基于FPGA的线阵光栅光调制器驱动控制系统设计与实验
摘要
“民以食为天,食以安为先”,食品安全关乎人们健康和国计民生。因此,食品安全越来越引起全社会的关注。目前,针对食品安全监测的仪器大部分采用光谱分析仪器。传统光谱分析仪器大多只能进行少样本定点抽查检验或者实验室使用,而且费用昂贵,普及率低,造成了我国食品安全监测力度弱的现状。因此,开发一款价格低廉、监测速度快、体积小、重量轻、使用方便的光谱监测仪具有重要的意义。
正是在上述背景下,重庆大学提出并研发了具有自主知识产权的光栅平动式光调制器(Grating Moving Light Modulator,GMLM),采用GMLM作为光谱编码的核心器件,开发一款具有价格低廉,信噪比高,体积小,检测速度快等优点的近红外光谱监测仪。本文介绍了GMLM的结构与工作原理,分析了GMLM的机电特性,设计了器件驱动电路,并在此基础上进行了线阵GMLM器件测试及其驱动控制系统的相关实验研究。
本文主要研究工作如下:
①分析线阵光栅光调制器的结构与工作原理,对线阵GMLM的工作电压、吸合电压、固有频率等机电特性进行研究,为线阵GMLM驱动控制电路的设计提供理论依据;
②根据线阵光栅光调制器的结构与工作原理,针对GMLM的机电特性,设计线阵GMLM的驱动控制电路,研究哈达玛变换原理,推导相应的S-矩阵,分析以线阵GMLM为模板实现S矩阵以达到光谱调制的方案和原理;
③采用Altera公司的FPGA(Cyclone系列的EP1C6Q240C8),及其相应的开发软件QuartusII 6.0和Verilog硬件描述语言实现S-矩阵及其他控制信号,完成Hadamard时序控制电路的设计;应用Protel DXP软件设计PCB,选择合适的数模转换器(TLC5615)、运算放大器(OPA551)、多路模拟开关的元器件(ADG221),得到0-25V、30阶可编程电压,完成线阵GMLM的驱动电路的设计;
④结合光学系统,搭建MEMS线阵光栅光调制器控制系统电路的相应软、硬件测试与实验系统平台,测试驱动控制电路的性能和线阵光栅光调制器的机电特性。
"Hunger breeds discontent, to food security for the first", food safety is close to people's health and national welfare and the people's livelihood. Therefore, food safety has caused the concern of the whole society. Currently, most of instruments for monitoring food safety are spectral instruments. Most of traditional spectral instruments can only test a small sample of fixed-point sampling or be used in the laboratory, moreover, these instruments are expensive and low penetration, which resulted in the weak actuality of food safety monitoring. Therefore, it is significant to develop a novel spectroscopy,which has the advantages of low-cost, rapid monitoring, small size, light weight, easy to use.
Under this background and urgent needs, GMLM (Grating Moving Light Modulator) project with independent intellectual property rights was just prompted by Chongqing University. GMLM serving as the core device of spectral encoding, a novel near-infrared spectroscopy with the advantages of low price, high signal to noise ratio, small size, fast detection, is under development. In this paper, the structure and working principle of GMLM were described, and electrical and mechanical characteristics of GMLM were analyzed. Then the driving circuits of GMLM were designed and developed, furthermore, the research and relevant experiment for the control system of GMLM array were accomplished.
The main work of this paper is as following:
①The structure and working principle of GMLM were analyzed. Electromechanical parameters such as operation voltage, pull-in voltage and resonance frequency of GMLM were researched. That provided the theory for the design of drive control circuit of GMLM.
②According to the structure, working principle and electromechanical characteristics of GMLM, the driving control circuit of linear GMLM array was designed. Based on Hadamard transform theory, the corresponding S matrixes were derived. The principle of as GMLM a template for implementing S matrix to modulate spectrum was analysised.
③The S-matrix and other control signals were designed and the timing control circuit of GMLM was completed by FPGA. Using Protel DXP software, selecting the appropriate DAC(TLC5615), op amp(OPA551), multi-channel analog switch components(ADG221), the programmable voltage (0-25v ,30 rank) was achieved, and then the drivie control circuit of GMLM was completed.
④The test platform of drive control circuit of GMLM corresponding software and hardware was established with the optical system. The drive control circuit of GMLM and characteristics of GMLM were tested respectively.
正是在上述背景下,重庆大学提出并研发了具有自主知识产权的光栅平动式光调制器(Grating Moving Light Modulator,GMLM),采用GMLM作为光谱编码的核心器件,开发一款具有价格低廉,信噪比高,体积小,检测速度快等优点的近红外光谱监测仪。本文介绍了GMLM的结构与工作原理,分析了GMLM的机电特性,设计了器件驱动电路,并在此基础上进行了线阵GMLM器件测试及其驱动控制系统的相关实验研究。
本文主要研究工作如下:
①分析线阵光栅光调制器的结构与工作原理,对线阵GMLM的工作电压、吸合电压、固有频率等机电特性进行研究,为线阵GMLM驱动控制电路的设计提供理论依据;
②根据线阵光栅光调制器的结构与工作原理,针对GMLM的机电特性,设计线阵GMLM的驱动控制电路,研究哈达玛变换原理,推导相应的S-矩阵,分析以线阵GMLM为模板实现S矩阵以达到光谱调制的方案和原理;
③采用Altera公司的FPGA(Cyclone系列的EP1C6Q240C8),及其相应的开发软件QuartusII 6.0和Verilog硬件描述语言实现S-矩阵及其他控制信号,完成Hadamard时序控制电路的设计;应用Protel DXP软件设计PCB,选择合适的数模转换器(TLC5615)、运算放大器(OPA551)、多路模拟开关的元器件(ADG221),得到0-25V、30阶可编程电压,完成线阵GMLM的驱动电路的设计;
④结合光学系统,搭建MEMS线阵光栅光调制器控制系统电路的相应软、硬件测试与实验系统平台,测试驱动控制电路的性能和线阵光栅光调制器的机电特性。
"Hunger breeds discontent, to food security for the first", food safety is close to people's health and national welfare and the people's livelihood. Therefore, food safety has caused the concern of the whole society. Currently, most of instruments for monitoring food safety are spectral instruments. Most of traditional spectral instruments can only test a small sample of fixed-point sampling or be used in the laboratory, moreover, these instruments are expensive and low penetration, which resulted in the weak actuality of food safety monitoring. Therefore, it is significant to develop a novel spectroscopy,which has the advantages of low-cost, rapid monitoring, small size, light weight, easy to use.
Under this background and urgent needs, GMLM (Grating Moving Light Modulator) project with independent intellectual property rights was just prompted by Chongqing University. GMLM serving as the core device of spectral encoding, a novel near-infrared spectroscopy with the advantages of low price, high signal to noise ratio, small size, fast detection, is under development. In this paper, the structure and working principle of GMLM were described, and electrical and mechanical characteristics of GMLM were analyzed. Then the driving circuits of GMLM were designed and developed, furthermore, the research and relevant experiment for the control system of GMLM array were accomplished.
The main work of this paper is as following:
①The structure and working principle of GMLM were analyzed. Electromechanical parameters such as operation voltage, pull-in voltage and resonance frequency of GMLM were researched. That provided the theory for the design of drive control circuit of GMLM.
②According to the structure, working principle and electromechanical characteristics of GMLM, the driving control circuit of linear GMLM array was designed. Based on Hadamard transform theory, the corresponding S matrixes were derived. The principle of as GMLM a template for implementing S matrix to modulate spectrum was analysised.
③The S-matrix and other control signals were designed and the timing control circuit of GMLM was completed by FPGA. Using Protel DXP software, selecting the appropriate DAC(TLC5615), op amp(OPA551), multi-channel analog switch components(ADG221), the programmable voltage (0-25v ,30 rank) was achieved, and then the drivie control circuit of GMLM was completed.
④The test platform of drive control circuit of GMLM corresponding software and hardware was established with the optical system. The drive control circuit of GMLM and characteristics of GMLM were tested respectively.
引文
[1]殷玲,陈非凡.可编程相位光栅结构的微机械特性研究[J].微细加工技术, 2003(3): 72-76.
[2] D. Senturia. Microsystem Design. Third Edition[M]. London. Kluwer Academic Puberlishers. 2001:530~558.
[3]付博,赵月月.微光机电系统(MOEMS)研究综述[J].传感器世界, 2004, (10): 11-17.
[4]刘晓明,朱钟淦著.微机电系统设计与制造[M].北京.国防工业出版社, 2005:1~11.
[5] Stephen D. Senturia著.刘泽文,王晓红,黄庆安等译,微系统设计[M].电子工业出版社,2004,11:1-9.
[6]陈非凡,殷玲.微型可编程相位光栅结构设计及有限元分析[J].仪器仪表学报, 2001, 22(3): 341-343.
[7]史俊锋,惠梅,王东生,等.光谱仪的微型化及其应用[J].光学技术, 2003, 29(1): 13-17.
[8] TEKLA S P. Tomorrow's TV-The grating light valve [J]. IEEE Spectrum, 2004, 41(4): 38-41.
[9] KONG SH, CORREIA JH, GRAAFG, et al. Integrated silicon micro spectrometers [J]. IEEE Instrumentation & Measurement Magazine, 2001, (4): 34-38.
[10] ALEXANDER P, WILHELMUS D, ROBERTM et al. Enabling high data-rate imaging applications with Grating Light ValveTMtechnology[C]. Micromachining and Micro fabrication Symposium, San Jose, CA, USA, 2004: 5348-07.
[11]金珠.MOEMS光栅光调制器阵列的控制系统电路关键技术研究[D].重庆.重庆大学,2010.
[12] HOCKER G B, YOUNGNER D, DEUTSCH E, et al. The polychromator: a programmable MEMS diffraction grating for synthetic spectra[C]. Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 2000: 89-91.
[13] Michael B. Sinclair, Kent B. Pfeifer, Michael A. Butler, et al. A MEMS-Based Correlation Radiometer[J].Proceedings of SPIE ,2004,Vol.5346:37-47.
[14] MAREKW K, JOHN C B, JAMESG P. Conformal grating electromechanical system (gems) for high-speed digital light modulation[C]. 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, USA, 2002: 568-573.
[15] NEWMAN J D, MAREK W K, JAMES G P, et al. MEMS programmable spectral imaging system for remote sensing[C]. Proceedings of SPIE, Spaceborne SensorsIII, May 2006, 6220: 622006.
[16] JOHN C B, MAREKW K. High-resolution laser-projection display system using a grating electromechanical system (GEMS) [C]. Proceedings of SPIE, MOEMS Display and Imaging Systems II, January 2004, 5348: 65-75.
[17] http://www.hiperscan.com[EB/OL].
[18] ZHANG X M, LIU A Q. AMEMS Pitch-tunable Grating Add/Drop Multiplexers[C]. IEEE/LEOS International Conference on Optical MEMS, Kauai, HI, USA, 2000:25-26.
[19] CHEEW W, YONG B J, GEORGE B, et al. Analog piezoelectric-driven tunable gratings with nanometer resolution [J]. Journal of Micro electromechanical Systems,2004, 13(6):998-1005.
[20] WEIC S, CHEEW W, YONG B J, et al. Electrostatic and piezoelectric analog tunable diffractive gratings[C].Proceeding of Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science, 2002: 75-76.
[21] WEIC S, SANG G K, GEORGE B. High-resolution electrostatic analog tunable grating with a single-mask fabrication process[J]. Journal of Micro electromechanical Systems, 2006, 15(4): 763-769.
[22] WEIC S, CHEEW W, YONG B J, et al. MEMS tunable gratings with analog actuation[J]. Information Sciences, 2003, 149: 31-40.
[23] BYUNGKI K, MICHAEL C S, DEGERTEKIN F L, et al. Deformable diffraction grating for scanning micro interferometer arrays[C]. Proceedings of SPIE, MOEMS Display and Imaging Systems II, January 2004, 5348: 98-107.
[24] MAURIZIO T, YVESA P, PHILIPPEN, et al. Deformable MEMS grating for wide tunability and high operating speed[C]. Proceedings of SPIE, MOEMS Display, Imaging, andMiniaturized Microsystems IV, January 2006, 6114: 61140C.
[25]黄尚廉,张智海,闫许,付红桥,张洁,伍艺.光栅平动式光调制器及阵列[P]. 200510020186.8, 2005.
[26]张洁,黄尚廉,闫许,等.光栅平动式光调制器结构参数的优化分析[J].光学学报,2006,26(8):1121-1126.
[27]安飞,苑伟政,乔大勇,秦冲.微型可编程光栅光谱模拟特性及其应用研究[J].传感技术学报,2006,19(5):1754-1756.
[28]伍艺,黄尚廉,张洁等.反射面平动式光栅光调制器的实现及机电特性分析[J].中国机械工程,2005,16 (4).
[29]张洁,黄尚廉,闫许,伍艺,张志海.反射镜平动式光栅光调制器的光学特性分析[J].光子学报,2005.
[30]伍艺.基于MEMS光栅光调制器的机电特性及控制系统研究[D].重庆大学,2006.
[31]周锦松,吕群波,相里斌.阿达玛变换光谱成像仪光谱混迭分析及修正[J].光子学报,2005,34(10):1518～1520.
[32]相里斌.傅里叶变换光谱仪中的主要技术环节[J].光子学报,1997,26 (6):550～554.
[33] Marshall A C. Fourier, Hadamard and Hilbert transforms in chemistry[J]. New York: Plenum press ,1982
[34]董瑛,相里斌,赵葆常.Fourier变换光谱学退卷积技术的理论研究[J].光子学报,2002,31 (7):41～846.
[35] Harwit J V, Slone N J. Hadamard Transform Optics. London: Academic Press , 1979.
[36] Treado P J, Morris M D. Multichannel hadamard transform raman microscopy[J]. Appl Spectrosc, 1990, 44(1):1～4.
[37]王安平,叶虎年,张风生,杨新立.新型调制光谱技术的实验研究[J].华中理工大学学报, 1998,26 Sup.II.
[38]董继学,张虹.关于Hadamard矩阵的几个结论[J].黑龙江工程学院学报(自然科学版), 2005,19(2):60~62.
[39]杨刚,龙海燕.现代电子技术--VHDL与数字系统设计[M].电子工业出版社, 2004,1.
[40]齐洪喜,陆颖. VHDL电路设计实用教程[M].清华大学出版社, 2004,6.
[41]李国洪,沈明山.可编程器件EDA技术与实践[M].机械工程出版社, 2004,7.
[42]潘松,黄继业,曾毓. SOPC技术实用教程[M].清华大学出版社, 2005,3.
[43]潘松,黄继业. EDA技术与VHDL[M].北京:清华大学出版社, 2005.
[44]李哲英,骆丽.数字集成电路设计[M].机械工业出版社,2008,1.
[45]张智海.基于MOEMS技术的光栅平动式光调制器阵列若干关键技术研究[D].重庆:重庆大学,2008.
[2] D. Senturia. Microsystem Design. Third Edition[M]. London. Kluwer Academic Puberlishers. 2001:530~558.
[3]付博,赵月月.微光机电系统(MOEMS)研究综述[J].传感器世界, 2004, (10): 11-17.
[4]刘晓明,朱钟淦著.微机电系统设计与制造[M].北京.国防工业出版社, 2005:1~11.
[5] Stephen D. Senturia著.刘泽文,王晓红,黄庆安等译,微系统设计[M].电子工业出版社,2004,11:1-9.
[6]陈非凡,殷玲.微型可编程相位光栅结构设计及有限元分析[J].仪器仪表学报, 2001, 22(3): 341-343.
[7]史俊锋,惠梅,王东生,等.光谱仪的微型化及其应用[J].光学技术, 2003, 29(1): 13-17.
[8] TEKLA S P. Tomorrow's TV-The grating light valve [J]. IEEE Spectrum, 2004, 41(4): 38-41.
[9] KONG SH, CORREIA JH, GRAAFG, et al. Integrated silicon micro spectrometers [J]. IEEE Instrumentation & Measurement Magazine, 2001, (4): 34-38.
[10] ALEXANDER P, WILHELMUS D, ROBERTM et al. Enabling high data-rate imaging applications with Grating Light ValveTMtechnology[C]. Micromachining and Micro fabrication Symposium, San Jose, CA, USA, 2004: 5348-07.
[11]金珠.MOEMS光栅光调制器阵列的控制系统电路关键技术研究[D].重庆.重庆大学,2010.
[12] HOCKER G B, YOUNGNER D, DEUTSCH E, et al. The polychromator: a programmable MEMS diffraction grating for synthetic spectra[C]. Solid State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, 2000: 89-91.
[13] Michael B. Sinclair, Kent B. Pfeifer, Michael A. Butler, et al. A MEMS-Based Correlation Radiometer[J].Proceedings of SPIE ,2004,Vol.5346:37-47.
[14] MAREKW K, JOHN C B, JAMESG P. Conformal grating electromechanical system (gems) for high-speed digital light modulation[C]. 15th IEEE International Conference on Micro Electro Mechanical Systems, Las Vegas, NV, USA, 2002: 568-573.
[15] NEWMAN J D, MAREK W K, JAMES G P, et al. MEMS programmable spectral imaging system for remote sensing[C]. Proceedings of SPIE, Spaceborne SensorsIII, May 2006, 6220: 622006.
[16] JOHN C B, MAREKW K. High-resolution laser-projection display system using a grating electromechanical system (GEMS) [C]. Proceedings of SPIE, MOEMS Display and Imaging Systems II, January 2004, 5348: 65-75.
[17] http://www.hiperscan.com[EB/OL].
[18] ZHANG X M, LIU A Q. AMEMS Pitch-tunable Grating Add/Drop Multiplexers[C]. IEEE/LEOS International Conference on Optical MEMS, Kauai, HI, USA, 2000:25-26.
[19] CHEEW W, YONG B J, GEORGE B, et al. Analog piezoelectric-driven tunable gratings with nanometer resolution [J]. Journal of Micro electromechanical Systems,2004, 13(6):998-1005.
[20] WEIC S, CHEEW W, YONG B J, et al. Electrostatic and piezoelectric analog tunable diffractive gratings[C].Proceeding of Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science, 2002: 75-76.
[21] WEIC S, SANG G K, GEORGE B. High-resolution electrostatic analog tunable grating with a single-mask fabrication process[J]. Journal of Micro electromechanical Systems, 2006, 15(4): 763-769.
[22] WEIC S, CHEEW W, YONG B J, et al. MEMS tunable gratings with analog actuation[J]. Information Sciences, 2003, 149: 31-40.
[23] BYUNGKI K, MICHAEL C S, DEGERTEKIN F L, et al. Deformable diffraction grating for scanning micro interferometer arrays[C]. Proceedings of SPIE, MOEMS Display and Imaging Systems II, January 2004, 5348: 98-107.
[24] MAURIZIO T, YVESA P, PHILIPPEN, et al. Deformable MEMS grating for wide tunability and high operating speed[C]. Proceedings of SPIE, MOEMS Display, Imaging, andMiniaturized Microsystems IV, January 2006, 6114: 61140C.
[25]黄尚廉,张智海,闫许,付红桥,张洁,伍艺.光栅平动式光调制器及阵列[P]. 200510020186.8, 2005.
[26]张洁,黄尚廉,闫许,等.光栅平动式光调制器结构参数的优化分析[J].光学学报,2006,26(8):1121-1126.
[27]安飞,苑伟政,乔大勇,秦冲.微型可编程光栅光谱模拟特性及其应用研究[J].传感技术学报,2006,19(5):1754-1756.
[28]伍艺,黄尚廉,张洁等.反射面平动式光栅光调制器的实现及机电特性分析[J].中国机械工程,2005,16 (4).
[29]张洁,黄尚廉,闫许,伍艺,张志海.反射镜平动式光栅光调制器的光学特性分析[J].光子学报,2005.
[30]伍艺.基于MEMS光栅光调制器的机电特性及控制系统研究[D].重庆大学,2006.
[31]周锦松,吕群波,相里斌.阿达玛变换光谱成像仪光谱混迭分析及修正[J].光子学报,2005,34(10):1518～1520.
[32]相里斌.傅里叶变换光谱仪中的主要技术环节[J].光子学报,1997,26 (6):550～554.
[33] Marshall A C. Fourier, Hadamard and Hilbert transforms in chemistry[J]. New York: Plenum press ,1982
[34]董瑛,相里斌,赵葆常.Fourier变换光谱学退卷积技术的理论研究[J].光子学报,2002,31 (7):41～846.
[35] Harwit J V, Slone N J. Hadamard Transform Optics. London: Academic Press , 1979.
[36] Treado P J, Morris M D. Multichannel hadamard transform raman microscopy[J]. Appl Spectrosc, 1990, 44(1):1～4.
[37]王安平,叶虎年,张风生,杨新立.新型调制光谱技术的实验研究[J].华中理工大学学报, 1998,26 Sup.II.
[38]董继学,张虹.关于Hadamard矩阵的几个结论[J].黑龙江工程学院学报(自然科学版), 2005,19(2):60~62.
[39]杨刚,龙海燕.现代电子技术--VHDL与数字系统设计[M].电子工业出版社, 2004,1.
[40]齐洪喜,陆颖. VHDL电路设计实用教程[M].清华大学出版社, 2004,6.
[41]李国洪,沈明山.可编程器件EDA技术与实践[M].机械工程出版社, 2004,7.
[42]潘松,黄继业,曾毓. SOPC技术实用教程[M].清华大学出版社, 2005,3.
[43]潘松,黄继业. EDA技术与VHDL[M].北京:清华大学出版社, 2005.
[44]李哲英,骆丽.数字集成电路设计[M].机械工业出版社,2008,1.
[45]张智海.基于MOEMS技术的光栅平动式光调制器阵列若干关键技术研究[D].重庆:重庆大学,2008.