一种双光栅干涉位移传感器的研究
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摘要
随着现代制造朝着高精密方向发展,满足一般实验和生产条件下的低成本、方便实用的高精密位移计量测试手段和测量传感器面临紧迫的需求。
本文研究一种基于双光栅干涉原理位移传感器。由于衍射干涉的采用,该传感器具有大量程、高分辨率与高精度,同时由于是双光栅干涉,其结构简单、紧凑,具有良好的稳定性和抗环境干扰能力,因而适合一般实验和生产条件下高精密位移测量需要。
本文对双光栅干涉进行了深入研究,导出了双光栅干涉位移测量的基本原理,在此基础上,完成了双光栅干涉位移传感器系统的设计,包括机械系统设计和信号处理电路设计,并构建了系统实验装置,该装置由半导体激光器、双光栅干涉单元、位移导向机构、干涉条纹光电接收与信号处理电路、计数细分与位移数显单元等,其设计测量范围达15mm,分辨力达0.01μm。论文对影响系统精度特性的主要因素,包括机械、光学、电气因素进行了分析。
最后,利用建构的实验装置,对系统进行了测试实验。初步实验结果显示系统易于实现良好的精度特性和稳定性,能满足一般实验和生产条件下高精密位移测量需要。
With the development of modern manufacturing, high precision measuring and displacement sensor is used more urgently which is low cost and convenient in normal experiment and production conditions.
In this paper, a kind of displacement sensor based on the principle of double grating interference is introduced. Owing to the diffraction and interference, this displacement sensor has large measurement range, high accuracy, And because of double grating interference, it takes less room, is very steady, and has ability to resist environment noise. So it meets the need of high precision measuring in normal experiment and production conditions.
First of all, double grating interference is researched deeply in this paper. And make out the principle of two gratings interference. Second, a double grating interference displacement sensor system is designed, and this system contents the mechanical system design and the signal processing circuit design. A experimental device is made. And it is made up of semiconductor laser, double grating interference cell, displacement guiding mechanism, photoelectric receiver, the signal processing circuit and so on. The design measurement range can reach 15mm, the resolving power can reach 0.01μm. Third, the analysis about system accuracy and factors such as mechanical factors, optical factors and electric factors which shall influence the accuracy is worked out.
At last, testing experiment is carry out based on the experimental device. Initial experiment result proves that the system has a good accuracy character and stability, and could meet the need of high precision measuring in normal experiment and production conditions.
本文研究一种基于双光栅干涉原理位移传感器。由于衍射干涉的采用,该传感器具有大量程、高分辨率与高精度,同时由于是双光栅干涉,其结构简单、紧凑,具有良好的稳定性和抗环境干扰能力,因而适合一般实验和生产条件下高精密位移测量需要。
本文对双光栅干涉进行了深入研究,导出了双光栅干涉位移测量的基本原理,在此基础上,完成了双光栅干涉位移传感器系统的设计,包括机械系统设计和信号处理电路设计,并构建了系统实验装置,该装置由半导体激光器、双光栅干涉单元、位移导向机构、干涉条纹光电接收与信号处理电路、计数细分与位移数显单元等,其设计测量范围达15mm,分辨力达0.01μm。论文对影响系统精度特性的主要因素,包括机械、光学、电气因素进行了分析。
最后,利用建构的实验装置,对系统进行了测试实验。初步实验结果显示系统易于实现良好的精度特性和稳定性,能满足一般实验和生产条件下高精密位移测量需要。
With the development of modern manufacturing, high precision measuring and displacement sensor is used more urgently which is low cost and convenient in normal experiment and production conditions.
In this paper, a kind of displacement sensor based on the principle of double grating interference is introduced. Owing to the diffraction and interference, this displacement sensor has large measurement range, high accuracy, And because of double grating interference, it takes less room, is very steady, and has ability to resist environment noise. So it meets the need of high precision measuring in normal experiment and production conditions.
First of all, double grating interference is researched deeply in this paper. And make out the principle of two gratings interference. Second, a double grating interference displacement sensor system is designed, and this system contents the mechanical system design and the signal processing circuit design. A experimental device is made. And it is made up of semiconductor laser, double grating interference cell, displacement guiding mechanism, photoelectric receiver, the signal processing circuit and so on. The design measurement range can reach 15mm, the resolving power can reach 0.01μm. Third, the analysis about system accuracy and factors such as mechanical factors, optical factors and electric factors which shall influence the accuracy is worked out.
At last, testing experiment is carry out based on the experimental device. Initial experiment result proves that the system has a good accuracy character and stability, and could meet the need of high precision measuring in normal experiment and production conditions.
引文
[1]白春礼.纳米科技及其发展前景.华北工学院学报(社科版).2001. 104(3):205-320
[2] G..Binnig,H.Rohrer,Ch.Gerber et al.Surface Studies by Scanning Tunneling Microscopy.Phys.Rev.Let,1982.49(1):130-201
[3]张亦,贺节,商广义.原子力显微镜.光学学报.1995.15(1):320-331
[4] E.D. Sim,J.H.Song,S.K.Chang.Center-of-mass Quantization of Excisions and Fabry-Perot Modes of the Polariton in ZnSe Epilayers. Solid State Communication. 2002.121(9):513-517
[5] P. J.Eggington,A. G. Taylor. Monitoring Crystal Dissolution at Nanometer Resolution ising Laser Reflectometry.Journal of Crystal Growth .2000.208(1):525-532
[6] T.Wang S, Zheng Z.Yang.A high Precision Displacement Sensor Using a Low- Finesse Fiber-Optic Fabry-Perot Uinterferometer. Sensors and Actuators A: Physical. 1998.69(2):134-138
[7] Howard, Lowell,Stone Jack, Fu.Joe.Real-Time Displacement Measurements with a Fabry-Perot Cavity and a Diode Laser Precision Engineering.2001.25( 4):321-335
[8] J.Potter.A.Ezbir,RP.Tatam.A Broad Band Signal Processing Technique for Miniature Low-Finesse Fabry-Perot Unterfernmetric Sensors Optics Communications.1997.140(1):11-14
[9]洪新华,李保国.纳米技术与纳米材料研究应用进展.河南师范大学学报2001(2):501-522
[10] P.Hariharan. Optical interferometry. Rep.Prog.Phy.1990.5(4):230-289
[11]王佳,路刚.纳米位移传感器最小检测信号评述.传感器技术.1998.17(1):1-5.
[12]李伟.偏振光位移传感器原理与方法研究.仪器仪表学报.1999.20(3):221-224.
[13]孙晓明,马军山,强锡富.半导体激光自混合干涉理论研究.中国激光. 1998. A25(11):1018-1022
[14]禹延光,强锡富,魏振禄,孙晓明.差动型激光自混合干涉式位移测量系统.光学学报. 1999.19(9): 1269-12730
[15]马军山,王向朝,方祖捷,强锡富.激光自混合干涉仪的实验研究.中国激光. 2001.A28 (1):29-320
[16] T.Bosch,N. Servagent and S. Donati,Optical feedback interferometry forSensing application. Opt. Eng.2001.40 (1):20 -27
[17] P.J.Rodrigo.M.Lim, and C. Saloma,Optical-feedback semiconductor laser Michelson interfermeter for displacement measurements with directional.1999
[18] P.de Groot and G.M.Gallatin, Backscatter-modulation velocimetry with an external-cavity laser diode. Opt.Leet. 1989.14 (3):122-151
[19] W. M.Wang,W. J. O.Boyle,K .T .V grattan. Self-mixing interference in a diode laser:experimental observations and theoretical analysis. Appl.Opt., 1993.32(9):1551-1558
[20] W. M.Wang, K.T.V. grattan..Active optical feedback in a dual-diode laser configuration applied to displacement measurements with a wide dynamic range. App.Opt.,1994.33 (10):1795-1801
[21] N.Takahashi. S. Kakuma. Active heterodyne interferometer displacement measurement using optical feedback effects of laser diode. Opt. Eng.,1996. 35(3):802-806
[22]孙晓明.半导体激光干涉理论及应用.第一版,国防工业出版社.1998
[23]李伟,路甬祥.带非线性预校功能的偏振光位移传感器.仪器仪表学报.2000.21(1):58-60
[24]金国藩,李景镇.激光测量学.第一版,科学出版社.1998
[25] Y. Yu, H. Tam,W. Chung,and M. S. Demokan. Fiber Bragg grating sensor for simultaneous measurement of displacement and temperature. Opt.Let.,2000,25 (16):1141-1143
[26]余有龙,谭华耀,廖信义,钟永康,关柏鸥.免受温度影响的光纤光栅位移传感器.光学学报.2000.20(4):538-542
[27]廖延.物理光学.北京:电子工业出版社.1986
[28] Wang Q, Chen J. Interferometric system used for testing microdisplacement automatically, Nanjing Li Gong Daxue Xuebao/Journal of Nanjing University of Science & Technology. 1998. 22 (2): 145-148
[29]郁道银,谈恒英.工程光学.机械工业出版社.1998.11
[30]王君立,隗海林.改善莫尔条纹细分精度的硬件实现.传感技术学报. 2005.18(1):149-190
[31]张国雄,金篆芷.测控电路.机械工业出版社.2000
[32]胡乾斌,李光斌,李玲,甘锡英.单片微型计算机原理与应用.华中理工大学出版社.1996.10
[33]周坚.单片机C语言轻松入门.北京航空航天大学出版社.2006.2
[34]刘湘涛,江世明.单片机原理与应用.电子工业出版社.2006.7
[35]沈为民.双光栅干涉仪.苏州大学学报(自然科学).1992. 8(1):72-75
[36]郝德阜.光栅干涉仪德运动误差原理.光学机械.1990.5(1):40-50
[37]沈为民.部分相干照明双光栅干涉仪.苏州大学学报. 1992.8(4):458-460
[38]叶蓉华,洪宝晋,何永蓉.编码非相干光源光栅干涉仪.应用光学. 1997.18(2):37-39
[39]周俊.光栅干涉仪在高精度测量中的技术与应用.精密工程. 1992.3(1):44-51
[40]喻洪鳞,刘旭飞,吴永烽.光栅扭矩传感器的信号电路设计.光电工程.2005.32(8):94-96
[41]曲伟.双光栅干涉仪数字式位移传感器的研究.传感器技术.2004.23(10):22-26
[42]卢国纲.位移测量技术及其传感器的最新发展. WMEM.2005.4(4):74-87
[43]沈为民.正交光栅干涉仪的非近似分析.苏州大学学报(自然科学)1993.9(4):348-351
[2] G..Binnig,H.Rohrer,Ch.Gerber et al.Surface Studies by Scanning Tunneling Microscopy.Phys.Rev.Let,1982.49(1):130-201
[3]张亦,贺节,商广义.原子力显微镜.光学学报.1995.15(1):320-331
[4] E.D. Sim,J.H.Song,S.K.Chang.Center-of-mass Quantization of Excisions and Fabry-Perot Modes of the Polariton in ZnSe Epilayers. Solid State Communication. 2002.121(9):513-517
[5] P. J.Eggington,A. G. Taylor. Monitoring Crystal Dissolution at Nanometer Resolution ising Laser Reflectometry.Journal of Crystal Growth .2000.208(1):525-532
[6] T.Wang S, Zheng Z.Yang.A high Precision Displacement Sensor Using a Low- Finesse Fiber-Optic Fabry-Perot Uinterferometer. Sensors and Actuators A: Physical. 1998.69(2):134-138
[7] Howard, Lowell,Stone Jack, Fu.Joe.Real-Time Displacement Measurements with a Fabry-Perot Cavity and a Diode Laser Precision Engineering.2001.25( 4):321-335
[8] J.Potter.A.Ezbir,RP.Tatam.A Broad Band Signal Processing Technique for Miniature Low-Finesse Fabry-Perot Unterfernmetric Sensors Optics Communications.1997.140(1):11-14
[9]洪新华,李保国.纳米技术与纳米材料研究应用进展.河南师范大学学报2001(2):501-522
[10] P.Hariharan. Optical interferometry. Rep.Prog.Phy.1990.5(4):230-289
[11]王佳,路刚.纳米位移传感器最小检测信号评述.传感器技术.1998.17(1):1-5.
[12]李伟.偏振光位移传感器原理与方法研究.仪器仪表学报.1999.20(3):221-224.
[13]孙晓明,马军山,强锡富.半导体激光自混合干涉理论研究.中国激光. 1998. A25(11):1018-1022
[14]禹延光,强锡富,魏振禄,孙晓明.差动型激光自混合干涉式位移测量系统.光学学报. 1999.19(9): 1269-12730
[15]马军山,王向朝,方祖捷,强锡富.激光自混合干涉仪的实验研究.中国激光. 2001.A28 (1):29-320
[16] T.Bosch,N. Servagent and S. Donati,Optical feedback interferometry forSensing application. Opt. Eng.2001.40 (1):20 -27
[17] P.J.Rodrigo.M.Lim, and C. Saloma,Optical-feedback semiconductor laser Michelson interfermeter for displacement measurements with directional.1999
[18] P.de Groot and G.M.Gallatin, Backscatter-modulation velocimetry with an external-cavity laser diode. Opt.Leet. 1989.14 (3):122-151
[19] W. M.Wang,W. J. O.Boyle,K .T .V grattan. Self-mixing interference in a diode laser:experimental observations and theoretical analysis. Appl.Opt., 1993.32(9):1551-1558
[20] W. M.Wang, K.T.V. grattan..Active optical feedback in a dual-diode laser configuration applied to displacement measurements with a wide dynamic range. App.Opt.,1994.33 (10):1795-1801
[21] N.Takahashi. S. Kakuma. Active heterodyne interferometer displacement measurement using optical feedback effects of laser diode. Opt. Eng.,1996. 35(3):802-806
[22]孙晓明.半导体激光干涉理论及应用.第一版,国防工业出版社.1998
[23]李伟,路甬祥.带非线性预校功能的偏振光位移传感器.仪器仪表学报.2000.21(1):58-60
[24]金国藩,李景镇.激光测量学.第一版,科学出版社.1998
[25] Y. Yu, H. Tam,W. Chung,and M. S. Demokan. Fiber Bragg grating sensor for simultaneous measurement of displacement and temperature. Opt.Let.,2000,25 (16):1141-1143
[26]余有龙,谭华耀,廖信义,钟永康,关柏鸥.免受温度影响的光纤光栅位移传感器.光学学报.2000.20(4):538-542
[27]廖延.物理光学.北京:电子工业出版社.1986
[28] Wang Q, Chen J. Interferometric system used for testing microdisplacement automatically, Nanjing Li Gong Daxue Xuebao/Journal of Nanjing University of Science & Technology. 1998. 22 (2): 145-148
[29]郁道银,谈恒英.工程光学.机械工业出版社.1998.11
[30]王君立,隗海林.改善莫尔条纹细分精度的硬件实现.传感技术学报. 2005.18(1):149-190
[31]张国雄,金篆芷.测控电路.机械工业出版社.2000
[32]胡乾斌,李光斌,李玲,甘锡英.单片微型计算机原理与应用.华中理工大学出版社.1996.10
[33]周坚.单片机C语言轻松入门.北京航空航天大学出版社.2006.2
[34]刘湘涛,江世明.单片机原理与应用.电子工业出版社.2006.7
[35]沈为民.双光栅干涉仪.苏州大学学报(自然科学).1992. 8(1):72-75
[36]郝德阜.光栅干涉仪德运动误差原理.光学机械.1990.5(1):40-50
[37]沈为民.部分相干照明双光栅干涉仪.苏州大学学报. 1992.8(4):458-460
[38]叶蓉华,洪宝晋,何永蓉.编码非相干光源光栅干涉仪.应用光学. 1997.18(2):37-39
[39]周俊.光栅干涉仪在高精度测量中的技术与应用.精密工程. 1992.3(1):44-51
[40]喻洪鳞,刘旭飞,吴永烽.光栅扭矩传感器的信号电路设计.光电工程.2005.32(8):94-96
[41]曲伟.双光栅干涉仪数字式位移传感器的研究.传感器技术.2004.23(10):22-26
[42]卢国纲.位移测量技术及其传感器的最新发展. WMEM.2005.4(4):74-87
[43]沈为民.正交光栅干涉仪的非近似分析.苏州大学学报(自然科学)1993.9(4):348-351