精密柱径测量理论、方法与技术的研究
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摘要
自古以来，轴的直径测量一直是制造业的经典课题，从人类制造第一根轴开始，如何测量其直径，并使测量精度不断提高便自始至终成为机械师、科学家们追求的目标。基于新时期国防军工、航空航天事业的发展需要，国家“九五”、国防计量“十五”都把超精密柱径测量纳入重点研究发展项目。本文的研究工作正是在这样一个背景下开展的。
本论文针对精密柱径测量，围绕着提高柱径测量精度的关键理论、方法与技术展开了深入的研究。论文的主要研究内容包括：
1、比较了现有的柱径测量设备和测量原理，基于几何光学法，首次建立了光学扫描测径通用的光学扫描测径数学模型，分析了检出灵敏度和光斑尺寸的关系，并将通用理论模型应用于峰(谷)值、过零和激光半焦斑等三种边缘检出方法，以进行检验。在CCD图像法测径中，基于图像边缘识别理论和方法，建立了柱径CCD光学边缘图像的识别和细分方法。
2、基于BP神经网络，首次在柱径边缘特征点定位路径优化中，建立了基于被测参数模型的神经网络位移预测器；
3、根据黄金分割最优化方法建立了小区域超精密定位最优路径策略。在超精密柱边峰值定位时，首次建立了BP神经网络路径位移预测器和黄金分割最优化路径策略的复合应用路径搜索策略，峰值检出测量效率提高数十倍。
4、基于机构运动学原理，根据测头和被测件的封闭链关系，应用齐次坐标变换法，建立了超精密测量机的运动定位误差综合数学模型，进一步完善了以往测量机的运动定位误差模型。
5、建立了接触测量测头结构参数、设计安装定位误差与测量精度之间的数学模型。首次全面的通过仿真计算比较了各种参数特性对测量结果的影响，给出了具体工程设计、装配的指导原则。
6、基于赫兹接触理论，由于测头接触力产生的弹性变形数学模型，并针对测头、工件不同的参数因子进行了数字仿真，实现了对测头接触弹性变形误差的补偿。
7、设计并研制了新型直线电机驱动进给系统(LDEMA)，并对LDEMA的电磁场特点进行了有限元分析。此外，在动力学分析的基础上，建立了LDEMA的传递函数模型。并针对LDEMA在超精密接触测量中的应用，建立了自调整模糊PID控制策略(SAFPID)。
8、基于对精密直径测量中关键理论、方法和技术的研究，设计并研制了符合阿贝测长原则的COY-I超精密偶件柱径测量仪，测量精度达到国内领先水平。
9、对超精密测量的环境控制进行了研究，提出了相应的控制策略和方法，并最终应用于COY-I超精密偶件柱径测量的工程实践中。
From of old, improving the diameter measurement accuracy of cylinder is a classical problem in the field of manufacture. Since the first cylinder was made, it has been the goal, which the craftsman and the engineer eager after from beginning to end, to find the better way of diameter measurement and to make these measurements more and more precise. Nowadays, with the rapid development of the military and aerospace technology, the demands of large dimension and high accuracy in cylinder manufacture is becoming more and more important. No ultra-precision measurement, no ultra-precision manufacture. The work described in the dissertation is researched under this background. The dissertation focuses on the key theory, method and techniques of improving the cylinder
diameter measurement accuracy. The main research concerns on the following lists: 1 , Compared with existing devices and principles of the cylinder diameter measurement, a new optical scanning measure diameter mathematical model is built, which is based on geometrical optics approach. The relationship of sensibility and spot size is analyzed. And the multipurpose theoretical model is used in edge checkout methods include laser half-focus method, Zero-pass method and extremum method. In CCD scanning method, the image edge checkout model and the pixel subdivision is established based on the principle of image edge identify. 2, A new displacement forecast model in search of character point on cylinder edge is first time established. The model is based on BP neural network and the parameter model of the cylinder which under detect.
3, Based on golden section optimal method, the localization strategy of ultra-precision cylinder edge checkout is proposed in small measurement range. By combination golden section method and BP neural network forecasting, the optimal localization strategy is established in cylinder full measurement range. The efficiency of cylinder diameter measurement is greatly improved.
4, Through study of coordinate relationship between measurement probe and workpiece, the localization error of ultra-precision measurement mechanical is attained based on coordinate transform method.
5, The mathematical model of measurement error is established . The influence of the probe structure parameter, component design error and mechanical fixing error is all considered in this model. Then, the numerical simulation is fulfilled, along with a series of rules of the influence on precision measurement caused by probe parameter and the relative position between probe and workpiece.
6, Based on Hertz elastic theory, the deformation model of workpiece caused by touch force is
established. And the numerical simulation is also fulfilled, along with a series of rules of the influence on contact property caused by the characteristic parameters of probe and workpiece. Then the deformation error caused by touch force can be compensated in the last result. 7, A novel linear DC electromagnetism actuator(LDEMA) for ultra-precise contact probe positioning is proposed. The electromagnetism character of LDEMA is analysed by using FEM method. On the basis of electromagnetism theory, ihe transfer function between displacement and controlled parameters of LDEMA system is obtained. Meanwhile, a kinetic mathematical model of motion characteristic for LDEMA system is studied in this dissertation. The paper also brings forward a hybrid control method of Fuzzy-PID, which resolve perfectly the problem of response's delay and the fuzzy positioning value of LDEMA. 8 , A novel instrument that can attain ultra-precision for measuring diameter of cylinder is presented. The instrument is designed on the ba
sis of Abyi principle and the techniques researched in this dissertation, such as LDEMA, Fuzzy-PID control, air-lubricated hydrostatic slide guide and contact error compensation. The instrument measurement precision is on top of the diameter measurement field.
9, The affection of vibration and temperature is also considered. Relevant controlling method is proposed
本论文针对精密柱径测量，围绕着提高柱径测量精度的关键理论、方法与技术展开了深入的研究。论文的主要研究内容包括：
1、比较了现有的柱径测量设备和测量原理，基于几何光学法，首次建立了光学扫描测径通用的光学扫描测径数学模型，分析了检出灵敏度和光斑尺寸的关系，并将通用理论模型应用于峰(谷)值、过零和激光半焦斑等三种边缘检出方法，以进行检验。在CCD图像法测径中，基于图像边缘识别理论和方法，建立了柱径CCD光学边缘图像的识别和细分方法。
2、基于BP神经网络，首次在柱径边缘特征点定位路径优化中，建立了基于被测参数模型的神经网络位移预测器；
3、根据黄金分割最优化方法建立了小区域超精密定位最优路径策略。在超精密柱边峰值定位时，首次建立了BP神经网络路径位移预测器和黄金分割最优化路径策略的复合应用路径搜索策略，峰值检出测量效率提高数十倍。
4、基于机构运动学原理，根据测头和被测件的封闭链关系，应用齐次坐标变换法，建立了超精密测量机的运动定位误差综合数学模型，进一步完善了以往测量机的运动定位误差模型。
5、建立了接触测量测头结构参数、设计安装定位误差与测量精度之间的数学模型。首次全面的通过仿真计算比较了各种参数特性对测量结果的影响，给出了具体工程设计、装配的指导原则。
6、基于赫兹接触理论，由于测头接触力产生的弹性变形数学模型，并针对测头、工件不同的参数因子进行了数字仿真，实现了对测头接触弹性变形误差的补偿。
7、设计并研制了新型直线电机驱动进给系统(LDEMA)，并对LDEMA的电磁场特点进行了有限元分析。此外，在动力学分析的基础上，建立了LDEMA的传递函数模型。并针对LDEMA在超精密接触测量中的应用，建立了自调整模糊PID控制策略(SAFPID)。
8、基于对精密直径测量中关键理论、方法和技术的研究，设计并研制了符合阿贝测长原则的COY-I超精密偶件柱径测量仪，测量精度达到国内领先水平。
9、对超精密测量的环境控制进行了研究，提出了相应的控制策略和方法，并最终应用于COY-I超精密偶件柱径测量的工程实践中。
From of old, improving the diameter measurement accuracy of cylinder is a classical problem in the field of manufacture. Since the first cylinder was made, it has been the goal, which the craftsman and the engineer eager after from beginning to end, to find the better way of diameter measurement and to make these measurements more and more precise. Nowadays, with the rapid development of the military and aerospace technology, the demands of large dimension and high accuracy in cylinder manufacture is becoming more and more important. No ultra-precision measurement, no ultra-precision manufacture. The work described in the dissertation is researched under this background. The dissertation focuses on the key theory, method and techniques of improving the cylinder
diameter measurement accuracy. The main research concerns on the following lists: 1 , Compared with existing devices and principles of the cylinder diameter measurement, a new optical scanning measure diameter mathematical model is built, which is based on geometrical optics approach. The relationship of sensibility and spot size is analyzed. And the multipurpose theoretical model is used in edge checkout methods include laser half-focus method, Zero-pass method and extremum method. In CCD scanning method, the image edge checkout model and the pixel subdivision is established based on the principle of image edge identify. 2, A new displacement forecast model in search of character point on cylinder edge is first time established. The model is based on BP neural network and the parameter model of the cylinder which under detect.
3, Based on golden section optimal method, the localization strategy of ultra-precision cylinder edge checkout is proposed in small measurement range. By combination golden section method and BP neural network forecasting, the optimal localization strategy is established in cylinder full measurement range. The efficiency of cylinder diameter measurement is greatly improved.
4, Through study of coordinate relationship between measurement probe and workpiece, the localization error of ultra-precision measurement mechanical is attained based on coordinate transform method.
5, The mathematical model of measurement error is established . The influence of the probe structure parameter, component design error and mechanical fixing error is all considered in this model. Then, the numerical simulation is fulfilled, along with a series of rules of the influence on precision measurement caused by probe parameter and the relative position between probe and workpiece.
6, Based on Hertz elastic theory, the deformation model of workpiece caused by touch force is
established. And the numerical simulation is also fulfilled, along with a series of rules of the influence on contact property caused by the characteristic parameters of probe and workpiece. Then the deformation error caused by touch force can be compensated in the last result. 7, A novel linear DC electromagnetism actuator(LDEMA) for ultra-precise contact probe positioning is proposed. The electromagnetism character of LDEMA is analysed by using FEM method. On the basis of electromagnetism theory, ihe transfer function between displacement and controlled parameters of LDEMA system is obtained. Meanwhile, a kinetic mathematical model of motion characteristic for LDEMA system is studied in this dissertation. The paper also brings forward a hybrid control method of Fuzzy-PID, which resolve perfectly the problem of response's delay and the fuzzy positioning value of LDEMA. 8 , A novel instrument that can attain ultra-precision for measuring diameter of cylinder is presented. The instrument is designed on the ba
sis of Abyi principle and the techniques researched in this dissertation, such as LDEMA, Fuzzy-PID control, air-lubricated hydrostatic slide guide and contact error compensation. The instrument measurement precision is on top of the diameter measurement field.
9, The affection of vibration and temperature is also considered. Relevant controlling method is proposed
引文
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