大功率它激式电子管射频电源设计及实验研究
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摘要
大功率射频电源是射频CO_2板条激光器的重要组成部分。本论文主要研究射频CO_2板条激光器的电源系统,对它激式射频电源的原理和电路参数进行分析与设计,借助EDA仿真软件对模块进行了仿真设计。对电源进行了负载特性测试。内容包括以下几方面:
(1)分析自激式与它激式电子管电源及固态电源的特点,选择它激式电子管电源作为500W射频板条激光器的激励电源。在它激式射频电源总体结构的框架下,进行了射频电源的总体电路设计。包括电路的具体组成部分及技术参数。
(2)本论文设计300W功放模块,由晶振产生一个微弱的微瓦级射频信号,经过一级BJT高频150mW晶体管放大电路,再接10W MOS管放大电路,后接300W推挽MOS管放大电路进行三级放大。利用multisim仿真软件对各级放大电路进行仿真,确定工作参数。
(3)设计8KW电子管放大电路。根据FU-113F四级电子管的工作曲线,从中取出一些典型点,通过MATLAB的数值计算功能,建立FU-113F四级电子管的PSPICE模型。然后根据具体的要求进行综合设计,最后进行仿真分析。
(4)论述功率控制与检测原理,最后进行整机实验。包括假负载实验,激光器负载实验,研究其功率输出特性。
本论文对它激式射频电子管电源进行了详细的理论分析与实验研究,希望对射频板条CO_2激光器的发展做出贡献。
RF power supply plays an important role for the high power RF-excited CO_2 laser system. This thesis aims to research a RF power supply system of the high-power CO_2 lasers, the principles and working parameters of the circuit components of separate-excited RF power supply circuit has been analyzed. The simulation design of RF power supply circuit has been carried out by RF simulation software EDA. Through the load system experiment, the thesis researches characteristics of RF power supply. The main results are as follows.
(1) Characteristic of self-excited tube RF power supply, separate-excited tube RF power supply and solid-state power supply have been analyzed in the thesis, and the scheme of separate-excited RF power supply as the power source of 500W RF-excited CO_2 laser has been chosen. The circuit of a RF power supply system is designed, including the scheme of RF power and technical parameters.
(2) The 300W amplifier module which includes the crystal oscillator, 150mW BJT amplifier module, 10W MOS amplifier module and 300W Push-pull MOS amplifier module have been designed in the thesis. The simulation analysis of the each amplifier module has been carried out by the simulation software multisim. Further, working parameters is chosen.
(3) The 8KW tube amplifier module has been designed in the thesis. Based on the static working curve of quadrupole bunch of shoot tube, FU-113F, the PSPICE model of the FU-113F is established through the use of MATLAB of numerical computation function. According to the specific requirements, 8KW amplifier module has been integrated designed and simulated in the thesis.
(4) The principle of the power control and power test has been discussed in the thesis. Through the load system experiments which include the dummy load experiment and the laser load experiment, the power output characteristics are systematically researched.
By making detailed theoretical analysis and experimental research of separate-excited separate-excited RF power supply, the thesis hopes to make the contribution to the RF-excited CO_2 laser development.
(1)分析自激式与它激式电子管电源及固态电源的特点,选择它激式电子管电源作为500W射频板条激光器的激励电源。在它激式射频电源总体结构的框架下,进行了射频电源的总体电路设计。包括电路的具体组成部分及技术参数。
(2)本论文设计300W功放模块,由晶振产生一个微弱的微瓦级射频信号,经过一级BJT高频150mW晶体管放大电路,再接10W MOS管放大电路,后接300W推挽MOS管放大电路进行三级放大。利用multisim仿真软件对各级放大电路进行仿真,确定工作参数。
(3)设计8KW电子管放大电路。根据FU-113F四级电子管的工作曲线,从中取出一些典型点,通过MATLAB的数值计算功能,建立FU-113F四级电子管的PSPICE模型。然后根据具体的要求进行综合设计,最后进行仿真分析。
(4)论述功率控制与检测原理,最后进行整机实验。包括假负载实验,激光器负载实验,研究其功率输出特性。
本论文对它激式射频电子管电源进行了详细的理论分析与实验研究,希望对射频板条CO_2激光器的发展做出贡献。
RF power supply plays an important role for the high power RF-excited CO_2 laser system. This thesis aims to research a RF power supply system of the high-power CO_2 lasers, the principles and working parameters of the circuit components of separate-excited RF power supply circuit has been analyzed. The simulation design of RF power supply circuit has been carried out by RF simulation software EDA. Through the load system experiment, the thesis researches characteristics of RF power supply. The main results are as follows.
(1) Characteristic of self-excited tube RF power supply, separate-excited tube RF power supply and solid-state power supply have been analyzed in the thesis, and the scheme of separate-excited RF power supply as the power source of 500W RF-excited CO_2 laser has been chosen. The circuit of a RF power supply system is designed, including the scheme of RF power and technical parameters.
(2) The 300W amplifier module which includes the crystal oscillator, 150mW BJT amplifier module, 10W MOS amplifier module and 300W Push-pull MOS amplifier module have been designed in the thesis. The simulation analysis of the each amplifier module has been carried out by the simulation software multisim. Further, working parameters is chosen.
(3) The 8KW tube amplifier module has been designed in the thesis. Based on the static working curve of quadrupole bunch of shoot tube, FU-113F, the PSPICE model of the FU-113F is established through the use of MATLAB of numerical computation function. According to the specific requirements, 8KW amplifier module has been integrated designed and simulated in the thesis.
(4) The principle of the power control and power test has been discussed in the thesis. Through the load system experiments which include the dummy load experiment and the laser load experiment, the power output characteristics are systematically researched.
By making detailed theoretical analysis and experimental research of separate-excited separate-excited RF power supply, the thesis hopes to make the contribution to the RF-excited CO_2 laser development.
引文
[1] R. wester, S. seiwert. Investigation of microwave excited CO_2 laser discharge. Appl. Phys, 1991, 24: 1100-1109
[2] R.Abram, D.R.Hall. 2-dimensional Waveguide CO_2 laser Arrays and Beam Reforming. GCL/HPL’96, Edinburgh U.K, August, 1996. 27-32
[3] Meferd. RF excited CO_2 slab waveguide laser.U.S.A, Pat.5, 283, 797, 1994. 4-12
[4] D.G.Youmans. Phase Locking of Adjacent Channel Leaky Waveguide CO_2 Laser, 1984, 44(4): 361-368
[5] Lapucci, G.cangioli. Phase-locked operation of a compact three-slab-sections radio frequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2960 -2966
[6] D.Ehrlichmann, U.Habich, H. D. Plum, et al. Annular resonators for diffusion cooled CO_2 lasers. CLEO’94 Amsterdam, Netherlands, August, 1994. 400-403
[7]郑国川,李洪英.电子管功放设计和装调技术.福州:福建科学技术出版社, 2004. 9-15
[8] C.Lucking, K.Fakler, U. Berkermann.Measurement of impedance of rf excited CO_2 slab lasers and discharge chambers. SPIE, 1996, 3092: 455-463
[9]雷振亚.射频/微波电路导论.西安:西安电子科技大学出版社, 2005. 33-35
[10]廖承恩.微波技术基础.北京:国防工业出版社, 1984. 45-48
[11]梁昌洪,谢拥军,官伯然.简明微波.北京:高等教育出版社, 2006. 61-63
[12]逯贵祯.射频电路的分析和设计.北京:北京广播学院出版社, 2003. 30-33
[13]鲍家善,马柏林.微波原理.北京:高等教育出版社, 1985. 42-44
[14]康华光.电子技术基础模拟部分. (第四版).北京:高等教育出版社, 1999. 411-415
[15] (日)小牧省三编著.模拟电子电路.何希才译.北京:科学出版社, 2003. 65-88
[16] G.J.Foschini, R.Valenzuela. Initial estimation of communication efficiency of indoor wireless channel. Wirel. Nehv., 1997, 3(2): 140-152
[17]威廉,拜耳.世界电子管手册(上).北京:人民邮电出版社, 1958. 1-5
[18]广东省邮电管理局[电子管电路基础]编写组.电子管电路基础.北京:人民邮电出版社, 1976. 23-27
[19] SAMUEL, SEELY.电子管电路.才重寿译.台北:台北市教育部, 1971. 22-26
[20]郑国川,李洪英.电子管功放设计和装调技术. (第一版).福建:福建科学技术出版社, 2005. 16-19
[21]柯学.电子管的使命.北京:科学普及出版社, 1983. 35-37
[22] W.MARSHALL, LEACH, JR.AES Fellow.SPICE Models for Vacuum-Tube Amplifier, J.Audio Eng. Soc, 1995, 43(3): 117-124
[23]中华人民共和国第四机械工业部.标准编号: SJ1802-81, 1982. 6-7
[24]张肃文.高频电子线路. (第四版) .北京:高等教育出版社, 2005. 214-219
[25]阳昌汉.高频电子线路.哈尔滨:哈尔滨工程大学出版社, 2001. 165-172
[26]谭明磊.高功率CO_2激光器射频电源分析和设计: [硕士学位论文].武汉:华中科技大学, 2008
[27]叶向阳,汪盛烈,何云贵.射频激励CO_2激光器功率控制及其控制器设计.光电子·激光, 2001, 12(2): 150-155
[28]廖斐.大功率射频激光电源功率控制技术研究: [硕士学位论文].武汉:华中科技大学, 2011
[29]王蕴仪,苗敬峰,陈顺生.微波器件与电路.南京:江苏科学与技术出版社, 1981. 88-98
[30]杨祥林,张兆键,张祖舜.微波器件原理.北京:电子工业出版社, 1994. 62-64
[31]李素珍,丁辛芳.半导体器件物理基础.北京:高等教育出版社, 1984. 79-82
[32] (美)J. F.怀特.微波半导体控制电路.北京:科学出版社, 1983. 30-35
[33]丁家峰. PIN二极管的物理机制仿真模型及其应用研究: [硕士学位论文].长沙:中南大学, 2001
[34]张楠,冯宇波. PIN二极管在射频开关电路中的工作原理及应用.科技信息, 2007, (3): 5-7
[35]吴万春.微波网络与应用.西安:西安电子科技大学出版社, 1985. 277-314
[36] P.P.Toullios, A.C.Todd. Synthesis of symmetrical TEM-mode directional couplers.MTT, 1965. 536-544
[37]唐汉.微波原理.南京:南京大学出版社, 1990. 92-94
[38]沈世明,李金文.甚高频同轴线用定向耦合器原理和试验.广播与电视技术, 1979, 15(1), 37-45
[39]陈抗生.电磁场与电磁波.北京:高等教育出版社, 2007. 290-297
[40] F.C.de Rond. A new class of microstrip directional couplers. G-M TT symposium digest, 1970. 184-189
[41]刘景顺.非均匀传输线定向耦合器的研究.无线电通信技术, 1998, 24(1) : 38-47
[42] A. lapucci, G. Cangioli. Phase-locked operation of a compact three-slab-sections radiofrequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2962 -2978
[43] Hall, D. R. Baker, H. J. Progress in RF discharge-excited gas lasers, CLEO 88:Conference on Lasers and Electro-Optics, 1988. 206-209
[44] K. M. Abramski, A. D. Colley, H. J. Baker. Power scaling of large–area transverse radio frequency discharge CO_2 laser. Appl. Phys. Lett., 1989, 54(19): 1831-1836
[2] R.Abram, D.R.Hall. 2-dimensional Waveguide CO_2 laser Arrays and Beam Reforming. GCL/HPL’96, Edinburgh U.K, August, 1996. 27-32
[3] Meferd. RF excited CO_2 slab waveguide laser.U.S.A, Pat.5, 283, 797, 1994. 4-12
[4] D.G.Youmans. Phase Locking of Adjacent Channel Leaky Waveguide CO_2 Laser, 1984, 44(4): 361-368
[5] Lapucci, G.cangioli. Phase-locked operation of a compact three-slab-sections radio frequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2960 -2966
[6] D.Ehrlichmann, U.Habich, H. D. Plum, et al. Annular resonators for diffusion cooled CO_2 lasers. CLEO’94 Amsterdam, Netherlands, August, 1994. 400-403
[7]郑国川,李洪英.电子管功放设计和装调技术.福州:福建科学技术出版社, 2004. 9-15
[8] C.Lucking, K.Fakler, U. Berkermann.Measurement of impedance of rf excited CO_2 slab lasers and discharge chambers. SPIE, 1996, 3092: 455-463
[9]雷振亚.射频/微波电路导论.西安:西安电子科技大学出版社, 2005. 33-35
[10]廖承恩.微波技术基础.北京:国防工业出版社, 1984. 45-48
[11]梁昌洪,谢拥军,官伯然.简明微波.北京:高等教育出版社, 2006. 61-63
[12]逯贵祯.射频电路的分析和设计.北京:北京广播学院出版社, 2003. 30-33
[13]鲍家善,马柏林.微波原理.北京:高等教育出版社, 1985. 42-44
[14]康华光.电子技术基础模拟部分. (第四版).北京:高等教育出版社, 1999. 411-415
[15] (日)小牧省三编著.模拟电子电路.何希才译.北京:科学出版社, 2003. 65-88
[16] G.J.Foschini, R.Valenzuela. Initial estimation of communication efficiency of indoor wireless channel. Wirel. Nehv., 1997, 3(2): 140-152
[17]威廉,拜耳.世界电子管手册(上).北京:人民邮电出版社, 1958. 1-5
[18]广东省邮电管理局[电子管电路基础]编写组.电子管电路基础.北京:人民邮电出版社, 1976. 23-27
[19] SAMUEL, SEELY.电子管电路.才重寿译.台北:台北市教育部, 1971. 22-26
[20]郑国川,李洪英.电子管功放设计和装调技术. (第一版).福建:福建科学技术出版社, 2005. 16-19
[21]柯学.电子管的使命.北京:科学普及出版社, 1983. 35-37
[22] W.MARSHALL, LEACH, JR.AES Fellow.SPICE Models for Vacuum-Tube Amplifier, J.Audio Eng. Soc, 1995, 43(3): 117-124
[23]中华人民共和国第四机械工业部.标准编号: SJ1802-81, 1982. 6-7
[24]张肃文.高频电子线路. (第四版) .北京:高等教育出版社, 2005. 214-219
[25]阳昌汉.高频电子线路.哈尔滨:哈尔滨工程大学出版社, 2001. 165-172
[26]谭明磊.高功率CO_2激光器射频电源分析和设计: [硕士学位论文].武汉:华中科技大学, 2008
[27]叶向阳,汪盛烈,何云贵.射频激励CO_2激光器功率控制及其控制器设计.光电子·激光, 2001, 12(2): 150-155
[28]廖斐.大功率射频激光电源功率控制技术研究: [硕士学位论文].武汉:华中科技大学, 2011
[29]王蕴仪,苗敬峰,陈顺生.微波器件与电路.南京:江苏科学与技术出版社, 1981. 88-98
[30]杨祥林,张兆键,张祖舜.微波器件原理.北京:电子工业出版社, 1994. 62-64
[31]李素珍,丁辛芳.半导体器件物理基础.北京:高等教育出版社, 1984. 79-82
[32] (美)J. F.怀特.微波半导体控制电路.北京:科学出版社, 1983. 30-35
[33]丁家峰. PIN二极管的物理机制仿真模型及其应用研究: [硕士学位论文].长沙:中南大学, 2001
[34]张楠,冯宇波. PIN二极管在射频开关电路中的工作原理及应用.科技信息, 2007, (3): 5-7
[35]吴万春.微波网络与应用.西安:西安电子科技大学出版社, 1985. 277-314
[36] P.P.Toullios, A.C.Todd. Synthesis of symmetrical TEM-mode directional couplers.MTT, 1965. 536-544
[37]唐汉.微波原理.南京:南京大学出版社, 1990. 92-94
[38]沈世明,李金文.甚高频同轴线用定向耦合器原理和试验.广播与电视技术, 1979, 15(1), 37-45
[39]陈抗生.电磁场与电磁波.北京:高等教育出版社, 2007. 290-297
[40] F.C.de Rond. A new class of microstrip directional couplers. G-M TT symposium digest, 1970. 184-189
[41]刘景顺.非均匀传输线定向耦合器的研究.无线电通信技术, 1998, 24(1) : 38-47
[42] A. lapucci, G. Cangioli. Phase-locked operation of a compact three-slab-sections radiofrequency discharge CO_2 laser. IEEE.J.Quant Electron, 1993, QE-29(12): 2962 -2978
[43] Hall, D. R. Baker, H. J. Progress in RF discharge-excited gas lasers, CLEO 88:Conference on Lasers and Electro-Optics, 1988. 206-209
[44] K. M. Abramski, A. D. Colley, H. J. Baker. Power scaling of large–area transverse radio frequency discharge CO_2 laser. Appl. Phys. Lett., 1989, 54(19): 1831-1836