基于CCD的石英管壁厚检测系统研究
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摘要
本文基于CCD器件所具有的自扫描、高分辨率、高灵敏度等特性以及测量精度高、易维护、操作容易等优点，提出了一种用于透明石英管壁厚非接触在线测量的光电检测系统——基于CCD的石英管壁厚检测系统，以满足生产中石英管壁厚检测高效率、自动化、动态检测、非接触测量等要求。
该系统主要由半导体激光光源、准直扩束整形光学系统、主体精密机械系统、单片机控制系统和计算机实时数据处理系统等组成。该系统将光学、机械、电子和计算机技术有机地结合，利用线阵CCD器件接收由石英管壁上下表面所反射的一对一字形激光光束，通过计算两光束间距，从而计算得到石英管壁厚值。该激光光束通过一系列光学系统处理，充分利用了CCD器件的分辨率，达到了高速高精度非接触测量的设计要求。
本论文主要对“基于CCD的石英管壁厚检测系统”研制进行基础理论探讨，在确定该检测系统的总体方案设计的基础上，主要从事了该检测仪的光学系统、CCD硬件电路以及单片机控制系统的研究工作，并对实验结果进行了误差分析，验证了方案的可行性。整机调试和实际测量结果表明，本系统测量精度可达到±0.01mm。
Based on CCD measuring technology, we present in this paper a quartz tube wall thickness photoelectric comprehensive measuring system, which is applied to measure the thickness of quartz tube wall non-contacted automatically with a line CCD device.
The system is composed of a semiconductor laser source, a main fine mechanic system and controller, a real-time controlling system with SCM and data processing system by PC. The line CCD in this instrument can measure the distance between the two laser beams which were reflected from the outside and inside surfaces of the quartz tube wall. The computer processes the data and we finally get the thickness data of the tube wall. This design is a simple and direct way to do the measurement. It takes the advantages of CCD device to carry out the non-contacted measurement with high speed and precision.
Based on theoretical research and total design, the designs of optical system, hardware circuit and SCM control system are mainly discussed in this paper. The experiment has proved its practicability. Real measured data indicates that the system can be up to measuring tube wall thickness with precision of 0.01mm.
该系统主要由半导体激光光源、准直扩束整形光学系统、主体精密机械系统、单片机控制系统和计算机实时数据处理系统等组成。该系统将光学、机械、电子和计算机技术有机地结合，利用线阵CCD器件接收由石英管壁上下表面所反射的一对一字形激光光束，通过计算两光束间距，从而计算得到石英管壁厚值。该激光光束通过一系列光学系统处理，充分利用了CCD器件的分辨率，达到了高速高精度非接触测量的设计要求。
本论文主要对“基于CCD的石英管壁厚检测系统”研制进行基础理论探讨，在确定该检测系统的总体方案设计的基础上，主要从事了该检测仪的光学系统、CCD硬件电路以及单片机控制系统的研究工作，并对实验结果进行了误差分析，验证了方案的可行性。整机调试和实际测量结果表明，本系统测量精度可达到±0.01mm。
Based on CCD measuring technology, we present in this paper a quartz tube wall thickness photoelectric comprehensive measuring system, which is applied to measure the thickness of quartz tube wall non-contacted automatically with a line CCD device.
The system is composed of a semiconductor laser source, a main fine mechanic system and controller, a real-time controlling system with SCM and data processing system by PC. The line CCD in this instrument can measure the distance between the two laser beams which were reflected from the outside and inside surfaces of the quartz tube wall. The computer processes the data and we finally get the thickness data of the tube wall. This design is a simple and direct way to do the measurement. It takes the advantages of CCD device to carry out the non-contacted measurement with high speed and precision.
Based on theoretical research and total design, the designs of optical system, hardware circuit and SCM control system are mainly discussed in this paper. The experiment has proved its practicability. Real measured data indicates that the system can be up to measuring tube wall thickness with precision of 0.01mm.
引文
1．王庆有．CCD应用技术[M]．天津：天津大学出版社．2000，：15～228
2．雷玉堂，王庆有，何加铭．光电检测技术．北京：中国计量出版社，1997：86～220
3．卢春生．光电探测技术及应用．北京：机械工业出版社，1992：46～156
4．徐熙平等．石英管壁厚激光扫描在线检测系统研究．兵工学报，2004，25(2)：1～3
5．杨琳．石英管尺寸光电综合检测系统的研究：[硕士学位论文]．长春：长春光学精密机械学院测试计量技术与仪器，2001
6．阴红卫．基于CCD的玻璃管几何参数测量系统的研究：[硕士学位论文]．南京：南京理工大学电子信息工程，2004
7．陈兴梧．透明玻璃管的在线测量．计量技术，1996，8：4～7
8．陈本智，陈兴梧．在线实时检测玻璃管外径和壁厚尺寸的新技术．计量学报，1995，16(3)：221～225
9．宋峰．CCD挠度测量系统的研究：[硕士学位论文]．成都：电子科技大学机械电子工程，2004
10．日本东芝CCD手册，2001
11．T.C.Bopohehckar．不接触测量玻璃管外径的双坐标激光测量仪．国外计量，1991，6：24～26
12．孙学珠．CCD传感器检测玻璃管外径和壁厚的研究．计量与测试技术，1995，5：3～5
13．王林．CCD玻璃管几何参数在线检测系统的研制．红外与激光技术工程，1996，25(2)：59～64
14．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15～18
15．安毓英．曾小东编．光学传感与测量．北京：电子工业出版社，2001
16．陈安健．透明管径及管厚的CCD成像在线测量方法[J]．应用光学，2001，22(1)：46～48
17．张道勇等．基于FPGA的线阵CCD驱动时序发生器设计．微型机与应用，2004，11：25～27，46
18. L.G.Cohen and P.Glyn. Dynamic measurement of optical fiber diameter..Rev. Sci. Instrum,1973,44:1749
19. H. M. Presby. Geometric measurement of perform rods and starting tubes.Applied Optics,1982,21(19):3528～3530
20. D.H.Smithgall. L.S.Watkins. High speed non-contact fiber diameter measurement using forward light scattering. Applied Optics, 1997,16:2395～2397
21. B. T. Meggitt. Geometrical measurements of fiber-optic starter tubes using a novel optical technique. Optic & Laser Technology, 1989,21(5):343～344
22. A.B. Fedortsov. A fast operating laser device for measuring the thickness of transparent solid and liquid films. Rev. Sci. Instrument. 1992, 63(10):3579～3582
23. Chen Weimin.A new type high precision laser thickness gauge.SPIE, 1990,1230:419～420
24. Richard Hobe.Laser technology provides non-contact dimensional measurement. Applied Optics, 1982,21(19): 1326～132925. Pawel Fotowicz,Richard Jablonski.Laser scanning system for measurement of optical fiber diameter.SPIE.Laser Technology 11,1987,859:245—248
26. H. M. Presby. Preform core diameter measurement by Flouresence. Applied Optics, 1991, 20(24):15
27. Jiang Hulin, An Zhiyong, Zhao Tieju.Application of a semiconductor laser in a optoelectronic system.SPIE, 1996,2899: 399-408
28. Amelio.GF, M.F. Tompsett and GSmith:Experimental verification of the charge-coupled device concept. Bell Syst.Tech.journ., 1970, (49):593—600
29. Walden.R.H.etal .The buried channel charge-coupled device. BellSyst. Tech.journ.,1972,(51):1635~1640
30. Christiansen,P. et al. CCD for PAL Decoder. IEEE Jour. of solide-State Ciruits, 1981,SC:16(136)
31. Schuermeiyer,et al. New structure for Charge-Coupled Device, Proc, IEEE 1972,144
2．雷玉堂，王庆有，何加铭．光电检测技术．北京：中国计量出版社，1997：86～220
3．卢春生．光电探测技术及应用．北京：机械工业出版社，1992：46～156
4．徐熙平等．石英管壁厚激光扫描在线检测系统研究．兵工学报，2004，25(2)：1～3
5．杨琳．石英管尺寸光电综合检测系统的研究：[硕士学位论文]．长春：长春光学精密机械学院测试计量技术与仪器，2001
6．阴红卫．基于CCD的玻璃管几何参数测量系统的研究：[硕士学位论文]．南京：南京理工大学电子信息工程，2004
7．陈兴梧．透明玻璃管的在线测量．计量技术，1996，8：4～7
8．陈本智，陈兴梧．在线实时检测玻璃管外径和壁厚尺寸的新技术．计量学报，1995，16(3)：221～225
9．宋峰．CCD挠度测量系统的研究：[硕士学位论文]．成都：电子科技大学机械电子工程，2004
10．日本东芝CCD手册，2001
11．T.C.Bopohehckar．不接触测量玻璃管外径的双坐标激光测量仪．国外计量，1991，6：24～26
12．孙学珠．CCD传感器检测玻璃管外径和壁厚的研究．计量与测试技术，1995，5：3～5
13．王林．CCD玻璃管几何参数在线检测系统的研制．红外与激光技术工程，1996，25(2)：59～64
14．黄文财，王秀琳，郭福源．半导体激光束准直技术．光电子技术与信息，1999，12(2)：15～18
15．安毓英．曾小东编．光学传感与测量．北京：电子工业出版社，2001
16．陈安健．透明管径及管厚的CCD成像在线测量方法[J]．应用光学，2001，22(1)：46～48
17．张道勇等．基于FPGA的线阵CCD驱动时序发生器设计．微型机与应用，2004，11：25～27，46
18. L.G.Cohen and P.Glyn. Dynamic measurement of optical fiber diameter..Rev. Sci. Instrum,1973,44:1749
19. H. M. Presby. Geometric measurement of perform rods and starting tubes.Applied Optics,1982,21(19):3528～3530
20. D.H.Smithgall. L.S.Watkins. High speed non-contact fiber diameter measurement using forward light scattering. Applied Optics, 1997,16:2395～2397
21. B. T. Meggitt. Geometrical measurements of fiber-optic starter tubes using a novel optical technique. Optic & Laser Technology, 1989,21(5):343～344
22. A.B. Fedortsov. A fast operating laser device for measuring the thickness of transparent solid and liquid films. Rev. Sci. Instrument. 1992, 63(10):3579～3582
23. Chen Weimin.A new type high precision laser thickness gauge.SPIE, 1990,1230:419～420
24. Richard Hobe.Laser technology provides non-contact dimensional measurement. Applied Optics, 1982,21(19): 1326～132925. Pawel Fotowicz,Richard Jablonski.Laser scanning system for measurement of optical fiber diameter.SPIE.Laser Technology 11,1987,859:245—248
26. H. M. Presby. Preform core diameter measurement by Flouresence. Applied Optics, 1991, 20(24):15
27. Jiang Hulin, An Zhiyong, Zhao Tieju.Application of a semiconductor laser in a optoelectronic system.SPIE, 1996,2899: 399-408
28. Amelio.GF, M.F. Tompsett and GSmith:Experimental verification of the charge-coupled device concept. Bell Syst.Tech.journ., 1970, (49):593—600
29. Walden.R.H.etal .The buried channel charge-coupled device. BellSyst. Tech.journ.,1972,(51):1635~1640
30. Christiansen,P. et al. CCD for PAL Decoder. IEEE Jour. of solide-State Ciruits, 1981,SC:16(136)
31. Schuermeiyer,et al. New structure for Charge-Coupled Device, Proc, IEEE 1972,144