铁电薄膜的溶胶凝胶法制备与结构研究
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摘要
本论文以铁电薄膜材料为研究对象，以制备成分均匀的铁电薄膜为基础，采
用溶胶凝胶的方法，最终获得高质量的铁电薄膜为中心开展工作。通过改变薄膜
的制备工艺条件，探索了采用溶胶凝胶工艺制备成分稳定的铁电薄膜的实验途
径，研究了薄膜的结构和表观形貌。
Ba2TiSi2O8晶体被认为是一种特殊的压电体，它具有压电性、热释电性和非
线性光学特性。本文中采用溶胶凝胶的方法成功的制备了成分均匀，性能稳定的
BTS 铁电薄膜。并通过有效的手段对薄膜的结构和形貌进行表征，利用原子力显
微镜AFM观察了薄膜的表面形貌，表明在薄膜中已经形成了钡硅石相；同时讨
论了薄膜制备后期不同热处理条件对结晶性能的影响，从而能够获得性能优良的
薄膜样品。
本文中采用溶胶凝胶过渡层的方法制备了Ba2TiSi2O8铁电薄膜。通过拉曼散
射光谱的测试和表面形貌的观察，说明溶胶凝胶层的存在很大程度的改善了薄膜
的结晶度和晶粒形状，为Ba2TiSi2O8铁电薄膜的制备进行了有价值的探索。
PbTiO3 是一种典型的钙钛矿型结构铁电材料，通过钙改性的钛酸铅
[(Pb1-xCax)TiO3, PCT(x)]材料具有良好的铁电，压电，热释电及光学特性，近年来
国内外已开展了较多有关 PCT 陶瓷及薄膜的研究工作。本文中主要以醋酸铅、
硝酸钙和钛酸四丁酯为原料，采用溶胶凝胶方法制备了(Pb0.76Ca0.24)TiO3 铁电薄
膜。讨论了采用管式炉和 RTA 两种不同热处理方式对薄膜结晶性能及表面形貌
的影响。
Based on investigation of homogeneous compositional ferroelectric thin film,
ferroelectric thin films were prepared with sol-gel process. By changing technics
condition of preparation, experimentation that homogeneous compositional
ferroelectric thin films were prepared with sol-gel process was searched. The structure
and electrical properties of the thin films were systematically studied.
Fresnoite (Ba2TiSi2O8, BTS), has been believed structurally to be a special
piezoelectricity for its excellent piezoelectric, pyroelectric and nonlineoptic properties.
BTS ferroelectric thin films were succeeded to prepare with sol-gel process in this
article. The structure and properties of the thin films were systematically studied by
available testing measure. It was evident that fresnoite had been formed in the thin
films. At the same time the influences of different later heat treat condition to
crystallinity were discussed.
In this article, Ba2TiSi2O8ferroelectric thin films were prepared with sol-gel wet
layer first time. Raman spectra and AFM micrographs show that the sol-gel-derived layer
improves the crystallinty and morphology of the films.
PbTiO3 is a kind of ferroelectric material that has typical perovskite structure.
[(Pb1-xCax) TiO3, PCT(x)] is modified property by Ca2+ doping. Recently, great efforts
had been made to prepare PCT ceramic and thin film. Calcium modified lead titanate
solutions were synthesized using lead acetate tri-hydrate, calcium nitrate tetra-hydrate
and titanium tetra- butyl as starting materials. (Pb0.76Ca0.24)TiO3 thin films were
prepared with the solutions. The effect of different heat treats in tube furnace and
rapid temperature annealing to the crystallinity and morphology were investigated.
用溶胶凝胶的方法，最终获得高质量的铁电薄膜为中心开展工作。通过改变薄膜
的制备工艺条件，探索了采用溶胶凝胶工艺制备成分稳定的铁电薄膜的实验途
径，研究了薄膜的结构和表观形貌。
Ba2TiSi2O8晶体被认为是一种特殊的压电体，它具有压电性、热释电性和非
线性光学特性。本文中采用溶胶凝胶的方法成功的制备了成分均匀，性能稳定的
BTS 铁电薄膜。并通过有效的手段对薄膜的结构和形貌进行表征，利用原子力显
微镜AFM观察了薄膜的表面形貌，表明在薄膜中已经形成了钡硅石相；同时讨
论了薄膜制备后期不同热处理条件对结晶性能的影响，从而能够获得性能优良的
薄膜样品。
本文中采用溶胶凝胶过渡层的方法制备了Ba2TiSi2O8铁电薄膜。通过拉曼散
射光谱的测试和表面形貌的观察，说明溶胶凝胶层的存在很大程度的改善了薄膜
的结晶度和晶粒形状，为Ba2TiSi2O8铁电薄膜的制备进行了有价值的探索。
PbTiO3 是一种典型的钙钛矿型结构铁电材料，通过钙改性的钛酸铅
[(Pb1-xCax)TiO3, PCT(x)]材料具有良好的铁电，压电，热释电及光学特性，近年来
国内外已开展了较多有关 PCT 陶瓷及薄膜的研究工作。本文中主要以醋酸铅、
硝酸钙和钛酸四丁酯为原料，采用溶胶凝胶方法制备了(Pb0.76Ca0.24)TiO3 铁电薄
膜。讨论了采用管式炉和 RTA 两种不同热处理方式对薄膜结晶性能及表面形貌
的影响。
Based on investigation of homogeneous compositional ferroelectric thin film,
ferroelectric thin films were prepared with sol-gel process. By changing technics
condition of preparation, experimentation that homogeneous compositional
ferroelectric thin films were prepared with sol-gel process was searched. The structure
and electrical properties of the thin films were systematically studied.
Fresnoite (Ba2TiSi2O8, BTS), has been believed structurally to be a special
piezoelectricity for its excellent piezoelectric, pyroelectric and nonlineoptic properties.
BTS ferroelectric thin films were succeeded to prepare with sol-gel process in this
article. The structure and properties of the thin films were systematically studied by
available testing measure. It was evident that fresnoite had been formed in the thin
films. At the same time the influences of different later heat treat condition to
crystallinity were discussed.
In this article, Ba2TiSi2O8ferroelectric thin films were prepared with sol-gel wet
layer first time. Raman spectra and AFM micrographs show that the sol-gel-derived layer
improves the crystallinty and morphology of the films.
PbTiO3 is a kind of ferroelectric material that has typical perovskite structure.
[(Pb1-xCax) TiO3, PCT(x)] is modified property by Ca2+ doping. Recently, great efforts
had been made to prepare PCT ceramic and thin film. Calcium modified lead titanate
solutions were synthesized using lead acetate tri-hydrate, calcium nitrate tetra-hydrate
and titanium tetra- butyl as starting materials. (Pb0.76Ca0.24)TiO3 thin films were
prepared with the solutions. The effect of different heat treats in tube furnace and
rapid temperature annealing to the crystallinity and morphology were investigated.
引文
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科学出版社，1989
2. 张福学，孙康. 压电学. 国防工业出版社，1984
3. 姚熹. 铁电陶瓷薄膜与器件. 材料导报. 1992,(6):9~17
4. J. F. Scott, C. A. Araujo, L. D. McMillan. Ferroelectric Thin Films and Thin Film
Devices. Ferroelectric Ceramics. 1993:P185
5. 王弘，王民. 铁电薄膜与集成铁电学. 高技术通讯. 1995,5(1):53~58
6. 肖定全. 集成铁电学与铁电集成薄膜. 物理. 1994,23(10):577~581
7. J. F. Scott. The Physics of Ferroelectric Ceramic Thin Films for Memory
Applications. Ferroelectrics Review. 1998,1(1):1~29
8. D. L. Polla, L. F. Francis. Processing and Characterization of Piezoelectric
Materials and Integration into Microelectro-mechanical Systems. Annu. Rev.
Mater. Sci. 1998,28:563~597
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