石英管尺寸光电综合检测系统的研究
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摘要
基于激光扫描检测技术，本文提出了一种用于石英管多种尺寸参数非接触自动测量的光电检测系统——石英管尺寸光电综合检测系统。该系统主要由激光扫描综合测量仪、回转与直线运动伺服控制系统、主体精密机械系统、主控制器和计算机实时控制与数据处理等系统组成。激光扫描综合测量仪可同时测量被测石英管某一位置的外径和壁厚。系统将激光扫描综合测量仪、直线与回转伺服控制系统和计算机有机地结合，采用测量仪轴向移动，而被测石英管在固定位置上转运而不移动的测量方案，根据测量出多个截面和多个不同位置的外径和壁厚数据，计算出被测石英管的截面积、椭圆度、偏壁度、弯曲度等其它参数。
本论文主要对“石英管尺寸光电综合检测系统”的研制进行基础理论探讨，在确定该检测系统的总体方案设计的基础上，着重研究了激光扫描综合测量仪的光学系统设计、系统硬件电路设计、系统软件部分设计，通过Matlab对信号处理过程进行仿真，并对实验结果和误差进行了分析，提出了进一步改善系统精度的方法。整机调试和实际测量结果表明，系统测径和测厚精度均优于±0.02mm。
Based on laser scanning measuring technology, a quartz tube dimensions photoelectric comprehensive measuring system, which is applied to measure the dimensions of quartz tube non-contacted automatically, is presented in this paper. The system is composed of a laser scanning comprehensive measuring instrument, rotate and linear movement servo-control systems, a main fine mechanic system, a main controller, a real time controlling and data processing system by computer. The instrument can measure the data of outer diameter and wall thickness of certain position of quartz tube. The project is used which measuring instrument moved along axis and the measured quartz tube rotated and fixed ort a position. According to data of outer diameter and wall thickness of different sections and positions, it can calculate the parameters of section area, ellipticity, wall thickness error, flexibility and so on.
Based on theoretical research and total design, the designs of optical system, hardware circuit, software and precision analysis are discussed in this paper. By measuring the data of electric machinery rotating speed, the error that is affected by its instability will be corrected. And Matlab emulates the process of data processing in the computer. The real measured data indicates that the system can be up to measuring outer diameter and wall thickness precision that will be supper to 0.02mm.
本论文主要对“石英管尺寸光电综合检测系统”的研制进行基础理论探讨，在确定该检测系统的总体方案设计的基础上，着重研究了激光扫描综合测量仪的光学系统设计、系统硬件电路设计、系统软件部分设计，通过Matlab对信号处理过程进行仿真，并对实验结果和误差进行了分析，提出了进一步改善系统精度的方法。整机调试和实际测量结果表明，系统测径和测厚精度均优于±0.02mm。
Based on laser scanning measuring technology, a quartz tube dimensions photoelectric comprehensive measuring system, which is applied to measure the dimensions of quartz tube non-contacted automatically, is presented in this paper. The system is composed of a laser scanning comprehensive measuring instrument, rotate and linear movement servo-control systems, a main fine mechanic system, a main controller, a real time controlling and data processing system by computer. The instrument can measure the data of outer diameter and wall thickness of certain position of quartz tube. The project is used which measuring instrument moved along axis and the measured quartz tube rotated and fixed ort a position. According to data of outer diameter and wall thickness of different sections and positions, it can calculate the parameters of section area, ellipticity, wall thickness error, flexibility and so on.
Based on theoretical research and total design, the designs of optical system, hardware circuit, software and precision analysis are discussed in this paper. By measuring the data of electric machinery rotating speed, the error that is affected by its instability will be corrected. And Matlab emulates the process of data processing in the computer. The real measured data indicates that the system can be up to measuring outer diameter and wall thickness precision that will be supper to 0.02mm.
引文
1．雷玉堂．王庆有．何加铭．光电检测技术．北京．中国计量出版社，1997
2．卢春生．光电探测技术及应用．机械工业出版社，1992
3．孙明甫．光电尺寸检测应用及国内发展．电光系统，1993，1：46～54
4．张宁．玻璃制品的检验(一)．玻璃与搪瓷，1998，19(3)：62～67
5. L.G. Cohen and P. Glyn. Dynamic measurement of optical fiber diameter. Rev. Sci. Instrum., 1973, 44:1749
6. H.M. Presby. Geometric measurement of perform rods and starting tubes. Applied Optics, 1982, 21(19): 3528～3530
7. D.H.Smithgall. L.S.Watkins. High speed non-contact fiber diameter measurement using forward light scattering. Applied Optics, 1997, 16:2395～2397
8．严慎．反射法测量石英管外径及壁厚．光学仪器，1986，8(4)：22～26
9．陈明仪．光纤胚棒外径在线自动检测应用．光学仪器，1986，8(3)：13～15
10. B.T. Meggitt. Geometrical measurements of fiber-optic starter tubes using a novel optical technique. Optic & Laser Technology, 1989, 21(5): 343～344
11. A.B. Fedortsov. A fast operating laser device for measuring the thickness of transparent solid and liquid films. Rev. Sci. Instrument, 1992, 63(10): 3579～3582
12. Chen Weimin. A new type high precision laser thickness gauge. SPIE, 1990, 1230: 419～420
13. Richard Hobe. Laser technology provides non-contact dimensional measurement. Applied Optics, 1982, 21(19): 1326～1329
14．王林．玻璃管径的激光在线监测．红外与激光技术，1993，1：31～34
15．娄菁林．测量石英管几何量的光学原理．光学技术，1991，2：25～31
16. Pawel Fotowicz. Richard Jablonski. Laser scanning system for measurement of optical fiber diameter. SPIE. Laser Technology Ⅱ, 1987, 859:245～248
17．T．C．Bopohehckar．不接触测量玻璃管外径的双坐标激光测量仪．国外计量，1991，6：24～26
18. H.M. Presby. Preform core diameter measurement by Flouresence. Applied Optics, 1991, 20(24): 15
19．陈本智．陈兴梧．在线实时检测玻璃管外径和壁厚尺寸的新技术．计量学报，1995，16(3)：221～225
20．桑胜泉．用激光扫描方法遥测透明管子的厚度．激光与光学，1989，11：29～31
21．孙学珠．CCD传感器检测玻璃管外径和壁厚的研究．计量与测试技术，1995，5：3～5
22．王林．CCD玻璃管几何参数在线检测系统的研制．红外与激光技术工程，1996，25(2)：59～64
23．陈慧玲，杨坤涛．激光扫描在线检测玻璃管外径及壁厚的测量系统研究．应用光学，1996，17(2)：47～49
24．刘文兵．杨坤涛．CCD成像在线测量玻璃管外径及壁厚方法的研究．应用光学，1995，16(4)：44～46
25．陈兴梧．透明玻璃管的在线测量．计量技术，1996，8：4～7
26．袁绍藻．采用微机进行数据处理的CCD摄像动态测径仪．仪器仪表学报，1989，10(3)：297～303
27．郑殊．智能化激光扫描测径仪的研制．大连理工大学学报，1994，34(5)：539～544
28．阎晓峰．激光扫描测量及其应用．激光与红外，1995，25(3)：30～32
29. Bodaj V, Klement E. Remote measurement of distance and thickness using a deflected laser beam. Applied Optics, 1976, 15(6: 1432
30．安毓英．曾小东编．光学传感与测量．北京．电子工业出版社，2001
31．王秀琳，黄文财，郭福源．半导体激光束准直系统的研究．应用光学，1999，20(1)：1～6
32．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15～18
33. Jiang Hulin, An Zhiyong, Zhao Tieju. Application of a semiconductor laser in a optoclectronic system. SPIE, 1996, 2899: 399～408
34．李成志．“JSY—CX激光扫描尺寸形状自动检测仪”科学技术研究报告。长春光学精密机械学院，1994
35．杨大任．高精度线性棱镜扫描器设计．兵工学报．1985，3：32～38
36．刘乐善．微型计算机接口技术及应用．华中理工大学出版社，1993
37．陈粤初．单片机应用系统设计与实践．北京航空航天大学出版社，1991
38．孙海健，潘文，钱俞寿．Visual Basic 4.0通信程序设计．微型机与应用，1998，8：14～15
39．鞠阳．用Visual Basic 4.0开发微机与单片机通信程序，微型机与应用，1998，8：16～18
40．赵振亚．微机控制系统软件抗干扰的若干措施．电子技术应用，1988，3：8～10
41. Zhang Guoyu, An Zhiyong, Zhang Congzhou. Theoretical analysis for the characteristics of a laser-scanned measuring system. SPIE, 1996, 2899:328～347
42. Zhang, Guoyu, An Zhiyong, Zhang Congzhou. Research on a non-contact steel products dynamic on-line inspection instrument. SPIE, 1996, 2899:354～361
43. Zhang Congzhou, An Zhiyong, Zhang Gouyu. Research on a semiconductor laser-scanned multi-functional on-line inspection system. SPIE, 1996, 2899:393～398
44．于从新，项世法．激光扫描测厚的信号处理．光电工程，1995，22(5)：69～72
45. R.P. Shukla. Sanjiva Kumar. Interferometric measurement of thickness of thin films of former deposited on glass plates. Journal of Optics, 2000, 29(2): 85～93
2．卢春生．光电探测技术及应用．机械工业出版社，1992
3．孙明甫．光电尺寸检测应用及国内发展．电光系统，1993，1：46～54
4．张宁．玻璃制品的检验(一)．玻璃与搪瓷，1998，19(3)：62～67
5. L.G. Cohen and P. Glyn. Dynamic measurement of optical fiber diameter. Rev. Sci. Instrum., 1973, 44:1749
6. H.M. Presby. Geometric measurement of perform rods and starting tubes. Applied Optics, 1982, 21(19): 3528～3530
7. D.H.Smithgall. L.S.Watkins. High speed non-contact fiber diameter measurement using forward light scattering. Applied Optics, 1997, 16:2395～2397
8．严慎．反射法测量石英管外径及壁厚．光学仪器，1986，8(4)：22～26
9．陈明仪．光纤胚棒外径在线自动检测应用．光学仪器，1986，8(3)：13～15
10. B.T. Meggitt. Geometrical measurements of fiber-optic starter tubes using a novel optical technique. Optic & Laser Technology, 1989, 21(5): 343～344
11. A.B. Fedortsov. A fast operating laser device for measuring the thickness of transparent solid and liquid films. Rev. Sci. Instrument, 1992, 63(10): 3579～3582
12. Chen Weimin. A new type high precision laser thickness gauge. SPIE, 1990, 1230: 419～420
13. Richard Hobe. Laser technology provides non-contact dimensional measurement. Applied Optics, 1982, 21(19): 1326～1329
14．王林．玻璃管径的激光在线监测．红外与激光技术，1993，1：31～34
15．娄菁林．测量石英管几何量的光学原理．光学技术，1991，2：25～31
16. Pawel Fotowicz. Richard Jablonski. Laser scanning system for measurement of optical fiber diameter. SPIE. Laser Technology Ⅱ, 1987, 859:245～248
17．T．C．Bopohehckar．不接触测量玻璃管外径的双坐标激光测量仪．国外计量，1991，6：24～26
18. H.M. Presby. Preform core diameter measurement by Flouresence. Applied Optics, 1991, 20(24): 15
19．陈本智．陈兴梧．在线实时检测玻璃管外径和壁厚尺寸的新技术．计量学报，1995，16(3)：221～225
20．桑胜泉．用激光扫描方法遥测透明管子的厚度．激光与光学，1989，11：29～31
21．孙学珠．CCD传感器检测玻璃管外径和壁厚的研究．计量与测试技术，1995，5：3～5
22．王林．CCD玻璃管几何参数在线检测系统的研制．红外与激光技术工程，1996，25(2)：59～64
23．陈慧玲，杨坤涛．激光扫描在线检测玻璃管外径及壁厚的测量系统研究．应用光学，1996，17(2)：47～49
24．刘文兵．杨坤涛．CCD成像在线测量玻璃管外径及壁厚方法的研究．应用光学，1995，16(4)：44～46
25．陈兴梧．透明玻璃管的在线测量．计量技术，1996，8：4～7
26．袁绍藻．采用微机进行数据处理的CCD摄像动态测径仪．仪器仪表学报，1989，10(3)：297～303
27．郑殊．智能化激光扫描测径仪的研制．大连理工大学学报，1994，34(5)：539～544
28．阎晓峰．激光扫描测量及其应用．激光与红外，1995，25(3)：30～32
29. Bodaj V, Klement E. Remote measurement of distance and thickness using a deflected laser beam. Applied Optics, 1976, 15(6: 1432
30．安毓英．曾小东编．光学传感与测量．北京．电子工业出版社，2001
31．王秀琳，黄文财，郭福源．半导体激光束准直系统的研究．应用光学，1999，20(1)：1～6
32．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15～18
33. Jiang Hulin, An Zhiyong, Zhao Tieju. Application of a semiconductor laser in a optoclectronic system. SPIE, 1996, 2899: 399～408
34．李成志．“JSY—CX激光扫描尺寸形状自动检测仪”科学技术研究报告。长春光学精密机械学院，1994
35．杨大任．高精度线性棱镜扫描器设计．兵工学报．1985，3：32～38
36．刘乐善．微型计算机接口技术及应用．华中理工大学出版社，1993
37．陈粤初．单片机应用系统设计与实践．北京航空航天大学出版社，1991
38．孙海健，潘文，钱俞寿．Visual Basic 4.0通信程序设计．微型机与应用，1998，8：14～15
39．鞠阳．用Visual Basic 4.0开发微机与单片机通信程序，微型机与应用，1998，8：16～18
40．赵振亚．微机控制系统软件抗干扰的若干措施．电子技术应用，1988，3：8～10
41. Zhang Guoyu, An Zhiyong, Zhang Congzhou. Theoretical analysis for the characteristics of a laser-scanned measuring system. SPIE, 1996, 2899:328～347
42. Zhang, Guoyu, An Zhiyong, Zhang Congzhou. Research on a non-contact steel products dynamic on-line inspection instrument. SPIE, 1996, 2899:354～361
43. Zhang Congzhou, An Zhiyong, Zhang Gouyu. Research on a semiconductor laser-scanned multi-functional on-line inspection system. SPIE, 1996, 2899:393～398
44．于从新，项世法．激光扫描测厚的信号处理．光电工程，1995，22(5)：69～72
45. R.P. Shukla. Sanjiva Kumar. Interferometric measurement of thickness of thin films of former deposited on glass plates. Journal of Optics, 2000, 29(2): 85～93