双向激光扫描检测系统的研究
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摘要
在单向激光扫描检测技术的基础之上，提出了一种双向激光扫描检测系统，其采用激光扫描检测技术与特殊光学系统相结合，用准直半导体激光扫描光束对被测工件径向某一截面的两个相互垂直方向同时扫描，经扫描接收光学系统、高速光电变换、电子学系统和微机数据处理系统，对将携带有垂直方向被测量信息的光束进行处理，实现了回转体工件同一截面两个垂直方向的径向尺寸和椭圆度等参数的非接触自动测量，解决了同时非接触测量回转体零件同一截面两个径向尺寸的难题，它具有高速，高精度和非接触自动测量等特点。
本文论述了双向激光扫描检测系统的测量原理，进行了系统的总体设计，在确定该检测系统总体方案设计的基础上，着重研究了双向激光扫描检测系统的光学系统设计、系统硬件电路设计、系统软件部分设计，并对误差进行了分析，提出了进一步改善系统精度的方法。整机调试和实际测量结果表明，系统直径测量精度均优于±0.002mm。
On the base of the single-diameter laser-scanned measuring technology, a double direction laser-scanned measuring system is presented. Which combinate the laser-scanned measuring technology with special optical system. In the system, the collimation semiconductor laser-scanned beam scanning two perpendiculars direct of one plane of the measured workpiece at the same time is made. The beams with the dimension information of two perpendiculars direct are processed by the scanning receive system, the high-speed photoelectric transition and electronic data process. Two measured results of the diametric directs and ellipse tolerance,etc, parameter, of the turning workpiece on the same plane are obtained by non-contact automatic measurement. The problem of non-contact measurement of two perpendiculars direct of one plane of turning workpiece is settled. It processes many peculiarities, such as high speed, high accuracy and non-contact automatic measurement, etc.
In this paper, the measuring principle of the double directions laser-scanned measuring system is introduced in detail. The overall structure design of the system is made. Based on measuring system total design, the designs of optical system, hardware circuit, software of the system are emphatically researched. The measuring errors of the system are analyzed, and the method of improving system accuracy is put up. The finally testing and the results of the experiment indicate that the diameters measuring precision are supper to 0.002mm.
本文论述了双向激光扫描检测系统的测量原理，进行了系统的总体设计，在确定该检测系统总体方案设计的基础上，着重研究了双向激光扫描检测系统的光学系统设计、系统硬件电路设计、系统软件部分设计，并对误差进行了分析，提出了进一步改善系统精度的方法。整机调试和实际测量结果表明，系统直径测量精度均优于±0.002mm。
On the base of the single-diameter laser-scanned measuring technology, a double direction laser-scanned measuring system is presented. Which combinate the laser-scanned measuring technology with special optical system. In the system, the collimation semiconductor laser-scanned beam scanning two perpendiculars direct of one plane of the measured workpiece at the same time is made. The beams with the dimension information of two perpendiculars direct are processed by the scanning receive system, the high-speed photoelectric transition and electronic data process. Two measured results of the diametric directs and ellipse tolerance,etc, parameter, of the turning workpiece on the same plane are obtained by non-contact automatic measurement. The problem of non-contact measurement of two perpendiculars direct of one plane of turning workpiece is settled. It processes many peculiarities, such as high speed, high accuracy and non-contact automatic measurement, etc.
In this paper, the measuring principle of the double directions laser-scanned measuring system is introduced in detail. The overall structure design of the system is made. Based on measuring system total design, the designs of optical system, hardware circuit, software of the system are emphatically researched. The measuring errors of the system are analyzed, and the method of improving system accuracy is put up. The finally testing and the results of the experiment indicate that the diameters measuring precision are supper to 0.002mm.
引文
1．高稚允，高岳．光电检测技术．北京：中国计量出版社，1995．
2．雷玉堂，王庆有，何加铭．光电检测技术．北京：中国计量出版社，1997．
3．卢春生．光电探测技术及应用．北京：机械工业出版社，1992．
4．安志勇．光电检测技术的现状与发展前景．21世纪中国光电子技术及产业发展战略长春论坛论文集，2001：172-175
5．日本．Keyence LS-7000系列 透过光束测量仪器产品手册．
6．美国．TSI公司直径测量产品TSI Hotix Gauges．
7．美国．美国BetaLaserMike公司单向激光扫描产品手册．
8．英国Scantron Industrial Products Ltd激光测量直径产品手册．
9．张凤生，刘冲．高精度激光衍射测径系统．仪器仪表学报，2001(6)：152-154
10．张全法，齐红基，黄立华．动态线材直径测量新方法．仪器与仪表，2001(1)：17-21
11．张南洋生．杨坤涛 激光扫描相位边缘检测方法的研究．激光技术，2001，25(6)：421-426
12．李为民，俞巧云，袭凌红．投影法CCD测径系统．仪表技术与传感器，2001(1)：34-35
13．冯正明，蒋诚志，李敬杰等．中型热轧圆钢直径测量仪。计量学报，17(2)：100-106
14. Guoyu Zhang, Xiping Xu,Chengzhi Li,Hongguang Sun. "Research on the double diameters laser-scanned measuring system".SPIE, vol.4927, p750-754, 2002.
15．王秀琳，黄文财，郭福源．半导体激光束准直系统的研究．应用光学，1999，20(1)：1-6
16．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15-18
17．刘兴占，刘向东．激光扫描镜的应用研究．激光技术．1998(12)：346-349
18 戴士杰，崔庆华，岳宏，蔡鹤皋．新型机器人视觉系统准直相干光束的获取．红外与激光工程，2002，31(5)：437-440
19．陈炳林，张河，孙权意．脉冲式半导体激光器准直光学系统的设计．激光技术，2003，27(3)：243-245
20．杨国光．近代光学测试技术．杭州：浙江大学出版社，1997．
21．处允锦．仪表结构设计基础．北京：机械工业出版社，1982．
22 [苏联]о．ф．季申柯 主编．仪器仪表零件设计．处允锦 等译，北京：机械工业出版社．1985．
23．陈玉清．王静环．激光原理．杭州：浙江大学出版社，1997．
24．俞宽新．江铁良．赵启大．激光原理与激光技术．北京：北京工业大学出版社，1998．
25．戴树煌等．光学仪器设计．北京：国防工业出版社．1991，46-57
26．王尔祺，宋德慧．光学仪器精度分析．北京：测绘出版社．1988．
27．张以漠．应用光学．北京：机械工业出版社．1998．
28 E. K. Murthy, "Elimination of the thick meniscus element in high-resolution scanning lenses" Opt. Eng. 31 (1), 95-97(1992)
29．金国藩，李景镇．激光测量学．北京：科学出版社，1998．
30 Lesezk Wronkowskl, "Signal transfusing in optoelectronic asurement systems based on the moiré pheaomenon" Opt. Eng. 31 (3), 505-515(1992)
31．李成志．“JSY—CX激光扫描尺寸形状自动检测仪”科学技术研究报告．长春光学精密机械学院，1994．
32 杨大任．高精度线性棱镜扫描器设计．兵工学报，1985(3)：32-38
33. Lesezk Wronkowskl, "Signal transducing in optoelectronic measurement systems based on the moiré phenomenon" Opt. Eng. 31(3),505-515(1992)
34 WenShing Sun Horng Chang et, "Design of high-power a spherical ophthalmic lenses with a reduced error budget" Opt. Eng. 41(2),460-470(2002)
35. Jiang hui ling, An zhi yong,Zhao tie jun, and Li cheng zhi, "Application of a semiconductor laser in a optoelectronic system" SPIE. Vol2899/399-408,1996
36. Zhiwen Liu, Martin Centurrion, George, Panotopoulos, John Hong, Demetri Psaa altis , "Holographic recording of fast events on a CCD camera" OPTICS LETTERS. 27 (1) (2002)
37．薛鸣球等．电影摄影物镜光学设计．北京：中国工业出版社．1971．
38．(苏)в．с．普洛特尼科夫，д．и．瓦尔佛洛麦夫，В．Ё．普斯托瓦洛甫．光学机械仪器设计和计算．祝绍箕 译．桂松范 黄宣劭 校．北京：机械工业出版社，1991．
39．王之江，陈杏蒲，陆汉民，顾培森．光学技术手册．北京：中国工业出版社．1987．
40．高连柱，李成志，韩森．激光扫描检测系统中陀螺效应对检测误差德影响．长春光机学院学报，1986(4)；31-35
41．李成志，高连柱，徐洪吉．激光扫描尺寸自动检测系统设计计算．长春光机学院学报，1986(2)：26-33
42．《光学仪器设计手册》编辑组编．光学仪器设计手册(下册)．北京：国防工业出版社，1972．
43．刘乐善．微型计算机接口技术及应用．华中理工大学出版社，1993．
44. G.Y. Zhang, X.P. xu, X.H. Fu, L, yang, C.Z. Li, "The measurement of diameter in large-scale part processing" Journal of Materials Processing Technology. 2002, vol129,653-657
45. Johan Hult, Maattias Ricchter, Jenny Nygen, "Application of a high-repetition-rate
laser diagnostic system for dingle-cycle-resolved imaging ia internal combustion engines" Appl. Opt. 2002,41(24),5002-5014
46．陈粤初．单片机应用系统设计与实践．北京：北京航空航天大学出版社，1991．
47. M. Petron, J. Kittler. Optimal Edge Detector for Ramp Edges. IEEE. 1991.13(5)483～491.
48．杨大任，姜会林．高精度棱透镜光束扫描器设计．兵工学报，1993(3)：88-91
49．赵振亚．微机控制系统软件抗干扰的若干措施．电子技术应用，1988(3)：8-10
50. Johan Hult, Maattias Ricchter, Jenny Nygen, "Application of a high-repetition-rate laser diagnostic system for dingle-cycle-resolved imaging in internal combustion engines" Appl. Opt. 2002,41(24),5002-5014
51. M. Petrou, J. Kittler. Optimal Edge Detector for Ramp Edges. IEEE. 1991.13(5)483～491
52. Zhang Guoyu, An Zhiyong, Zhang Congzhou. Theoretical analysis for the characteristics of a laser-scanned measuring system. SPIE, vol. 2899, p338-347, 1996
53. Zhang, Guoyu, An Zhiyong, Zhang Congzhou. Research on a non-contact steel products dynamic on-line inspection instrument. SPIE, vol. 2899, p354-361, 1996.
54．毕纪军．如何设计激光扫描系统．激光与光电子学进展，2001(14)：23-26
2．雷玉堂，王庆有，何加铭．光电检测技术．北京：中国计量出版社，1997．
3．卢春生．光电探测技术及应用．北京：机械工业出版社，1992．
4．安志勇．光电检测技术的现状与发展前景．21世纪中国光电子技术及产业发展战略长春论坛论文集，2001：172-175
5．日本．Keyence LS-7000系列 透过光束测量仪器产品手册．
6．美国．TSI公司直径测量产品TSI Hotix Gauges．
7．美国．美国BetaLaserMike公司单向激光扫描产品手册．
8．英国Scantron Industrial Products Ltd激光测量直径产品手册．
9．张凤生，刘冲．高精度激光衍射测径系统．仪器仪表学报，2001(6)：152-154
10．张全法，齐红基，黄立华．动态线材直径测量新方法．仪器与仪表，2001(1)：17-21
11．张南洋生．杨坤涛 激光扫描相位边缘检测方法的研究．激光技术，2001，25(6)：421-426
12．李为民，俞巧云，袭凌红．投影法CCD测径系统．仪表技术与传感器，2001(1)：34-35
13．冯正明，蒋诚志，李敬杰等．中型热轧圆钢直径测量仪。计量学报，17(2)：100-106
14. Guoyu Zhang, Xiping Xu,Chengzhi Li,Hongguang Sun. "Research on the double diameters laser-scanned measuring system".SPIE, vol.4927, p750-754, 2002.
15．王秀琳，黄文财，郭福源．半导体激光束准直系统的研究．应用光学，1999，20(1)：1-6
16．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15-18
17．刘兴占，刘向东．激光扫描镜的应用研究．激光技术．1998(12)：346-349
18 戴士杰，崔庆华，岳宏，蔡鹤皋．新型机器人视觉系统准直相干光束的获取．红外与激光工程，2002，31(5)：437-440
19．陈炳林，张河，孙权意．脉冲式半导体激光器准直光学系统的设计．激光技术，2003，27(3)：243-245
20．杨国光．近代光学测试技术．杭州：浙江大学出版社，1997．
21．处允锦．仪表结构设计基础．北京：机械工业出版社，1982．
22 [苏联]о．ф．季申柯 主编．仪器仪表零件设计．处允锦 等译，北京：机械工业出版社．1985．
23．陈玉清．王静环．激光原理．杭州：浙江大学出版社，1997．
24．俞宽新．江铁良．赵启大．激光原理与激光技术．北京：北京工业大学出版社，1998．
25．戴树煌等．光学仪器设计．北京：国防工业出版社．1991，46-57
26．王尔祺，宋德慧．光学仪器精度分析．北京：测绘出版社．1988．
27．张以漠．应用光学．北京：机械工业出版社．1998．
28 E. K. Murthy, "Elimination of the thick meniscus element in high-resolution scanning lenses" Opt. Eng. 31 (1), 95-97(1992)
29．金国藩，李景镇．激光测量学．北京：科学出版社，1998．
30 Lesezk Wronkowskl, "Signal transfusing in optoelectronic asurement systems based on the moiré pheaomenon" Opt. Eng. 31 (3), 505-515(1992)
31．李成志．“JSY—CX激光扫描尺寸形状自动检测仪”科学技术研究报告．长春光学精密机械学院，1994．
32 杨大任．高精度线性棱镜扫描器设计．兵工学报，1985(3)：32-38
33. Lesezk Wronkowskl, "Signal transducing in optoelectronic measurement systems based on the moiré phenomenon" Opt. Eng. 31(3),505-515(1992)
34 WenShing Sun Horng Chang et, "Design of high-power a spherical ophthalmic lenses with a reduced error budget" Opt. Eng. 41(2),460-470(2002)
35. Jiang hui ling, An zhi yong,Zhao tie jun, and Li cheng zhi, "Application of a semiconductor laser in a optoelectronic system" SPIE. Vol2899/399-408,1996
36. Zhiwen Liu, Martin Centurrion, George, Panotopoulos, John Hong, Demetri Psaa altis , "Holographic recording of fast events on a CCD camera" OPTICS LETTERS. 27 (1) (2002)
37．薛鸣球等．电影摄影物镜光学设计．北京：中国工业出版社．1971．
38．(苏)в．с．普洛特尼科夫，д．и．瓦尔佛洛麦夫，В．Ё．普斯托瓦洛甫．光学机械仪器设计和计算．祝绍箕 译．桂松范 黄宣劭 校．北京：机械工业出版社，1991．
39．王之江，陈杏蒲，陆汉民，顾培森．光学技术手册．北京：中国工业出版社．1987．
40．高连柱，李成志，韩森．激光扫描检测系统中陀螺效应对检测误差德影响．长春光机学院学报，1986(4)；31-35
41．李成志，高连柱，徐洪吉．激光扫描尺寸自动检测系统设计计算．长春光机学院学报，1986(2)：26-33
42．《光学仪器设计手册》编辑组编．光学仪器设计手册(下册)．北京：国防工业出版社，1972．
43．刘乐善．微型计算机接口技术及应用．华中理工大学出版社，1993．
44. G.Y. Zhang, X.P. xu, X.H. Fu, L, yang, C.Z. Li, "The measurement of diameter in large-scale part processing" Journal of Materials Processing Technology. 2002, vol129,653-657
45. Johan Hult, Maattias Ricchter, Jenny Nygen, "Application of a high-repetition-rate
laser diagnostic system for dingle-cycle-resolved imaging ia internal combustion engines" Appl. Opt. 2002,41(24),5002-5014
46．陈粤初．单片机应用系统设计与实践．北京：北京航空航天大学出版社，1991．
47. M. Petron, J. Kittler. Optimal Edge Detector for Ramp Edges. IEEE. 1991.13(5)483～491.
48．杨大任，姜会林．高精度棱透镜光束扫描器设计．兵工学报，1993(3)：88-91
49．赵振亚．微机控制系统软件抗干扰的若干措施．电子技术应用，1988(3)：8-10
50. Johan Hult, Maattias Ricchter, Jenny Nygen, "Application of a high-repetition-rate laser diagnostic system for dingle-cycle-resolved imaging in internal combustion engines" Appl. Opt. 2002,41(24),5002-5014
51. M. Petrou, J. Kittler. Optimal Edge Detector for Ramp Edges. IEEE. 1991.13(5)483～491
52. Zhang Guoyu, An Zhiyong, Zhang Congzhou. Theoretical analysis for the characteristics of a laser-scanned measuring system. SPIE, vol. 2899, p338-347, 1996
53. Zhang, Guoyu, An Zhiyong, Zhang Congzhou. Research on a non-contact steel products dynamic on-line inspection instrument. SPIE, vol. 2899, p354-361, 1996.
54．毕纪军．如何设计激光扫描系统．激光与光电子学进展，2001(14)：23-26