接触的波长扫描式光谱分析方法测量GMLM器件可动光栅上表面和下反射镜之间的微小距离,测试结果与采用
Projection display devices are undergoing a period of muti-development, and with the maturation of MEMS technology, which leads to MEMS-based light modulators for display applications has become one of the research focuses, such as Digital Micromirror Devices, Thin-film Micromirror Array and Grating Light Valve. DMD has entered into the market and as an important branch has promoted the next generation display industry for its merits. But domestic research on these devices is relatively lagged and restricted by international patents, so it is a great importance and potential value to develop a novel MEMS-based light modulator for display applications with independent intellectual property rights.
In this paper, two MEMS-based grating light modulators (Reflector Moving Grating Light Modulator and Grating Moving Light Modulator) were proposed, after the review of literature about MEMS-based light modulators in domestic and abroad was summarized. Their theoretical models were developed and validated by scalar diffraction theory. Especially, the influence of structural parameters and manufacture error were in details analyzed and simulated. The 4×4, 2×16 and 16×16 Grating Moving Light Modulator(GMLM) arrays have been manufactured. A non-contact wavelength scanning spectrum analysis method was put forward to measure vertical distance. Diffraction and signal processing experiments were carried on. The main works of this paper are follows:
①After summarizing the review of literature about MEMS-based light modulator in domestic and abroad, novel MEMS-based light modulators were put forward.
②The display system of grating light modulator was analyzed, which indicates that the grating light modulator is the core part of display system.
③The structure of Reflector Moving Grating Light Modulator (RMGLM) was first introduced and optical principle using scalar diffraction theory was in details analyzed and simulated by Coventor software.
④The structure of Grating Moving Light Modulator was first put forward. Optical principle of single GMLM pixel and GMLM array, the relationship between important parameters and contrast ratio were analyzed and simulated. The manufacture error was discussed. The geometrical parameters of GMLM were achieved. The methods of using different thickness of grating margin, foursquare electrode, laddering
本文在综述国内外面向显示基于MEMS光调制器的基础上,首次提出了基于MEMS的反射镜平动式光栅光调制器(RMGLM)和光栅平动式光调制器(GMLM)。对这两种调制器建立了理论模型,并利用标量衍射理论进行了光学分析和仿真;设计了器件的结构参数;结合协作单位的工艺平台,对关键参数进行了优化;讨论了加工误差对器件性能的影响;对光栅平动式光调制器进行了工艺研究和加工制作;提出了一种测量微小间距的非接触的波长扫描式光谱分析方法;同时进行了GMLM衍射实验和光学处理系统实验研究。具体研究内容如下:
①通过分析基于MEMS光调制器及其相关研究的现状,指出了目前基于MEMS光调制器存在的问题,提出了本论文的研究工作要点。
②分析了基于MEMS光栅光调制器显示系统,表明光栅光调制器的性能决定着显示系统的关键性能,是显示系统的核心器件。
③首次提出了反射镜平动式光栅光调制器的基本结构;利用标量衍射理论,分析了反射镜平动式光栅光调制器的光学原理。
④首次提出了光栅平动式光调制器的基本结构,GMLM主要依靠可动光栅和下反射镜之间的间距变化来实现光调制作用;建立光学模型,利用标量衍射理论进行了器件单象素和面阵结构的光学原理分析,理论分析与CoventorWare仿真结果一致;重点讨论了光栅平动式光调制器的几何参数、可动光栅和下反射面间距、加工误差等对对比度的影响。采用不等厚光栅边距、正方形电极、阶梯型电极、减薄悬臂梁,分别将可动光栅的有效光学面积由约50%提高至60%,70%,75%,85%。
⑤在4f系统中分析了GMLM单象素、GMLM面阵在物面、频谱面和像面的分布情况。分析表明:要得到高的对比度和图像占空比,结构上需满足可动光栅占空比为0.5和减小边框和悬臂梁的尺寸。
⑥确定GMLM的加工几何参数,单象素的面积为52×52μm~2。制作了4×4,2×16,16×16GMLM阵列测试样品。提出了采用非接触的波长扫描式光谱分析方法测量GMLM器件可动光栅上表面和下反射镜之间的微小距离,测试结果与采用
Projection display devices are undergoing a period of muti-development, and with the maturation of MEMS technology, which leads to MEMS-based light modulators for display applications has become one of the research focuses, such as Digital Micromirror Devices, Thin-film Micromirror Array and Grating Light Valve. DMD has entered into the market and as an important branch has promoted the next generation display industry for its merits. But domestic research on these devices is relatively lagged and restricted by international patents, so it is a great importance and potential value to develop a novel MEMS-based light modulator for display applications with independent intellectual property rights.
In this paper, two MEMS-based grating light modulators (Reflector Moving Grating Light Modulator and Grating Moving Light Modulator) were proposed, after the review of literature about MEMS-based light modulators in domestic and abroad was summarized. Their theoretical models were developed and validated by scalar diffraction theory. Especially, the influence of structural parameters and manufacture error were in details analyzed and simulated. The 4×4, 2×16 and 16×16 Grating Moving Light Modulator(GMLM) arrays have been manufactured. A non-contact wavelength scanning spectrum analysis method was put forward to measure vertical distance. Diffraction and signal processing experiments were carried on. The main works of this paper are follows:
①After summarizing the review of literature about MEMS-based light modulator in domestic and abroad, novel MEMS-based light modulators were put forward.
②The display system of grating light modulator was analyzed, which indicates that the grating light modulator is the core part of display system.
③The structure of Reflector Moving Grating Light Modulator (RMGLM) was first introduced and optical principle using scalar diffraction theory was in details analyzed and simulated by Coventor software.
④The structure of Grating Moving Light Modulator was first put forward. Optical principle of single GMLM pixel and GMLM array, the relationship between important parameters and contrast ratio were analyzed and simulated. The manufacture error was discussed. The geometrical parameters of GMLM were achieved. The methods of using different thickness of grating margin, foursquare electrode, laddering
引文
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