FMEA失效模式和效果分析在半导体后段工序中的应用
摘要
FMEA(Failure Mode and Effect Analysis,失效模式和效果分析)是一种用来确定潜在失效模式及其原因的分析方法。具体来说,通过实行FMEA,可在产品设计或生产工艺真正实现之前发现产品的弱点,可在原形样机阶段或在量生产之前确定产品缺陷。FMEA已经成功地应用在军用航空领域、一般工业的产品制造和生产过程设计等领域。
针对半导体后段制造既存在系统集成下自动化生产又兼顾大量手动操作的过程,本文着重于寻求一种半导体后段生产中集管理系统、工艺管理、设备管理、的方法。本研究的目的是通过评估半导体后段生产中系统、工艺和设备等3个层面的故障模式,尽量降低生产线故障导致的异常品及停工问题。通过对FMEA理论的分析并结合生产的实际情况,寻找到适合A公司的管理和维护方法,并通过实际工作中的案例进行FMEA分析和操作,进行半导体后段生产环节中的各个失效模式评估,制定出相应的改善措施,提供给工程人员采取事先防范措施,避免或降低失效造成的产品品质问题、设备故障及停线问题,给公司后段工序生产的质量、成本和安全等因素提供保障。
本文的研究结果显示,在引入FMEA系统分析方法后,系统故障、产品质量问题、工艺设备问题、人为操作失误等各层面异常有效降低,有效实现了质量、成本和效率的平衡。
FMEA (Fail Mode and Effect Analysis) is a kind of method used to identify potential failure modes and do effect analysis. By implementing FMEA, the weakness and the fault of the products can be found out before product design or manufacturing period and the prototype of a product can be determined whether potential fault before mass production has. FMEA have been successfully used in military aviation, general industrial products manufacturing and production process design and other fields.
Semiconductor manufacturing has the extremely high concentration of not only automation management but also manual operation. The thesis is to reduce the quality issue and tool downtime ration by applying a quality management tool to system management, process management, equipment management and manual operation management in semiconductor. By the analysis of FMEA theory and real samples in A corporation, a series of effective and useful countermeasure can be found and taken. After the countermeasure is taken, every potentional quality risk can be effectively controlled to improve the product quality and improve product throughput.
This thesis shows FMEA is an effective management tool in semiconductor back-end production. With the good understanding and application of FMEA theory, yield improvement, cost-down and efficiency improvement can be realized.
针对半导体后段制造既存在系统集成下自动化生产又兼顾大量手动操作的过程,本文着重于寻求一种半导体后段生产中集管理系统、工艺管理、设备管理、的方法。本研究的目的是通过评估半导体后段生产中系统、工艺和设备等3个层面的故障模式,尽量降低生产线故障导致的异常品及停工问题。通过对FMEA理论的分析并结合生产的实际情况,寻找到适合A公司的管理和维护方法,并通过实际工作中的案例进行FMEA分析和操作,进行半导体后段生产环节中的各个失效模式评估,制定出相应的改善措施,提供给工程人员采取事先防范措施,避免或降低失效造成的产品品质问题、设备故障及停线问题,给公司后段工序生产的质量、成本和安全等因素提供保障。
本文的研究结果显示,在引入FMEA系统分析方法后,系统故障、产品质量问题、工艺设备问题、人为操作失误等各层面异常有效降低,有效实现了质量、成本和效率的平衡。
FMEA (Fail Mode and Effect Analysis) is a kind of method used to identify potential failure modes and do effect analysis. By implementing FMEA, the weakness and the fault of the products can be found out before product design or manufacturing period and the prototype of a product can be determined whether potential fault before mass production has. FMEA have been successfully used in military aviation, general industrial products manufacturing and production process design and other fields.
Semiconductor manufacturing has the extremely high concentration of not only automation management but also manual operation. The thesis is to reduce the quality issue and tool downtime ration by applying a quality management tool to system management, process management, equipment management and manual operation management in semiconductor. By the analysis of FMEA theory and real samples in A corporation, a series of effective and useful countermeasure can be found and taken. After the countermeasure is taken, every potentional quality risk can be effectively controlled to improve the product quality and improve product throughput.
This thesis shows FMEA is an effective management tool in semiconductor back-end production. With the good understanding and application of FMEA theory, yield improvement, cost-down and efficiency improvement can be realized.
引文
[1]樊喜刚.FMEA在产品制造质量控制中的应用[R].北京：中国质量协会,2010
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[3]李维佳.FMEA应用于设备维护管理的研究[D].成都：西南交通大学,2006：
[4]李勇,王悦勇,王成.FMEA在液压支架设计中的应用[J].煤矿机械2010(10)
[5]于宗光,江惠蓉.集成电路项目管理[J].微电子技术,2003,12.
[6]成功的项目管理[EB].华为培训,2007,8
[7]樊正平.项目计划与进度控制在某半导体企业的应用[D],南京理工大学,2005.
[8]格雷戈里T.豪根.有效的工作分解结构[M].机械工业出版社,2005年.
[9]谷珊.风险管理在软件测试项目中的应用[D].北京邮电大学,2009：
[10]费朵,邹家继. 项目风险识别方法探讨[J].物流科技2008(8)：140
[11]曹进.电子制造业生产线建设项目管理研究[D].成都西南交通大学,2006：
[12]张骅.项目评估过程中的风险管理[J].科技经济市场,2009(12)：75-76.
[13]赵昕.项目风险管理[J].社会科学家,2005,5：391-392
[14]Lan Sutton. Process Risk and Reliability Management[M]. Elsevier Lnc,2010:79-90.
[15]IBM Project Management Methodology Technique:Project Control Book Guide[M]. International Business Machine Corporation 1995,1996.
[16]Lan T. Cameron and Raghu Raman. Process System engineering Risk Management[M].
[17]Wu, Desheng Dash, Olson, David. Enterprise Risk Management:Coping with model risk[M]./db,2008:125-126
[18]Kasap, Deniz, Kaymak, Murat. Risk identification Step of the Project Risk Management[M], Protland State University,2007:
[19]Stephen C Ward, Chris B Chapman. Risk-management perspective on the project lifecycle[J]. Internation Journal of Project Management,1995,13(3):145-149
[20]Alessandro Birolini. Reliability Engineering Theory and Practice (Fifth edition)[M]. Springer,2007:100
[2]唐微FMEA在电力机车设计过程中的应用[J].电力机车与城轨车辆,2010(8)
[3]李维佳.FMEA应用于设备维护管理的研究[D].成都：西南交通大学,2006：
[4]李勇,王悦勇,王成.FMEA在液压支架设计中的应用[J].煤矿机械2010(10)
[5]于宗光,江惠蓉.集成电路项目管理[J].微电子技术,2003,12.
[6]成功的项目管理[EB].华为培训,2007,8
[7]樊正平.项目计划与进度控制在某半导体企业的应用[D],南京理工大学,2005.
[8]格雷戈里T.豪根.有效的工作分解结构[M].机械工业出版社,2005年.
[9]谷珊.风险管理在软件测试项目中的应用[D].北京邮电大学,2009：
[10]费朵,邹家继. 项目风险识别方法探讨[J].物流科技2008(8)：140
[11]曹进.电子制造业生产线建设项目管理研究[D].成都西南交通大学,2006：
[12]张骅.项目评估过程中的风险管理[J].科技经济市场,2009(12)：75-76.
[13]赵昕.项目风险管理[J].社会科学家,2005,5：391-392
[14]Lan Sutton. Process Risk and Reliability Management[M]. Elsevier Lnc,2010:79-90.
[15]IBM Project Management Methodology Technique:Project Control Book Guide[M]. International Business Machine Corporation 1995,1996.
[16]Lan T. Cameron and Raghu Raman. Process System engineering Risk Management[M].
[17]Wu, Desheng Dash, Olson, David. Enterprise Risk Management:Coping with model risk[M]./db,2008:125-126
[18]Kasap, Deniz, Kaymak, Murat. Risk identification Step of the Project Risk Management[M], Protland State University,2007:
[19]Stephen C Ward, Chris B Chapman. Risk-management perspective on the project lifecycle[J]. Internation Journal of Project Management,1995,13(3):145-149
[20]Alessandro Birolini. Reliability Engineering Theory and Practice (Fifth edition)[M]. Springer,2007:100