压电作动器建模与非线性控制技术研究
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摘要
本课题来源于国家自然科学基金项目“电荷反馈式压电陶瓷精密定位及非线性控制技术”(No:10376043)。根据要求,本文研制了回滞现象小、线性化高的压电式二维微动工作平台,这种工作平台在精密工程、超精密加工等领域具有广泛的用途。该平台主要由机械弹性体、压电作动器、压电作动器驱动电路及电荷反馈回路、差动变压器测微仪和C8051F021单片机控制装置等构成。
本文针对压电陶瓷存在非线性与滞后的问题,根据电荷反馈原理设计了精密功率放大电路和电荷反馈回路;建立了压电作动器的机电模型,证明了电荷反馈控制对于减小回滞现象、提高线性度有明显的作用。在此基础上,以提高工作平台的定位精度、改善其线性度为目标,采用了数字控制的方法,对PID整定、模糊控制、神经网络等算法进行了仿真实验。仿真结果表明,PID模糊控制能取得较好的控制效果。与采用电压反馈的同类工作平台相比,非线性减少60%,滞后减少95%,几乎没有爬行现象。
The dissertation derives from the project“Piezoelectric platform for precision positioning using charge-feedback and nonlinear control method”supported by National Natural Science Foundation of China (authorized No. 10376043). According to the contract, a two dimensional micropositioning platform with small creep and hysteresis behavior and with high linearity was developed in this paper. The platform is widely applied in precision engineering, ultraprecision machining and et al, which consists of a mechanical elastomer, two piezoelectric actuators, two driving circuits based on charge-feedback, two linear variable differential transformers, and a numerical control device based on C8051F021.
In order to deal with the nonlinearity and hysteresis of piezoceramics, a precise power amplifier circuit with charge-feedback loop was developed. And an electromechanical model of piezoelectric actuator is presented to demonstrate that charge-feedback control is prominently effective to reduce hysteresis, creep and to improve linearity. Furthermore, in order to enhance the precision and linearity of the positioning platform, simulations of several numerical control algorithms, such as PID control, fuzzy control and NN (Neuro Net) had been carried out. The results show that fuzzy PID control has better performance than the others. Compared with the piezoelectric actuator using voltage-feedback control procedure, the nonlinearity of the platform is reduced by 60%, and the hysteresis and the creep are reduced by 95% or more.
本文针对压电陶瓷存在非线性与滞后的问题,根据电荷反馈原理设计了精密功率放大电路和电荷反馈回路;建立了压电作动器的机电模型,证明了电荷反馈控制对于减小回滞现象、提高线性度有明显的作用。在此基础上,以提高工作平台的定位精度、改善其线性度为目标,采用了数字控制的方法,对PID整定、模糊控制、神经网络等算法进行了仿真实验。仿真结果表明,PID模糊控制能取得较好的控制效果。与采用电压反馈的同类工作平台相比,非线性减少60%,滞后减少95%,几乎没有爬行现象。
The dissertation derives from the project“Piezoelectric platform for precision positioning using charge-feedback and nonlinear control method”supported by National Natural Science Foundation of China (authorized No. 10376043). According to the contract, a two dimensional micropositioning platform with small creep and hysteresis behavior and with high linearity was developed in this paper. The platform is widely applied in precision engineering, ultraprecision machining and et al, which consists of a mechanical elastomer, two piezoelectric actuators, two driving circuits based on charge-feedback, two linear variable differential transformers, and a numerical control device based on C8051F021.
In order to deal with the nonlinearity and hysteresis of piezoceramics, a precise power amplifier circuit with charge-feedback loop was developed. And an electromechanical model of piezoelectric actuator is presented to demonstrate that charge-feedback control is prominently effective to reduce hysteresis, creep and to improve linearity. Furthermore, in order to enhance the precision and linearity of the positioning platform, simulations of several numerical control algorithms, such as PID control, fuzzy control and NN (Neuro Net) had been carried out. The results show that fuzzy PID control has better performance than the others. Compared with the piezoelectric actuator using voltage-feedback control procedure, the nonlinearity of the platform is reduced by 60%, and the hysteresis and the creep are reduced by 95% or more.
引文
[1] 伟彬,孙立宁,曲东升等,基于压电陶瓷管的三自由度微操作手建模与实验,压电与声光,2002,24(2):160-164
[2] 褚祥诚,李龙土,国外压电陶瓷声马达的发展近况,材料报导,2001,15(6):24-27
[3] 李翠云,朱华,李蔓华,压电陶瓷在声速测量中的应用,中国陶瓷,2003,8:35-36
[4] 孙明清,STASZEWSKIWJ,SWAMYRN,压电陶瓷片用于检测混凝土的波速和动弹模,武汉理工大学学报,2004,6:1-4
[5] 李邓化,张良莹,姚熹,复合型钹式执行器的高位移性能研究,传感技术学报,1999,9:214-217
[6] Ka C., G.E. Smid, Z. Pan(潘仲明). Multi-sensor based Collision Warning System, Proc. of the 32nd ISATA, Vienna, Austria, 1999,6:14-18
[7] 许天增等. 超声传输特性和超声传感系统研究,厦门大学学报(自然科学版),2001,40 (2):303-310
[8] 王清池, 吴在勋. 超声地形障碍检出系统换能器的研制,厦门大学学报(自然科学版),1997,36(2):229-233
[9] R. Kuc. Three-Dimensional Tracking Using Qualitative Bionic Sonar, Robotics & Autonomous Systems, 1993,11:213-219
[10] C. D?rlemann, P. Mu?, M. Schugt, R. Uhlenbrock, NEW HIGH SPEED CURRENT CONTROLLED AMPLIFIER FOR PZT MULTILAYER STACK ACTUATORS, ScienLab electronic systems GmbH, Harpener Heide 4 D-44805 Bochum
[11] 武秀兰,王芬,任强,陶瓷智能材料及其应用,中国陶瓷工业,2004,10(2):43-46
[12] 叶超群,须政,严彪,电子陶瓷材料介电功能应用研究现状与前瞻,江苏陶瓷,2004, 37(2):15-19
[13] 薛泉林,压电陶瓷驱动器材料,江苏陶瓷,1997,30(3):26-28
[14] 栾桂冬,王光灿,新型换能器技术的进展,哈尔滨工程大学学报,2004,25(3):322-326
[15] Sriram Chandrasekaran and Douglas K. Lindner, Power Flow through Controlled Piezoelectric Actuators, Journal of Intelligent Material Systems and Structures, 2000,11(6):469-481
[16] Sriram Chandrasekaran and Douglas K. Lindner, Optimized Design of Switching Amplifiers for Piezoelectric Actuators, Bradley Department of Electrical and Computer Engineering Virginia Tech, Blacksburg, VA 24061, 2001,1
[17] Hagood, N. W., W. H. Chung, and A. von Flotow, Modeling of Piezoelectric Actuator Dynamics for Active Structure Control, Journal on Intelligent Material Systems and Structures, 1990,1(3):327-354
[18] Smith R.C, and C.L. Hom, A Domain Wall Model for Ferroelectric Hysteresis, Proceedings of SPIE, 1999,3667:61-150
[19] A. J. FLEMING* AND S. O. R. MOHEIMANI, Improved Current and Charge Amplifiers for Dring Piezoelectric Loads, and Issues in Signal Processing Design for Synthesis of Shunt Damping Circuits, Journal of Iintelligent Material Systems and Structures, 2004,15(2):77-92
[20] 杜正春,杨建国,姚振强,精密工程中压电陶瓷机构两种高压驱动电源的研制,压电与声光,2001,23(6):478
[21] USE High-Voltage Op Amps To Drive Power MOSFETs, ELECTRONIC DESIGN, 1993,6:51-55
[22] Paul Mayhan, K.Srinivasan, Sarawoot Watechagit, et al, Dynamic Modeling and Controller Design for a Piezoelectric Actuation System Used for Machine Tool Control, JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2000,11(10):771-780
[23] 魏克新,王云亮,陈志敏等,MATLAB 语言与自动控制系统设计,机械工业出版社
[24] 潘仲明,王跃科,杨俊,现代测控理论基础,国防科技大学出版社
[25] 刘金琨,先进 PID 控制 MATLAB 仿真(第 2 版),电子工业出版社
[26] 闻新,周露,李东江等,MATLAB 模糊逻辑工具箱的分析与应用,科学出版社
[27] 许桂生,罗豪甦,王评初等,新型弛豫型铁电单晶 PMNT 的铁电与压电性能,中国科学院
[28] IEEE Standard on Piezoelectricity, 1998
[29] 闻新,周露,王丹力等,MATLAB 神经网络应用设计,科学出版社
[2] 褚祥诚,李龙土,国外压电陶瓷声马达的发展近况,材料报导,2001,15(6):24-27
[3] 李翠云,朱华,李蔓华,压电陶瓷在声速测量中的应用,中国陶瓷,2003,8:35-36
[4] 孙明清,STASZEWSKIWJ,SWAMYRN,压电陶瓷片用于检测混凝土的波速和动弹模,武汉理工大学学报,2004,6:1-4
[5] 李邓化,张良莹,姚熹,复合型钹式执行器的高位移性能研究,传感技术学报,1999,9:214-217
[6] Ka C., G.E. Smid, Z. Pan(潘仲明). Multi-sensor based Collision Warning System, Proc. of the 32nd ISATA, Vienna, Austria, 1999,6:14-18
[7] 许天增等. 超声传输特性和超声传感系统研究,厦门大学学报(自然科学版),2001,40 (2):303-310
[8] 王清池, 吴在勋. 超声地形障碍检出系统换能器的研制,厦门大学学报(自然科学版),1997,36(2):229-233
[9] R. Kuc. Three-Dimensional Tracking Using Qualitative Bionic Sonar, Robotics & Autonomous Systems, 1993,11:213-219
[10] C. D?rlemann, P. Mu?, M. Schugt, R. Uhlenbrock, NEW HIGH SPEED CURRENT CONTROLLED AMPLIFIER FOR PZT MULTILAYER STACK ACTUATORS, ScienLab electronic systems GmbH, Harpener Heide 4 D-44805 Bochum
[11] 武秀兰,王芬,任强,陶瓷智能材料及其应用,中国陶瓷工业,2004,10(2):43-46
[12] 叶超群,须政,严彪,电子陶瓷材料介电功能应用研究现状与前瞻,江苏陶瓷,2004, 37(2):15-19
[13] 薛泉林,压电陶瓷驱动器材料,江苏陶瓷,1997,30(3):26-28
[14] 栾桂冬,王光灿,新型换能器技术的进展,哈尔滨工程大学学报,2004,25(3):322-326
[15] Sriram Chandrasekaran and Douglas K. Lindner, Power Flow through Controlled Piezoelectric Actuators, Journal of Intelligent Material Systems and Structures, 2000,11(6):469-481
[16] Sriram Chandrasekaran and Douglas K. Lindner, Optimized Design of Switching Amplifiers for Piezoelectric Actuators, Bradley Department of Electrical and Computer Engineering Virginia Tech, Blacksburg, VA 24061, 2001,1
[17] Hagood, N. W., W. H. Chung, and A. von Flotow, Modeling of Piezoelectric Actuator Dynamics for Active Structure Control, Journal on Intelligent Material Systems and Structures, 1990,1(3):327-354
[18] Smith R.C, and C.L. Hom, A Domain Wall Model for Ferroelectric Hysteresis, Proceedings of SPIE, 1999,3667:61-150
[19] A. J. FLEMING* AND S. O. R. MOHEIMANI, Improved Current and Charge Amplifiers for Dring Piezoelectric Loads, and Issues in Signal Processing Design for Synthesis of Shunt Damping Circuits, Journal of Iintelligent Material Systems and Structures, 2004,15(2):77-92
[20] 杜正春,杨建国,姚振强,精密工程中压电陶瓷机构两种高压驱动电源的研制,压电与声光,2001,23(6):478
[21] USE High-Voltage Op Amps To Drive Power MOSFETs, ELECTRONIC DESIGN, 1993,6:51-55
[22] Paul Mayhan, K.Srinivasan, Sarawoot Watechagit, et al, Dynamic Modeling and Controller Design for a Piezoelectric Actuation System Used for Machine Tool Control, JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES, 2000,11(10):771-780
[23] 魏克新,王云亮,陈志敏等,MATLAB 语言与自动控制系统设计,机械工业出版社
[24] 潘仲明,王跃科,杨俊,现代测控理论基础,国防科技大学出版社
[25] 刘金琨,先进 PID 控制 MATLAB 仿真(第 2 版),电子工业出版社
[26] 闻新,周露,李东江等,MATLAB 模糊逻辑工具箱的分析与应用,科学出版社
[27] 许桂生,罗豪甦,王评初等,新型弛豫型铁电单晶 PMNT 的铁电与压电性能,中国科学院
[28] IEEE Standard on Piezoelectricity, 1998
[29] 闻新,周露,王丹力等,MATLAB 神经网络应用设计,科学出版社