变栅距光栅位移传感器的若干问题研究
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摘要
随着军事和民用工业中特殊场合对抗电磁干扰传感器的需求逐渐增加,光学传感器的研究越来越受到重视。在上世纪70年代,国外发起的光传飞行控制系统先进硬件研究计划FLASH中研发了多种光纤位移传感器;在这样的背景下,国内多家单位也在进行光纤位移传感器的研制,以取代现有的电磁式位移传感器。
考虑国内外的研究现状和结合现有的技术,西安某所开展了变栅距光栅位移传感器的研究,在样机实验中取得了圆满成功,并开始了从原理样机走向工程样机的研究。
本课题拟通过对变栅距光栅位移传感器光学系统的全面研究,提出对该系统的优化和设计方案。为系统的工程制作和设计提供一定的理论指导,尽量使工程设计少走弯路。主要研究内容有以下几个方面:
一、传感器的光学系统研究
基于单色仪的光学原理,对变栅距光栅位移传感器的核心元件变栅距光栅、入射光纤、接收光纤和光谱仪进行了深入分析,指出现有结构存在的问题及相应的解决办法。通过对变栅距光栅成像特性的研究,指出了现有光学系统存在着分辨率和数据采集时间冲突的问题,通过Zemax软件模拟对该问题提出解决方案;对入射光纤和接收光纤的纤芯直径进行研究,分析了其对传感器分辨率的影响,并提出了计算方法;对光谱仪参数和传感器分辨率之间的关系进行了数据分析,为传感器设计时光谱仪的选择提供一定的指导和借鉴。
二、传感器的工程样机研究
针对设计的传感器工程样机进行了全面的系统误差分析,估算传感器中各种元件和因素给传感器位移测试带来的误差的大小。并提出可能的解决方案。研究了导轨移动过程中的位移误差对传感器系统的影响,分析了现有的单反射镜结构对传感器精度的影响,提出采用双反射镜结构来消除导轨移动时带来的动态误差的解决方案;对传感器工程样机的静态测试数据进行分析,指出现有光栅参数和数据处理方法对系统误差的影响,并提出解决方案。
三、角度位移传感器的光学系统优化和柱面变栅距光栅的制作
对基于柱面变栅距光栅原理的角度位移传感器进行了分析,对光学结构的设计提出建议,并提出制作柱面变栅距光栅的方法。首先通过全息光刻-电镀的方法制作了厚度为100μm镍基底的金属变栅距光栅,再将薄金属光栅贴在柱面上即可得到柱面变栅距光栅。
本论文的主要贡献体现在:对变栅距位移传感器的光学系统进行了理论的分析和研究,对传感器的工程化具有一定的理论指导作用;对传感器的误差进行了全面的分析,采用双反射镜结构抑制了导轨的精度对传感器精准度的影响;对工程样机的数据进行了分析和研究,指出了现有传感器的问题所在;制作了柱面变栅距光栅,解决了角度位移传感器核心元件—柱面变栅距光栅研制的难题。
In these years,lots of optical position sensors are generally needed where electromagnetic sensors can't work for the magnetic and electrical interference.A number of Linear position Fiber Optic Sensors has emerged in the program of FLASH(Fly-By-Light Advanced Systems Hardware) sponsored by U.S.A in 1970s. Since 1990s,the fiber optical sensors have attracted enormous interest in our country, which may replace the electromagnetic sensors in special applications.
A wavelength encoded fiber optic position sensor has been investigated,in which the sensing element is a diffraction grating with a linear variation in period over its length.When illuminated with a broadband optical source at a fixed angle of incidence,linear translation of the grating always lead to a linear shift in the wavelength of the detected signals collected at a fixed angle.Based on the information coming from the papers which can be got,some researchers have worked out the first wavelength encoded fiber optic position sensor prototype employing varied line-space grating in our country through several years' hard work.The following work is to develop an engineering sample sensor.
This thesis focuses on the optical system of the wavelength encoding fiber optical position sensor with varied line-space grating and presents optimum parameters as well as design methods which can avoid some problems during the manufacture of the engineering sample sensor.The main contents of this thesis are summarized as follows:
1.Research on wavelength encoded fiber optic position sensor's optical system
The optics system of the sensor,including the varied line-space grating,the input and output fibers,was analyzed using the design method of the monochromator.
Theoretic analysis for the varied line-space grating shows that the focusing characteristic is special for the sensor.For high resolution and high frequency response,the new design for the sensor should consider the varied line-space grating's focusing characteristic.The differences were analyzed using the optical designing soft-Zemax.The calculation method for the fiber's diameter is presented in this part. How does the optic spectrometer's resolution influence the sensor's displacement resolution,and the method choosing the optimized spectrometer is also discussed in this part.
2.Theoretic error analysis of the engineering sample sensor's system
The error coming from the guide has a significantly effect on the displacement measure error.To improve the whole performance,single-mirror was replaced by dual-mirrors,and the novel configuration makes the sensor insensitive to the guide errors.A theoretic analysis on the results of engineering sample sensor's test was conducted,and solutions for solving the existence problems were proposed.
3.Optimization for the angle sensor's optical system and fabrication method of the cylindrical varied line-space grating
A wavelength encoded fiber optic angle position sensor was optimized using a cylindrical varied line-space grating.And the method for fabricating of cylindrical varied line-space grating was proposed with holographic-electroplating method. Firstly,a metal varied line-space grating on the Ni foil with a thickness of 100μm was prepared using the holographic-electroplating method.Then,a cylindrical varied line-space grating was made by fixing the metal grating on a cylinder.
The main innovations of this paper include:The theoretical analysis and experimental study on the optical system of wavelength-encoding-fiber optical position sensor with varied line-space grating were conducted,and the optimum methods for the fabrication of high resolving power sensor were proposed;an error analysis was carried out for the engineering sample sensor,and the single-mirror was replaced by dual-mirrors,which made the sensor insensitive to the guide errors;the cylindrical varied line-space grating for the angle sensor was fabricated using the holographic- electroplating method.
考虑国内外的研究现状和结合现有的技术,西安某所开展了变栅距光栅位移传感器的研究,在样机实验中取得了圆满成功,并开始了从原理样机走向工程样机的研究。
本课题拟通过对变栅距光栅位移传感器光学系统的全面研究,提出对该系统的优化和设计方案。为系统的工程制作和设计提供一定的理论指导,尽量使工程设计少走弯路。主要研究内容有以下几个方面:
一、传感器的光学系统研究
基于单色仪的光学原理,对变栅距光栅位移传感器的核心元件变栅距光栅、入射光纤、接收光纤和光谱仪进行了深入分析,指出现有结构存在的问题及相应的解决办法。通过对变栅距光栅成像特性的研究,指出了现有光学系统存在着分辨率和数据采集时间冲突的问题,通过Zemax软件模拟对该问题提出解决方案;对入射光纤和接收光纤的纤芯直径进行研究,分析了其对传感器分辨率的影响,并提出了计算方法;对光谱仪参数和传感器分辨率之间的关系进行了数据分析,为传感器设计时光谱仪的选择提供一定的指导和借鉴。
二、传感器的工程样机研究
针对设计的传感器工程样机进行了全面的系统误差分析,估算传感器中各种元件和因素给传感器位移测试带来的误差的大小。并提出可能的解决方案。研究了导轨移动过程中的位移误差对传感器系统的影响,分析了现有的单反射镜结构对传感器精度的影响,提出采用双反射镜结构来消除导轨移动时带来的动态误差的解决方案;对传感器工程样机的静态测试数据进行分析,指出现有光栅参数和数据处理方法对系统误差的影响,并提出解决方案。
三、角度位移传感器的光学系统优化和柱面变栅距光栅的制作
对基于柱面变栅距光栅原理的角度位移传感器进行了分析,对光学结构的设计提出建议,并提出制作柱面变栅距光栅的方法。首先通过全息光刻-电镀的方法制作了厚度为100μm镍基底的金属变栅距光栅,再将薄金属光栅贴在柱面上即可得到柱面变栅距光栅。
本论文的主要贡献体现在:对变栅距位移传感器的光学系统进行了理论的分析和研究,对传感器的工程化具有一定的理论指导作用;对传感器的误差进行了全面的分析,采用双反射镜结构抑制了导轨的精度对传感器精准度的影响;对工程样机的数据进行了分析和研究,指出了现有传感器的问题所在;制作了柱面变栅距光栅,解决了角度位移传感器核心元件—柱面变栅距光栅研制的难题。
In these years,lots of optical position sensors are generally needed where electromagnetic sensors can't work for the magnetic and electrical interference.A number of Linear position Fiber Optic Sensors has emerged in the program of FLASH(Fly-By-Light Advanced Systems Hardware) sponsored by U.S.A in 1970s. Since 1990s,the fiber optical sensors have attracted enormous interest in our country, which may replace the electromagnetic sensors in special applications.
A wavelength encoded fiber optic position sensor has been investigated,in which the sensing element is a diffraction grating with a linear variation in period over its length.When illuminated with a broadband optical source at a fixed angle of incidence,linear translation of the grating always lead to a linear shift in the wavelength of the detected signals collected at a fixed angle.Based on the information coming from the papers which can be got,some researchers have worked out the first wavelength encoded fiber optic position sensor prototype employing varied line-space grating in our country through several years' hard work.The following work is to develop an engineering sample sensor.
This thesis focuses on the optical system of the wavelength encoding fiber optical position sensor with varied line-space grating and presents optimum parameters as well as design methods which can avoid some problems during the manufacture of the engineering sample sensor.The main contents of this thesis are summarized as follows:
1.Research on wavelength encoded fiber optic position sensor's optical system
The optics system of the sensor,including the varied line-space grating,the input and output fibers,was analyzed using the design method of the monochromator.
Theoretic analysis for the varied line-space grating shows that the focusing characteristic is special for the sensor.For high resolution and high frequency response,the new design for the sensor should consider the varied line-space grating's focusing characteristic.The differences were analyzed using the optical designing soft-Zemax.The calculation method for the fiber's diameter is presented in this part. How does the optic spectrometer's resolution influence the sensor's displacement resolution,and the method choosing the optimized spectrometer is also discussed in this part.
2.Theoretic error analysis of the engineering sample sensor's system
The error coming from the guide has a significantly effect on the displacement measure error.To improve the whole performance,single-mirror was replaced by dual-mirrors,and the novel configuration makes the sensor insensitive to the guide errors.A theoretic analysis on the results of engineering sample sensor's test was conducted,and solutions for solving the existence problems were proposed.
3.Optimization for the angle sensor's optical system and fabrication method of the cylindrical varied line-space grating
A wavelength encoded fiber optic angle position sensor was optimized using a cylindrical varied line-space grating.And the method for fabricating of cylindrical varied line-space grating was proposed with holographic-electroplating method. Firstly,a metal varied line-space grating on the Ni foil with a thickness of 100μm was prepared using the holographic-electroplating method.Then,a cylindrical varied line-space grating was made by fixing the metal grating on a cylinder.
The main innovations of this paper include:The theoretical analysis and experimental study on the optical system of wavelength-encoding-fiber optical position sensor with varied line-space grating were conducted,and the optimum methods for the fabrication of high resolving power sensor were proposed;an error analysis was carried out for the engineering sample sensor,and the single-mirror was replaced by dual-mirrors,which made the sensor insensitive to the guide errors;the cylindrical varied line-space grating for the angle sensor was fabricated using the holographic- electroplating method.
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2.C.R.Porter,G.L.Abbas,M.de La Chapelle,G.P.Floodeen et al,Standard fly-by-light sensor interface using Ladar Fiber-Optic Sensor technology Fly-by-Light Technology Transfer Proceedings of SPIE,1994,2295:248-253.
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