非平膜电容式微型超声波传感器研究
|
摘要
超声波具有方向性好,穿透能力强,易于获得较集中的声能,会引起空化作用等特点,广泛的应用在工业无损检测,医学超声成像,军事声纳系统等领域。作为超声系统中的关键器件,超声传感器对系统性能具有很大影响,目前普遍使用的压电式超声传感器存在着压电材料与工作介质水、空气等阻抗不匹配,小尺寸二维阵列制作困难、工作温度范围小等问题。近年来,由于电容式微型超声传感器具有声阻抗低、体积小、灵敏度高、频带宽和易于集成等特点,在医学超声成像、流量测量和空气耦合式超声检测等方面具有潜在的优势,受到国内外研究人员的关注。
本文以电容式微型超声传感器在声频定向技术中的应用为目标,开展了非平膜低频电容式微型超声传感器的基础研究工作,围绕传感器的理论模型分析、结构设计、力电耦合及声场特性有限元分析、实验测试等几个方面,论文的主要研究工作包括:
1、以提高电容式微型超声传感器的机电耦合效率为目标,设计了两种非平膜传感器结构,即改变传感器振动膜的形状,使整个薄膜的厚度不一致,通过对传感器进行力电耦合有限元分析,表明两种非平膜传感器与传统结构的传感器相比,薄膜平均位移量增大,机电耦合效率提高。
2、建立了非平膜传感器的声场有限元模型,研究了传感器的输出声压分布情况,对相同尺寸的平膜与非平膜传感器在振膜位移相同时的发射声压进行了对比分析,非平膜传感器的平均输出声压高于相同尺寸的平膜传感器。
3、研究分析了非平膜传感器的主要结构参数如薄膜半径,厚度,空腔间隙,电极尺寸,凸台及凹槽尺寸等对其吸合电压、机电转换系数、发射声压及带宽等性能的影响规律,为传感器的设计及优化提供了理论依据。
4、设计并制作了用于声频定向技术的电容式微型超声传感器,构建了实验测试系统,对传感器进行了机械、电学和声学性能测试。验证了非平膜电容式微型超声传感器设计理论与设计思想的正确性。
Ultrasonic waves have characteristics such as good direction, penetrating ablility, sound energy concentrated and cavitation, which is commonly used in many applications including non-destructive testing, medical ultrasonic imaging and SONAR system in military. As a critical part of ultrasonic system, ultrasonic transducers determinate the system’s performance. Now, piezoelectric materials have dominated the ultrasonic transducer technology. However, the piezoelectric transducers exhibit disadvantages such as the impedance mismatch between the piezoceramic and the air or the fluid of interest, difficult of fabricating large 2D arrays, and unsuitable being used in high temperature environments. The capacitive subminiature ultrasonic transducers receive increasing acceptance as an alternative to conventional piezoelectric transducers, they offer performance advantages of wide bandwidth、low impedance、high sensitivity and small size,and they are ideally suitable for medical diagnostics、air-coupled inspection and micro-flow measurement.
For the application in audio directional system, the capacitive subminiature ultrasonic transducers of non-flated membrane are studied deeply in this dissertation, which covers the aspects including theory model, structural designing, FEM simulations and characteristic testing.
The major research works in this dissertation can be summarized as follows:
1. Aimming at increasing the electromechanical coupling efficiency of transducers, two improved structures with non-flat membrane are proposed, one is a boss on the membrane and another is trench on the membrane. Finite element analysis results demonstrated that both improved structures achieved more uniform membrane deformation, and larger average membrane displacement, and higher effective electromechanical coupling efficiency.
2. The acoustic finite element models of transducers are developed to demonstrate the distributing characteristic of sound field. The FEA simulations have illustrated that the output pressure comparision between flat membrane and non-flated membrane by same size and same displacement, the non-flated membranes can radiate larger sound pressure.
3. The behaviors of the transducers with non-flated membrane in terms of collapse voltage, frequency, bandwidth and transformer ratio are investigated by varying the critical structural parameters such as membrane radius, membrane thickness, gap thickness, boss size and trench size. The detailed analysis results have been presented in this paper, which are beneficial for the design and optimization of capacitive ultrasonic transducers.
4. The capacitive transducers of non-flated membrane for audio directional system have been fabricated, and the experiment setups for transducers are established. The electrical, mechanical and acoustical characteristic performances of transducers have been tested. The results of finite element analysis in this paper are successfully verified by those experiments.
本文以电容式微型超声传感器在声频定向技术中的应用为目标,开展了非平膜低频电容式微型超声传感器的基础研究工作,围绕传感器的理论模型分析、结构设计、力电耦合及声场特性有限元分析、实验测试等几个方面,论文的主要研究工作包括:
1、以提高电容式微型超声传感器的机电耦合效率为目标,设计了两种非平膜传感器结构,即改变传感器振动膜的形状,使整个薄膜的厚度不一致,通过对传感器进行力电耦合有限元分析,表明两种非平膜传感器与传统结构的传感器相比,薄膜平均位移量增大,机电耦合效率提高。
2、建立了非平膜传感器的声场有限元模型,研究了传感器的输出声压分布情况,对相同尺寸的平膜与非平膜传感器在振膜位移相同时的发射声压进行了对比分析,非平膜传感器的平均输出声压高于相同尺寸的平膜传感器。
3、研究分析了非平膜传感器的主要结构参数如薄膜半径,厚度,空腔间隙,电极尺寸,凸台及凹槽尺寸等对其吸合电压、机电转换系数、发射声压及带宽等性能的影响规律,为传感器的设计及优化提供了理论依据。
4、设计并制作了用于声频定向技术的电容式微型超声传感器,构建了实验测试系统,对传感器进行了机械、电学和声学性能测试。验证了非平膜电容式微型超声传感器设计理论与设计思想的正确性。
Ultrasonic waves have characteristics such as good direction, penetrating ablility, sound energy concentrated and cavitation, which is commonly used in many applications including non-destructive testing, medical ultrasonic imaging and SONAR system in military. As a critical part of ultrasonic system, ultrasonic transducers determinate the system’s performance. Now, piezoelectric materials have dominated the ultrasonic transducer technology. However, the piezoelectric transducers exhibit disadvantages such as the impedance mismatch between the piezoceramic and the air or the fluid of interest, difficult of fabricating large 2D arrays, and unsuitable being used in high temperature environments. The capacitive subminiature ultrasonic transducers receive increasing acceptance as an alternative to conventional piezoelectric transducers, they offer performance advantages of wide bandwidth、low impedance、high sensitivity and small size,and they are ideally suitable for medical diagnostics、air-coupled inspection and micro-flow measurement.
For the application in audio directional system, the capacitive subminiature ultrasonic transducers of non-flated membrane are studied deeply in this dissertation, which covers the aspects including theory model, structural designing, FEM simulations and characteristic testing.
The major research works in this dissertation can be summarized as follows:
1. Aimming at increasing the electromechanical coupling efficiency of transducers, two improved structures with non-flat membrane are proposed, one is a boss on the membrane and another is trench on the membrane. Finite element analysis results demonstrated that both improved structures achieved more uniform membrane deformation, and larger average membrane displacement, and higher effective electromechanical coupling efficiency.
2. The acoustic finite element models of transducers are developed to demonstrate the distributing characteristic of sound field. The FEA simulations have illustrated that the output pressure comparision between flat membrane and non-flated membrane by same size and same displacement, the non-flated membranes can radiate larger sound pressure.
3. The behaviors of the transducers with non-flated membrane in terms of collapse voltage, frequency, bandwidth and transformer ratio are investigated by varying the critical structural parameters such as membrane radius, membrane thickness, gap thickness, boss size and trench size. The detailed analysis results have been presented in this paper, which are beneficial for the design and optimization of capacitive ultrasonic transducers.
4. The capacitive transducers of non-flated membrane for audio directional system have been fabricated, and the experiment setups for transducers are established. The electrical, mechanical and acoustical characteristic performances of transducers have been tested. The results of finite element analysis in this paper are successfully verified by those experiments.
引文
[1]林书玉,超声换能器的原理及设计,北京:科学出版社,2004
[2]贾宝贤,边文凤,赵万生等,压电超声换能器的应用与发展,压电与声光,2005,27(2):131~135
[3] http://www.murata.com/cn/
[4]陈荷娟,马宝华,水中探测超声换能器研究,传感器技术,2001,7:9~11
[5]曾锦晖,杨军,王延群,超声换能器在医学成像中的发展,国外医学生物医学工程分册,2005,28(5):310~313
[6]李文龙,菅喜岐,超声成像换能器的应用现状及其展望,中国科技论文在线,http://www.paper.edu.cn
[7]沈美娥,朱嘉林,李炜,0-3型压电复合材料圆柱形水听器,压电与声光,2006,28(6):662~664
[8]栾桂冬,王光灿,新型换能器技术的进展,哈尔滨工程大学学报,2004,25(3):322~326
[9]舒方法,石俊,基于PVDF压电薄膜的脉搏测量系统研究,压电与声光,2008,30(1):124~126
[10]黄文美,王博文,曹淑瑛等,超磁致伸缩超声换能器的结构与谐振频率分析,微特电机,2004(9):5~8
[11]鲍芳,磁致伸缩换能器应用研究进展,中国测试技术,2003(9):32~33
[12]李倩,林书玉,王春玲,电磁超声换能器(EMAT)的应用技术研究,电子元器件应用,2008,10(10):71~73
[13]王淑娟,康磊,赵再新等,电磁超声换能器的研究进展综述,仪表技术与传感器,2006(5):47~50
[14] I. Ladabaum,B. T. Khuri-Yakub,D. Spoliansky,et al.,Micromachined ultrasonic transducers (MUTs), IEEE Ultrasonics Symosium,1995, 501~504
[15]郝震宏,汤亮,乔东海等等,硅微压电超声换能器的设计与制作,传感技术学报,2006,19(5):2272~2275
[16] Xuecheng Jin,Micromachined capacitive ultrasonic immersion transducer array,Ph.D Dissertation,Stanford University,2002
[17] Davie W. Schinedel,Davie A. Hutchins,The design and characterization of micromachined air-coupled capacitance transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1995,42(1): 42~50
[18]周正干,魏东,空气耦合式超声波无损检测技术的发展,南昌航空航天大学学报,2007,21(3):96~100
[19]袁建人,国外医疗超声换能器的应用、研究和发展,中国医疗器械信息,2004 ,10(5):48~52
[20]格雷戈里T.A.科瓦奇著,张文栋等译,微传感器与微执行器全书,北京:科学出版社,2003
[21] Firas Akasheh,Todd Myers,John D. Fraser,et al.,Development of piezoelectric micromachined ultrasonic transducers,Sensor and Actuators A 111,2004: 275~287
[22] Jacek Baborowski,Nicolas Ledermann,Paul Muralt,Piezoelectric micromachined transducers(PMUTs) based on PZT thin films, IEEE Ultrasonics Symposium,2002: 1051~1054
[23] Paul Muralt,Jacek Baborowski,Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films,Journal of Electroceramics,2004,12: 101~108
[24] Firas Akasheh,John D. Fraser,Susmita Bose,Amit Bandyopadhyay,Piezoelectric micromachined ultrasonic transducers: Modeling the Influence of Structural Parameters on Device Performance,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(3): 455~468
[25] W. Chao,W. Zheyao,R. Tian-Ling,et al.,A micromachined piezoelectric ultrasonic transducer operating in d33 mode using square interdigital electrodes,IEEE Sensors Journal,2007,7(7):967~976
[26] W. Zheyao,W. Chao,L. Litian,Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(11): 1840~1850
[27] W.Zhihong,Z.Weiguang,Z.Hong,et al.,Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(12): 2289~2297
[28] Z.Wang,W.Zhu,J.Miao,et al.,Micromachined thick film piezoelectric ultrasonic transducer array,Sensors and Actuators A:Physical,2006,130: 485~490
[29]张晋弘,基于PZT厚膜的MEMS超声换能器:[硕士学位论文],中国科学技术大学,2009
[30]温建强,刘美丽,PZT厚膜及高频超声换能器的研究,声学技术,2010,29(1):74~80
[31]郝震宏,汤亮,李俊红,乔东海,基于圆形振动膜的硅微压电超声换能器的设计,声学技术,2006,25(4): 25~28
[32]杨楚威,李俊红,黄歆,汪承濠,圆形振动膜ZnO压电微传声器的研制,应用声学,2006,25(4): 197~200
[33] W. Kuhl,G. R. Schroder and F. K. Schroder,Condenser transmitters and microphones with solid dielectric for airborne ultrasonics,Acustica,1954,4: 519~532
[34] J. H. Cantrell and J. S. Heyman,Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids,Rev. Sci. Instrum.,1979,50: 31~33
[35] Suzuki,K.,Higuchi,K. and Tanigawa,H.,A silicon electrostatic ultrasonic transducer,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1989,36: 620~627
[36] M.I. Haller and B.T. Khuri-Yakub,A surface micromachined electrostatic ultrasonic air transducer,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1994, 1241-1244
[37] Igal Ladabaum,Xuecheng Jin,Hyongsok T. Soh,et al.,Surface micromachined capacitive ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1998,45(3):678-690
[38] M. Rafiq,C. Wykes,The performance of capacitive ultrasonic transducers using V- grooved backplates,Meas. Sci. Technol.,1991,2:168 -174
[39] P. Mattila,F. Tsuzuki,H. Vaataja,et al.,Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1995,42(1):1-7 [40 ] Luis Pizarro,Dominique Certon,Marc Lethiecq,et al.,Airborne ultrasonic electrostatic transducers with conductive grooved backplates:tailoring their centre frequency,sensitivity and bandwidth,Ultrasonics,1999,37:493~503
[41] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,Capacitive micromachined ultrasonic transducers (CMUTs)with isolation posts,IEEE International Ultrasonics,Ferroelectrics,and Frequency Control Joint 50th Anniversary Conference,2004:2223~2226
[42] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,A solution to the charging problems in capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005, 52(4):578~580
[43] Rasim O. Guldiken,Mujdat Balantekin,F. Levent Degertekin,Analysis and design of dual-electrode CMUTs,IEEE Ultrasonics Symposium,2005:581~584
[44] Rasim O. Guldiken,Jeff McLean,F. Levent Degertekin,CMUTS with dual-electrode structure for improved transmit and receive performance , IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2006,53(2):483~491
[45] Giosue Caliano,Alessandro Savoia,Alessandro Caronti,et al.,Capacitive micromachined ultrasonic transducer with an open-cells structure,Sensors and Actuators,2005:382~387
[46] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,Optimized membrane configuration improves CMUT performance,IEEE Ultrasonics Symposium,2004:505~508
[47] Ching-Hsiang Cheng,Chen Chao,Xiaomei Shi,et al.,A flexible capacitive micromachined ultrasonic transducer(CMUT) array with increase effective capacitance from concave bottom electrodes for ultrasonic imaging applications,IEEE Ultrasonics Symposium,2009:996~999
[48] Yongli Huang,Edward O. Haggstrom,Xuefeng Zhuang,Capacitive micromachined ultrasonic transducers with piston-shaped membranes,IEEE Ultrasonics Symposium,2005:589~592
[49] Muhammed N. Senlik,Selim Olcum,Abdullah Atalar,Improved performance of cMUT with nonuniform membranes,IEEE Ultrasonics Symposium,2005:597~600
[50] Shiwei Zhou,Paul Reynolds,John A. Hossack,Improving the performance of capacitive micromachined ultrasound transducers using modified membrane and support structures,IEEE Ultrasonics Symposium,2005:1925~1928
[51] Sean T. Hansen,Benjamin J. Mossawir,A. Sanli Ergun,et al.,Air-coupled nondestructive evaluation using micromachined ultrasonic transducers,IEEE Ultrasonics Symposium,1999:1037~1040
[52] Xuefeng Wang , Ying Fan , Wei-Cheng Tian , et al. , An air-coupled capacitive micromachined ultrasound transducer for noncontact nondestructive evaluation,IEEE Sensors Conference,2007:1464~1467
[53] Meng-Hui Chen and Michael S-C Lu,Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process,Journal of Micromechanics and Microengineering,2008,18:015009
[54] ?. Oralkan,A. S. Ergun,C.-H. Cheng,et al.,Underwater acoustic imaging using capacitive micromachined ultrasonic transducer arrays,IEEE ,2002:2354~2360
[55] ?. Oralkan,A.S.Ergun,C.H. Cheng,et al.,Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays(CMUTs):initial results,IEEE Ultrasonics Symposium,2002:1083~1086
[56] ?. Oralkan,A.S.Ergun,Jeremy A. Johoson,et al.,Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging , IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49(11):1596~1610
[57] David M. Mills , Medical imaging with capacitive micromachined ultrasound transducer(cMUT) arrays,IEEE Ultrasonics Symposium,2004:384~390
[58] ?mer Oralkan,Sean T. Hansen,Baris Bayram,et al.,CMUT ring arrays for forward-looking intravascular imaging,IEEE Ultrasonics Symposium,2004:403~406
[59] Utkan Demirci,Arif S. Ergun,?mer Oralkan,et al.,Forward-viewing CMUT arrays for Medical Imaging,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2004,51(7):886~894
[60] Rasim Guldiken,Jaime Zahorian,Mujdat Balantekin,et al.,Dual-annular-ring CMUT array for forwar-looking IVUS imaging,IEEE Ultrasonics Symposium,2006:698~701
[61] F. Levent Degertekin,Rasim O. Guldiken,Mustafa Karaman,Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging,IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 53, no. 2, 2006:474~482
[62] Jingkuang Chen,Xiaoyang Cheng,I-Ming Shen,et al.,A monolithic three-dimensional ultrasonic transducer array for medical imaging,Journal of Microelectromechanical Systems, 2007,16(5):1015~1024
[63] Xiaoyang Cheng,gkuang Chen,I-Ming Shen,et al.,Fabrication and assembly of a monolithic 3D CMUT array for imaging applications,IEEE Ultrasonics Symposium,2007:515~518
[64]葛立峰,硅微加工超声成像传感器的理论模型和优化设计,中国科学E辑,2007,37(5):700~706
[65] GE Li-feng,Progress in Electrostatic transducers for sound and ultrasound,Journal of Anhui University Natural Science Edition,2000,24(3),76~84
[66]葛立峰,微膜片的动力学行为及其特征化描述,中国科学G辑,2009,39(8):1058~1067
[67] Wenchao Zhou,Ting Yu,Fengqi Yu,A 1-D lumped theoretical model for CMUT,Proceedings of the 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics,Xi'an,China,2008:318~322
[68] Wenchao Zhou,Ting Yu,and Fengqi Yu,A 1-D theoretical receiving model for CMUT, International Conference on Intelligent Computation Technology and Automation,2008,529~534
[69] Xingqiang Lu,Ting Yu,Fengqi Yu,Investigation of thermal stress influence on cmut in standard CMOS process,Proceeding of the 2009 IEEE International conference on information and automation,2009:1447~1451
[70]田静,汪承灏,徐联等,圆形振动膜硅微电容传声器,传感技术学报,2006,19(5):2297~2299
[71]乔东海,田静,一种以多晶硅为振动膜的MEMS传声器研制,中国机械工程,2005,16(4):1243~1247
[72]宫铭举,何庆,汤亮等,基于MEMS的高灵敏度电容式低频传声器,压电与声光,2009,31(5):675~677
[73]郝震宏,汤亮,乔东海,硅微电容式超声换能器谐振频率的有限元分析,声学技术,2009,28(4):133~134
[74] Iro O. Wygant,Mario Kupnik,Goksen Yaralioglu,et al.,50-kHz capacitive micromachined ultrasonic transducers for generating highly directional sound with parametric arrays,IEEE Ultrasonics Symposium,2007:519~522
[75] Iro O. Wygant,Mario Kupnik,Mark S. Wochner,et al.,The design and characterization of capacitive micromachined ultrasonic transducers for generating high-intensity ultrasound for transmission of directional audio,IEEE Ultrasonics Symposium,2008:2100~2102
[76]冯冠平,谐振传感理论及器件,北京,清华大学出版社,2008
[77]江文娟,MEMS静电驱动系统中非局部问题研究:[硕士学位论文],华东师范大学,2008
[78]王洪喜,微结构的静电驱动特性研究:[博士学位论文],西安电子科技大学,2006
[79]于尚民,MEMS静电驱动结构运动特性控制方法:[硕士学位论文],北京邮电大学,2007
[80] Olcum Selim,Senlik Muhammed N,Atalar Abdullah,Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic Transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005,52(12):2211~2219
[81] Amin Nikoozadeh,Baris Bayram,Goksen G. Yaralioglu,Analytical calculation of collapse voltage of CMUT membrane,IEEE Ultrasonics Symposium,2004:256~259
[82] ANSYS耦合场分析指南,2000
[83]龚曙光,ANSYS工程应用实例解析,北京:机械工业出版社,2003
[84]博弈创作室,ANSYS7.0基础教程与实例详解,北京:中国水利水电出版社,2004
[85]刘娟,电容式微加工超声传感器的结构设计与仿真:[硕士学位论文],天津大学,2006
[86] Bradley J. Kirchmayer, Walied A. Moussa,M. David Checkel,Finite element modeling of a capacitive micromachined ultrasonic transduer,Proceeding of the international conference on MEMS,NANO and Smart Systems,2003
[87] Goksen G. Yaralioglu,A. Sanli Ergun,Butrus T. Khuri-Yakub,Finite-element analysis of capacitive micromachined ultrasonic transducers, IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005,52(12):2185~2198
[88] S A Anbalagan,G Uma and M Umapathy,Modeling and simulation of capacitive micromachined ultrasonic transducer,Internaltional MEMS Conference,2006,34:595~600
[89] Manvinder Singh,Vamshi Kommareddy,Manoj Kumar,et al.,Finite element analysis of capacitive micromachined ultrasonic transducer for NDE applications ,http://proceeding .aip.org/proceeding
[90] M.F. Teng and A. J. Hariz,Characterisation and modeling of MEMS ultrasonic transducers, International MEMS Conference 2006,949~954
[91] Goksen G. Yaralioglu,Arif Sanli Ergun,Baris Bayram,et al.,Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2003,50(4):449~456
[92] J. Fraser and P. Reynolds,Finite-element method for determination of electromechanical coupling coefficient for piezoelectric and capacitive micromachined ultrasonic transducers,Joint 140th meeting of ASA/NOISE-CON,2000
[93] D. Berlincourt,Piezoelectric crystals and ceramics,in Ultrasoinc Transducer Materials. New York: Plenum,1971
[94] W. P. Mason,Electromechanical transducers and wave filters,New York:Van Nostrand,1942
[95]乐同现,超音波微换能元件机电耦合参数最佳化设计与分析:[硕士学位论],台湾逢甲大学,2005
[96]梁智全,电容性微机电超音波换能器特性描述、设计制作与运用数值演算法构建等效电路:[硕士学位论文],台湾大学,2002
[97] M. W. Chang,T. J. Gwo,T. M. Deng,Modeling and design of capacitive micromachined ultrasonic transducers based-on database optimization,Internaltional MEMS Conderence,2006,192~197
[98] Morris Ming-Wei Chang,Milton T-M. Deng,James T-J. Gwo,Polymer-based capacitive micromachined ultrasonic transducers for micro surgical imaging applications,Proceding of the 1st IEEE International conference on Nano/Micro Engineered and Molecular systems,2006,61~65
[99] Chia-Hung Liu,Pei-Tai Chen,Surface micromachined capacitive ultrasonic transducer for underwater imaging,Journal of the Chinese Institute of Engineers,2007,30(3):447~458
[100] Ira O. Wygant,Mario Kupnik and Butrus T. Khuri-Yakub,Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell,IEEE Ultrasonics Symposium,2008:2111~2114
[101] H. Kagan Oguz,Selim Olcum,Muhammed N. Senlik,et al.,A novel equivalent circuit model for CMUTs,2009,2193~2196
[102] Selim Olcum,Abdullah Atalar,Hayrettin Koymen et al.,Calculation of transformer ratio in mason’s equivalent circuit for cMUTs,IEEE Ultrasonics Symposium,2006:1947~1950
[103]怡晓玲,压电声波器件的多场耦合问题ANSYS模拟与分析:[硕士学位论文],兰州大学,2009
[104]王海文,声场结构耦合系统的有限元分析及灵敏度计算:[硕士学位论文],大连理工大学,2004
[105] Saravanos D A,Heyliger R P,Mechanics and computational models for laminated piezoelectric beams,plates and shells,Applied mechanics Review,1999,52(10):305~319
[106]莫喜平,ANSYS软件在模拟分析声学换能器中的应用,声学技术,2007,26(6):1279~1290
[107]龚曙光、谢桂兰,ANSYS操作命令与参数化编程,北京:机械工业出版社,2004
[108] ANSYS,Inc. ANSYS APDL Programmer’s Analysis Guide Release 12.0
[109]官志坚,电容式微加工超声传感器仿真与制造流程:[硕士学位论],天津大学,2007
[110] Yongrae Roh,Butrus T.Khuri-Yakub,Finite element modeling of capacitor micromachined ultrasonic transducers, IEEE Ultrasonics Symposium,2000:905~908
[111] De-Yi Chiou , Mu-Yueh Chen , Ming-Wei Chang , Finite element modeling ,characterization,and optimization design for the polymer-typed capacitive micro-arrayed ultrasonic transducer,Microsystem Technology,2008,14:787~797
[112] Baris Bayram,Mario Kupnik,Goksen G. Yaralioglu,et al.,Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2007,54(2):418~430
[113] G.G. Yaralioglu,F. L. Degertekin,M. H. Badi,et al.,Finite element method and normal mode modeling of capacitive micromachined saw and lamb wave transducers,IEEE Ultrasonics Symposium,2000:129~132
[114] Yongrae Roh,Butrus T. Khuri-Yakub,Finite element analysis of underwater capacitor micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49(3):293~298
[115] Baris Bayram,Goksen G. Yaralioglu,Arif Sanli Ergun,et al.,Dynamic fem analysis of multiple cmut cells in immersion,IEEE Ultrasonics Symposium,2004:252~255
[116] Selim Olcum,Abdullah Atalar,Calculation of transformer ratio in mason’s equivalent circuit for cmuts,IEEE Ultrasonics Symposium,2006:1947~1950 [117 ] Mario Kupnik,Ira O. Wygant,Butrus T. Khuri-Yakub,Finite element analysis of stress stiffening effects in CMUTs,IEEE Ultrasonics Symposium,2008:487~490
[118] Mario Kupnik,Arif S. Ergun,Goksen G. Yaralioglu,Finite element analysis of fabrication related thermal effects in capacitive micromachined ultrasonic transducers , IEEE Ultrasonics Symposium,2006:938~941
[119] Baris Bayram,Goksen G. Yaralioglu,A. Sanli Ergun,et al.,Influence of the electrode size and location on the performance of a CMUT,IEEE Ultrasonics Symosium,2001, 949~952
[120] Alessandro Caronti,Riccardo Carotenuto,Giosue` Caliano,et al.,The effects of membrane metallization in capacitive microfabricated ultrasonic transducers,Acoustical Society of America J. Acoust. Soc. Am,2004,115 (2): 651–657
[121] M. Yoneyama,J. I. Fujimoto,The audio spotlight: An application of nonlinear interaction of sound waves to a new type of loudspeaker design,The Journal of the Acoustical Society of America,1983,73(5):1532~1536
[122] T. Kamakura,M. Yoneyama,K. Ikegaya,Developments of parametric loudspeaker for practical use,10th International Symposium on Nonliear Acoustics,Kobe,Japan,1984:147~150
[123] T. Kamakura,K. Aoki,Y. Kumamoto,Suitable modulation of the carrier ultrasound for a parametric loudspeaker,Acustica,1991,73:215~217
[124]焦丽华,声频定向超声波换能器的研究:[硕士学位论文],电子科技大学,2007
[125]郑贤中,高指向性音频声波理论与控制研究:[博士学位论文],华中科技大学,2005
[126]杜公焕,朱哲民,龚秀芬,声学基础(第2版),南京:南京大学出版社,2001
[127]袁易全,近代超声原理与应用,南京:南京大学出版社,1996
[128]张勋,许文海,董丽丽等,圆形活塞圆周阵组合声源的远场指向性,大连海事大学学报,2008,34(1):91~94
[129]陈敏,徐利梅,黄大贵等,基于MATLAB的换能器阵列指向性分析方法研究,电声技术,2006,5:25~28
[130]蒙海英,基于MATLAB的超声波声场模拟及可视化研究:[硕士学位论],大连理工大学,2008
[131]刘圣军,声学参量阵技术研究:[硕士学位论文],国防科学技术大学,2008
[132] O. Oralkan,B. Bayram,G. Yaralioglu,et al.,Experimental characterization of collapse-mode CMUT operation,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2006,53: 1513~1523
[133] B. Bayram,G. Yaralioglu,M. Kupnik,et al.,Dynamic analysis of capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52: 2270~2275
[134] B. Bayram,M. Kupnik,G. Yaralioglu,et al.,Characterization of cross-coupling in capacitive micromachined ultrasonic transducers,IEEE Ultrasonics Symosium,2005, 601~604
[135]徐临燕,栗大超,邱晗等,基于显微激光多普勒的纳结构振动特性测试,光电子激光,2008,19(6):781~785
[136] X. C. Jin,?. Oralkan,F. L. Degertekin,and B. T. Khuri-Yakub,Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2001,48(3): 750~760
[137] ?. Oralkan,X. C. Jin,F. L. Degertekin and B. T. Khuri-Yakub,Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer (cMUT) array element,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1999,46(6): 1337~1340
[138] Acoustic interface design guide,http://www.knowlesacoustics.com
[2]贾宝贤,边文凤,赵万生等,压电超声换能器的应用与发展,压电与声光,2005,27(2):131~135
[3] http://www.murata.com/cn/
[4]陈荷娟,马宝华,水中探测超声换能器研究,传感器技术,2001,7:9~11
[5]曾锦晖,杨军,王延群,超声换能器在医学成像中的发展,国外医学生物医学工程分册,2005,28(5):310~313
[6]李文龙,菅喜岐,超声成像换能器的应用现状及其展望,中国科技论文在线,http://www.paper.edu.cn
[7]沈美娥,朱嘉林,李炜,0-3型压电复合材料圆柱形水听器,压电与声光,2006,28(6):662~664
[8]栾桂冬,王光灿,新型换能器技术的进展,哈尔滨工程大学学报,2004,25(3):322~326
[9]舒方法,石俊,基于PVDF压电薄膜的脉搏测量系统研究,压电与声光,2008,30(1):124~126
[10]黄文美,王博文,曹淑瑛等,超磁致伸缩超声换能器的结构与谐振频率分析,微特电机,2004(9):5~8
[11]鲍芳,磁致伸缩换能器应用研究进展,中国测试技术,2003(9):32~33
[12]李倩,林书玉,王春玲,电磁超声换能器(EMAT)的应用技术研究,电子元器件应用,2008,10(10):71~73
[13]王淑娟,康磊,赵再新等,电磁超声换能器的研究进展综述,仪表技术与传感器,2006(5):47~50
[14] I. Ladabaum,B. T. Khuri-Yakub,D. Spoliansky,et al.,Micromachined ultrasonic transducers (MUTs), IEEE Ultrasonics Symosium,1995, 501~504
[15]郝震宏,汤亮,乔东海等等,硅微压电超声换能器的设计与制作,传感技术学报,2006,19(5):2272~2275
[16] Xuecheng Jin,Micromachined capacitive ultrasonic immersion transducer array,Ph.D Dissertation,Stanford University,2002
[17] Davie W. Schinedel,Davie A. Hutchins,The design and characterization of micromachined air-coupled capacitance transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1995,42(1): 42~50
[18]周正干,魏东,空气耦合式超声波无损检测技术的发展,南昌航空航天大学学报,2007,21(3):96~100
[19]袁建人,国外医疗超声换能器的应用、研究和发展,中国医疗器械信息,2004 ,10(5):48~52
[20]格雷戈里T.A.科瓦奇著,张文栋等译,微传感器与微执行器全书,北京:科学出版社,2003
[21] Firas Akasheh,Todd Myers,John D. Fraser,et al.,Development of piezoelectric micromachined ultrasonic transducers,Sensor and Actuators A 111,2004: 275~287
[22] Jacek Baborowski,Nicolas Ledermann,Paul Muralt,Piezoelectric micromachined transducers(PMUTs) based on PZT thin films, IEEE Ultrasonics Symposium,2002: 1051~1054
[23] Paul Muralt,Jacek Baborowski,Micromachined ultrasonic transducers and acoustic sensors based on piezoelectric thin films,Journal of Electroceramics,2004,12: 101~108
[24] Firas Akasheh,John D. Fraser,Susmita Bose,Amit Bandyopadhyay,Piezoelectric micromachined ultrasonic transducers: Modeling the Influence of Structural Parameters on Device Performance,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(3): 455~468
[25] W. Chao,W. Zheyao,R. Tian-Ling,et al.,A micromachined piezoelectric ultrasonic transducer operating in d33 mode using square interdigital electrodes,IEEE Sensors Journal,2007,7(7):967~976
[26] W. Zheyao,W. Chao,L. Litian,Design and analysis of a PZT-based micromachined acoustic sensor with increased sensitivity,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(11): 1840~1850
[27] W.Zhihong,Z.Weiguang,Z.Hong,et al.,Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52(12): 2289~2297
[28] Z.Wang,W.Zhu,J.Miao,et al.,Micromachined thick film piezoelectric ultrasonic transducer array,Sensors and Actuators A:Physical,2006,130: 485~490
[29]张晋弘,基于PZT厚膜的MEMS超声换能器:[硕士学位论文],中国科学技术大学,2009
[30]温建强,刘美丽,PZT厚膜及高频超声换能器的研究,声学技术,2010,29(1):74~80
[31]郝震宏,汤亮,李俊红,乔东海,基于圆形振动膜的硅微压电超声换能器的设计,声学技术,2006,25(4): 25~28
[32]杨楚威,李俊红,黄歆,汪承濠,圆形振动膜ZnO压电微传声器的研制,应用声学,2006,25(4): 197~200
[33] W. Kuhl,G. R. Schroder and F. K. Schroder,Condenser transmitters and microphones with solid dielectric for airborne ultrasonics,Acustica,1954,4: 519~532
[34] J. H. Cantrell and J. S. Heyman,Broadband electrostatic acoustic transducer for ultrasonic measurements in liquids,Rev. Sci. Instrum.,1979,50: 31~33
[35] Suzuki,K.,Higuchi,K. and Tanigawa,H.,A silicon electrostatic ultrasonic transducer,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1989,36: 620~627
[36] M.I. Haller and B.T. Khuri-Yakub,A surface micromachined electrostatic ultrasonic air transducer,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1994, 1241-1244
[37] Igal Ladabaum,Xuecheng Jin,Hyongsok T. Soh,et al.,Surface micromachined capacitive ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1998,45(3):678-690
[38] M. Rafiq,C. Wykes,The performance of capacitive ultrasonic transducers using V- grooved backplates,Meas. Sci. Technol.,1991,2:168 -174
[39] P. Mattila,F. Tsuzuki,H. Vaataja,et al.,Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1995,42(1):1-7 [40 ] Luis Pizarro,Dominique Certon,Marc Lethiecq,et al.,Airborne ultrasonic electrostatic transducers with conductive grooved backplates:tailoring their centre frequency,sensitivity and bandwidth,Ultrasonics,1999,37:493~503
[41] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,Capacitive micromachined ultrasonic transducers (CMUTs)with isolation posts,IEEE International Ultrasonics,Ferroelectrics,and Frequency Control Joint 50th Anniversary Conference,2004:2223~2226
[42] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,A solution to the charging problems in capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005, 52(4):578~580
[43] Rasim O. Guldiken,Mujdat Balantekin,F. Levent Degertekin,Analysis and design of dual-electrode CMUTs,IEEE Ultrasonics Symposium,2005:581~584
[44] Rasim O. Guldiken,Jeff McLean,F. Levent Degertekin,CMUTS with dual-electrode structure for improved transmit and receive performance , IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2006,53(2):483~491
[45] Giosue Caliano,Alessandro Savoia,Alessandro Caronti,et al.,Capacitive micromachined ultrasonic transducer with an open-cells structure,Sensors and Actuators,2005:382~387
[46] Yongli Huang,Edward O. H?ggstr?m,Xuefeng Zhuang,et al.,Optimized membrane configuration improves CMUT performance,IEEE Ultrasonics Symposium,2004:505~508
[47] Ching-Hsiang Cheng,Chen Chao,Xiaomei Shi,et al.,A flexible capacitive micromachined ultrasonic transducer(CMUT) array with increase effective capacitance from concave bottom electrodes for ultrasonic imaging applications,IEEE Ultrasonics Symposium,2009:996~999
[48] Yongli Huang,Edward O. Haggstrom,Xuefeng Zhuang,Capacitive micromachined ultrasonic transducers with piston-shaped membranes,IEEE Ultrasonics Symposium,2005:589~592
[49] Muhammed N. Senlik,Selim Olcum,Abdullah Atalar,Improved performance of cMUT with nonuniform membranes,IEEE Ultrasonics Symposium,2005:597~600
[50] Shiwei Zhou,Paul Reynolds,John A. Hossack,Improving the performance of capacitive micromachined ultrasound transducers using modified membrane and support structures,IEEE Ultrasonics Symposium,2005:1925~1928
[51] Sean T. Hansen,Benjamin J. Mossawir,A. Sanli Ergun,et al.,Air-coupled nondestructive evaluation using micromachined ultrasonic transducers,IEEE Ultrasonics Symposium,1999:1037~1040
[52] Xuefeng Wang , Ying Fan , Wei-Cheng Tian , et al. , An air-coupled capacitive micromachined ultrasound transducer for noncontact nondestructive evaluation,IEEE Sensors Conference,2007:1464~1467
[53] Meng-Hui Chen and Michael S-C Lu,Design and characterization of an air-coupled capacitive ultrasonic sensor fabricated in a CMOS process,Journal of Micromechanics and Microengineering,2008,18:015009
[54] ?. Oralkan,A. S. Ergun,C.-H. Cheng,et al.,Underwater acoustic imaging using capacitive micromachined ultrasonic transducer arrays,IEEE ,2002:2354~2360
[55] ?. Oralkan,A.S.Ergun,C.H. Cheng,et al.,Volumetric imaging using 2D capacitive micromachined ultrasonic transducer arrays(CMUTs):initial results,IEEE Ultrasonics Symposium,2002:1083~1086
[56] ?. Oralkan,A.S.Ergun,Jeremy A. Johoson,et al.,Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging , IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49(11):1596~1610
[57] David M. Mills , Medical imaging with capacitive micromachined ultrasound transducer(cMUT) arrays,IEEE Ultrasonics Symposium,2004:384~390
[58] ?mer Oralkan,Sean T. Hansen,Baris Bayram,et al.,CMUT ring arrays for forward-looking intravascular imaging,IEEE Ultrasonics Symposium,2004:403~406
[59] Utkan Demirci,Arif S. Ergun,?mer Oralkan,et al.,Forward-viewing CMUT arrays for Medical Imaging,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2004,51(7):886~894
[60] Rasim Guldiken,Jaime Zahorian,Mujdat Balantekin,et al.,Dual-annular-ring CMUT array for forwar-looking IVUS imaging,IEEE Ultrasonics Symposium,2006:698~701
[61] F. Levent Degertekin,Rasim O. Guldiken,Mustafa Karaman,Annular-ring CMUT arrays for forward-looking IVUS: transducer characterization and imaging,IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 53, no. 2, 2006:474~482
[62] Jingkuang Chen,Xiaoyang Cheng,I-Ming Shen,et al.,A monolithic three-dimensional ultrasonic transducer array for medical imaging,Journal of Microelectromechanical Systems, 2007,16(5):1015~1024
[63] Xiaoyang Cheng,gkuang Chen,I-Ming Shen,et al.,Fabrication and assembly of a monolithic 3D CMUT array for imaging applications,IEEE Ultrasonics Symposium,2007:515~518
[64]葛立峰,硅微加工超声成像传感器的理论模型和优化设计,中国科学E辑,2007,37(5):700~706
[65] GE Li-feng,Progress in Electrostatic transducers for sound and ultrasound,Journal of Anhui University Natural Science Edition,2000,24(3),76~84
[66]葛立峰,微膜片的动力学行为及其特征化描述,中国科学G辑,2009,39(8):1058~1067
[67] Wenchao Zhou,Ting Yu,Fengqi Yu,A 1-D lumped theoretical model for CMUT,Proceedings of the 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics,Xi'an,China,2008:318~322
[68] Wenchao Zhou,Ting Yu,and Fengqi Yu,A 1-D theoretical receiving model for CMUT, International Conference on Intelligent Computation Technology and Automation,2008,529~534
[69] Xingqiang Lu,Ting Yu,Fengqi Yu,Investigation of thermal stress influence on cmut in standard CMOS process,Proceeding of the 2009 IEEE International conference on information and automation,2009:1447~1451
[70]田静,汪承灏,徐联等,圆形振动膜硅微电容传声器,传感技术学报,2006,19(5):2297~2299
[71]乔东海,田静,一种以多晶硅为振动膜的MEMS传声器研制,中国机械工程,2005,16(4):1243~1247
[72]宫铭举,何庆,汤亮等,基于MEMS的高灵敏度电容式低频传声器,压电与声光,2009,31(5):675~677
[73]郝震宏,汤亮,乔东海,硅微电容式超声换能器谐振频率的有限元分析,声学技术,2009,28(4):133~134
[74] Iro O. Wygant,Mario Kupnik,Goksen Yaralioglu,et al.,50-kHz capacitive micromachined ultrasonic transducers for generating highly directional sound with parametric arrays,IEEE Ultrasonics Symposium,2007:519~522
[75] Iro O. Wygant,Mario Kupnik,Mark S. Wochner,et al.,The design and characterization of capacitive micromachined ultrasonic transducers for generating high-intensity ultrasound for transmission of directional audio,IEEE Ultrasonics Symposium,2008:2100~2102
[76]冯冠平,谐振传感理论及器件,北京,清华大学出版社,2008
[77]江文娟,MEMS静电驱动系统中非局部问题研究:[硕士学位论文],华东师范大学,2008
[78]王洪喜,微结构的静电驱动特性研究:[博士学位论文],西安电子科技大学,2006
[79]于尚民,MEMS静电驱动结构运动特性控制方法:[硕士学位论文],北京邮电大学,2007
[80] Olcum Selim,Senlik Muhammed N,Atalar Abdullah,Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic Transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005,52(12):2211~2219
[81] Amin Nikoozadeh,Baris Bayram,Goksen G. Yaralioglu,Analytical calculation of collapse voltage of CMUT membrane,IEEE Ultrasonics Symposium,2004:256~259
[82] ANSYS耦合场分析指南,2000
[83]龚曙光,ANSYS工程应用实例解析,北京:机械工业出版社,2003
[84]博弈创作室,ANSYS7.0基础教程与实例详解,北京:中国水利水电出版社,2004
[85]刘娟,电容式微加工超声传感器的结构设计与仿真:[硕士学位论文],天津大学,2006
[86] Bradley J. Kirchmayer, Walied A. Moussa,M. David Checkel,Finite element modeling of a capacitive micromachined ultrasonic transduer,Proceeding of the international conference on MEMS,NANO and Smart Systems,2003
[87] Goksen G. Yaralioglu,A. Sanli Ergun,Butrus T. Khuri-Yakub,Finite-element analysis of capacitive micromachined ultrasonic transducers, IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2005,52(12):2185~2198
[88] S A Anbalagan,G Uma and M Umapathy,Modeling and simulation of capacitive micromachined ultrasonic transducer,Internaltional MEMS Conference,2006,34:595~600
[89] Manvinder Singh,Vamshi Kommareddy,Manoj Kumar,et al.,Finite element analysis of capacitive micromachined ultrasonic transducer for NDE applications ,http://proceeding .aip.org/proceeding
[90] M.F. Teng and A. J. Hariz,Characterisation and modeling of MEMS ultrasonic transducers, International MEMS Conference 2006,949~954
[91] Goksen G. Yaralioglu,Arif Sanli Ergun,Baris Bayram,et al.,Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2003,50(4):449~456
[92] J. Fraser and P. Reynolds,Finite-element method for determination of electromechanical coupling coefficient for piezoelectric and capacitive micromachined ultrasonic transducers,Joint 140th meeting of ASA/NOISE-CON,2000
[93] D. Berlincourt,Piezoelectric crystals and ceramics,in Ultrasoinc Transducer Materials. New York: Plenum,1971
[94] W. P. Mason,Electromechanical transducers and wave filters,New York:Van Nostrand,1942
[95]乐同现,超音波微换能元件机电耦合参数最佳化设计与分析:[硕士学位论],台湾逢甲大学,2005
[96]梁智全,电容性微机电超音波换能器特性描述、设计制作与运用数值演算法构建等效电路:[硕士学位论文],台湾大学,2002
[97] M. W. Chang,T. J. Gwo,T. M. Deng,Modeling and design of capacitive micromachined ultrasonic transducers based-on database optimization,Internaltional MEMS Conderence,2006,192~197
[98] Morris Ming-Wei Chang,Milton T-M. Deng,James T-J. Gwo,Polymer-based capacitive micromachined ultrasonic transducers for micro surgical imaging applications,Proceding of the 1st IEEE International conference on Nano/Micro Engineered and Molecular systems,2006,61~65
[99] Chia-Hung Liu,Pei-Tai Chen,Surface micromachined capacitive ultrasonic transducer for underwater imaging,Journal of the Chinese Institute of Engineers,2007,30(3):447~458
[100] Ira O. Wygant,Mario Kupnik and Butrus T. Khuri-Yakub,Analytically calculating membrane displacement and the equivalent circuit model of a circular CMUT cell,IEEE Ultrasonics Symposium,2008:2111~2114
[101] H. Kagan Oguz,Selim Olcum,Muhammed N. Senlik,et al.,A novel equivalent circuit model for CMUTs,2009,2193~2196
[102] Selim Olcum,Abdullah Atalar,Hayrettin Koymen et al.,Calculation of transformer ratio in mason’s equivalent circuit for cMUTs,IEEE Ultrasonics Symposium,2006:1947~1950
[103]怡晓玲,压电声波器件的多场耦合问题ANSYS模拟与分析:[硕士学位论文],兰州大学,2009
[104]王海文,声场结构耦合系统的有限元分析及灵敏度计算:[硕士学位论文],大连理工大学,2004
[105] Saravanos D A,Heyliger R P,Mechanics and computational models for laminated piezoelectric beams,plates and shells,Applied mechanics Review,1999,52(10):305~319
[106]莫喜平,ANSYS软件在模拟分析声学换能器中的应用,声学技术,2007,26(6):1279~1290
[107]龚曙光、谢桂兰,ANSYS操作命令与参数化编程,北京:机械工业出版社,2004
[108] ANSYS,Inc. ANSYS APDL Programmer’s Analysis Guide Release 12.0
[109]官志坚,电容式微加工超声传感器仿真与制造流程:[硕士学位论],天津大学,2007
[110] Yongrae Roh,Butrus T.Khuri-Yakub,Finite element modeling of capacitor micromachined ultrasonic transducers, IEEE Ultrasonics Symposium,2000:905~908
[111] De-Yi Chiou , Mu-Yueh Chen , Ming-Wei Chang , Finite element modeling ,characterization,and optimization design for the polymer-typed capacitive micro-arrayed ultrasonic transducer,Microsystem Technology,2008,14:787~797
[112] Baris Bayram,Mario Kupnik,Goksen G. Yaralioglu,et al.,Finite element modeling and experimental characterization of crosstalk in 1-D CMUT arrays,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2007,54(2):418~430
[113] G.G. Yaralioglu,F. L. Degertekin,M. H. Badi,et al.,Finite element method and normal mode modeling of capacitive micromachined saw and lamb wave transducers,IEEE Ultrasonics Symposium,2000:129~132
[114] Yongrae Roh,Butrus T. Khuri-Yakub,Finite element analysis of underwater capacitor micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics,and Frequency Control,2002,49(3):293~298
[115] Baris Bayram,Goksen G. Yaralioglu,Arif Sanli Ergun,et al.,Dynamic fem analysis of multiple cmut cells in immersion,IEEE Ultrasonics Symposium,2004:252~255
[116] Selim Olcum,Abdullah Atalar,Calculation of transformer ratio in mason’s equivalent circuit for cmuts,IEEE Ultrasonics Symposium,2006:1947~1950 [117 ] Mario Kupnik,Ira O. Wygant,Butrus T. Khuri-Yakub,Finite element analysis of stress stiffening effects in CMUTs,IEEE Ultrasonics Symposium,2008:487~490
[118] Mario Kupnik,Arif S. Ergun,Goksen G. Yaralioglu,Finite element analysis of fabrication related thermal effects in capacitive micromachined ultrasonic transducers , IEEE Ultrasonics Symposium,2006:938~941
[119] Baris Bayram,Goksen G. Yaralioglu,A. Sanli Ergun,et al.,Influence of the electrode size and location on the performance of a CMUT,IEEE Ultrasonics Symosium,2001, 949~952
[120] Alessandro Caronti,Riccardo Carotenuto,Giosue` Caliano,et al.,The effects of membrane metallization in capacitive microfabricated ultrasonic transducers,Acoustical Society of America J. Acoust. Soc. Am,2004,115 (2): 651–657
[121] M. Yoneyama,J. I. Fujimoto,The audio spotlight: An application of nonlinear interaction of sound waves to a new type of loudspeaker design,The Journal of the Acoustical Society of America,1983,73(5):1532~1536
[122] T. Kamakura,M. Yoneyama,K. Ikegaya,Developments of parametric loudspeaker for practical use,10th International Symposium on Nonliear Acoustics,Kobe,Japan,1984:147~150
[123] T. Kamakura,K. Aoki,Y. Kumamoto,Suitable modulation of the carrier ultrasound for a parametric loudspeaker,Acustica,1991,73:215~217
[124]焦丽华,声频定向超声波换能器的研究:[硕士学位论文],电子科技大学,2007
[125]郑贤中,高指向性音频声波理论与控制研究:[博士学位论文],华中科技大学,2005
[126]杜公焕,朱哲民,龚秀芬,声学基础(第2版),南京:南京大学出版社,2001
[127]袁易全,近代超声原理与应用,南京:南京大学出版社,1996
[128]张勋,许文海,董丽丽等,圆形活塞圆周阵组合声源的远场指向性,大连海事大学学报,2008,34(1):91~94
[129]陈敏,徐利梅,黄大贵等,基于MATLAB的换能器阵列指向性分析方法研究,电声技术,2006,5:25~28
[130]蒙海英,基于MATLAB的超声波声场模拟及可视化研究:[硕士学位论],大连理工大学,2008
[131]刘圣军,声学参量阵技术研究:[硕士学位论文],国防科学技术大学,2008
[132] O. Oralkan,B. Bayram,G. Yaralioglu,et al.,Experimental characterization of collapse-mode CMUT operation,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2006,53: 1513~1523
[133] B. Bayram,G. Yaralioglu,M. Kupnik,et al.,Dynamic analysis of capacitive micromachined ultrasonic transducers,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2005,52: 2270~2275
[134] B. Bayram,M. Kupnik,G. Yaralioglu,et al.,Characterization of cross-coupling in capacitive micromachined ultrasonic transducers,IEEE Ultrasonics Symosium,2005, 601~604
[135]徐临燕,栗大超,邱晗等,基于显微激光多普勒的纳结构振动特性测试,光电子激光,2008,19(6):781~785
[136] X. C. Jin,?. Oralkan,F. L. Degertekin,and B. T. Khuri-Yakub,Characterization of one-dimensional capacitive micromachined ultrasonic immersion transducer arrays,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,2001,48(3): 750~760
[137] ?. Oralkan,X. C. Jin,F. L. Degertekin and B. T. Khuri-Yakub,Simulation and experimental characterization of a 2-D capacitive micromachined ultrasonic transducer (cMUT) array element,IEEE Transactions on Ultrasonics,Ferroelectrics and Frequency Control,1999,46(6): 1337~1340
[138] Acoustic interface design guide,http://www.knowlesacoustics.com