压电厚膜驱动的变形镜技术研究
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摘要
自适应光学技术对波前畸变进行实时测量并校正,能够补偿诸如大气湍流等动态扰动的影响,获得接近系统衍射极限的分辨率。随着自适应光学技术的发展,已经在天文望远镜、视网膜成像、激光光束整形、光通信等领域得到应用。变形镜作为一种波前校正器,是自适应光学系统的核心部件。其中,基于压电驱动的变形镜以其大变形量、高带宽等优点受到研究者的青睐。本论文以PZT厚膜作为驱动材料,以研究低成本、低驱动电压、大变形量变形镜为目标,对压电厚膜MEMS变形镜和双驱动模式单压电片变形镜这两种变形镜进行研究。
(1)压电厚膜MEMS变形镜研究。首先采用影响函数矩阵法研究变形镜参数对波前校正能力的影响,完善基于薄板理论和压电方程的电-机械耦合模型预测变形镜的变形行为。在此基础之上,对变形镜的结构参数如排列方式、致动器数目、影响函数、致动器尺寸、PZT/Si层厚度、镜面厚度等进行优化设计。研究压电厚膜MEMS变形镜的制作流程及关键工艺,采用研磨抛光技术实现高平整度硅基PZT的制备,成功研制满足波前校正要求的61单元变形镜样机。最后对变形镜样机进行测试,结果显示：100V工作电压获得约5μm的致动器变形量,一阶谐振频率为18kHz,16mm口径内PV幅值约为21μm,采用19单元和37单元对Zernike多项式像差进行重构,实验结果证明其具有较强的校正能力并适用于高阶像差的校正。
(2)双驱动模式单压电片变形镜研究。该变形镜由两种类型致动器驱动：中心的致动器阵列用于校正波前像差,环形致动器用于产生整体偏置,只用正向驱动电压实现了双向波前校正能力。论文对其进行建模、优化、制备及测试。结果显示该变形镜的致动器变形量约为5μm@100V,最大离焦幅值为～15pm,初始镜面校平后优于λ/20RMS能够精确重构前5阶Zernike多项式面形,显示其优异的波前校正能力。该变形镜具有低成本、低驱动电压、大变形量等优势,具有在自适应光学中应用的潜力。
(3)变形镜控制方法研究。研究基于波前反馈的控制方法,包括影响函数矩阵法和基于最速下降的闭环控制方法。通过影响函数方法实现变形镜初始镜面的校平,并重构Zernike多项式像差表征变形镜的波前校正性能。研究变形镜在光斑整形中的应用并搭建相应的实验装置。采用点扩散函数研究波前像差对光斑质量的影响。研究基于搜索算法(如模拟退火算法)的闭环反馈控制算法。经过变形镜对光束的校正,系统获得了按近衍射极限的聚焦光斑,为下一步应用奠定基础。
基于以上研究,本论文在以下几个方面具有创新之处：(1)成功制备了满足波前校正要求的压电MEMS变形镜这一新类型变形镜,并对其校正性能进行表征；(2)提出了一种新型的双驱动模式单压电片变形镜,以正向驱动电压实现了双向波前校正能力；(3)搭建了基于泰曼-格林干涉仪的变形镜实验平台,可进行基于波前反馈和基于搜索算法的控制算法的实验研究。
Adaptive optics (AO) measures and corrects the wavefront distortion in real-time to overcome the dynamic wavefronts aberrations of the imaging system, such as atmospheric disturbances, achieving the diffraction limit resolution. With the development of the AO, it has been investigated in astronomical telescopes, retinal imaging, laser beam shaping, optical communication and so on. Deformable mirror (DM) worked as wavefront corrector is a core component and determines the performance of the AO system. Among various kinds of developed DMs, piezoelectric-driven DM is attracted by researchers due to its large deformation, high frequency response. In this dissertation, in order to develop DMs with low-cost, large deformation and low drive voltage, two types of DMs based on PZT thick films, PZT-thick-film MEMS DM and dual-drive mode unimorph DM, were studied.
(1) For the PZT-thick-film MEMS DM, the correction capability of the DM was investigated using the influence function matrix method. The electrics-mechanics coupling model of the PZT-thick-film MEMS DM based on the theory of plates and shell and piezoelectric equations was developed to predict the DM deformation. Based on thses models, the parameters of the DM, such as actuator arrangement, actuator number, influnce function, actuator size, the PZT/Si layer thicknesses and the mirror thickness, were optimized. The fabrication processes of the PZT-thick-film MEMS DM, including PZT thick films grinding and polishing techniques, were intestigated. A61-element DM prototype was successfully developed, which meets the requirements of the wavefront aberration correction. The stroke was measured of approximately5μm at100V. The first order resonant frequency is18kHz. And peak to valley (PV) amplitude is2.1μm at16mm operture which controlled by19actuators. The generation of Zernike polynomials was performed using19actuators and37actuators, which demonstrates that the PZT-thick-film MEMS DM has strong correction capabilities even for higher-order aberrations.
(2) A dual-drive mode unimorph DM driven by positive voltage is presented. The developed DM consists of both an inner actuator array and an outer ring actuator. The inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. This dissertation describes the design, fabrication and characterization of the DM. The measurements show that the device has the maximum defocus amplitude of～15μm and the actuator deflection of～5um at100V. After correction, mirror surface better than λ/20RMS was achieved. Replication of Zernike polynomial up to5th order indicates it has excellent wavefront correction ability. Considering the advantages of low-cost, large deformation and low driving voltage, this DM is satisfactory for low-cost AO applications.
(3) The control methods of DM are investigated. The control methods based wavefront feedback were studied, including influence function matrix method and the closed-loop control method based on steepest-descent algorithm are investigated. The correction of the initial surface and generation of Zernike polynomials shapes were characterized using influence function matrix method. The application of the DM for laser beam shaping was studied. Point Spread Function with wavefront aberrations was used to evaluate the spot quality. The control method based search algorithms, such as simulated annealing algorithm, were researched for wavefront sensor-less AO system. After the correction using the developed DM, the sysrem achieved the diffraction limit focal spot. This experiment lays the foundation for the applications of the DMs.
There are some creative points in this dissertation as follows:(1) a piezoelectric MEMS DM which is suitable for the AO applications is develop, and the correction performances are characterized,(2) a new dual-drive mode unimorph DM is proposed, which can achieve bidirectional wavefront correction capability only using a positive drive voltage;(3) a test platform based on Twyman-Green interferometer for the DM performance measuement is developed. The experiments for both the wavefront feedback control algorithm and the search-based algorithm for wavefront sensor-less AO can be tested.
(1)压电厚膜MEMS变形镜研究。首先采用影响函数矩阵法研究变形镜参数对波前校正能力的影响,完善基于薄板理论和压电方程的电-机械耦合模型预测变形镜的变形行为。在此基础之上,对变形镜的结构参数如排列方式、致动器数目、影响函数、致动器尺寸、PZT/Si层厚度、镜面厚度等进行优化设计。研究压电厚膜MEMS变形镜的制作流程及关键工艺,采用研磨抛光技术实现高平整度硅基PZT的制备,成功研制满足波前校正要求的61单元变形镜样机。最后对变形镜样机进行测试,结果显示：100V工作电压获得约5μm的致动器变形量,一阶谐振频率为18kHz,16mm口径内PV幅值约为21μm,采用19单元和37单元对Zernike多项式像差进行重构,实验结果证明其具有较强的校正能力并适用于高阶像差的校正。
(2)双驱动模式单压电片变形镜研究。该变形镜由两种类型致动器驱动：中心的致动器阵列用于校正波前像差,环形致动器用于产生整体偏置,只用正向驱动电压实现了双向波前校正能力。论文对其进行建模、优化、制备及测试。结果显示该变形镜的致动器变形量约为5μm@100V,最大离焦幅值为～15pm,初始镜面校平后优于λ/20RMS能够精确重构前5阶Zernike多项式面形,显示其优异的波前校正能力。该变形镜具有低成本、低驱动电压、大变形量等优势,具有在自适应光学中应用的潜力。
(3)变形镜控制方法研究。研究基于波前反馈的控制方法,包括影响函数矩阵法和基于最速下降的闭环控制方法。通过影响函数方法实现变形镜初始镜面的校平,并重构Zernike多项式像差表征变形镜的波前校正性能。研究变形镜在光斑整形中的应用并搭建相应的实验装置。采用点扩散函数研究波前像差对光斑质量的影响。研究基于搜索算法(如模拟退火算法)的闭环反馈控制算法。经过变形镜对光束的校正,系统获得了按近衍射极限的聚焦光斑,为下一步应用奠定基础。
基于以上研究,本论文在以下几个方面具有创新之处：(1)成功制备了满足波前校正要求的压电MEMS变形镜这一新类型变形镜,并对其校正性能进行表征；(2)提出了一种新型的双驱动模式单压电片变形镜,以正向驱动电压实现了双向波前校正能力；(3)搭建了基于泰曼-格林干涉仪的变形镜实验平台,可进行基于波前反馈和基于搜索算法的控制算法的实验研究。
Adaptive optics (AO) measures and corrects the wavefront distortion in real-time to overcome the dynamic wavefronts aberrations of the imaging system, such as atmospheric disturbances, achieving the diffraction limit resolution. With the development of the AO, it has been investigated in astronomical telescopes, retinal imaging, laser beam shaping, optical communication and so on. Deformable mirror (DM) worked as wavefront corrector is a core component and determines the performance of the AO system. Among various kinds of developed DMs, piezoelectric-driven DM is attracted by researchers due to its large deformation, high frequency response. In this dissertation, in order to develop DMs with low-cost, large deformation and low drive voltage, two types of DMs based on PZT thick films, PZT-thick-film MEMS DM and dual-drive mode unimorph DM, were studied.
(1) For the PZT-thick-film MEMS DM, the correction capability of the DM was investigated using the influence function matrix method. The electrics-mechanics coupling model of the PZT-thick-film MEMS DM based on the theory of plates and shell and piezoelectric equations was developed to predict the DM deformation. Based on thses models, the parameters of the DM, such as actuator arrangement, actuator number, influnce function, actuator size, the PZT/Si layer thicknesses and the mirror thickness, were optimized. The fabrication processes of the PZT-thick-film MEMS DM, including PZT thick films grinding and polishing techniques, were intestigated. A61-element DM prototype was successfully developed, which meets the requirements of the wavefront aberration correction. The stroke was measured of approximately5μm at100V. The first order resonant frequency is18kHz. And peak to valley (PV) amplitude is2.1μm at16mm operture which controlled by19actuators. The generation of Zernike polynomials was performed using19actuators and37actuators, which demonstrates that the PZT-thick-film MEMS DM has strong correction capabilities even for higher-order aberrations.
(2) A dual-drive mode unimorph DM driven by positive voltage is presented. The developed DM consists of both an inner actuator array and an outer ring actuator. The inner actuator array is used for aberration correction, while the outer ring actuator is used to generate an overall defocus bias. This dissertation describes the design, fabrication and characterization of the DM. The measurements show that the device has the maximum defocus amplitude of～15μm and the actuator deflection of～5um at100V. After correction, mirror surface better than λ/20RMS was achieved. Replication of Zernike polynomial up to5th order indicates it has excellent wavefront correction ability. Considering the advantages of low-cost, large deformation and low driving voltage, this DM is satisfactory for low-cost AO applications.
(3) The control methods of DM are investigated. The control methods based wavefront feedback were studied, including influence function matrix method and the closed-loop control method based on steepest-descent algorithm are investigated. The correction of the initial surface and generation of Zernike polynomials shapes were characterized using influence function matrix method. The application of the DM for laser beam shaping was studied. Point Spread Function with wavefront aberrations was used to evaluate the spot quality. The control method based search algorithms, such as simulated annealing algorithm, were researched for wavefront sensor-less AO system. After the correction using the developed DM, the sysrem achieved the diffraction limit focal spot. This experiment lays the foundation for the applications of the DMs.
There are some creative points in this dissertation as follows:(1) a piezoelectric MEMS DM which is suitable for the AO applications is develop, and the correction performances are characterized,(2) a new dual-drive mode unimorph DM is proposed, which can achieve bidirectional wavefront correction capability only using a positive drive voltage;(3) a test platform based on Twyman-Green interferometer for the DM performance measuement is developed. The experiments for both the wavefront feedback control algorithm and the search-based algorithm for wavefront sensor-less AO can be tested.
引文
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