面向精化的表面微加工MEMS几何和工艺建模研究
摘要
随着微机电系统(Micro Electronic Mechanical System, MEMS)的发展,MEMS器件结构日益复杂,通常需要多次设计精化才能达到性能最优。精化设计过程中,对MEMS器件的工艺掩模或几何模型进行手动修改,常常导致几何模型内部的不一致以及几何模型与工艺掩模不一致等问题。
针对精化过程中模型的不一致问题,本文提出一种面向精化的表面微加工MEMS工艺和几何建模方法。该方法首先建立三维模型和工艺模型关联关系；当用户对二维掩模进行精化设计时,根据变动依赖关系通过直接变动映射到或局部几何建模的方式更新所影响的局部三维几何模型；在对三维几何模型进行精化变动设计时,用户仅需对设计关注层进行修改,然后,通过变动传播和变动映射实现三维实体中各工艺层的一致性变动和同步掩模更新,达到满足可制造性的器件模型优化和掩模更新的目的。采用该方法进行表面微加工MEMS器件的设计精化,由于保存了原有模型中的大量可用信息,仅仅进行局部模型的变动,因此可以实现实时的变动输入和响应,有利于加速MEMS器件的精化设计,从而缩短器件的开发周期。
基于以上研究成果,论文实现一个面向精化的表面微加工MEMS几何和工艺建模原型系统,并以微传感器的设计为例进行测试,验证本文的学术思想与原型系统的正确性。
With the rapid development of MEMS(Micro Electronic Mechanical System) technology, the structure of MEMS devices is becoming increasingly complex, thus repeated design optimization is always needed to achieve optimal performance. In the refinement process, manually modification of MEMS geometry model or the craft masks usually causes problems like geometry model internal inconsistencies and masks not consistent with the geometry model.
In order to solve the problems in manual variation of MEMS refinement, a method of refinement-oriented geometrical and process modeling of the surface micro-processed MEMS devices is proposed. In this method, the relationship between geometry model and process model is established firstly; When the designer refine a craft mask, the local 3D geometrical model influenced will be updated through direct modification mapping or local geometrical modeling according to the dependent relationship; As to design refinement of the geometry model, the designer only need to modify the concerned layer of the 3D geometry model; then all the associated elements will be updated in the 3D geometry model and the masks simultaneously through variation propagation and variation mapping. In the method, the device model can be optimized and maintained with manufacturability. Because most of the available information in the original model were preserved, only a partial model changed, therefore this method can realize real-time modification input and response, and is advantageous to the acceleration of MEMS devices design refinement process, so as to shorten the development cycle.
Based on the above research achievements, the paper implements a prototype system of refinement-oriented geometrical and process modeling for surface micromachined MEMS. To verify the correctness of the academic idea of the paper and the prototype system, some tests are given.
针对精化过程中模型的不一致问题,本文提出一种面向精化的表面微加工MEMS工艺和几何建模方法。该方法首先建立三维模型和工艺模型关联关系；当用户对二维掩模进行精化设计时,根据变动依赖关系通过直接变动映射到或局部几何建模的方式更新所影响的局部三维几何模型；在对三维几何模型进行精化变动设计时,用户仅需对设计关注层进行修改,然后,通过变动传播和变动映射实现三维实体中各工艺层的一致性变动和同步掩模更新,达到满足可制造性的器件模型优化和掩模更新的目的。采用该方法进行表面微加工MEMS器件的设计精化,由于保存了原有模型中的大量可用信息,仅仅进行局部模型的变动,因此可以实现实时的变动输入和响应,有利于加速MEMS器件的精化设计,从而缩短器件的开发周期。
基于以上研究成果,论文实现一个面向精化的表面微加工MEMS几何和工艺建模原型系统,并以微传感器的设计为例进行测试,验证本文的学术思想与原型系统的正确性。
With the rapid development of MEMS(Micro Electronic Mechanical System) technology, the structure of MEMS devices is becoming increasingly complex, thus repeated design optimization is always needed to achieve optimal performance. In the refinement process, manually modification of MEMS geometry model or the craft masks usually causes problems like geometry model internal inconsistencies and masks not consistent with the geometry model.
In order to solve the problems in manual variation of MEMS refinement, a method of refinement-oriented geometrical and process modeling of the surface micro-processed MEMS devices is proposed. In this method, the relationship between geometry model and process model is established firstly; When the designer refine a craft mask, the local 3D geometrical model influenced will be updated through direct modification mapping or local geometrical modeling according to the dependent relationship; As to design refinement of the geometry model, the designer only need to modify the concerned layer of the 3D geometry model; then all the associated elements will be updated in the 3D geometry model and the masks simultaneously through variation propagation and variation mapping. In the method, the device model can be optimized and maintained with manufacturability. Because most of the available information in the original model were preserved, only a partial model changed, therefore this method can realize real-time modification input and response, and is advantageous to the acceleration of MEMS devices design refinement process, so as to shorten the development cycle.
Based on the above research achievements, the paper implements a prototype system of refinement-oriented geometrical and process modeling for surface micromachined MEMS. To verify the correctness of the academic idea of the paper and the prototype system, some tests are given.
引文
[1]王亚珍,朱文坚.微机电系统(MEMS)技术及发展趋势.机械设计与研究.2004.20(1)：10-12.
[2]Gujarathi, G.P.; Ma, Y.-S.Generative CAD and CAE integration using common data model.Automation Science and Engineering (CASE),2010.Page(s):586-591.
[3]Pieters, P.Versatile MEMS and mems integration technology platforms for cost effective MEMS development. Microelectronics and Packaging Conference, EMPC 2009.Page(s): 1-5
[4]汪继亮微器件工艺设计方法的研究.西安,西安交通大学.硕士学位论文2003.
[5]Xin Zhao; Lei Wang; Yiyong Tan; Guangyi Sun; Guizhang Lu; A novel design methodology for MEMS device Nanotechnology,2007. IEEE-NANO 2007.7th Page(s):39-44
[6]王阳元,武国英,郝一龙,等.硅基MEMS加工技术及其标准工艺研究[J].电子学报,2002,30(11)：577-584
[7]郝文涛,田凌,童秉枢.MEMS CAD系统及其关键技术研究.工程图学学报.2006-1：1-8
[8]Dmytryshyn, B. Lobur, M. Research and design of integrated software agents for automated autoconfiguration of information environments for MEMS CAD.Perspective Technologies and Methods in MEMS Design (MEMSTECH),2010, Page(s):219-220
[9]张海霞,郭辉,肖志勇,周荣春,郝一龙.MEMS CAD系统IMEE的研究和开发.微纳电子技术2003.40(7)：92-95.
[10]吕湘连面向器件行为的MEMS宏建模方法研究[学位论文]西北工业大学硕士2005
[11]Zhun Fan, Kisung Seo, Jianjun Hu. System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs. Genetic and Evolutionary Computation 2003
[12]Schlegel, M.; Herrmann, G.; Muller, D.Application of the "Multi Architecture Modeling" design method to system level MEMS simulation Design, Test, Integration and Packaging of MEMS/MOEMS 2003.Page(s):149-153
[13]马铁利.机械CAD几何建模核心技术及其发展趋势[J].计算机工程,2003,11(19)：1-3
[14]赵新,李亚威,任亮等.虚拟MEMS加工工艺的定义、关键技术与实现框架.高技术通讯,2004,14(6)：65
[15]赵新,任亮,李亚威,卢桂章.虚拟MEMS加工工艺建模、实现与系统验证.高技 术通讯.2005(1).
[16]季国顺,张永康.微机械系统建模与仿真技术研究[J],光学精密工程,2002,10(6)：626-631.
[17]Studzinski W,Danial M,Napieralski A,et al. The new 3Dvisulization tool for MUMPS technology. In:Napieralski A. Proceedings of the 8th International Conference Mixed Design of Integrated Circuits and System.Poland:Tech. Univ. lodz,2001.417
[18]T. Udeshi. Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes, in:S.N. Spencer ed. Proceedings of the 2005 ACM symposium on Solid and physical modeling. New York:The Association for Computing Machinery, 2005,257-266.
[19]Liu, Y., P. Y. Jiang, et al. (2007).3D-feature-based structure design for silicon fabrication of micro devices. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 13(7):701-714.
[20]张长富,蒋庄德,et al. (2007).基于三维特征的微机电系统器件结构设计方法.西安交通大学学报41(5)：571-575.
[21]马骥陈正鸣高曙明.根据工艺需要进行设计特征模型调整的方法.计算机辅助设计与图形学学报2003-2 Vol.15 No.2
[22]刘云华陈立平钟毅芳.从几何实体重建设计特征模型.计算机辅助设计与图形学学报.2003.7.第11卷
[23]F. Gao. A Feature-Based Geometric Modeling Approach for Surface Micromachined Micro-Mechanical Systems. Doctor. University of Toledo.2004.
[24]Mamiya, H.; Ishikawa, K.; Qiang Yu. A new MEMS optimal design method using CASE Thermal and Thermomechanical Phenomena in Electronic Systems,2004. Volume:2 Page(s):529-534 Vol.2
[25]Mukherjee, T.; Fedder, GK.. Design methodology for mixed-domain systems-on-a-chip [MEMS design] VLSI'98. System Level Design. Page(s):96-101
[26]Ananthakrishnan V. Part-to-Art:Basis for a systematic geometric design tool for surface micromachined MEMSE[D].US A:The University of Toledo,2000
[27]J.H. Li, S.M. Gao, Y.S. Liu. Solid-based CAPP for Surface Micro-Machined MEMS. Computer-aided Design.2007,39(3):190-201
[28]J.H. Li, Y.S. Liu, S.M. Gao. Manufacturability evaluation of layer model for surface micro-machined MEMS. Journal of Zhejiang University(Engineering Science).2006, 40(10):1669-1674
[29]张海霞,郭辉,张大成,徐嘉佳,郝一龙.集成化MEMS工艺设计技术的研究.纳米技术与精密工程.2004.2(3)：229-233.
[30]赵旭,MEMS工艺验证系统[M] 南开大学：计算机应用技术2009
[31]范明聪.面向掩模图形设计的WEB协同CAD系统的研究[D]中国科学技术大学：精密仪器及机械2007
[32]张长富,任泰安,et al. (2007).表面硅微器件中掩膜和工艺流程的自动生成方法.西安交通大学学报41(009)：1031-1035.
[33]V. Ananthakrishnan, R. Sarma, G. K. Anathasuresh. Systematic mask synthesis for surface micromachined microelectromechanical systems. Journal of Micromechanics and Microengineering.2003,13(6):927-941.
[34]R.L. Schiek and R.C. Schmidt. Automated surface micro-machining mask creation from a 3D model. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems.2006,12(3):204-207.
[35]Y. Zhang, R. Kamalian, A.M. Agogino, C.H. Sequin. Design synthesis of microelectromechanical systems using genetic algorithms with component-based genotype representation, In:M. Keijzer et al eds. Proceedings of the 8th annual conference on Genetic and evolutionary computation. New York:The Association for Computing Machinery,2006,731-738
[36]Z. Liu, P.Y. Jiang. Mask Deduction for Surface Micromachining to Support Top-Down Design Flow. Journal of Computer-Aided Design and Computer Graphics. 2007,19(6):798-803
[37]李建华,刘玉生,高曙明.基于三维工艺层模型的表面为微加工MEMS器件淹模综合2006 CAD CG
[38]窦连旺,陈曦,刘鲁源.基于面向对象技术的参数化CAD系统.计算机工程.2004.5第9期第30卷
[39]董洪伟,周儒荣,周来水,等.在ACIS平台上开发三维软件[J].计算机辅助工程,2002,12(4)：53-58.
[40]HOOPS User Interface Integrations[EB/OL]. http//www.spatial.com.cn,2010.
[2]Gujarathi, G.P.; Ma, Y.-S.Generative CAD and CAE integration using common data model.Automation Science and Engineering (CASE),2010.Page(s):586-591.
[3]Pieters, P.Versatile MEMS and mems integration technology platforms for cost effective MEMS development. Microelectronics and Packaging Conference, EMPC 2009.Page(s): 1-5
[4]汪继亮微器件工艺设计方法的研究.西安,西安交通大学.硕士学位论文2003.
[5]Xin Zhao; Lei Wang; Yiyong Tan; Guangyi Sun; Guizhang Lu; A novel design methodology for MEMS device Nanotechnology,2007. IEEE-NANO 2007.7th Page(s):39-44
[6]王阳元,武国英,郝一龙,等.硅基MEMS加工技术及其标准工艺研究[J].电子学报,2002,30(11)：577-584
[7]郝文涛,田凌,童秉枢.MEMS CAD系统及其关键技术研究.工程图学学报.2006-1：1-8
[8]Dmytryshyn, B. Lobur, M. Research and design of integrated software agents for automated autoconfiguration of information environments for MEMS CAD.Perspective Technologies and Methods in MEMS Design (MEMSTECH),2010, Page(s):219-220
[9]张海霞,郭辉,肖志勇,周荣春,郝一龙.MEMS CAD系统IMEE的研究和开发.微纳电子技术2003.40(7)：92-95.
[10]吕湘连面向器件行为的MEMS宏建模方法研究[学位论文]西北工业大学硕士2005
[11]Zhun Fan, Kisung Seo, Jianjun Hu. System-Level Synthesis of MEMS via Genetic Programming and Bond Graphs. Genetic and Evolutionary Computation 2003
[12]Schlegel, M.; Herrmann, G.; Muller, D.Application of the "Multi Architecture Modeling" design method to system level MEMS simulation Design, Test, Integration and Packaging of MEMS/MOEMS 2003.Page(s):149-153
[13]马铁利.机械CAD几何建模核心技术及其发展趋势[J].计算机工程,2003,11(19)：1-3
[14]赵新,李亚威,任亮等.虚拟MEMS加工工艺的定义、关键技术与实现框架.高技术通讯,2004,14(6)：65
[15]赵新,任亮,李亚威,卢桂章.虚拟MEMS加工工艺建模、实现与系统验证.高技 术通讯.2005(1).
[16]季国顺,张永康.微机械系统建模与仿真技术研究[J],光学精密工程,2002,10(6)：626-631.
[17]Studzinski W,Danial M,Napieralski A,et al. The new 3Dvisulization tool for MUMPS technology. In:Napieralski A. Proceedings of the 8th International Conference Mixed Design of Integrated Circuits and System.Poland:Tech. Univ. lodz,2001.417
[18]T. Udeshi. Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes, in:S.N. Spencer ed. Proceedings of the 2005 ACM symposium on Solid and physical modeling. New York:The Association for Computing Machinery, 2005,257-266.
[19]Liu, Y., P. Y. Jiang, et al. (2007).3D-feature-based structure design for silicon fabrication of micro devices. Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems 13(7):701-714.
[20]张长富,蒋庄德,et al. (2007).基于三维特征的微机电系统器件结构设计方法.西安交通大学学报41(5)：571-575.
[21]马骥陈正鸣高曙明.根据工艺需要进行设计特征模型调整的方法.计算机辅助设计与图形学学报2003-2 Vol.15 No.2
[22]刘云华陈立平钟毅芳.从几何实体重建设计特征模型.计算机辅助设计与图形学学报.2003.7.第11卷
[23]F. Gao. A Feature-Based Geometric Modeling Approach for Surface Micromachined Micro-Mechanical Systems. Doctor. University of Toledo.2004.
[24]Mamiya, H.; Ishikawa, K.; Qiang Yu. A new MEMS optimal design method using CASE Thermal and Thermomechanical Phenomena in Electronic Systems,2004. Volume:2 Page(s):529-534 Vol.2
[25]Mukherjee, T.; Fedder, GK.. Design methodology for mixed-domain systems-on-a-chip [MEMS design] VLSI'98. System Level Design. Page(s):96-101
[26]Ananthakrishnan V. Part-to-Art:Basis for a systematic geometric design tool for surface micromachined MEMSE[D].US A:The University of Toledo,2000
[27]J.H. Li, S.M. Gao, Y.S. Liu. Solid-based CAPP for Surface Micro-Machined MEMS. Computer-aided Design.2007,39(3):190-201
[28]J.H. Li, Y.S. Liu, S.M. Gao. Manufacturability evaluation of layer model for surface micro-machined MEMS. Journal of Zhejiang University(Engineering Science).2006, 40(10):1669-1674
[29]张海霞,郭辉,张大成,徐嘉佳,郝一龙.集成化MEMS工艺设计技术的研究.纳米技术与精密工程.2004.2(3)：229-233.
[30]赵旭,MEMS工艺验证系统[M] 南开大学：计算机应用技术2009
[31]范明聪.面向掩模图形设计的WEB协同CAD系统的研究[D]中国科学技术大学：精密仪器及机械2007
[32]张长富,任泰安,et al. (2007).表面硅微器件中掩膜和工艺流程的自动生成方法.西安交通大学学报41(009)：1031-1035.
[33]V. Ananthakrishnan, R. Sarma, G. K. Anathasuresh. Systematic mask synthesis for surface micromachined microelectromechanical systems. Journal of Micromechanics and Microengineering.2003,13(6):927-941.
[34]R.L. Schiek and R.C. Schmidt. Automated surface micro-machining mask creation from a 3D model. Microsystem Technologies-Micro-And Nanosystems-Information Storage and Processing Systems.2006,12(3):204-207.
[35]Y. Zhang, R. Kamalian, A.M. Agogino, C.H. Sequin. Design synthesis of microelectromechanical systems using genetic algorithms with component-based genotype representation, In:M. Keijzer et al eds. Proceedings of the 8th annual conference on Genetic and evolutionary computation. New York:The Association for Computing Machinery,2006,731-738
[36]Z. Liu, P.Y. Jiang. Mask Deduction for Surface Micromachining to Support Top-Down Design Flow. Journal of Computer-Aided Design and Computer Graphics. 2007,19(6):798-803
[37]李建华,刘玉生,高曙明.基于三维工艺层模型的表面为微加工MEMS器件淹模综合2006 CAD CG
[38]窦连旺,陈曦,刘鲁源.基于面向对象技术的参数化CAD系统.计算机工程.2004.5第9期第30卷
[39]董洪伟,周儒荣,周来水,等.在ACIS平台上开发三维软件[J].计算机辅助工程,2002,12(4)：53-58.
[40]HOOPS User Interface Integrations[EB/OL]. http//www.spatial.com.cn,2010.