基于SU-8微透镜及其阵列制造方法
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摘要
透镜是构成光路系统中基本而又重要的光学元件，它属于被动光学元件，用来汇聚、发散、准直光辐射。透镜阵列是由相同的透镜按一定的顺序排列在一个平面上形成的。传统的透镜体积比较大，属于折射型光学元件，然而，随着MOEMS（微光机电系统）技术的兴起，当前的仪器已经开始朝着光、机、电集成的方向发展，用传统方法制作出来的透镜已满足不了当今科技发展的需求。
与球面透镜相比，非球面透镜具有消除像差、成像良好等特点而受到广泛关注，本文在加工球面透镜的基础上设计了非球面透镜的掩模板并对其进行加工。
本文首先用光学设计软件ZEMAX对球面透镜与非球面透镜进行了光线追迹，初步模拟出球面透镜与非球面透镜的像差图，从理论上分析其光线传输特性。
本文使用SU-8作为光刻胶，采用光刻原理，尤其是斜曝光原理，加工出了主光轴平行于衬底的微透镜及其透镜阵列，单个微透镜的直径可达到300微米。由于SU-8并不是很好的光学材料，本文以SU-8微透镜及其阵列作为母模，用PDMS作为中间模具，最后用一种优质的光学材料（NOA73）进行大量低成本微复制，加工出了光学性能良好的微透镜及其阵列，最后对加工过程中出现的问题进行了分析并给出了优化的方法。
论文最后初步给出了透镜阵列的测试结果，包括透镜曲率半径的测量、透镜阵列的表面形貌SEM图及其成像特性，与理论结果进行了比对。
Lens is the basic and important optical component in the composition of light pathsystem and it belongs to passive optical components with the function of collecting, divergingand collimating optical radiation. Lens array is formed by the ranking of equivalent lenses onone plane in certain order. The traditional lens is large in size, belonging to refractive opticalelements. However, with the development of MOEMS (Micro-Opto-Electro-MechanicalSystems), current instruments have headed towards optical, mechanical, electrical integration,so lenses made up by traditional ways cannot met the need of technology developmentnowadays any longer.
Compared with spherical lens, aspheric lens have drawn more and more attention due tothe good characters of eliminating aberrations and good images. This paper, based on theprocessing of spherical lens, designed and processed the maskplate of aspheric lens.
Firstly, the optical design software ZEMAX is used to trace the optical line of thespherical lens and the aspherical lens respectively in this paper and simulate the aberrationcurve of the spherical lens and the aspherical lens. Then analyzed its light transmissioncharacteristics theoretically.
With SU-8 as structural material, using UV light photolithography process, especiallyinclined exposure technology, micro lens arrays whose primary optical axis parallel to thesubstrate and the diameter of one single micro lens is about 300 microns. Because SU-8 is notgood optical material, this paper uses SU-8 micro lens and array as mould , applies PDMS asintermediate mould and employs the high-quality optical materials, such as NOA73, toreplicate the microlens and arrays with large quantity and low cost. The micro lens and arrayswith good performance are fabricated and in the last part the problems in the are analyzed andthe optimized methods are proposed.
At the end of the paper, the test results of the lens and arrays are proposed preliminaryand compared with the theoretical result.
与球面透镜相比，非球面透镜具有消除像差、成像良好等特点而受到广泛关注，本文在加工球面透镜的基础上设计了非球面透镜的掩模板并对其进行加工。
本文首先用光学设计软件ZEMAX对球面透镜与非球面透镜进行了光线追迹，初步模拟出球面透镜与非球面透镜的像差图，从理论上分析其光线传输特性。
本文使用SU-8作为光刻胶，采用光刻原理，尤其是斜曝光原理，加工出了主光轴平行于衬底的微透镜及其透镜阵列，单个微透镜的直径可达到300微米。由于SU-8并不是很好的光学材料，本文以SU-8微透镜及其阵列作为母模，用PDMS作为中间模具，最后用一种优质的光学材料（NOA73）进行大量低成本微复制，加工出了光学性能良好的微透镜及其阵列，最后对加工过程中出现的问题进行了分析并给出了优化的方法。
论文最后初步给出了透镜阵列的测试结果，包括透镜曲率半径的测量、透镜阵列的表面形貌SEM图及其成像特性，与理论结果进行了比对。
Lens is the basic and important optical component in the composition of light pathsystem and it belongs to passive optical components with the function of collecting, divergingand collimating optical radiation. Lens array is formed by the ranking of equivalent lenses onone plane in certain order. The traditional lens is large in size, belonging to refractive opticalelements. However, with the development of MOEMS (Micro-Opto-Electro-MechanicalSystems), current instruments have headed towards optical, mechanical, electrical integration,so lenses made up by traditional ways cannot met the need of technology developmentnowadays any longer.
Compared with spherical lens, aspheric lens have drawn more and more attention due tothe good characters of eliminating aberrations and good images. This paper, based on theprocessing of spherical lens, designed and processed the maskplate of aspheric lens.
Firstly, the optical design software ZEMAX is used to trace the optical line of thespherical lens and the aspherical lens respectively in this paper and simulate the aberrationcurve of the spherical lens and the aspherical lens. Then analyzed its light transmissioncharacteristics theoretically.
With SU-8 as structural material, using UV light photolithography process, especiallyinclined exposure technology, micro lens arrays whose primary optical axis parallel to thesubstrate and the diameter of one single micro lens is about 300 microns. Because SU-8 is notgood optical material, this paper uses SU-8 micro lens and array as mould , applies PDMS asintermediate mould and employs the high-quality optical materials, such as NOA73, toreplicate the microlens and arrays with large quantity and low cost. The micro lens and arrayswith good performance are fabricated and in the last part the problems in the are analyzed andthe optimized methods are proposed.
At the end of the paper, the test results of the lens and arrays are proposed preliminaryand compared with the theoretical result.
引文
[1]张巍.微光学自适应系统中基于PZT薄膜的微反射镜单元工艺研究.硕士学位论文.浙江:浙江大学,2006.
[2]Dongmei Guo, Ming Wang. Self-mixing micro-interferometer based on sinusoidal phasemodulation and integrting–bucket method. Optics Communications.2010, 283.10:2186-2192.
[3]Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and KseniaSapozhnikova. Compensation of tilt angles and verification of displacement measurementswith a Fabry-Perot interferometer. Key Engineering Materials. 2010,437:95-97.
[4]Xiaohao Wang. Study of control system for a micro programmable blazed grating.Advanced Materials Research.2009, 60:180-184.
[5]Han Zhao. Experimental study on etched micro-structured fiber bragg grating. AppliedMechanics and Materials. 2011, 130:4061-4064.
[6]韦玮,黄尚廉,陈伟民,王宁,张洁,朱永.一种基于MEMS光栅光调制器的近红外光谱探测系统.光谱学与光谱分析.2010,30.3:846-850.
[7]Xiaowei Li, Qiaofeng Tan, Benfeng Bai and Guofan Jin. Plasmonic leak-free focusinglens under radially polarized illumination. Journal of Optics. 2010, 12.8:1-6.
[8]阎传文.自适应微镜阵列的研究.硕士学位论文.浙江大学:浙江大学信息学院,2008.
[9]陈高庭.火星探测用的三维MOEMS光束扫描成像系统.激光与光电子学进展.2003,40.4:13-17.
[10]T Mitsui, Y Takahashi and Y Watanabe. A2-axis optical scanner driven nonresonantly byelectromagnetic force for OCT imaging. Journal of Micromechanics and Microengineering.2006,16.11: 2482-2487.
[11]高永锋.尘埃粒子光散射测量技术及微型光学传感器的研究.硕士学位论文.苏州：苏州大学,2005.
[12]A.Arrieta, M.L. Rodriguez-Mendez, J.A.de Saja.Langmuir-Blodgett film and carbonpaste electrodes based on phthalocyanines as sensing units for taste. Sensors and Actuators B:Chemical. 2003,95.1:357-365.
[13]Cai Zhixiang Zeng Xiaoyan. Experimental study of SnO2gas sensing film fabricated bylaser micro cladding and its corresponding characteristics. Chinese Journal of Lasers.2010,37.8:2149-2153.
[14]陈非凡,殷玲,李云龙.微光机电系统(MOEMS)的研究现状及展望.微细加工技术.2002,20.3:01-07.
[15]柯才军.微透镜阵列的设计、制作及与CCD的集成技术.博士学位论文.武汉:华中科技大学，2005.
[16]张巍.基于激光扫描系统的光栅广阀研究.博士学位论文.浙江大学:浙江大学光电信息工程系，2009.
[17]陈非凡,尤政.微型可编程相位光栅技术的研究.微米/纳米科学与技术.2000,5.1：62-64.
[18]P Rai-Choudhury. MEMS and MOEMS Technology and Application. Washington: TheSociety of Photo-Optical Instrumentation Engineers,2001:1-517.
[19]马军山,陈高庭,王向朝.用于光通信的微电子机械系统技术进展.激光与光电子学进展.1999,36.10:11-18.
[20]兰卫华等.国内MOEMS光开关的研究现状.光通讯技术.2004,4:11-14.
[21]王刚.光纤通信中的MOEMS光开关.微处理机.2004,25.5:1-6.
[22]Jeonggi Seo, Luke P. Lee. Disposable integrated microfluidics with self-aligned planarmicrolenses. Sensors and Actuators B: Chemical. 2003,99.2:615-622.
[23]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究.光子学报.2008,37.8:1639-1642.
[24]Shu Yang, Gang Che, MischaMegens, et. al. Functional Biomimetic Microlens Arrayswith Integrated Pores. Journal of Advanced Materials. 2005,17.4:435-438.
[25]漆新民,谌廷政,朱小进,高益庆,罗宁宁,王铮.衍射光学元件灰度掩模板激光制作系统研究.光电工程.2004,31.10:21-23.
[26]彭钦军,郭永康,曾阳素,刘世杰,陈波,肖啸.实时灰阶掩膜技术制作微透镜列阵.中国激光.2003,30.10:893-896.
[27]Jiang Hongjin,Yuan Xiaocong,Yun ZhiSheng, etal. Fabrication of microlens inphotosensitive hybrid sol-gel films using a gray scale mask. Materials Science andEngineering C, 2001,16:99-102.
[28]Weixing Yu and X.-C. Yuan. Fabrication of multilevel structures in self-developmentphotosensitive hybrid sol-gel glass by a gray scale mask. Optical Engineering. 2003,42.12:3411-3412.
[29]Hongkai Wu, Teri W. Odom, and George M. Whitesides. Reduction photolithographyusing microlens arrays: Applications in gray scale photolithography. Analytical Chemistry.2002,74.14:3267-3273.
[30]李同海.聚合物微透镜及其阵列的研究.硕士研究生学位论文.西安:中国科学院研究生院（西安光学精密机械研究所）,2006.
[31]张玉虹.用按需滴定技术制备聚合物折射微透镜阵列.光子学报.2005,11:1639-1642.
[32]甘代伟.微透镜阵列制作技术研究.装备制造技术.2011,39.9:44-45.
[33]Guocheng Shao, Weiping Qiu and Wanjun Wang. Fast replication of out-of-planemicrolens with polydimethylsiloxane and curable polymer (NOA73). MicrosystemTechnologies. 2010, 16.8:1471-1477.
[34] Ren Yang, Wanjun Wang. Out-of-plane polymer refractive microlens fabricated based ondirect lithography of SU-8. Sensors and Actuators A: Physical. 2004, 113.1:71-77.
[35]M. C. Wu, L. Y. Lin, S. S. Lee, and C. R. King. Free-space integrated optics realized bySurface micromachining.International Journal of High Speed Electronics and Systems.1997,8.2:51-65.
[36]倪玮.基于软光刻的短距离光互连研究.博士学位论文.浙江大学:浙江大学信息科学与工程学院，2009．
[37]胡昊明.长焦连续变倍单镜头反光照相镜头技术研究.硕士研究生学位论文.南京:南京理工大学，2006.
[38]http://www.docin.com/p-96253223.html
[39]代会娜.基于ZEMAX的LCOS微型投影镜头设计研究.硕士研究生学位论文.长春:长春理工大学,2010.
[40]Guocheng Shao. Polymer Based Microfabrication and Its Applications in Optical MEMSand BioMEMS. Dissertation. Louisiana State University: Agricultural and MechanicalCollege,2010.
[41]刘建林,张斌珍,崔敏,张剑,季长红.基于SU-8的微透镜阵列的设计和制作.微纳电子技术.2012,3:55-59.
[2]Dongmei Guo, Ming Wang. Self-mixing micro-interferometer based on sinusoidal phasemodulation and integrting–bucket method. Optics Communications.2010, 283.10:2186-2192.
[3]Yuri Chugui, Yongsheng Gao, Kuang-Chao Fan, Roald Taymanov and KseniaSapozhnikova. Compensation of tilt angles and verification of displacement measurementswith a Fabry-Perot interferometer. Key Engineering Materials. 2010,437:95-97.
[4]Xiaohao Wang. Study of control system for a micro programmable blazed grating.Advanced Materials Research.2009, 60:180-184.
[5]Han Zhao. Experimental study on etched micro-structured fiber bragg grating. AppliedMechanics and Materials. 2011, 130:4061-4064.
[6]韦玮,黄尚廉,陈伟民,王宁,张洁,朱永.一种基于MEMS光栅光调制器的近红外光谱探测系统.光谱学与光谱分析.2010,30.3:846-850.
[7]Xiaowei Li, Qiaofeng Tan, Benfeng Bai and Guofan Jin. Plasmonic leak-free focusinglens under radially polarized illumination. Journal of Optics. 2010, 12.8:1-6.
[8]阎传文.自适应微镜阵列的研究.硕士学位论文.浙江大学:浙江大学信息学院,2008.
[9]陈高庭.火星探测用的三维MOEMS光束扫描成像系统.激光与光电子学进展.2003,40.4:13-17.
[10]T Mitsui, Y Takahashi and Y Watanabe. A2-axis optical scanner driven nonresonantly byelectromagnetic force for OCT imaging. Journal of Micromechanics and Microengineering.2006,16.11: 2482-2487.
[11]高永锋.尘埃粒子光散射测量技术及微型光学传感器的研究.硕士学位论文.苏州：苏州大学,2005.
[12]A.Arrieta, M.L. Rodriguez-Mendez, J.A.de Saja.Langmuir-Blodgett film and carbonpaste electrodes based on phthalocyanines as sensing units for taste. Sensors and Actuators B:Chemical. 2003,95.1:357-365.
[13]Cai Zhixiang Zeng Xiaoyan. Experimental study of SnO2gas sensing film fabricated bylaser micro cladding and its corresponding characteristics. Chinese Journal of Lasers.2010,37.8:2149-2153.
[14]陈非凡,殷玲,李云龙.微光机电系统(MOEMS)的研究现状及展望.微细加工技术.2002,20.3:01-07.
[15]柯才军.微透镜阵列的设计、制作及与CCD的集成技术.博士学位论文.武汉:华中科技大学，2005.
[16]张巍.基于激光扫描系统的光栅广阀研究.博士学位论文.浙江大学:浙江大学光电信息工程系，2009.
[17]陈非凡,尤政.微型可编程相位光栅技术的研究.微米/纳米科学与技术.2000,5.1：62-64.
[18]P Rai-Choudhury. MEMS and MOEMS Technology and Application. Washington: TheSociety of Photo-Optical Instrumentation Engineers,2001:1-517.
[19]马军山,陈高庭,王向朝.用于光通信的微电子机械系统技术进展.激光与光电子学进展.1999,36.10:11-18.
[20]兰卫华等.国内MOEMS光开关的研究现状.光通讯技术.2004,4:11-14.
[21]王刚.光纤通信中的MOEMS光开关.微处理机.2004,25.5:1-6.
[22]Jeonggi Seo, Luke P. Lee. Disposable integrated microfluidics with self-aligned planarmicrolenses. Sensors and Actuators B: Chemical. 2003,99.2:615-622.
[23]张玉,刘德森.六角形孔径平面微透镜阵列的制作及基本特性研究.光子学报.2008,37.8:1639-1642.
[24]Shu Yang, Gang Che, MischaMegens, et. al. Functional Biomimetic Microlens Arrayswith Integrated Pores. Journal of Advanced Materials. 2005,17.4:435-438.
[25]漆新民,谌廷政,朱小进,高益庆,罗宁宁,王铮.衍射光学元件灰度掩模板激光制作系统研究.光电工程.2004,31.10:21-23.
[26]彭钦军,郭永康,曾阳素,刘世杰,陈波,肖啸.实时灰阶掩膜技术制作微透镜列阵.中国激光.2003,30.10:893-896.
[27]Jiang Hongjin,Yuan Xiaocong,Yun ZhiSheng, etal. Fabrication of microlens inphotosensitive hybrid sol-gel films using a gray scale mask. Materials Science andEngineering C, 2001,16:99-102.
[28]Weixing Yu and X.-C. Yuan. Fabrication of multilevel structures in self-developmentphotosensitive hybrid sol-gel glass by a gray scale mask. Optical Engineering. 2003,42.12:3411-3412.
[29]Hongkai Wu, Teri W. Odom, and George M. Whitesides. Reduction photolithographyusing microlens arrays: Applications in gray scale photolithography. Analytical Chemistry.2002,74.14:3267-3273.
[30]李同海.聚合物微透镜及其阵列的研究.硕士研究生学位论文.西安:中国科学院研究生院（西安光学精密机械研究所）,2006.
[31]张玉虹.用按需滴定技术制备聚合物折射微透镜阵列.光子学报.2005,11:1639-1642.
[32]甘代伟.微透镜阵列制作技术研究.装备制造技术.2011,39.9:44-45.
[33]Guocheng Shao, Weiping Qiu and Wanjun Wang. Fast replication of out-of-planemicrolens with polydimethylsiloxane and curable polymer (NOA73). MicrosystemTechnologies. 2010, 16.8:1471-1477.
[34] Ren Yang, Wanjun Wang. Out-of-plane polymer refractive microlens fabricated based ondirect lithography of SU-8. Sensors and Actuators A: Physical. 2004, 113.1:71-77.
[35]M. C. Wu, L. Y. Lin, S. S. Lee, and C. R. King. Free-space integrated optics realized bySurface micromachining.International Journal of High Speed Electronics and Systems.1997,8.2:51-65.
[36]倪玮.基于软光刻的短距离光互连研究.博士学位论文.浙江大学:浙江大学信息科学与工程学院，2009．
[37]胡昊明.长焦连续变倍单镜头反光照相镜头技术研究.硕士研究生学位论文.南京:南京理工大学，2006.
[38]http://www.docin.com/p-96253223.html
[39]代会娜.基于ZEMAX的LCOS微型投影镜头设计研究.硕士研究生学位论文.长春:长春理工大学,2010.
[40]Guocheng Shao. Polymer Based Microfabrication and Its Applications in Optical MEMSand BioMEMS. Dissertation. Louisiana State University: Agricultural and MechanicalCollege,2010.
[41]刘建林,张斌珍,崔敏,张剑,季长红.基于SU-8的微透镜阵列的设计和制作.微纳电子技术.2012,3:55-59.