水热法单晶硅表面均匀小尺寸金字塔的制备及表征
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摘要
能源危机与环境污染问题促进了清洁能源的广泛研究与应用开发。太阳能光伏发电是一种利用光伏效应将太阳光辐射能直接转换为电能的新型发电技术。太阳电池种类繁多，大致可分为晶体硅电池和薄膜电池两大类。由于研究开发成果的应用及各国多种普及推广政策的促进，晶体硅太阳电池早已达到实用化阶段。而且，自从20世纪80年代初商业化薄膜电池开始进入市场以来，晶体硅电池的性能业已取得了尤为显著的进步，且电池的效率仍存在进一步提升的潜力。
高的光电转换效率和低的生产成本是太阳能光电工业和研究界始终追求的目标，为了达到这个目的，人们进行了很多研究。减反射是提高效率的一种途径。其方法之一是在太阳电池表面镀一层减反膜，另一种方法是把太阳电池表面作成一个高密度的金字塔形或四面体结构的织构表面，即表面制绒。在硅片表面制作绒面可以增加硅片表面对太阳辐射的吸收，有效地减少太阳光在硅片表面的反射损失，实现陷光作用的高可能性，所以正逐渐成为低成本晶体硅表面形貌的制备方法。
本文第一章阐述了太阳电池的基本理论，概述了国内外的太阳电池的发展现状，简要说明了晶体硅太阳电池的制作流程；并对所报道的各种制绒方法进行了阐述及比较，最后对本文的研究意义、主要工作做了说明。
第二章研究了太阳电池用单晶硅片绒面的制备技术。简要介绍了单晶硅太阳电池绒面制备实验原理及具体实验过程，详细描述了分别用碳酸钠与碳酸氢钠混合溶液(Na_2CO_3/NaHCO_3)、氨水溶液（NH_3·H_2O）作为腐蚀液并通过将织构液置于密封搅拌的环境下，对单晶硅片表面进行绒面制备的实验。最后利用扫描电镜、紫外-可见分光光度计对腐蚀后的单晶硅片的表面形貌、表面反射率等性能进行测试。
第三章针对两种方法制备出的单晶硅片减反射绒面的性能，将该项制绒技术的各种实验参数优化比较，分析了两者的优劣和影响绒面制备的各种因素。即研究溶液中各成分的含量、腐蚀时间和制绒温度对绒面制作的影响，从而得出最佳的结果。最后我们针对现在实验室的研究状况提出了存在的问题及相应的解决方法。
The energy crisis and enviromental pollution promoted the clean energy’s extensiveresearch and application development. Solar photovoltaic power generation is a new technology,by using of photovoltaic effects, the sunlight radiant energy can convert to electrical energydirectly. There are various kinds of solar cell, which can be roughly divided into crystallinesilicon cells and thin-film solar cells. With the achievements of application research anddevelopment and the international popularisation of various policy, the crystalline silicon solarcells have already entered a practical stage. Moreover, since the commercial thin-film solar cellsbegan to enter the market around1980s, the performance of crystalline silicon cells haveobtained particularly remarkable progress, and the photoelectric conversion efficiency ofcrystalline silicon cells still has further improve potential.
In order to obtain high energy photoelectric conversion efficiency, reduce production costs,in recent years people have made much studying on it. It is an effective way to apply the anti-reflection layer to improve efficiency. That’s one of the method is to have a coating on the solarcells, another way is to make the surface to high-density pyramid or the structure of thetetrahedron structural surface, that is texture. The special surface can increase wafer surface ofthe sun radiation absorption,on the surface, minimize the surface reflection losses of sunlighteffectively, realize the high probability use to catching the light, thus is becoming a low costcrystalline silicon surface morphology of the method of preparation.
In the first chapter,we illustrate the basic theory of solar cells, summarize the currentresearh situation of crystalline silicon solar cells at home and abroad. We also briefly explain thecrystalline silicon solar cell production process, and the comparison among various kinds oftexturization preparation reported are described. Finally we illustrate the significance and themain research of this paper.
Chapter2detailes the texturization technique for monocrystalline silicon solar cells, byusing of two kinds of corrosion solutions. We briefly illustrate the chemical reaction principlesand the texturization process of monocrystalline silicon solar cells. The homogeneous and smallpyramids in the textured structure of silicon crystalline is obtained by placing the solutions inseal environment, by using Na2CO3/NaHCO3solution, NH3·H2O solution as an escharotics,respectively. Finally, the morphology of corroded monocrystalline silicon chips have beenobserved by scanning electron microscope, and the surface reflectivity performance testing havebeen taken with uv-vis spectrophotometer.
In the third chapter of this paper, based on the obtained results, the effects of eachcomponent content, etching time, temperature in the solution on the surface texturisation ofsilicon were investigated. Moreover, we conclude the best experimental parameters, that includesthe concentration of solutions, texturing time and reaction temperature.
At last, we summarize the technique’s advantages, analyze the existing problems, proposeits corresponding solutions.
高的光电转换效率和低的生产成本是太阳能光电工业和研究界始终追求的目标，为了达到这个目的，人们进行了很多研究。减反射是提高效率的一种途径。其方法之一是在太阳电池表面镀一层减反膜，另一种方法是把太阳电池表面作成一个高密度的金字塔形或四面体结构的织构表面，即表面制绒。在硅片表面制作绒面可以增加硅片表面对太阳辐射的吸收，有效地减少太阳光在硅片表面的反射损失，实现陷光作用的高可能性，所以正逐渐成为低成本晶体硅表面形貌的制备方法。
本文第一章阐述了太阳电池的基本理论，概述了国内外的太阳电池的发展现状，简要说明了晶体硅太阳电池的制作流程；并对所报道的各种制绒方法进行了阐述及比较，最后对本文的研究意义、主要工作做了说明。
第二章研究了太阳电池用单晶硅片绒面的制备技术。简要介绍了单晶硅太阳电池绒面制备实验原理及具体实验过程，详细描述了分别用碳酸钠与碳酸氢钠混合溶液(Na_2CO_3/NaHCO_3)、氨水溶液（NH_3·H_2O）作为腐蚀液并通过将织构液置于密封搅拌的环境下，对单晶硅片表面进行绒面制备的实验。最后利用扫描电镜、紫外-可见分光光度计对腐蚀后的单晶硅片的表面形貌、表面反射率等性能进行测试。
第三章针对两种方法制备出的单晶硅片减反射绒面的性能，将该项制绒技术的各种实验参数优化比较，分析了两者的优劣和影响绒面制备的各种因素。即研究溶液中各成分的含量、腐蚀时间和制绒温度对绒面制作的影响，从而得出最佳的结果。最后我们针对现在实验室的研究状况提出了存在的问题及相应的解决方法。
The energy crisis and enviromental pollution promoted the clean energy’s extensiveresearch and application development. Solar photovoltaic power generation is a new technology,by using of photovoltaic effects, the sunlight radiant energy can convert to electrical energydirectly. There are various kinds of solar cell, which can be roughly divided into crystallinesilicon cells and thin-film solar cells. With the achievements of application research anddevelopment and the international popularisation of various policy, the crystalline silicon solarcells have already entered a practical stage. Moreover, since the commercial thin-film solar cellsbegan to enter the market around1980s, the performance of crystalline silicon cells haveobtained particularly remarkable progress, and the photoelectric conversion efficiency ofcrystalline silicon cells still has further improve potential.
In order to obtain high energy photoelectric conversion efficiency, reduce production costs,in recent years people have made much studying on it. It is an effective way to apply the anti-reflection layer to improve efficiency. That’s one of the method is to have a coating on the solarcells, another way is to make the surface to high-density pyramid or the structure of thetetrahedron structural surface, that is texture. The special surface can increase wafer surface ofthe sun radiation absorption,on the surface, minimize the surface reflection losses of sunlighteffectively, realize the high probability use to catching the light, thus is becoming a low costcrystalline silicon surface morphology of the method of preparation.
In the first chapter,we illustrate the basic theory of solar cells, summarize the currentresearh situation of crystalline silicon solar cells at home and abroad. We also briefly explain thecrystalline silicon solar cell production process, and the comparison among various kinds oftexturization preparation reported are described. Finally we illustrate the significance and themain research of this paper.
Chapter2detailes the texturization technique for monocrystalline silicon solar cells, byusing of two kinds of corrosion solutions. We briefly illustrate the chemical reaction principlesand the texturization process of monocrystalline silicon solar cells. The homogeneous and smallpyramids in the textured structure of silicon crystalline is obtained by placing the solutions inseal environment, by using Na2CO3/NaHCO3solution, NH3·H2O solution as an escharotics,respectively. Finally, the morphology of corroded monocrystalline silicon chips have beenobserved by scanning electron microscope, and the surface reflectivity performance testing havebeen taken with uv-vis spectrophotometer.
In the third chapter of this paper, based on the obtained results, the effects of eachcomponent content, etching time, temperature in the solution on the surface texturisation ofsilicon were investigated. Moreover, we conclude the best experimental parameters, that includesthe concentration of solutions, texturing time and reaction temperature.
At last, we summarize the technique’s advantages, analyze the existing problems, proposeits corresponding solutions.
引文
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