MEMS金属/电介质光子晶体的强透射特性研究
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摘要
MEMS红外气敏传感器因其利用气体的特征光谱进行测量而具有优越的选择性、灵敏度和稳定性。其中,其关键部件MEMS红外光源的研究近年来备受人们的关注。随着纳米等离子体晶体技术的发展,人们注意到利用二维金属亚波长圆孔(孔直径不超过入射光波长的一半)阵列[Two-Dimensional MetallicSubwavelength Hole Arrays(TDMSHA)]具有对特定波长光的选择与强透射[Extraordinary Optical Transmission(EOT)]特性,有望为研制对特定范围的红外光波有很好的选择和增强透射作用的MEMS红外辐射光源提供了一个有效的手段。
本文以MEMS红外气敏传感器为应用目标,采用MEMS技术,设计和制作一种由TDMSHA和硅—空气光子晶体组合成的金属/电介质光子晶体[Metal/Dielectric Photonic Crystal(MDPhC)]结构。目的是利用MDPhC对黑体热辐射光谱有增强透射和滤波剪裁特性来制作能够发射高性能、可调谐窄带的等离子体MEMS红外光源。论文主要研究了三种结构,即MDPhC、金属/金属/电介质光子晶体[Metal/Metal/Dielectric Photonic Crystal(M/MDPhC)]和金属/电介质/金属/电介质光子晶体[Metal/Dielectric/Metal/Dielectric Photonic Crystal(M/D/MDPhC)],系统地探讨了这三种结构的EOT新现象、新特性对提高等离子体MEMS红外光源的选频与光辐射增强特性的影响,为MEMS红外气敏传感器的应用提供理论基础和技术支持。
本文主要研究内容和成果如下:
1.研究了由TDMSHA和硅—空气光子晶体组合而成的MDPhC结构,探讨了几何尺寸横向比例即圆孔半径同阵列周期的比值(r/a_0=0.2,0.25,0.3)对MDPhC在金属/空气界面中表面等离子体激元[surface plasmon polaritons(SPP)](1,0)基态模式的EOT特性的影响。在课题组设计和制作的金/二氧化硅/硅MDPhC结构基础上,对该结构进行了时域有限差分法(FDTD)数值模拟和对实验样品的反射光谱进行了测量。同正方形晶格圆孔阵列相比较,理论模拟和实验测量结果均发现由正三角形晶格圆孔阵列组成的MDPhC,当r/a_0=0.25时,能够获得较强的光透射增强效果和较窄的透射峰。理论模拟结果拟合出来的反射率最小值的位置(λ_(min))与a_0的关系式(λ_(min)=1+0.82a_0)和实验结果拟合的关系式(λ_(min)=0.2+0.94a_0)基本属于一致的线性关系。这种线性关系与由SPP耦合作用机理推出的方程式(λ_(min)≈3~(1/2)a_0/2=0.87a_0)相符合,证实了该机理解释MDPhC的EOT特性是可行的。
2.研究了由最外层金属膜厚度小于其趋肤深度而内层金属膜厚度远大于其趋肤深度的双层金属膜组成的M/MDPhC结构,发现该结构中的双层金属之间存在SPP相互耦合作用。探讨了最外层金属厚度(t_m)对M/MDPhC的EOT特性的影响。采用MEMS技术,设计和制作了由银/金双层金属膜TDMSHA和硅—空气光子晶体组合而成的M/MDPhC结构。对该结构进行了FDTD数值模拟和对实验样品的透射光谱进行了测量。比较了M/MDPhC和MDPhC的EOT特性,发现M/MDPhC比MDPhC在金属/空气界面中SPP(1,1)次态模式的透射效率[T(λ_(max))]大,且其大小与t_m无关;而M/MDPhC在金属/空气界面中SPP(1,0)基态模式的T(λ_(max))与t_m有关;这说明银/金双层组合膜之间存在SPP相互耦合作用且主要发生在金属/空气界面中。实验结果发现:由不同的银膜厚度(t_m=1.5,3.8,23nm)组成的正三角形晶格和正方形晶格两种圆孔阵列的M/MDPhC在金属/空气界面中SPP(1,0)基态模式的EOT现象都与t_m存在相似的关系。①随着t_m的增加,透射峰的位置(λ_(max))有规律地向短波长方向偏移;②当t_m=3.8nm时,M/MDPhC的T(λ_(max))较大。
3.研究了由金属/电介质/金属三层组合膜组成的M/D/MDPhC结构,探讨了电介质的折射率对M/D/MDPhC在金属/空气界面中SPP(1,0)基态模式的EOT特性的影响,同时也讨论了不同电介质膜的厚度(t_d=0.2,0.4,0.6μm)的影响。采用MEMS技术,设计和制作了由金/SiO_xN_y/金三层膜组合的TDMSHA和硅—空气光子晶体构成的M/D/MDPhC结构。对实验样品的透射光谱进行了测量。比较了M/D/MDPhC和MDPhC的EOT特性,发现M/D/MDPhC的透射峰更窄了,这说明金/SiO_xN_y/金三层组合膜之间存在SPP相互耦合作用。实验结果发现:①采用折射率小(1.6)的SiO_(2.1)N_(0.3)比折射率大(1.8)的SiO_(0.6)N_1组成的M/D/MDPhC的λ_(max)小,这证实了SPP相互耦合作用机理的正确性;②采用低折射率的SiO_(2.1)N_(0.3)组成的M/D/MDPhC的T(λ_(max))较大且透射峰较窄;③采用薄的SiO_xN_y膜(0.2微米)组成的M/D/MDPhC能够获得较大的T(λ_(max))和较窄的透射峰;随着SiO_xN_y膜的厚度增加,M/D/MDPhC在金属/空气界面中SPP(1,0)基态模式逐渐退化,其透射峰也逐渐展宽。
MEMS infrared gas sensor has excellent selectivity,sensitivity and stability owing to using spectral characteristics of gas as measurement.Thereinto,the research on MEMS infrared light source,which is the key components of it has been concerned in recent years.With the development of nanometer plasmonic crystals technology,it was noted that using the characteristics of two-dimensional metallic subwavelength (hole diameter less than half of the wavelength of incident light) round hole arrays (TDMSHA) to select a specific wavelength of light and enhance extraordinary optical transmission(EOT),it is possible to provide an effective means of fabricating MEMS infrared radiation light source having a very good selection and enhancement in a specific range of infrared light.
In this paper,MEMS infrared gas sensor as the goal of application,we design and fabricate the metal/dielectric photonic crystal(MDPhC) combined structure with TDMSHA and silicon-air photonic crystal using MEMS technology.The purpose is to fabricate the plasmonic MEMS infrared light source,which can emit high performance、tunable narrow-band light by using these tailor-made properties of MDPhC enhanced the blackbody radiation spectrum transmission and filtering.The three kinds of structures were investigated mainly by us in this paper,namely MDPhC、metal/metal/dielectric photonic crystal(M/MDPhC) and metal/dielectric/metal photonic crystal(M/D/MDPhC),we systematically explored the effect of new phenomena and new features of the EOT for three different structures to enhance the characteristics of plasmonic MEMS infrared light source selected frequency and optical radiation enhancement,this will provide a theoretical basis and technical support for the application of MEMS infrared gas sensor.
The main research contents and results in this paper are as follows:
1.We investigated MDPhC combined structure with TDMSHA and silicon-air photonic crystal,and explored the ratio of the horizontal geometry namely hole radius ratio to the array period(r/a_0=0.2,0.25,0.3) effect on the EOT performance at metal/air interface surface plasmon polaritons(SPP)(1,0) ground-state model of MDPhC.Based on the design and production of the gold/silicon dioxide/silicon MDPhC structure by our MEMS group,we used FDTD numerical simulation to the structure and measured reflectance spectra of experimental samples.Comparing with square lattice round hole array,it is found that both the theoretical simulation results and the experimental results have proved that MDPhC being composed of triangular lattice round hole array,while r/a_0=0.25,it can obtain better effect of light transmission enhancement and narrower transmission peak.The relationship(λ_(min)=1+0.82a_0) of array period(a_0) and the minimum reflectivity position(λ_(min)) by fitting the theoretical simulation results and the relationship(λ_(min)=0.2+0.94a_0 ) by fitting the experimental results are the same linear relationship basically.This linear relationship is coincident with the equation(λ_(min)≈3~(1/2)a_0/2=0.87a_0) by the introduction of SPP coupling mechanism,it is confirmed that the SPP coupling mechanism to explain the EOT characteristics of MDPhC is feasible.
2.We investigated M/MDPhC combined structure with double-layered metallic films,which the metal film's thickness of outer layer is less than its skin depth and the metal film's thickness of the inner layer is much larger than skin depth.It is found that the role of SPP mutual coupling occurs between the double-metal of the structure.The effect of metal thickness(t_m) at outermost layer on the EOT characteristics of M/MDPhC was explored by us.We design and fabricate M/MDPhC combined structure with silver/gold double-layered metallic films' TDMSHA and silicon-air photonic crystal using MEMS technology.We used FDTD numerical simulation to the structure and measured transmission spectra of experimental samples.By comparing the EOT characteristics of M/MDPhC and MDPhC,it is found that the transmission efficiency[T(λ_(max))]of SPP(1,1) hypo-state model at metal/air interface of M/MDPhC is bigger than MDPhC,and it has nothing to do with t_m;and the T(λ_(max)) of SPP(1,0) ground-state model at metal/air interface of M/MDPhC has something to do with t_m;it is;demonstrated that the SPP mutual coupling role being between silver/gold double-layered metallic films occurs only at metal/air interface. The results are found that:The EOT characteristics of M/MDPhC being composed of triangular lattice and square lattice round hole arrays with different silver film's thickness(t_m=1.5,3.8,23nm) exists the similar relationship with t_m.(1)With the increase of t_m,theλ_(max) shift to the direction of short-wavelength regularly;(2)While t_m=3.8nm,M/MDPhC has bigger T(λ_max).
3.We investigated M/D/MDPhC combined structure with metal/dielectric/metal trilayer combination membrane,the effect of refractive index of dielectric on the EOT characteristics of SPP(1,0) ground-state model at metal/air interface of M/D/MDPhC was explored by us,and at the same time we also discussed the impact of the different dielectric film's thickness(t_d=0.2,0.4,0.6μm).We design and fabricate M/D/MDPhC combined structure with TDMSHA consisting of Au/SiO_xN_y/Au three combination membrane and silicon-air photonic crystal using MEMS technology.We measured transmission spectra of experimental samples.By comparing the EOT characteristics of M/D/MDPhC and MDPhC,it is found that the transmission peak of M/D/MDPhC get much narrower,it is demonstrated that the SPP mutual coupling role between Au/SiO_xN_y/Au three combination membrane indeed exists.The results are found that:(1)λ_(max) of M/D/MDPhC being composed of SiO_(2.1)N_(0.3) with small refractive index(1.6) is smaller than that of M/D/MDPhC being composed of SiO_(0.6)N_1 with large refractive index(1.8),the phenomenon can validate the correctness of SPP mutual coupling role mechanism;(2)M/D/MDPhC being composed of dielectric SiO_(2.1)N_(0.3) with small refractive index has a larger T(λ_(max)) and a narrower transmission peak;(3)M/D/MDPhC being composed of SiO_xN_y with thin film(0.2μm) is able to get much larger T(λ_(max)) and narrower transmission peak; With the increase of SiO_xN_y film's thickness,theSPP(1,0) ground-state model at metal/air interface of M/D/MDPhC gradually degrades,and its transmission peak also gradually widens.
本文以MEMS红外气敏传感器为应用目标,采用MEMS技术,设计和制作一种由TDMSHA和硅—空气光子晶体组合成的金属/电介质光子晶体[Metal/Dielectric Photonic Crystal(MDPhC)]结构。目的是利用MDPhC对黑体热辐射光谱有增强透射和滤波剪裁特性来制作能够发射高性能、可调谐窄带的等离子体MEMS红外光源。论文主要研究了三种结构,即MDPhC、金属/金属/电介质光子晶体[Metal/Metal/Dielectric Photonic Crystal(M/MDPhC)]和金属/电介质/金属/电介质光子晶体[Metal/Dielectric/Metal/Dielectric Photonic Crystal(M/D/MDPhC)],系统地探讨了这三种结构的EOT新现象、新特性对提高等离子体MEMS红外光源的选频与光辐射增强特性的影响,为MEMS红外气敏传感器的应用提供理论基础和技术支持。
本文主要研究内容和成果如下:
1.研究了由TDMSHA和硅—空气光子晶体组合而成的MDPhC结构,探讨了几何尺寸横向比例即圆孔半径同阵列周期的比值(r/a_0=0.2,0.25,0.3)对MDPhC在金属/空气界面中表面等离子体激元[surface plasmon polaritons(SPP)](1,0)基态模式的EOT特性的影响。在课题组设计和制作的金/二氧化硅/硅MDPhC结构基础上,对该结构进行了时域有限差分法(FDTD)数值模拟和对实验样品的反射光谱进行了测量。同正方形晶格圆孔阵列相比较,理论模拟和实验测量结果均发现由正三角形晶格圆孔阵列组成的MDPhC,当r/a_0=0.25时,能够获得较强的光透射增强效果和较窄的透射峰。理论模拟结果拟合出来的反射率最小值的位置(λ_(min))与a_0的关系式(λ_(min)=1+0.82a_0)和实验结果拟合的关系式(λ_(min)=0.2+0.94a_0)基本属于一致的线性关系。这种线性关系与由SPP耦合作用机理推出的方程式(λ_(min)≈3~(1/2)a_0/2=0.87a_0)相符合,证实了该机理解释MDPhC的EOT特性是可行的。
2.研究了由最外层金属膜厚度小于其趋肤深度而内层金属膜厚度远大于其趋肤深度的双层金属膜组成的M/MDPhC结构,发现该结构中的双层金属之间存在SPP相互耦合作用。探讨了最外层金属厚度(t_m)对M/MDPhC的EOT特性的影响。采用MEMS技术,设计和制作了由银/金双层金属膜TDMSHA和硅—空气光子晶体组合而成的M/MDPhC结构。对该结构进行了FDTD数值模拟和对实验样品的透射光谱进行了测量。比较了M/MDPhC和MDPhC的EOT特性,发现M/MDPhC比MDPhC在金属/空气界面中SPP(1,1)次态模式的透射效率[T(λ_(max))]大,且其大小与t_m无关;而M/MDPhC在金属/空气界面中SPP(1,0)基态模式的T(λ_(max))与t_m有关;这说明银/金双层组合膜之间存在SPP相互耦合作用且主要发生在金属/空气界面中。实验结果发现:由不同的银膜厚度(t_m=1.5,3.8,23nm)组成的正三角形晶格和正方形晶格两种圆孔阵列的M/MDPhC在金属/空气界面中SPP(1,0)基态模式的EOT现象都与t_m存在相似的关系。①随着t_m的增加,透射峰的位置(λ_(max))有规律地向短波长方向偏移;②当t_m=3.8nm时,M/MDPhC的T(λ_(max))较大。
3.研究了由金属/电介质/金属三层组合膜组成的M/D/MDPhC结构,探讨了电介质的折射率对M/D/MDPhC在金属/空气界面中SPP(1,0)基态模式的EOT特性的影响,同时也讨论了不同电介质膜的厚度(t_d=0.2,0.4,0.6μm)的影响。采用MEMS技术,设计和制作了由金/SiO_xN_y/金三层膜组合的TDMSHA和硅—空气光子晶体构成的M/D/MDPhC结构。对实验样品的透射光谱进行了测量。比较了M/D/MDPhC和MDPhC的EOT特性,发现M/D/MDPhC的透射峰更窄了,这说明金/SiO_xN_y/金三层组合膜之间存在SPP相互耦合作用。实验结果发现:①采用折射率小(1.6)的SiO_(2.1)N_(0.3)比折射率大(1.8)的SiO_(0.6)N_1组成的M/D/MDPhC的λ_(max)小,这证实了SPP相互耦合作用机理的正确性;②采用低折射率的SiO_(2.1)N_(0.3)组成的M/D/MDPhC的T(λ_(max))较大且透射峰较窄;③采用薄的SiO_xN_y膜(0.2微米)组成的M/D/MDPhC能够获得较大的T(λ_(max))和较窄的透射峰;随着SiO_xN_y膜的厚度增加,M/D/MDPhC在金属/空气界面中SPP(1,0)基态模式逐渐退化,其透射峰也逐渐展宽。
MEMS infrared gas sensor has excellent selectivity,sensitivity and stability owing to using spectral characteristics of gas as measurement.Thereinto,the research on MEMS infrared light source,which is the key components of it has been concerned in recent years.With the development of nanometer plasmonic crystals technology,it was noted that using the characteristics of two-dimensional metallic subwavelength (hole diameter less than half of the wavelength of incident light) round hole arrays (TDMSHA) to select a specific wavelength of light and enhance extraordinary optical transmission(EOT),it is possible to provide an effective means of fabricating MEMS infrared radiation light source having a very good selection and enhancement in a specific range of infrared light.
In this paper,MEMS infrared gas sensor as the goal of application,we design and fabricate the metal/dielectric photonic crystal(MDPhC) combined structure with TDMSHA and silicon-air photonic crystal using MEMS technology.The purpose is to fabricate the plasmonic MEMS infrared light source,which can emit high performance、tunable narrow-band light by using these tailor-made properties of MDPhC enhanced the blackbody radiation spectrum transmission and filtering.The three kinds of structures were investigated mainly by us in this paper,namely MDPhC、metal/metal/dielectric photonic crystal(M/MDPhC) and metal/dielectric/metal photonic crystal(M/D/MDPhC),we systematically explored the effect of new phenomena and new features of the EOT for three different structures to enhance the characteristics of plasmonic MEMS infrared light source selected frequency and optical radiation enhancement,this will provide a theoretical basis and technical support for the application of MEMS infrared gas sensor.
The main research contents and results in this paper are as follows:
1.We investigated MDPhC combined structure with TDMSHA and silicon-air photonic crystal,and explored the ratio of the horizontal geometry namely hole radius ratio to the array period(r/a_0=0.2,0.25,0.3) effect on the EOT performance at metal/air interface surface plasmon polaritons(SPP)(1,0) ground-state model of MDPhC.Based on the design and production of the gold/silicon dioxide/silicon MDPhC structure by our MEMS group,we used FDTD numerical simulation to the structure and measured reflectance spectra of experimental samples.Comparing with square lattice round hole array,it is found that both the theoretical simulation results and the experimental results have proved that MDPhC being composed of triangular lattice round hole array,while r/a_0=0.25,it can obtain better effect of light transmission enhancement and narrower transmission peak.The relationship(λ_(min)=1+0.82a_0) of array period(a_0) and the minimum reflectivity position(λ_(min)) by fitting the theoretical simulation results and the relationship(λ_(min)=0.2+0.94a_0 ) by fitting the experimental results are the same linear relationship basically.This linear relationship is coincident with the equation(λ_(min)≈3~(1/2)a_0/2=0.87a_0) by the introduction of SPP coupling mechanism,it is confirmed that the SPP coupling mechanism to explain the EOT characteristics of MDPhC is feasible.
2.We investigated M/MDPhC combined structure with double-layered metallic films,which the metal film's thickness of outer layer is less than its skin depth and the metal film's thickness of the inner layer is much larger than skin depth.It is found that the role of SPP mutual coupling occurs between the double-metal of the structure.The effect of metal thickness(t_m) at outermost layer on the EOT characteristics of M/MDPhC was explored by us.We design and fabricate M/MDPhC combined structure with silver/gold double-layered metallic films' TDMSHA and silicon-air photonic crystal using MEMS technology.We used FDTD numerical simulation to the structure and measured transmission spectra of experimental samples.By comparing the EOT characteristics of M/MDPhC and MDPhC,it is found that the transmission efficiency[T(λ_(max))]of SPP(1,1) hypo-state model at metal/air interface of M/MDPhC is bigger than MDPhC,and it has nothing to do with t_m;and the T(λ_(max)) of SPP(1,0) ground-state model at metal/air interface of M/MDPhC has something to do with t_m;it is;demonstrated that the SPP mutual coupling role being between silver/gold double-layered metallic films occurs only at metal/air interface. The results are found that:The EOT characteristics of M/MDPhC being composed of triangular lattice and square lattice round hole arrays with different silver film's thickness(t_m=1.5,3.8,23nm) exists the similar relationship with t_m.(1)With the increase of t_m,theλ_(max) shift to the direction of short-wavelength regularly;(2)While t_m=3.8nm,M/MDPhC has bigger T(λ_max).
3.We investigated M/D/MDPhC combined structure with metal/dielectric/metal trilayer combination membrane,the effect of refractive index of dielectric on the EOT characteristics of SPP(1,0) ground-state model at metal/air interface of M/D/MDPhC was explored by us,and at the same time we also discussed the impact of the different dielectric film's thickness(t_d=0.2,0.4,0.6μm).We design and fabricate M/D/MDPhC combined structure with TDMSHA consisting of Au/SiO_xN_y/Au three combination membrane and silicon-air photonic crystal using MEMS technology.We measured transmission spectra of experimental samples.By comparing the EOT characteristics of M/D/MDPhC and MDPhC,it is found that the transmission peak of M/D/MDPhC get much narrower,it is demonstrated that the SPP mutual coupling role between Au/SiO_xN_y/Au three combination membrane indeed exists.The results are found that:(1)λ_(max) of M/D/MDPhC being composed of SiO_(2.1)N_(0.3) with small refractive index(1.6) is smaller than that of M/D/MDPhC being composed of SiO_(0.6)N_1 with large refractive index(1.8),the phenomenon can validate the correctness of SPP mutual coupling role mechanism;(2)M/D/MDPhC being composed of dielectric SiO_(2.1)N_(0.3) with small refractive index has a larger T(λ_(max)) and a narrower transmission peak;(3)M/D/MDPhC being composed of SiO_xN_y with thin film(0.2μm) is able to get much larger T(λ_(max)) and narrower transmission peak; With the increase of SiO_xN_y film's thickness,theSPP(1,0) ground-state model at metal/air interface of M/D/MDPhC gradually degrades,and its transmission peak also gradually widens.
引文
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