基于V型耦合腔的激光内腔生物传感器研究
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摘要
随着物联网概念的提出与不断深入,“更透彻的感知,更广泛的互联互通,更深入的智能化”成为物联网未来的发展方向。生物传感技术作为一门多学科交叉、相互渗透的高新“感知”技术,被广泛应用于临床医学、生物科学、军事科学、药物分析及环境监测等众多学科中,而且研究开发的势头在不断加大,实用化、商品化的步伐也在不断加快。光学生物传感作为一种能够直接探测生物分子反应的方法,以其非破坏性的操作模式、快速的信号产生和读取速率而在生物传感领域得到广泛的关注。并随着近年来集成光电子器件小型化和集成化的迅猛发展,光学生物传感已经成为集成光电子器件在取得巨大成功的光纤通信应用后的又一个重要的应用领域。
本文提出了一种基于V型耦合腔的激光内腔生物传感器。该激光内腔生物传感器包括一个V型耦合腔激光器和一个2×2多模干涉耦合器。由于V型耦合腔激光器的参照谐振腔的光学长度约为传感谐振腔光学长度的2倍,当传感区样品性质变化引起激光腔的光程变化时,激光器腔模将从一个模式跳变到相邻模式,该过程中V型激光器两输出端口相位差发生变化,通过测量腔外多模干涉耦合器出射端口的功率比即可以获得被测样品性质变化的相关信息。
本文利用Rsoft软件详细设计、分析了器件结构,包括波导的单模条件,有源无源的集成及波导灵敏度,并利用激光器阈值条件及多模速率方程等对传感灵敏度进行了详细的理论分析。结果表明相较于其他集成光波导生物传感器,该传感器首次将通信用激光器应用于传感,通过有源、无源混合集成实现了传感器的探测光源集成,减小了体积；在V型耦合腔激光器的基础上,引入两倍光学长度的游标效应,结合相应的腔外耦合器设计,从而脱离外部光谱探测设备,实现该传感器的功能集成,提高了便携性、可操作性；同时在工艺上通过湿法氧化法最大化了波导灵敏度,设计上使用游标效应以及激光腔内传感效应,显著提高该传感器的灵敏度。
With The Internet of Things proposed and developed, "Instrument the world's systems; Interconnect them; Make them intelligent" becomes the main direction of internet of things. Bio-sensing technology as an interdisciplinary high-tech "aware" technology, widely used in clinical medicine, biological sciences, military science, drug analysis, environmental monitoring and many other disciplines. Research and development momentum continues to increase in the field of bio-sensing, and is also accelerating the pace of commercialization. As a direct detection method, as well as its non-destructive mode of operation, fast rate of signal generation and reading, optical biosensors has received great interest. In recent years, with the rapid development of integrated optoelectronic devices, the optical bio-sensing becomes another important application area after optical fiber communication.
In the thesis we propose a novel integrated optical intracavity laser biosensor, which includes a V-coupled cavity laser and a 2×2 multimode interference coupler. The optical cavity length of one of the resonator is about twice of the other. As a result, when the lasing mode of the fixed cavity shifts from one mode to the next because of the effective refractive index variation in the sensing cavity caused by the sample index variation, the phase difference between the input port of the MMI coupler will experience aπphase change. By simply detecting the power ratio of two output ports, a refractive index sensitivity in the order of 10"8 RIU can be achieved.
To investigate the biosensor in detail, we used Rsoft to design the structure of the device, including the waveguide design, and the coupling of active and passive waveguide. By using laser threshold condition and multi-mode rate equation, the sensitivity of the sensor were analyzed. Compared with the other integrated optical biosensors, the main innovations of this thesis include, the integration of the active semiconductor laser source and photodetector with passive sensor; the double Vernier effect with MMI coupler to realize intensity interrogation without the need for any spectral measurement; the intracavity mechanism and a Vernier amplification effect to greatly increase the sensitivity.
本文提出了一种基于V型耦合腔的激光内腔生物传感器。该激光内腔生物传感器包括一个V型耦合腔激光器和一个2×2多模干涉耦合器。由于V型耦合腔激光器的参照谐振腔的光学长度约为传感谐振腔光学长度的2倍,当传感区样品性质变化引起激光腔的光程变化时,激光器腔模将从一个模式跳变到相邻模式,该过程中V型激光器两输出端口相位差发生变化,通过测量腔外多模干涉耦合器出射端口的功率比即可以获得被测样品性质变化的相关信息。
本文利用Rsoft软件详细设计、分析了器件结构,包括波导的单模条件,有源无源的集成及波导灵敏度,并利用激光器阈值条件及多模速率方程等对传感灵敏度进行了详细的理论分析。结果表明相较于其他集成光波导生物传感器,该传感器首次将通信用激光器应用于传感,通过有源、无源混合集成实现了传感器的探测光源集成,减小了体积；在V型耦合腔激光器的基础上,引入两倍光学长度的游标效应,结合相应的腔外耦合器设计,从而脱离外部光谱探测设备,实现该传感器的功能集成,提高了便携性、可操作性；同时在工艺上通过湿法氧化法最大化了波导灵敏度,设计上使用游标效应以及激光腔内传感效应,显著提高该传感器的灵敏度。
With The Internet of Things proposed and developed, "Instrument the world's systems; Interconnect them; Make them intelligent" becomes the main direction of internet of things. Bio-sensing technology as an interdisciplinary high-tech "aware" technology, widely used in clinical medicine, biological sciences, military science, drug analysis, environmental monitoring and many other disciplines. Research and development momentum continues to increase in the field of bio-sensing, and is also accelerating the pace of commercialization. As a direct detection method, as well as its non-destructive mode of operation, fast rate of signal generation and reading, optical biosensors has received great interest. In recent years, with the rapid development of integrated optoelectronic devices, the optical bio-sensing becomes another important application area after optical fiber communication.
In the thesis we propose a novel integrated optical intracavity laser biosensor, which includes a V-coupled cavity laser and a 2×2 multimode interference coupler. The optical cavity length of one of the resonator is about twice of the other. As a result, when the lasing mode of the fixed cavity shifts from one mode to the next because of the effective refractive index variation in the sensing cavity caused by the sample index variation, the phase difference between the input port of the MMI coupler will experience aπphase change. By simply detecting the power ratio of two output ports, a refractive index sensitivity in the order of 10"8 RIU can be achieved.
To investigate the biosensor in detail, we used Rsoft to design the structure of the device, including the waveguide design, and the coupling of active and passive waveguide. By using laser threshold condition and multi-mode rate equation, the sensitivity of the sensor were analyzed. Compared with the other integrated optical biosensors, the main innovations of this thesis include, the integration of the active semiconductor laser source and photodetector with passive sensor; the double Vernier effect with MMI coupler to realize intensity interrogation without the need for any spectral measurement; the intracavity mechanism and a Vernier amplification effect to greatly increase the sensitivity.
引文
[1]国际商报.物联网：激发下一个万亿超级产业.2010.http://news.xinhuanet.com/fortune/2010-07/06/c_l 2303413.htm
[2]Frost&Sullivan. Analytical Review of World Biosensors Market.2010. http://www.the-infoshop.com/press/fs121525.shtml
[3]生物网.生物传感器的发展历程.2009.http://www.biowww.com.cn/jiaoxue/jichu/2109.html
[4]鲁然.生物传感器在医学领域中的应用.当代医学,2009,15(24),36-37
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[6]初凤红,韩秀友,庞拂飞,蔡海文,瞿荣辉,方祖捷.集成光波导传感器的研究进展.激光与光电子学进展,2006,43(3)：21-27
[7]Xudong Fan, Ian M. White, Siyka I. Shopova, Hongying Zhu, Jonathan D. Suter, and Yuze Sun. Sensitive optical biosensors for unlabeled targets:A review. Analytica Chimica Acta, 2008,620(1-2):8-26
[8]Olivier Parriaux and G. J. Veldhuis. Normalized Analysis for the Sensitivity Optimization of Integrated Optical Evanescent-Wave Sensors. J. Lightwave Tech,2008,16(4):573-582
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[11]Prieto, F., Sepulveda, B., Calle, A., Llobera, A., Dominguez, C., Abad, A., Montoya, A., Lechuga, L. M. An integrated optical interferometric nanodevice based on silicon technology for biosensor applications. Nanotechnol.,2003,14:907-912
[12]Ymeti, A., Kanger, J. S., Greve, J., Lambeck, P. V., Wijn, R., Heideman, R. G. Realization of a multichannel integrated Young interferometer chemical sensor. Appl. Opt.,2003,42: 5649-5660.
[13]M. L. Gorodetsky, A. A. Savchenkov, and V. S. Ilchenko. Ultimate Q of optical microsphere resonators. Opt. Lett.,1996,21:453-455
[14]Katrien De Vos, Irene Bartolozzi, Etienne Schacht, Peter Bienstman, and Roel Baets. Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. Optics Express,2007,15(12):7610-7615
[15]Chao, C.-Y., Fung, W., Guo, L.J. Polymer Microring Resonators for Biochemical Sensing.Applications. IEEE J. Sel. Topics in Quantum Electron,2006,12(1):134-142
[16]Cohen, Daniel A., Nolde, Jill A., Wang, Chad S., Skogen, Erik J., Rivlin, A., Coldren, Larry A. Physics and Applications of Optoelectronic Devices. E Proceedings of the SPIE,2004,5594:81-93
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[19]马春生,刘式墉.光波导模式理论.吉林大学出版社,2007：172-203
[20]Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delage, B. Lamontagne, J. H. Schmid, and E. Post. A Silicon-on-Insulator Photonic Wire Based Evanescent Field Sensor. IEEE Photonics Technology Letters.2006,18(23):2520-2522
[21]Jian-Jun He, and Dekun Liu. Wavelength switchable semiconductor laser using half-wave V-coupled cavities. Optics Express,2008,16(6):3896-3911
[22]Dekun Liu, Min Lou, and Jian-Jun He. Static and Dynamic Characteristics of Digital Wavelength Switching in V-Coupled-Cavity Semiconductor Laser. IEEE J. Lightwave Tech., 2010,28(5):746-753
[23]Biocore. Biosensor systems and Biacore Technology. http://hermes.material.uu.se/-klas/S&A-Biochem+Biacore.pdf
[24]Min Lou, Tingting Yu, and Jian-Jun He. Monolithic Integrated Intracavity Biosensors Based on Interferometric Laser. Communications and Photonics Conference and Exhibition (ACP), 2009 Asia, SC 05 Best Student Paper Competition (TuG)
[25]刘德坤.单片集成波长可切换半导体激光器及高速Q调制技术研究.浙江大学,2010,博士论文
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[28]Larry A. Coldren, Scott W. Corzine(史寒星译).二极管激光器与集成光路.北京邮电大学出版社,2006,246-249
[29]E.J. Skogen, J.S. Barton, S.P. DenBaars, and L.A. Coldren. A Quantum-Well-Intermixing Process for Wavelength-Agile Photonic Integrated Circuits. IEEE J. Sel. Topics in Quant. Electron.,2002,8:863-869
[30]M.N. Sysak, J.W. Raring, J.S. Barton, M.M. Dummer, D.J. Blumenthal, and L.A. Coldren. A Single Regrowth Integration Platform for Photonic Circuits Incorporating Tunable SGDBR Lasers and Quantum-Well EAMs. IEEE Photon. Technol. Lett.,2006,18(15):1630-1632
[31]Y. A. Akulova, G. A. Fish, P. C. Koh, C. Schow, P. Kozodoy, A. Dahl, S. Nakagawa, M. Larsen, M. Mack, T. Strand, C. Coldren, E. Hegblom, S. Penniman, T. Wipiejewski, and L. A. Coldren. Widely-tunable electroasbsorption-modulated sampled grating DBR laser transmitter. IEEE J. Sel. Topics Quantum Electron.,2002,8(6):1349-1357
[32]K.S. Kim, K.H. Ha, T.Y. Han, M. Yang tind Y.H. LCC. GaAs/AIGaAs quantum well intermixing using buried Al-oxide layer. Electronics Letters,2002,36(33):246-247
[33]Hammons, D. Mathes, and R. Hull. Advances in selective wet oxidation of AlGaAs alloys. IEEE J. Sel. Topics. Quantum Electron.,1997,3(3):916-926
[34]江剑平.半导体激光器.电子工业出版社,2000：190-224
[35]Uzma Khalique. Polarization based Integration Scheme(POLIS).2008, PhD thesis
[36]Farid Agahi, Kei May Lau, Hong K. Choi,Arvind Baliga, and Neal G. Anderson. High-Performance 770-nm AlGaAs-GaAsP Tensile-Strained Quantum-Well Laser Diodes. IEEE Photonics Technology Letters,1995,7(2)
[37]H. Tanaka.780 nm band TM-mode laser operation of GaAsP/AIGaAs tensile-strained quantum-well lasers. Electron. Lett.,1993,29:1611-1613
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[50]王磊.磷化铟基集成光子器件及其关键工艺技术研究.浙江大学,2010,博士论文
[2]Frost&Sullivan. Analytical Review of World Biosensors Market.2010. http://www.the-infoshop.com/press/fs121525.shtml
[3]生物网.生物传感器的发展历程.2009.http://www.biowww.com.cn/jiaoxue/jichu/2109.html
[4]鲁然.生物传感器在医学领域中的应用.当代医学,2009,15(24),36-37
[5]王锋,樊先,王民权.光学生物传感器的研究进展.材料导报,2004,18(7)
[6]初凤红,韩秀友,庞拂飞,蔡海文,瞿荣辉,方祖捷.集成光波导传感器的研究进展.激光与光电子学进展,2006,43(3)：21-27
[7]Xudong Fan, Ian M. White, Siyka I. Shopova, Hongying Zhu, Jonathan D. Suter, and Yuze Sun. Sensitive optical biosensors for unlabeled targets:A review. Analytica Chimica Acta, 2008,620(1-2):8-26
[8]Olivier Parriaux and G. J. Veldhuis. Normalized Analysis for the Sensitivity Optimization of Integrated Optical Evanescent-Wave Sensors. J. Lightwave Tech,2008,16(4):573-582
[9]J. Homola, S. S. Yee, and G. Gauglitz. Surface plasmon resonance sensors:review. ensors and Actuators B:Chemical,1999,54(1-2):3-15
[10]Vittorio M. N. Passaro, Francesco Dell'Olio, Biagio Casamassima and Francesco De Leonardis. Guided-Wave Optical Biosensors. Sensors,2007,7:508-536
[11]Prieto, F., Sepulveda, B., Calle, A., Llobera, A., Dominguez, C., Abad, A., Montoya, A., Lechuga, L. M. An integrated optical interferometric nanodevice based on silicon technology for biosensor applications. Nanotechnol.,2003,14:907-912
[12]Ymeti, A., Kanger, J. S., Greve, J., Lambeck, P. V., Wijn, R., Heideman, R. G. Realization of a multichannel integrated Young interferometer chemical sensor. Appl. Opt.,2003,42: 5649-5660.
[13]M. L. Gorodetsky, A. A. Savchenkov, and V. S. Ilchenko. Ultimate Q of optical microsphere resonators. Opt. Lett.,1996,21:453-455
[14]Katrien De Vos, Irene Bartolozzi, Etienne Schacht, Peter Bienstman, and Roel Baets. Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. Optics Express,2007,15(12):7610-7615
[15]Chao, C.-Y., Fung, W., Guo, L.J. Polymer Microring Resonators for Biochemical Sensing.Applications. IEEE J. Sel. Topics in Quantum Electron,2006,12(1):134-142
[16]Cohen, Daniel A., Nolde, Jill A., Wang, Chad S., Skogen, Erik J., Rivlin, A., Coldren, Larry A. Physics and Applications of Optoelectronic Devices. E Proceedings of the SPIE,2004,5594:81-93
[17]李玉权,崔敏.光波导理论与技术.北京：人民邮电出版社,2002
[18]陈军.光学电磁理论.科学出版社,2005：138-170
[19]马春生,刘式墉.光波导模式理论.吉林大学出版社,2007：172-203
[20]Densmore, D.-X. Xu, P. Waldron, S. Janz, P. Cheben, J. Lapointe, A. Delage, B. Lamontagne, J. H. Schmid, and E. Post. A Silicon-on-Insulator Photonic Wire Based Evanescent Field Sensor. IEEE Photonics Technology Letters.2006,18(23):2520-2522
[21]Jian-Jun He, and Dekun Liu. Wavelength switchable semiconductor laser using half-wave V-coupled cavities. Optics Express,2008,16(6):3896-3911
[22]Dekun Liu, Min Lou, and Jian-Jun He. Static and Dynamic Characteristics of Digital Wavelength Switching in V-Coupled-Cavity Semiconductor Laser. IEEE J. Lightwave Tech., 2010,28(5):746-753
[23]Biocore. Biosensor systems and Biacore Technology. http://hermes.material.uu.se/-klas/S&A-Biochem+Biacore.pdf
[24]Min Lou, Tingting Yu, and Jian-Jun He. Monolithic Integrated Intracavity Biosensors Based on Interferometric Laser. Communications and Photonics Conference and Exhibition (ACP), 2009 Asia, SC 05 Best Student Paper Competition (TuG)
[25]刘德坤.单片集成波长可切换半导体激光器及高速Q调制技术研究.浙江大学,2010,博士论文
[26]E. S. Koteles. Techniques for Monolithically Fabricating Photonic Integrated Circuits. Applications of Photonic technology, Eds. New York:Plenum,1995,413-418
[27]J.-J. He, E. S. Koteles, P. J. Poole, Y. Feng, M. Davis, S. Charbonneau. Photonic integrated circuits and components using quantum well intermixing. Photonics China, SPIE's International Symposium on Lasers, Optoelectronics and Microphotonics, Beijing, China, 1996,2891(2)
[28]Larry A. Coldren, Scott W. Corzine(史寒星译).二极管激光器与集成光路.北京邮电大学出版社,2006,246-249
[29]E.J. Skogen, J.S. Barton, S.P. DenBaars, and L.A. Coldren. A Quantum-Well-Intermixing Process for Wavelength-Agile Photonic Integrated Circuits. IEEE J. Sel. Topics in Quant. Electron.,2002,8:863-869
[30]M.N. Sysak, J.W. Raring, J.S. Barton, M.M. Dummer, D.J. Blumenthal, and L.A. Coldren. A Single Regrowth Integration Platform for Photonic Circuits Incorporating Tunable SGDBR Lasers and Quantum-Well EAMs. IEEE Photon. Technol. Lett.,2006,18(15):1630-1632
[31]Y. A. Akulova, G. A. Fish, P. C. Koh, C. Schow, P. Kozodoy, A. Dahl, S. Nakagawa, M. Larsen, M. Mack, T. Strand, C. Coldren, E. Hegblom, S. Penniman, T. Wipiejewski, and L. A. Coldren. Widely-tunable electroasbsorption-modulated sampled grating DBR laser transmitter. IEEE J. Sel. Topics Quantum Electron.,2002,8(6):1349-1357
[32]K.S. Kim, K.H. Ha, T.Y. Han, M. Yang tind Y.H. LCC. GaAs/AIGaAs quantum well intermixing using buried Al-oxide layer. Electronics Letters,2002,36(33):246-247
[33]Hammons, D. Mathes, and R. Hull. Advances in selective wet oxidation of AlGaAs alloys. IEEE J. Sel. Topics. Quantum Electron.,1997,3(3):916-926
[34]江剑平.半导体激光器.电子工业出版社,2000：190-224
[35]Uzma Khalique. Polarization based Integration Scheme(POLIS).2008, PhD thesis
[36]Farid Agahi, Kei May Lau, Hong K. Choi,Arvind Baliga, and Neal G. Anderson. High-Performance 770-nm AlGaAs-GaAsP Tensile-Strained Quantum-Well Laser Diodes. IEEE Photonics Technology Letters,1995,7(2)
[37]H. Tanaka.780 nm band TM-mode laser operation of GaAsP/AIGaAs tensile-strained quantum-well lasers. Electron. Lett.,1993,29:1611-1613
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