半导体吸收式光纤温度传感系统研究
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摘要
本文通过分析半导体GaAs晶体的温度传感机理,设计了一种基于虚拟仪器技术的半导体吸收式光纤温度传感系统,采用Labview平台实现信号的实时检测与处理。通过对其工作原理和系统结构的分析,建立了完整的系统模型,并对模型进行了matlab仿真分析,得出各个元件对系统输出的影响规律和参数选取原则;设计GaAs探头的透射特性实验,验证了所设计的透射式探头结构的可行性;搭建了系统实验平台,并进行了实验分析。实验结果表明,系统在-10~100℃的温度范围内有±0.3℃的测量精度,并且具有较好的时间稳定性。
By analyzing the temperature sensing mechanism of direct band-gap semiconductor material,an optical fiber temperature sensing system based on semiconductor absorption is designed, and the signal is detected and processed with LabVIEW—virtual instrument platform. Through analyzing its operating principles and system structure, the mathematical model of the system is established, and the law of used components on system output and the choice principle for each component are obtained by analyzing the system model with matlab. And the feasibility of sensing probe designed in this paper is verified by experiment for GaAs transitivity. Furthermore, experimental platforms are set up and experiments are carried out. The results show that the sensing system has high accuracy about 0.3 degrees between -10 and 150 degree and high reliability.
By analyzing the temperature sensing mechanism of direct band-gap semiconductor material,an optical fiber temperature sensing system based on semiconductor absorption is designed, and the signal is detected and processed with LabVIEW—virtual instrument platform. Through analyzing its operating principles and system structure, the mathematical model of the system is established, and the law of used components on system output and the choice principle for each component are obtained by analyzing the system model with matlab. And the feasibility of sensing probe designed in this paper is verified by experiment for GaAs transitivity. Furthermore, experimental platforms are set up and experiments are carried out. The results show that the sensing system has high accuracy about 0.3 degrees between -10 and 150 degree and high reliability.
引文
[1] Greg McDonald. Toward Increased Reliability in the Electric Power Industry: Direct Temperature Measurement in Transformers Using Fiber Optic Sensors[]. SPIE.1986,3414:107～111
[2]陈振生,周骁威.智能化高压电器温升的在线监测.电工技术杂志,2002,(5):13～16
[3]施清平,毛献辉,苑立波,等.基于单片机的光纤半导体温度传感器的研究.光学与光电技术,2006,4(6):7～10
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[5]刘瑞复,史锦珊.光纤传感器及其应用.北京:机械工业出版社,1987:47～68
[6]郭凤珍,于长泰.光纤传感技术与应用.杭州:浙江大学出版社,1992:129～152
[7]张志鹏,W. A. Gambling.光纤传感器原理.北京:中国计量出版社,1991:176～178
[8]Kyuma K, Tai S, Sawada T, et al. Fiber-optical Instrument for Temperature Measurement. IEEE.Quantum Electron,1982,18(4):676～679
[9]De Lyon T J, Roth J A, Chow D H. Substrate Temperature Measurement by Absorption-edge Spectroscopy during Molecular Beam Empty of Narrow-band Gap. Vacuum Science Technology (B),1997,15(2):329～336
[10]Christensen D A. A Fiber-optic Temperature Sensor Using Wavelength -dependent Detection. Proc. of SPIE: Fiber Optic and Laser sensorsⅤ, 1987,838:252～256
[11]Christensen D A. A New Non-perturbing Temperature Probe Using Semi -conductor Band Edge Shift. Journal of Bioengineering,1997,1:541～545
[12]Hilgers K B, Kaufman I. A Fiber-optic Differential Temperature Probe. Proc. of SPIE: Fiber Optic and Laser sensorsⅤ,1987,838:223～230
[13]R.W.Bogue,“Semiconductor sensor: a challenge to Europe.”J.Phys.E. 20(1987):1059～1060
[14]S.Middlehock and S.A.Audet,“Silicon sensors: full of promises and pitfalls”, J.Phys.E.20(1987):1080～1086
[15]S.Middelhock, S.A.Audet. Silicon Sensors: Full of Promise and Pitfalls. Phys.E,1987,(20): 1080～1086
[16]R.P.Agarwal. Silicon Thin Films for Optoelectronic Temperature Sensor. Electronics and Optics,1998,158(1):1～5
[17]Isko Kajanto, Ari T Friberg. A Silicon-based Fiber-optical Temperature Sensor. Phys.E.Sci, Instrument, 1988,(21):625～656
[18]孟庆民.半导体吸收式光纤温度传感器.信息技术与信息化,2004,(5):48～50
[19]许忠保,叶虎年,叶梅.半导体吸收式光纤温度传感器.半导体光电, 2004,(1):62～64
[20]李志全,王志斌.一种单光源半导体温度传感器的研究.传感技术学报,2003.3,1:44～46
[21]Yong Zhao, Yanbiao- Liao.Novel optical fiber sensor for simultaneous measurement of temperature and salinity.Sensors and Actuators B,86 (2002): 63～67
[22]赵勇,荣民.基于半导体吸收原理的光纤温度传感器研究.光电子·激光,2003,14(2):140～142
[23]张绍华.单晶硅吸收型光纤温度传感器的探索:[硕士学位论文].浙江:浙江大学,2003
[24]段萌萌,陈长乐,累松鹤,等.吸收式光纤温度传感器的研究.光子学报,2006,35(8):1207～1210
[25]关荣峰,叶嘉雄,印新达,等.半导体光纤温度传感器特性研究.光电工程,1997,24(2):51～54
[26]曹康敏,施名恒.半导体吸收式光纤温度传感器的研制.传感技术学报,1999,1:57～62
[27]陈学岗,熊文林,王庆.GaAs材料测温系统的研制.江西科学,2001,(4):208～210
[28]常丹华,王延云.谱带吸收式光纤温度传感器.光子学报,2001,30(7):885～888
[29]王廷云,罗承沐,申烛.半导体吸收式光纤温度传感器.清华大学学报(自然科学版),2001,41(3):59～61
[30]刘晔,张贇,王采堂等.双波长光纤温度传感器的研究.西安交通大学学报,2002,(4):335～338
[31]李朋,焦斌亮.对称结构的半导体式光纤温度传感器.2007(11):1～2
[32]毛献辉,施清平,苑立波,等.光纤温度传感器在电力设备安全监测中的应用.新技术新仪器,2007,27(5):20～22
[33]曹宇欣,陈贵庆,张祥.光纤温度传感器在井温测井仪中应用初步研究.国外测井技术,2004,19(3):42～44
[34]沈学础.半导体光谱和光学特性(第二版).北京:科学出版社,2003.7
[35]刘恩科,朱秉升,罗晋生等编著.半导体物理学.北京:电子工业出版社,2003.8:321～329
[36]靳伟,廖延彪,张志鹏.导波光学传感器原理与技术.北京:科学出版社,1998:90～91
[37]穆道生.现代光纤通信系统.北京:科学出版社,2005:35～47
[38]Theocharous E. Differential Absorption Distributed Thermometer. IEEE Conference Publication, 1983, (221):10～12
[39] R. W. Bogue. Semicondutor Sensor: A Challenge to Europe. Phys. E, 1987(20):1059～1060
[40]张英,王海容,蒋庄德.半导体吸收式光纤温度传感器的研究.压电与声光,2007,29(4):389～391
[41]王玉田.光电子学与光纤传感技术.北京:国防工业出版社,2003:42～100
[42]胡建华,余桂英.半导体光纤温度传感器.高速摄影与光子学,1990,19(1):74～78
[43]HFBR1414.pdf. www.semiconductor.agilent.com.2001,10.9
[44]毕卫红,张燕君,齐跃峰等.光纤通信与传感技术.北京:电子工业出版社,2008.3
[45]杨祥林.光纤通信系统.北京:国防工业出版社,2000
[46]HFBR2416.pdf. www.semiconductor.agilent.com.2001,10.9
[47]李春燕,董天临.接插件HFBR2416在光接收器中的应用.国外电子元器件,2001,8:18～19
[48]雷开卓.TL431的原理及应用研究.电源技术应用,2001(4):34～36.
[49]番玉成.可调式精密稳压集成电路TL431及应用.宁德师专学报(自然科学版),2008,20(1):51～55
[50]OP27.pdf.data sheet download from www.21ic.com.
[51]刘卫东,刘延冰,刘建国.检测微弱光信号的PIN光电检测电路的设计.电测与仪表,1999,4:28～30
[52]杨乐平,李海涛等.虚拟仪器技术概论.北京:电子工业出版社,2003
[53]陈锡辉,张银鸿.LabVIEW8.20程序设计从入门到精通.北京:清华大学出版社,2007
[54]PCI6221.pdf.datasheet downloaded from www.21ic.com.
[55](美)毕晓普(Bishop ,R.H)著,乔瑞萍等译.LabVIEW 7实用教程.北京:电子工业出版社,2005
[56]雷振山,魏丽,赵晨光等.LabVIEW高级编程与虚拟仪器工程应用.北京:中国铁道出版社,2009
[2]陈振生,周骁威.智能化高压电器温升的在线监测.电工技术杂志,2002,(5):13～16
[3]施清平,毛献辉,苑立波,等.基于单片机的光纤半导体温度传感器的研究.光学与光电技术,2006,4(6):7～10
[4]A.N.Varava. Temperature Measurement by Semiconductor Devices Thermal Engineering,1998,45(8),683～685
[5]刘瑞复,史锦珊.光纤传感器及其应用.北京:机械工业出版社,1987:47～68
[6]郭凤珍,于长泰.光纤传感技术与应用.杭州:浙江大学出版社,1992:129～152
[7]张志鹏,W. A. Gambling.光纤传感器原理.北京:中国计量出版社,1991:176～178
[8]Kyuma K, Tai S, Sawada T, et al. Fiber-optical Instrument for Temperature Measurement. IEEE.Quantum Electron,1982,18(4):676～679
[9]De Lyon T J, Roth J A, Chow D H. Substrate Temperature Measurement by Absorption-edge Spectroscopy during Molecular Beam Empty of Narrow-band Gap. Vacuum Science Technology (B),1997,15(2):329～336
[10]Christensen D A. A Fiber-optic Temperature Sensor Using Wavelength -dependent Detection. Proc. of SPIE: Fiber Optic and Laser sensorsⅤ, 1987,838:252～256
[11]Christensen D A. A New Non-perturbing Temperature Probe Using Semi -conductor Band Edge Shift. Journal of Bioengineering,1997,1:541～545
[12]Hilgers K B, Kaufman I. A Fiber-optic Differential Temperature Probe. Proc. of SPIE: Fiber Optic and Laser sensorsⅤ,1987,838:223～230
[13]R.W.Bogue,“Semiconductor sensor: a challenge to Europe.”J.Phys.E. 20(1987):1059～1060
[14]S.Middlehock and S.A.Audet,“Silicon sensors: full of promises and pitfalls”, J.Phys.E.20(1987):1080～1086
[15]S.Middelhock, S.A.Audet. Silicon Sensors: Full of Promise and Pitfalls. Phys.E,1987,(20): 1080～1086
[16]R.P.Agarwal. Silicon Thin Films for Optoelectronic Temperature Sensor. Electronics and Optics,1998,158(1):1～5
[17]Isko Kajanto, Ari T Friberg. A Silicon-based Fiber-optical Temperature Sensor. Phys.E.Sci, Instrument, 1988,(21):625～656
[18]孟庆民.半导体吸收式光纤温度传感器.信息技术与信息化,2004,(5):48～50
[19]许忠保,叶虎年,叶梅.半导体吸收式光纤温度传感器.半导体光电, 2004,(1):62～64
[20]李志全,王志斌.一种单光源半导体温度传感器的研究.传感技术学报,2003.3,1:44～46
[21]Yong Zhao, Yanbiao- Liao.Novel optical fiber sensor for simultaneous measurement of temperature and salinity.Sensors and Actuators B,86 (2002): 63～67
[22]赵勇,荣民.基于半导体吸收原理的光纤温度传感器研究.光电子·激光,2003,14(2):140～142
[23]张绍华.单晶硅吸收型光纤温度传感器的探索:[硕士学位论文].浙江:浙江大学,2003
[24]段萌萌,陈长乐,累松鹤,等.吸收式光纤温度传感器的研究.光子学报,2006,35(8):1207～1210
[25]关荣峰,叶嘉雄,印新达,等.半导体光纤温度传感器特性研究.光电工程,1997,24(2):51～54
[26]曹康敏,施名恒.半导体吸收式光纤温度传感器的研制.传感技术学报,1999,1:57～62
[27]陈学岗,熊文林,王庆.GaAs材料测温系统的研制.江西科学,2001,(4):208～210
[28]常丹华,王延云.谱带吸收式光纤温度传感器.光子学报,2001,30(7):885～888
[29]王廷云,罗承沐,申烛.半导体吸收式光纤温度传感器.清华大学学报(自然科学版),2001,41(3):59～61
[30]刘晔,张贇,王采堂等.双波长光纤温度传感器的研究.西安交通大学学报,2002,(4):335～338
[31]李朋,焦斌亮.对称结构的半导体式光纤温度传感器.2007(11):1～2
[32]毛献辉,施清平,苑立波,等.光纤温度传感器在电力设备安全监测中的应用.新技术新仪器,2007,27(5):20～22
[33]曹宇欣,陈贵庆,张祥.光纤温度传感器在井温测井仪中应用初步研究.国外测井技术,2004,19(3):42～44
[34]沈学础.半导体光谱和光学特性(第二版).北京:科学出版社,2003.7
[35]刘恩科,朱秉升,罗晋生等编著.半导体物理学.北京:电子工业出版社,2003.8:321～329
[36]靳伟,廖延彪,张志鹏.导波光学传感器原理与技术.北京:科学出版社,1998:90～91
[37]穆道生.现代光纤通信系统.北京:科学出版社,2005:35～47
[38]Theocharous E. Differential Absorption Distributed Thermometer. IEEE Conference Publication, 1983, (221):10～12
[39] R. W. Bogue. Semicondutor Sensor: A Challenge to Europe. Phys. E, 1987(20):1059～1060
[40]张英,王海容,蒋庄德.半导体吸收式光纤温度传感器的研究.压电与声光,2007,29(4):389～391
[41]王玉田.光电子学与光纤传感技术.北京:国防工业出版社,2003:42～100
[42]胡建华,余桂英.半导体光纤温度传感器.高速摄影与光子学,1990,19(1):74～78
[43]HFBR1414.pdf. www.semiconductor.agilent.com.2001,10.9
[44]毕卫红,张燕君,齐跃峰等.光纤通信与传感技术.北京:电子工业出版社,2008.3
[45]杨祥林.光纤通信系统.北京:国防工业出版社,2000
[46]HFBR2416.pdf. www.semiconductor.agilent.com.2001,10.9
[47]李春燕,董天临.接插件HFBR2416在光接收器中的应用.国外电子元器件,2001,8:18～19
[48]雷开卓.TL431的原理及应用研究.电源技术应用,2001(4):34～36.
[49]番玉成.可调式精密稳压集成电路TL431及应用.宁德师专学报(自然科学版),2008,20(1):51～55
[50]OP27.pdf.data sheet download from www.21ic.com.
[51]刘卫东,刘延冰,刘建国.检测微弱光信号的PIN光电检测电路的设计.电测与仪表,1999,4:28～30
[52]杨乐平,李海涛等.虚拟仪器技术概论.北京:电子工业出版社,2003
[53]陈锡辉,张银鸿.LabVIEW8.20程序设计从入门到精通.北京:清华大学出版社,2007
[54]PCI6221.pdf.datasheet downloaded from www.21ic.com.
[55](美)毕晓普(Bishop ,R.H)著,乔瑞萍等译.LabVIEW 7实用教程.北京:电子工业出版社,2005
[56]雷振山,魏丽,赵晨光等.LabVIEW高级编程与虚拟仪器工程应用.北京:中国铁道出版社,2009