衍射光栅色散理论与光栅设计、制作和检验方法研究
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摘要
本文对衍射光栅色散理论与光栅设计、制作工艺和效率检验方法做了较为深入的研究。第一,在光栅理论研究方面,基于矢量衍射理论给出了一维和二维平面光栅的广义光栅方程以及角色散公式的完整解析形式,建立了衍射光栅第一类和第二类角色散概念,系统地讨论了衍射光栅两类角色散的相关特性,完善和发展了衍射光栅色散理论。第二,在光栅理论的应用研究方面,从矢量衍射理论基础出发,给出了表示平面光栅光谱仪谱线和谱带弯曲程度的精确关系式和光谱仪器的两类色散公式,数值结果表明以往所用近似公式存在不足。第三,在光栅设计与制作方面,导出了矩形光栅衍射效率的一般表达式,分析了矩形光栅衍射光谱的缺级现象,通过数值分析发现光学头光栅纵向与横向加工误差之间存在互补性,并根据设计结果成功地研制出了VCD信号读写头光栅。第四,在金属光栅刻划工艺研究方面,建立了实际刻划光栅的物理模型,着重探讨了刻划激光光栅和计量光栅的技术要领,并应用先进的检测手段再现了光栅槽形,为提高光栅的刻划精度提供了参考依据。第五,对全息曝光系统的特点、光栅常数的精确控制方法、曝光与显影过程中常见的问题和离子束刻蚀工艺等方面的具体问题做了研究,并制作了全息—离子束刻蚀光栅。第六,论述了平面光栅衍射效率连续扫描测试原理,分析了已有光栅效率自动检验仪设计方案及其优缺点,提出了一种新的结构紧凑,精度易于实现,能够进行实时测量的全自动光栅效率检验仪设计方案,并做了可行性分析,为具体研制工作做了准备。
In this paper the study on the dispersion theory, design, manufacture techniques, and efficiency test methods of diffraction gratings were made in a deep way. Firstly, concerning the study of basic theory of diffraction gratings, the general equation to the one-dimensional and two-dimensional plane gratings, the complete expression of the angular dispersion, as well as the concept of the first and second kind of angular dispersion were presented, and the inner relation between the two different kinds of angular dispersion of the diffraction gratings was discussed systematically based on the vector diffraction theory. All these theoretical work above mentioned is a complement to the overall theories of diffraction gratings. Secondly, the more accurate expressions that can be used to explain the distortion of the spectral lines or bands and two kinds of dispersion expressions for the plane gratings were described, the result obtained from these expressions shows that the previous formula was approximate and not accurate enough and needed to be given a more general form. Thirdly, in the aspect of design and manufacture of gratings, the general expression of the diffraction efficiency of rectangle gratings were deduced, the analysis to the phenomenon of order-missing of the spectra of the rectangle gratings was made, the complementarity between the longitudinal mismachining tolerance and the transverse mismachining tolerance was firstly found by numerical analysis, moreover, the gratings in the read-and-write head of VCD was obtained based on the design result. Fourthly, concerning the study of the ruled technics to metal gratings, the physical model of the actual ruled gratings was established, the technics of ruled laser gratings and metrological gratings was discussed in detail. The shape of gratings grooves was
obtained by using advanced test methods, which is valuable as a reference to improve the precision of ruled gratings. Fifthly, deep study to the properties, the accurate method of controlling the grating constant, common problems during the process of exposure and development, and special problems of the ion-beam etching technics were made on the holographic gratings. Moreover, the holographic and ion-beam gratings were manufactured. Sixthly, the continuous scanning test principle of diffraction efficiency of plane gratings was expounded, design scheme of auto testing instrument and its merits and demerits were analyzed. A new design scheme of auto testing instrument for gratings efficiency was proposed, which had compact structure, easily acquired precision and was capable of real-time test. Its feasibility analysis was made for actual manufacture.
In this paper the study on the dispersion theory, design, manufacture techniques, and efficiency test methods of diffraction gratings were made in a deep way. Firstly, concerning the study of basic theory of diffraction gratings, the general equation to the one-dimensional and two-dimensional plane gratings, the complete expression of the angular dispersion, as well as the concept of the first and second kind of angular dispersion were presented, and the inner relation between the two different kinds of angular dispersion of the diffraction gratings was discussed systematically based on the vector diffraction theory. All these theoretical work above mentioned is a complement to the overall theories of diffraction gratings. Secondly, the more accurate expressions that can be used to explain the distortion of the spectral lines or bands and two kinds of dispersion expressions for the plane gratings were described, the result obtained from these expressions shows that the previous formula was approximate and not accurate enough and needed to be given a more general form. Thirdly, in the aspect of design and manufacture of gratings, the general expression of the diffraction efficiency of rectangle gratings were deduced, the analysis to the phenomenon of order-missing of the spectra of the rectangle gratings was made, the complementarity between the longitudinal mismachining tolerance and the transverse mismachining tolerance was firstly found by numerical analysis, moreover, the gratings in the read-and-write head of VCD was obtained based on the design result. Fourthly, concerning the study of the ruled technics to metal gratings, the physical model of the actual ruled gratings was established, the technics of ruled laser gratings and metrological gratings was discussed in detail. The shape of gratings grooves was
obtained by using advanced test methods, which is valuable as a reference to improve the precision of ruled gratings. Fifthly, deep study to the properties, the accurate method of controlling the grating constant, common problems during the process of exposure and development, and special problems of the ion-beam etching technics were made on the holographic gratings. Moreover, the holographic and ion-beam gratings were manufactured. Sixthly, the continuous scanning test principle of diffraction efficiency of plane gratings was expounded, design scheme of auto testing instrument and its merits and demerits were analyzed. A new design scheme of auto testing instrument for gratings efficiency was proposed, which had compact structure, easily acquired precision and was capable of real-time test. Its feasibility analysis was made for actual manufacture.
引文
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