纳米金刚石复合涂层场发射关键技术研究
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摘要
场发射显示器(FED)几乎兼有阴极射线管(CRT)显示器与当前市场上平板显示器(FPD)的所有优点,被广泛认为是最具有发展前途的显示技术之一,有望成为下一代显示器件的主流技术。纳米金刚石薄膜材料具有优良的物理化学性质,将其应用于FED是场发射阴极开发的一个方向,纳米金刚石复合薄膜材料比纳米金刚石薄膜材料具有更优越的场发射性能,因而成为目前场发射研究的热点。
本文研究了纳米金刚石复合涂层材料场发射阴极的基底预处理技术、金刚石粉的分散技术、电泳沉积技术、热处理技术、氢等离子体处理等后处理工艺技术以及驱动电路等技术。获得一套完整的适合大面积沉积、涂层均匀稳定的纳米金刚石场发射阴极的制备工艺技术。
通过正交实验,研究了纳米金刚石复合涂层场发射阴极制备过程中工艺参数对阴极样品的场发射开启电场和电流密度的影响,结合复合涂层阴极样品表面形貌的微观分析与阴极在模拟显示器中的发光效果,筛选出阴极制备的优化工艺参数。
将纳米钛粉、纳米铪粉、纳米ZnO以及纳米碳管等分别掺入纳米金刚石,研究了纳米金刚石复合材料的场发射性能。
研究了氢等离子体处理、胶带处理、金相砂纸摩擦处理等后处理工艺对阴极场发射性能的影响；优化了氢处理工艺参数。
利用X射线衍射仪(XRD)、拉曼光谱仪(Raman)、金相显微镜、扫描电子显微镜(SEM)、原子力显微镜(AFM)等微观分析仪器对金刚石复合材料阴极样品的成分、结构及表面形貌进行了分析表征,结合样品的场发射特性曲线,剖析了制备工艺条件与场发射性能之间的内在原因,为提高纳米金刚石复合涂层场发射性能提供理论依据和实验基础。
研究了真空度对纳米金刚石阴极场发射性能的影响以及纳米金刚石的变温场发射,探讨了高温下金刚石场发射的机理,为纳米金刚石复合材料FED产业化提供了实验依据。
分析了纳米金刚石复合涂层FED驱动系统的工作原理和寻址方式,设计了16×16点阵纳米金刚石FED的驱动电路,利用LED屏验证了所设计的纳米金刚石FED驱动电路的逻辑控制功能。
Field emission display (FED), bearing almost both advantages of cathode ray tube (CRT) display and flat-panel display (FPD) on the current market, is widely regarded one of the most promising display technology and is expected to become the mainstream of the next generation display device. Nano-diamond film material has excellent physical and chemical properties, so the application of it in FED is an exploitation direction of field emission cathode. Nano-diamond composite film material has more superior field emission characteristic compared with nano-diamond film material, so it becomes a focus of present field emission studies.
The technology of after-treatment and driving circuit of Nano-diamond composite coating material field emission cathode were studied. The after-treatment technologies include the technology of substrate pretreatment, diamond powder dispersion, electrophoretic deposition, heat treatment, hydrogen plasma treatment and so on. A set of intact preparation technology, with uniform and stable coating, suiting for large area deposition, was obtained.
In the preparation process of nano-diamond composite coating field emission cathode, the influence of technological parameter on field emission turn-on field and current density of cathode sample was studied by orthogonal experiment. Combining with the micro-analysis of surface appearance of composite coating cathode sample and the luminescence effect of the cathode in analog display, the optimal technological parameter of cathode preparation was screened out.
Respectively, the nano-diamond was doped with nano-Ti powder, nano-Hf powder, nano-ZnO, carbon nano-tube etc, and field emission characteristic of nano-diamond composite material was studied.
The influence of after-treatment technology (such as hydrogen plasma treatment, gummed tape treatment, and metallographic abrasive paper, etc) on cathode field emission characteristic was studied. The technological parameter of hydrogen-treating was optimized.
With the help of X-Ray Diffraction (XRD), Raman, metalloscope, scanning electron microscope (SEM), atomic force microscope (AFM), etc, the constituents, structure, and surface appearance of the nano-diamond composite material cathode sample were analyzed and characterized. Combining with the field emission characteristic curve of the sample, the internal reasons between the preparation process conditions and the field emission characteristic were analyzed, which provides the theoretical and experimental basis for the improvement of field emission characteristic of nano-diamond composite coating.
The influence of vacuum on the field emission characteristic of nano-diamond cathode and temperature dependence of field emission of nano-diamonds were studied, and the mechanism of nano-diamond field emission in high temperature was discussed, which offered the experimental foundation for the industrialization of nano-diamond composite material FED.
Working principle and addressing mode of driving system of nano-diamond composite coating FED were analyzed, and the 16×16 lattice driving circuit of the nano-diamond FED was designed. Logic controlling function of the designed driving circuit was tested and verified by LED screen.
本文研究了纳米金刚石复合涂层材料场发射阴极的基底预处理技术、金刚石粉的分散技术、电泳沉积技术、热处理技术、氢等离子体处理等后处理工艺技术以及驱动电路等技术。获得一套完整的适合大面积沉积、涂层均匀稳定的纳米金刚石场发射阴极的制备工艺技术。
通过正交实验,研究了纳米金刚石复合涂层场发射阴极制备过程中工艺参数对阴极样品的场发射开启电场和电流密度的影响,结合复合涂层阴极样品表面形貌的微观分析与阴极在模拟显示器中的发光效果,筛选出阴极制备的优化工艺参数。
将纳米钛粉、纳米铪粉、纳米ZnO以及纳米碳管等分别掺入纳米金刚石,研究了纳米金刚石复合材料的场发射性能。
研究了氢等离子体处理、胶带处理、金相砂纸摩擦处理等后处理工艺对阴极场发射性能的影响；优化了氢处理工艺参数。
利用X射线衍射仪(XRD)、拉曼光谱仪(Raman)、金相显微镜、扫描电子显微镜(SEM)、原子力显微镜(AFM)等微观分析仪器对金刚石复合材料阴极样品的成分、结构及表面形貌进行了分析表征,结合样品的场发射特性曲线,剖析了制备工艺条件与场发射性能之间的内在原因,为提高纳米金刚石复合涂层场发射性能提供理论依据和实验基础。
研究了真空度对纳米金刚石阴极场发射性能的影响以及纳米金刚石的变温场发射,探讨了高温下金刚石场发射的机理,为纳米金刚石复合材料FED产业化提供了实验依据。
分析了纳米金刚石复合涂层FED驱动系统的工作原理和寻址方式,设计了16×16点阵纳米金刚石FED的驱动电路,利用LED屏验证了所设计的纳米金刚石FED驱动电路的逻辑控制功能。
Field emission display (FED), bearing almost both advantages of cathode ray tube (CRT) display and flat-panel display (FPD) on the current market, is widely regarded one of the most promising display technology and is expected to become the mainstream of the next generation display device. Nano-diamond film material has excellent physical and chemical properties, so the application of it in FED is an exploitation direction of field emission cathode. Nano-diamond composite film material has more superior field emission characteristic compared with nano-diamond film material, so it becomes a focus of present field emission studies.
The technology of after-treatment and driving circuit of Nano-diamond composite coating material field emission cathode were studied. The after-treatment technologies include the technology of substrate pretreatment, diamond powder dispersion, electrophoretic deposition, heat treatment, hydrogen plasma treatment and so on. A set of intact preparation technology, with uniform and stable coating, suiting for large area deposition, was obtained.
In the preparation process of nano-diamond composite coating field emission cathode, the influence of technological parameter on field emission turn-on field and current density of cathode sample was studied by orthogonal experiment. Combining with the micro-analysis of surface appearance of composite coating cathode sample and the luminescence effect of the cathode in analog display, the optimal technological parameter of cathode preparation was screened out.
Respectively, the nano-diamond was doped with nano-Ti powder, nano-Hf powder, nano-ZnO, carbon nano-tube etc, and field emission characteristic of nano-diamond composite material was studied.
The influence of after-treatment technology (such as hydrogen plasma treatment, gummed tape treatment, and metallographic abrasive paper, etc) on cathode field emission characteristic was studied. The technological parameter of hydrogen-treating was optimized.
With the help of X-Ray Diffraction (XRD), Raman, metalloscope, scanning electron microscope (SEM), atomic force microscope (AFM), etc, the constituents, structure, and surface appearance of the nano-diamond composite material cathode sample were analyzed and characterized. Combining with the field emission characteristic curve of the sample, the internal reasons between the preparation process conditions and the field emission characteristic were analyzed, which provides the theoretical and experimental basis for the improvement of field emission characteristic of nano-diamond composite coating.
The influence of vacuum on the field emission characteristic of nano-diamond cathode and temperature dependence of field emission of nano-diamonds were studied, and the mechanism of nano-diamond field emission in high temperature was discussed, which offered the experimental foundation for the industrialization of nano-diamond composite material FED.
Working principle and addressing mode of driving system of nano-diamond composite coating FED were analyzed, and the 16×16 lattice driving circuit of the nano-diamond FED was designed. Logic controlling function of the designed driving circuit was tested and verified by LED screen.
引文
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