微硅陀螺检测子系统集成电路的研究与实现
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摘要
在硅材料上采用氧化、光刻、腐蚀、键合等微机械加工技术制作出来的微机械惯性传感器具有批量生产成本低、体积小、质量轻、功耗低、可靠性高、易于与微电子电路集成实现数字化和智能化等优点。它成功地把旋转或者非旋转的惯性传感器从宏观概念向微观世界推进了至关重要的一大步。微硅机械振动陀螺仪是微机械惯性传感器乃至整个微机械研究领域内一项重要课题。微硅机械陀螺仪在航天航空器惯性制导、汽车自动导航和安全系统、武器火控系统、雷达天线稳定、机器人姿态控制、工业生产自动化、医用电子学等领域都有广阔的应用。
本文在分析差动电容式传感器工作原理的基础上，设计了音叉电容式微硅陀螺仪检测系统。电容检测电路采用电荷放大器方案。对电容检测电路的输出信号进行了分析，设计了信号检测电路，利用锁定放大技术检测微小信号。在锁定放大器前级设计高阻抗、低噪声、高增益放大器，使用开关式乘法器电路进行相关检测，根据锁定放大的特点，设计了二阶无源带通滤波器、有源低通滤波器，有效的分离出了输入角速度。通过对电路性能的分析、陀螺主要参数的估算，确定所设计的电路可以达到基本要求。
本文的最后，采用BiCMOS工艺技术完成了芯片的工艺设计以及版图设计并进行了一系列相关的版图验证工作。
Micro electro mechanical systems (MEMS) technology holds the promise of making complex systems that integrate micro mechanical and microelectronic component. MEMS gyroscopes can be implemented performance in a small package at a small cost, provide be high while being rugged and operable in harsh environments and take up less space than the macro-systems available. It is believed that MEMS gyroscope will soon be mass produced at similar volumes.
The sensing system of micromechanical silicon gyroscope is designed on the base of the differential capacitance sensor's work principle. The sensing circuit tuning fork micromechanical gyroscope is designed. As for the detecting circuit of the capacitances, the "charge sense" circuit is designed. Trough the analysis of the output of the detecting circuit of the capacitances, the processing circuit is designed. Use locked-in amplifier technology to detect weak signal. In first amplifier, using high impedance and low noise operational amplifier. Then two-pole band-pass filter, a single-pole low-pass filter and transfer-phase circuit are designed. Then the angular rate is separated. Parameters computed of the gyroscope and the performance analyzed of the circuit show that the circuit can reach the base requirement.
At last, the layout of the sensing system of micromechanical silicon gyroscope is finished with BiCMOS technology and complemented with series of check.
本文在分析差动电容式传感器工作原理的基础上，设计了音叉电容式微硅陀螺仪检测系统。电容检测电路采用电荷放大器方案。对电容检测电路的输出信号进行了分析，设计了信号检测电路，利用锁定放大技术检测微小信号。在锁定放大器前级设计高阻抗、低噪声、高增益放大器，使用开关式乘法器电路进行相关检测，根据锁定放大的特点，设计了二阶无源带通滤波器、有源低通滤波器，有效的分离出了输入角速度。通过对电路性能的分析、陀螺主要参数的估算，确定所设计的电路可以达到基本要求。
本文的最后，采用BiCMOS工艺技术完成了芯片的工艺设计以及版图设计并进行了一系列相关的版图验证工作。
Micro electro mechanical systems (MEMS) technology holds the promise of making complex systems that integrate micro mechanical and microelectronic component. MEMS gyroscopes can be implemented performance in a small package at a small cost, provide be high while being rugged and operable in harsh environments and take up less space than the macro-systems available. It is believed that MEMS gyroscope will soon be mass produced at similar volumes.
The sensing system of micromechanical silicon gyroscope is designed on the base of the differential capacitance sensor's work principle. The sensing circuit tuning fork micromechanical gyroscope is designed. As for the detecting circuit of the capacitances, the "charge sense" circuit is designed. Trough the analysis of the output of the detecting circuit of the capacitances, the processing circuit is designed. Use locked-in amplifier technology to detect weak signal. In first amplifier, using high impedance and low noise operational amplifier. Then two-pole band-pass filter, a single-pole low-pass filter and transfer-phase circuit are designed. Then the angular rate is separated. Parameters computed of the gyroscope and the performance analyzed of the circuit show that the circuit can reach the base requirement.
At last, the layout of the sensing system of micromechanical silicon gyroscope is finished with BiCMOS technology and complemented with series of check.
引文
[1] 刘俊，张斌珍．微弱信号检测技术．北京：电子工业出版社，2005
[2] 高晋占．微弱信号检测．北京：清华大学出版社，2005
[3] 沙占友，葛家怡．集成化智能传感器原理与应用．北京：电子工业出版社，2004
[4] 刘俊，许佩，石云波．微弱电容信号的离散频率测试方法及其硬件电路实现．兵工学报．2005年7月第26卷，第4期
[5] 刘玉广，樊尚春，周浩敏．微机械电子系统及其应用．北京：北京航空航天大学出版社，2003
[6] 孙志宁，周兆英，龚振邦．MEMS国内外发展状况及我国MEMS发展战略的思考，国家“863”计划机器人技术主题专家组，《机器人技术与应用》．2002年第1期
[7] 刘雪涛，高钟毓，张嵘．微机械惯性传感器检测平台的设计与应用．电子技术应用．2002年，第28卷，第10期
[8] 亢春梅，曹金名，刘光辉．国外MEMS技术的现状及其在军事领域中的应用．传感器技术(Joural of Transducer Yechonology)．2002年第21卷第6期
[9] 王寿荣．硅微型惯性器件理论及应用．南京：东南大学出版社，2002．10
[10] 毕查德·拉扎维．模拟CMOS集成电路设计．西安：西安交通大学出版社，2003
[11] 童诗白，华成英．模拟电子技术基础．北京：高等教育出版社，2002
[12] Alan Hasting. The Art of Analog Layout. New Jersey: Prentice-Hall, 2004
[13] Gray and Meyer. Analysis and Design of Analog Integrated Circuits. 4th ed. New York: Wiley, 2003
[14] Khasawneh, Qais. Design and control of Avibrating gyroscope Proceedings of the American Control Conference. 2004, vol. 3, Proceedings of the 2004 American Control Conference (AAC). pp. 2505-2510
[15] Lee, Jang Gyu, Song, Jin Woo. "H infinity controller design of MEMS gyroscope and its performance test". IEEE PLANS, Position Location and Navigation Symposium, PLANS-2004 Position Location and Navigation Symposium, 2004. pp. 63-69
[16] Howard R M. Principles of Random Signal Analysis and Low Noise Design: The Power Spectral Density and its Application. New York: John Wiley& Sons Inc., 2002
[17] P. Andreaniet al. "Noise optimization of an inductively degenerated CMOS low noise amplifier". IEEE Trans. Circuits Syst. Sept. 2001, vol. 48. pp. 835-811
[18] David Johns, Ken Martin. Analog Integrated Circuit Design. John Wiley & Sons. 2002
[19] Trung-Kien Nguyen, Chung-Hwan Kim, Gook-Ju Ihm. "CMOS Low-Noise Amplifier Design Optimization Techniques". IEEE Transactions on Instrument Measurement. May 2004, Vol. 52. pp. 1433-1442
[20] J. K. Gooetal. "A noise optimization technique for integrated low noise amplifiers". IEEE J. Solid-State Circuits. Aug 2002, vol. 37. pp. 994-1002
[21] Pingxi Ma, Marco Racanelli, Jie Zheng, Marion Knight. "A Novel Bipolar-MOSFET Low-Noise Amplifier, Circuit Configuration, Design Methodology, and Chip Implementation". IEEE Transactions on Instrument Measurement. Nov 2003, Vol. 51. pp. 2175-2180
[22] Jung-Suk Goo, Hee-Tae Alan, Donald J, Ladwig, Zhiping Yu. "A Noise Optimization Technique for Integrated Low-Noise Amplifiers". IEEE J. Solid-State Circuits. Aug2002, vol. 37. pp. 994-1001
[23] D. J. Allstot. "Low Noise Amplifiers". IEEE International Solid-State Circuits Conference Shorr Course. 2001
[24] Y. Cheng, et at. "High-frequency small-signal ac and noise modeling of MOSFETs for RF IC design". IEEE Trans. Electron Devices. Mar2002, vol. 49. pp. 400-408
[25] M. Berroth, A. Paseht, J. Fischer and D. Wiegner. "MOSFET Noise Model and Low Noise Amplifier Design". GHz 2000 Symposium, Goteborg, 2000
[26] Gilbert, John R, Bart, Stephen F, Romanowiez, Bart F. "Design of integrated systems including MEMS and ASICS". Proceedings of the Annual IEEE International ASIC Conference and Exhibit. 1998. pp. 383-386
[27] Bose, Bernhard E, Markus, Karen W. "Design of integrated MEMS". IEEE International Symposium on Circuits and Systems. Emerging Technologies Designing Low Power Digital Systems. 1996. pp. 207-232
[28] S. P. Voinigescu etal. "A scalable high-frequency noise model for bipolar transistors with application optimal transistor sizing for low-noise amplifier design". IEEE J. Solid-State Circuits. Sept1997, vol. 32, pp. 1430-1439
[2] 高晋占．微弱信号检测．北京：清华大学出版社，2005
[3] 沙占友，葛家怡．集成化智能传感器原理与应用．北京：电子工业出版社，2004
[4] 刘俊，许佩，石云波．微弱电容信号的离散频率测试方法及其硬件电路实现．兵工学报．2005年7月第26卷，第4期
[5] 刘玉广，樊尚春，周浩敏．微机械电子系统及其应用．北京：北京航空航天大学出版社，2003
[6] 孙志宁，周兆英，龚振邦．MEMS国内外发展状况及我国MEMS发展战略的思考，国家“863”计划机器人技术主题专家组，《机器人技术与应用》．2002年第1期
[7] 刘雪涛，高钟毓，张嵘．微机械惯性传感器检测平台的设计与应用．电子技术应用．2002年，第28卷，第10期
[8] 亢春梅，曹金名，刘光辉．国外MEMS技术的现状及其在军事领域中的应用．传感器技术(Joural of Transducer Yechonology)．2002年第21卷第6期
[9] 王寿荣．硅微型惯性器件理论及应用．南京：东南大学出版社，2002．10
[10] 毕查德·拉扎维．模拟CMOS集成电路设计．西安：西安交通大学出版社，2003
[11] 童诗白，华成英．模拟电子技术基础．北京：高等教育出版社，2002
[12] Alan Hasting. The Art of Analog Layout. New Jersey: Prentice-Hall, 2004
[13] Gray and Meyer. Analysis and Design of Analog Integrated Circuits. 4th ed. New York: Wiley, 2003
[14] Khasawneh, Qais. Design and control of Avibrating gyroscope Proceedings of the American Control Conference. 2004, vol. 3, Proceedings of the 2004 American Control Conference (AAC). pp. 2505-2510
[15] Lee, Jang Gyu, Song, Jin Woo. "H infinity controller design of MEMS gyroscope and its performance test". IEEE PLANS, Position Location and Navigation Symposium, PLANS-2004 Position Location and Navigation Symposium, 2004. pp. 63-69
[16] Howard R M. Principles of Random Signal Analysis and Low Noise Design: The Power Spectral Density and its Application. New York: John Wiley& Sons Inc., 2002
[17] P. Andreaniet al. "Noise optimization of an inductively degenerated CMOS low noise amplifier". IEEE Trans. Circuits Syst. Sept. 2001, vol. 48. pp. 835-811
[18] David Johns, Ken Martin. Analog Integrated Circuit Design. John Wiley & Sons. 2002
[19] Trung-Kien Nguyen, Chung-Hwan Kim, Gook-Ju Ihm. "CMOS Low-Noise Amplifier Design Optimization Techniques". IEEE Transactions on Instrument Measurement. May 2004, Vol. 52. pp. 1433-1442
[20] J. K. Gooetal. "A noise optimization technique for integrated low noise amplifiers". IEEE J. Solid-State Circuits. Aug 2002, vol. 37. pp. 994-1002
[21] Pingxi Ma, Marco Racanelli, Jie Zheng, Marion Knight. "A Novel Bipolar-MOSFET Low-Noise Amplifier, Circuit Configuration, Design Methodology, and Chip Implementation". IEEE Transactions on Instrument Measurement. Nov 2003, Vol. 51. pp. 2175-2180
[22] Jung-Suk Goo, Hee-Tae Alan, Donald J, Ladwig, Zhiping Yu. "A Noise Optimization Technique for Integrated Low-Noise Amplifiers". IEEE J. Solid-State Circuits. Aug2002, vol. 37. pp. 994-1001
[23] D. J. Allstot. "Low Noise Amplifiers". IEEE International Solid-State Circuits Conference Shorr Course. 2001
[24] Y. Cheng, et at. "High-frequency small-signal ac and noise modeling of MOSFETs for RF IC design". IEEE Trans. Electron Devices. Mar2002, vol. 49. pp. 400-408
[25] M. Berroth, A. Paseht, J. Fischer and D. Wiegner. "MOSFET Noise Model and Low Noise Amplifier Design". GHz 2000 Symposium, Goteborg, 2000
[26] Gilbert, John R, Bart, Stephen F, Romanowiez, Bart F. "Design of integrated systems including MEMS and ASICS". Proceedings of the Annual IEEE International ASIC Conference and Exhibit. 1998. pp. 383-386
[27] Bose, Bernhard E, Markus, Karen W. "Design of integrated MEMS". IEEE International Symposium on Circuits and Systems. Emerging Technologies Designing Low Power Digital Systems. 1996. pp. 207-232
[28] S. P. Voinigescu etal. "A scalable high-frequency noise model for bipolar transistors with application optimal transistor sizing for low-noise amplifier design". IEEE J. Solid-State Circuits. Sept1997, vol. 32, pp. 1430-1439