大功率射频激光电源DSP控制系统研究
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摘要
大功率射频板条CO_2激光器包括板条电极结构、光腔结构、射频电源和控制系统等几大核心关键技术,本文主要针对大功率射频激励电源,研究电源控制检测系统,为激光器稳定可靠运行设计相关电路和软件。论文主要研究工作如下:
⑴分析10KW它激式射频电源的工作原理和系统电路结构、控制方式和控制流程。射频电源包括射频信号发生器、300W功率前置放大、电子管末级放大电路和定向耦合器,工作频率为95.6MHz,占空比从10%~90%连续可调,最大输出功率10kW,用于驱动1kW射频板条激光器。
⑵设计DSP射频电源控制系统。以TMS320DSP2407为核心,利用光耦TPL521输入和输出的隔离,采用MAX430运算放大器把外部输入模拟采样信号转换为DSP可以接收处理的信号,采用CPLD进行I/O口扩展,选用SST39VF400和CY7C1021V进行存储器扩展。
⑶以软件CCS作为开发平台,完成开关机的流程控制,自锁互锁保护,错误报警输出和状态显示输出的程序编写。其中开机流程控制包括三种开机方式即内控手动、内控自动、外控自动开,以满足不同场合下的开机要求。实现了对按键开关量如开机信号、开冷却信号、开灯丝信号、开光闸信号、开高压等信号的检测,以及状态开关量如缺相、风压、水压、灯丝电压、灯丝电流、栅极电压、栅极电流等信号的检测,对屏压电压和屏压电流等模拟信号采样。
本文研究工作对于发展高功率、高光束质量CO_2气体激光器,保证激光器稳定可靠运行提供了理论基础和设计依据。
The high power RF-excited CO_2 laser comprises slab structure, resonator, RF power supply and control system. The control system has been researched in this thesis for high-power laser RF power supply, and the hardware and software have been developed for the stable and reliable operation of industry laser. The main contents of this thesis are as follows:
⑴The research of the principle and structure, control modes and control processes for 10kW RF power supply have been done in this thesis, the power includes excitation part, 300W power amplifier, electronic tube amplifier and directional coupler, and works at 95.6MHz, with adjustable duty ratio of 1%~99%, the output power can reach 10kW, which can be used to drive 1kW slab CO_2 laser.
⑵Control system for high-power laser RF power supply has been designed. Based on TMS320DSP2407, according to the specific requirements of RF power control system, this thesis has completed the schematic and PCB. Photo-coupler is used to isolate output signal from input signal, MAX430 amplifier convert sampling signal from high voltage to the signal which can be used directly by DSP, CPLD is adapted to I/O expansion, CY7C1021V and SST39VF400 are used to external storage expansion.
⑶On the platform of CCS, program development has been completed, which can realize power on and off in three different modes, and working-state detection. The three different modes separately are inter-manual starting, inter-auto starting, extern-auto starting, which can meet specific requirements of different conditions. The detection of control-key signals input such as starting, cooling, filament on, shutter on, high-pressure on, and state signals input such as phase state, air pressure, water pressure, filament voltage, filament current, grid voltage, grid current are realized, and the voltage and current of high-power pressure are displayed.
This thesis provides a theoretical basis for the development of high power, high beam quality CO_2 gas laser, and provides design basis for the stable and reliable operation of laser.
⑴分析10KW它激式射频电源的工作原理和系统电路结构、控制方式和控制流程。射频电源包括射频信号发生器、300W功率前置放大、电子管末级放大电路和定向耦合器,工作频率为95.6MHz,占空比从10%~90%连续可调,最大输出功率10kW,用于驱动1kW射频板条激光器。
⑵设计DSP射频电源控制系统。以TMS320DSP2407为核心,利用光耦TPL521输入和输出的隔离,采用MAX430运算放大器把外部输入模拟采样信号转换为DSP可以接收处理的信号,采用CPLD进行I/O口扩展,选用SST39VF400和CY7C1021V进行存储器扩展。
⑶以软件CCS作为开发平台,完成开关机的流程控制,自锁互锁保护,错误报警输出和状态显示输出的程序编写。其中开机流程控制包括三种开机方式即内控手动、内控自动、外控自动开,以满足不同场合下的开机要求。实现了对按键开关量如开机信号、开冷却信号、开灯丝信号、开光闸信号、开高压等信号的检测,以及状态开关量如缺相、风压、水压、灯丝电压、灯丝电流、栅极电压、栅极电流等信号的检测,对屏压电压和屏压电流等模拟信号采样。
本文研究工作对于发展高功率、高光束质量CO_2气体激光器,保证激光器稳定可靠运行提供了理论基础和设计依据。
The high power RF-excited CO_2 laser comprises slab structure, resonator, RF power supply and control system. The control system has been researched in this thesis for high-power laser RF power supply, and the hardware and software have been developed for the stable and reliable operation of industry laser. The main contents of this thesis are as follows:
⑴The research of the principle and structure, control modes and control processes for 10kW RF power supply have been done in this thesis, the power includes excitation part, 300W power amplifier, electronic tube amplifier and directional coupler, and works at 95.6MHz, with adjustable duty ratio of 1%~99%, the output power can reach 10kW, which can be used to drive 1kW slab CO_2 laser.
⑵Control system for high-power laser RF power supply has been designed. Based on TMS320DSP2407, according to the specific requirements of RF power control system, this thesis has completed the schematic and PCB. Photo-coupler is used to isolate output signal from input signal, MAX430 amplifier convert sampling signal from high voltage to the signal which can be used directly by DSP, CPLD is adapted to I/O expansion, CY7C1021V and SST39VF400 are used to external storage expansion.
⑶On the platform of CCS, program development has been completed, which can realize power on and off in three different modes, and working-state detection. The three different modes separately are inter-manual starting, inter-auto starting, extern-auto starting, which can meet specific requirements of different conditions. The detection of control-key signals input such as starting, cooling, filament on, shutter on, high-pressure on, and state signals input such as phase state, air pressure, water pressure, filament voltage, filament current, grid voltage, grid current are realized, and the voltage and current of high-power pressure are displayed.
This thesis provides a theoretical basis for the development of high power, high beam quality CO_2 gas laser, and provides design basis for the stable and reliable operation of laser.
引文
[1] L. A. Newman, R. A. Hart, J. T. Kennedy. High Power Coupled CO_2 Waveguide Laser Array. Appl. Phys. Lett., 1986, 48(25): 1703 ~ 1707
[2] K. M. Abramski, A. D. Colley, H. J. Baker. Power scaling of large–area transverse radio frequency discharge CO_2 laser. Appl. Phys. Lett., 1989, 54(19): 1833 ~ 1835
[3] D. R. Hall, H. J. Baker. Area scaling boosts CO_2-laser performance. Laser Focus World, 1989, 77 ~ 82
[4] R. Nowack, H. Opower, U. Schacfer. High power CO_2 Waveguide laser of the 1kW category. proc. SPIE, 1990,18 ~ 28
[5] A. D. Colley, H. J. Baker, D. R. Hall. Planar waveguide, 1kW CW, carbon dioxide laser excited by a single transverse RF discharge. Appl. Phys. Lett. , 1992, 61(2): 136~138
[6] A. lapucci, G. Cangioli. Phase-locked operation of a compact three-slab-sections radiofrequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2962 ~ 2971
[7] Kobayashi S., Terai K. 1kW slab CO_2 Laser excited by a Self-excited RF Generator. GCL/HPL’96, 1996, 25 ~ 30
[8] Xin J G. Kilowatt Single Transvers Dischange Excited Slab Waveguide Array CO_2 Laser. CML2,CLEO/Europe, Sep,1994
[9]魏在福,程兆谷.高功率横流CO_2激光器大体积放电研究.光学学报, 1994, 14(7): 673~677
[10]胡孝勇.气体放电及其等离子体. (第一版).哈尔滨:哈尔滨工业大学出版社, 1994
[11]王吉.全金属环波导CO_2激光器射频电源的研究与实践: [硕士学位论文].武汉:华中科技大学, 2005
[12]藤学顺.军用超小型中小功率射频CO_2激光电源的设计研究.红外与激光技术, 1994, 33~37
[13] D He, D.R Hall. Frequency dependence in RF discharge excited waveguide CO_2lasers. IEEE Journal of Quantum Electronics, 1984, 509-514
[14]许文龙,胡信国.现代通信电源技术. (第一版).北京:人民邮电出版社, 2000. 76~79
[15]胡广书,崔子经.数字信号处理——一门正在蓬勃发展的新学科.电子科技导报, 1995
[16] TMS320F/C24x DSP Controllers Reference Guide:CPU and Instruction Set. SPRU160. Texas Instruments
[17] TMS320LF2407,TMS320LF2406,TMS320LF2402 DSP Controllers. SPRS094. Texas Instruments
[18] P. Lapsley, J. Bier, A. Shoham, et al. Architectures and Features. Wiley-IEEE Press, 1997
[19]贾昊,张春光,樊丽萍. DSP电源设计.通信电源技术, 2005, 22( 5): 41~44
[20]王立华. DSP系统的电源和复位电路设计.电子世界, 2005, (8): 29~30
[21]祝贞凤,王旭. DSP芯片外围电路设计.电子工程师, 2007.4, 33(4): 36~47
[22] B. Van Ngo, P. Law, A. Sparks. Use of JTAG Boundary-Scan for Testing Electronic Circuit Boards and Systems. IEEE AUTOTESTCON, 2008. 596~601
[23] Z. D. Pan, F. E. Bai. JTAG agreement and application. 6th International Symposium on Test and Measurement, 2005. 8152~8155.
[24]长沙太阳人电子有限公司. SMC1602A LCM使用说明书. 2010
[25] OP07C,OP07D precision operational amplifiers. SLOS099E. Texas Instruments
[26] MAXIM±15V Chopper Stabilized Operational Amplifer Max430/432. 19-0904. Maxim Intergrated Products
[27] R. Baker. Circuit Design, Layout, and Simulation. Wiley-IEEE Press, 2007
[28]童诗白,华成英.模拟电子技术基础. (第三版).北京:高等教育出版社, 2003
[29]罗泳平.整流管与稳压管的参数和选择原则.家庭电子, 2005, (5): 3~58
[30]邵平,蒋永忠.稳压管稳压电路参数和故障的仿真分析.玉林师范学院学报, 2004, (3): 32~34
[31]舒华,陈建勤.稳压管及其应用.汽车维护与修理, 1999, (4): 36~37
[32]贾新章. OrCAD/Pspice 9实用教程. (第一版).西安:西安电子科技大学出版社, 2001
[33]徐志军,徐光辉. CPLD/FPGA的开发和应用. (第一版).北京:电子工业出版社, 2002
[34] T. Padmanabhan, B. Sundari. Design Through Verilog HDL. Wiley-IEEE Press, 2005
[35]刘和平,邓力,江渝. DSP原理及电机控制应用--基于TMS320LF240x系列.北京:北京航空航天大学出版社, 2006
[36]刘坤,宋戈,赵红波. 51单片机C语言应用开发技术大全. (第一版).北京:人民邮电出版社, 2008
[37]刘向宇. DSP嵌入式常用模块与综合系统设计实例精讲. (第一版).北京:电子工业出版社, 2009
[38]张雄伟,邹霞,贾冲. DSP芯片原理与应用. (第一版).北京:机械工业出版社, 2005
[39]冯源,樊祥.高速PCB设计技术及发展趋势.电子对抗, 2010, (5): 33~37
[40] S. Hall, H. Heck. Advanced Signal Integrity for High-Speed Digital Designs. Wiley-IEEE Press, 2009
[41]余静,陈立新. PCB图设计常见问题和技巧.科技导向, 2010, (33): 73~111
[42]谭浩强. C语言程序设计. (第一版).北京:清华大学出版社, 2004
[2] K. M. Abramski, A. D. Colley, H. J. Baker. Power scaling of large–area transverse radio frequency discharge CO_2 laser. Appl. Phys. Lett., 1989, 54(19): 1833 ~ 1835
[3] D. R. Hall, H. J. Baker. Area scaling boosts CO_2-laser performance. Laser Focus World, 1989, 77 ~ 82
[4] R. Nowack, H. Opower, U. Schacfer. High power CO_2 Waveguide laser of the 1kW category. proc. SPIE, 1990,18 ~ 28
[5] A. D. Colley, H. J. Baker, D. R. Hall. Planar waveguide, 1kW CW, carbon dioxide laser excited by a single transverse RF discharge. Appl. Phys. Lett. , 1992, 61(2): 136~138
[6] A. lapucci, G. Cangioli. Phase-locked operation of a compact three-slab-sections radiofrequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2962 ~ 2971
[7] Kobayashi S., Terai K. 1kW slab CO_2 Laser excited by a Self-excited RF Generator. GCL/HPL’96, 1996, 25 ~ 30
[8] Xin J G. Kilowatt Single Transvers Dischange Excited Slab Waveguide Array CO_2 Laser. CML2,CLEO/Europe, Sep,1994
[9]魏在福,程兆谷.高功率横流CO_2激光器大体积放电研究.光学学报, 1994, 14(7): 673~677
[10]胡孝勇.气体放电及其等离子体. (第一版).哈尔滨:哈尔滨工业大学出版社, 1994
[11]王吉.全金属环波导CO_2激光器射频电源的研究与实践: [硕士学位论文].武汉:华中科技大学, 2005
[12]藤学顺.军用超小型中小功率射频CO_2激光电源的设计研究.红外与激光技术, 1994, 33~37
[13] D He, D.R Hall. Frequency dependence in RF discharge excited waveguide CO_2lasers. IEEE Journal of Quantum Electronics, 1984, 509-514
[14]许文龙,胡信国.现代通信电源技术. (第一版).北京:人民邮电出版社, 2000. 76~79
[15]胡广书,崔子经.数字信号处理——一门正在蓬勃发展的新学科.电子科技导报, 1995
[16] TMS320F/C24x DSP Controllers Reference Guide:CPU and Instruction Set. SPRU160. Texas Instruments
[17] TMS320LF2407,TMS320LF2406,TMS320LF2402 DSP Controllers. SPRS094. Texas Instruments
[18] P. Lapsley, J. Bier, A. Shoham, et al. Architectures and Features. Wiley-IEEE Press, 1997
[19]贾昊,张春光,樊丽萍. DSP电源设计.通信电源技术, 2005, 22( 5): 41~44
[20]王立华. DSP系统的电源和复位电路设计.电子世界, 2005, (8): 29~30
[21]祝贞凤,王旭. DSP芯片外围电路设计.电子工程师, 2007.4, 33(4): 36~47
[22] B. Van Ngo, P. Law, A. Sparks. Use of JTAG Boundary-Scan for Testing Electronic Circuit Boards and Systems. IEEE AUTOTESTCON, 2008. 596~601
[23] Z. D. Pan, F. E. Bai. JTAG agreement and application. 6th International Symposium on Test and Measurement, 2005. 8152~8155.
[24]长沙太阳人电子有限公司. SMC1602A LCM使用说明书. 2010
[25] OP07C,OP07D precision operational amplifiers. SLOS099E. Texas Instruments
[26] MAXIM±15V Chopper Stabilized Operational Amplifer Max430/432. 19-0904. Maxim Intergrated Products
[27] R. Baker. Circuit Design, Layout, and Simulation. Wiley-IEEE Press, 2007
[28]童诗白,华成英.模拟电子技术基础. (第三版).北京:高等教育出版社, 2003
[29]罗泳平.整流管与稳压管的参数和选择原则.家庭电子, 2005, (5): 3~58
[30]邵平,蒋永忠.稳压管稳压电路参数和故障的仿真分析.玉林师范学院学报, 2004, (3): 32~34
[31]舒华,陈建勤.稳压管及其应用.汽车维护与修理, 1999, (4): 36~37
[32]贾新章. OrCAD/Pspice 9实用教程. (第一版).西安:西安电子科技大学出版社, 2001
[33]徐志军,徐光辉. CPLD/FPGA的开发和应用. (第一版).北京:电子工业出版社, 2002
[34] T. Padmanabhan, B. Sundari. Design Through Verilog HDL. Wiley-IEEE Press, 2005
[35]刘和平,邓力,江渝. DSP原理及电机控制应用--基于TMS320LF240x系列.北京:北京航空航天大学出版社, 2006
[36]刘坤,宋戈,赵红波. 51单片机C语言应用开发技术大全. (第一版).北京:人民邮电出版社, 2008
[37]刘向宇. DSP嵌入式常用模块与综合系统设计实例精讲. (第一版).北京:电子工业出版社, 2009
[38]张雄伟,邹霞,贾冲. DSP芯片原理与应用. (第一版).北京:机械工业出版社, 2005
[39]冯源,樊祥.高速PCB设计技术及发展趋势.电子对抗, 2010, (5): 33~37
[40] S. Hall, H. Heck. Advanced Signal Integrity for High-Speed Digital Designs. Wiley-IEEE Press, 2009
[41]余静,陈立新. PCB图设计常见问题和技巧.科技导向, 2010, (33): 73~111
[42]谭浩强. C语言程序设计. (第一版).北京:清华大学出版社, 2004