大功率激光射频电源电子管栅极和阴极回路研究
|
摘要
大功率电子管是自激式射频激光电源的核心器件。电子管灯丝电流的大小和稳定性,电子管栅极电流以及电子管的冷却决定了整个射频电源是否能正常工作。本论文旨在深入研究大功率电子管栅极和阴极回路特性,达到工程化应用水平。主要内容包括:
(1)分析了射频电源的整体结构和功能。根据电子管灯丝电流的要求,设计出了合理的高精度、高稳定性、大电流的灯丝变压器,为电子管灯丝提供稳定电流源。
(2)设计了高精度的灯丝稳流装置。根据灯丝电流稳定度和可调性的要求,开发了可以调节灯丝电流的稳流板。通过对灯丝变压器的初级端的电压控制达到控制灯丝变压器次级即灯丝电流的大小。根据可控硅调压模块的输出端受控制信号控制的作用,使可控硅的输出端可以在300~380V可调。可控硅的控制信号使用积分比较电路,实现输出的控制信号与给定的信号相同,达到控制信号可调的目的。
(3)研究了射频电源电子管栅极元器件的特性。根据射频电源电子管栅极电流以及栅极信号滤波的要求,设计出了合理的栅极限流电阻,栅极滤波电感以及保护电路的参数。使用PSpice软件对电感的滤波效果进行了模拟仿真。
(4)设计了合理的电子管冷却系统。通过对射频电源电子管的损耗分析,设计出了风冷和水冷系统。风冷系统主要针对电子管外围电路中的冷却,水冷系统针对电子管内部的冷却。在水冷系统中还分析了水质量对射频电源的影响。
本论文开发的大功率射频电源质量和稳定性对于射频板条CO2激光器的输出光功率及其稳定性具有决定性作用。
High power electronic tube is the core component of the self-excited RF laser power supply. The power supply is determined by the tube filament current, grid current and cooling system. This thesis aims at researching on circuit properties of the grid and the cathode for engineering application. The main contents of the thesis are as follows:
(1) The whole structure and function of the RF power supply have been analyzed. High- precision, high-stability and big-current filament transformer has been designed, it provides a stable current source for the tube filament.
(2) High-precision filament steady current system has been designed. According to the requirement for the stability and the adjustability of the filament current, the steady current plate that can control the measurement of the filament current has been designed by adjusting the voltage at the primary side of the filament transformer. The output voltage of the SRC can be arranged from 300V to 380V according to the principle that the output voltage of the SRC is determined by the control signal. The control signal uses PID to make sure that the control signal equals the given signal, to make the control signal adjustable.
(3) The characteristics of the components in the grid of the electronic tube have been studied. According to the requirements of the current and signal filter in the grid, the current-limiting resistance, the signal filtering inductance and the protecting circuit have been designed. The result of the filtering inductor has been simulated by PSpice.
(4) A cooling system has been designed for the electronic tube. The air-cooling and water-cooling systems have been designed by analyzing on the heat loss of the electronic tube. The air-cooling system is employed for the peripheral circuit and the water-cooling system is used for the interior. In the water cooling system, the impact of water quality on the RF power supply also has been analyzed.
The quality and stability of high RF power supply which this thesis developed directly affects the output laser power and beam quality of the RF slab CO_2 laser.
(1)分析了射频电源的整体结构和功能。根据电子管灯丝电流的要求,设计出了合理的高精度、高稳定性、大电流的灯丝变压器,为电子管灯丝提供稳定电流源。
(2)设计了高精度的灯丝稳流装置。根据灯丝电流稳定度和可调性的要求,开发了可以调节灯丝电流的稳流板。通过对灯丝变压器的初级端的电压控制达到控制灯丝变压器次级即灯丝电流的大小。根据可控硅调压模块的输出端受控制信号控制的作用,使可控硅的输出端可以在300~380V可调。可控硅的控制信号使用积分比较电路,实现输出的控制信号与给定的信号相同,达到控制信号可调的目的。
(3)研究了射频电源电子管栅极元器件的特性。根据射频电源电子管栅极电流以及栅极信号滤波的要求,设计出了合理的栅极限流电阻,栅极滤波电感以及保护电路的参数。使用PSpice软件对电感的滤波效果进行了模拟仿真。
(4)设计了合理的电子管冷却系统。通过对射频电源电子管的损耗分析,设计出了风冷和水冷系统。风冷系统主要针对电子管外围电路中的冷却,水冷系统针对电子管内部的冷却。在水冷系统中还分析了水质量对射频电源的影响。
本论文开发的大功率射频电源质量和稳定性对于射频板条CO2激光器的输出光功率及其稳定性具有决定性作用。
High power electronic tube is the core component of the self-excited RF laser power supply. The power supply is determined by the tube filament current, grid current and cooling system. This thesis aims at researching on circuit properties of the grid and the cathode for engineering application. The main contents of the thesis are as follows:
(1) The whole structure and function of the RF power supply have been analyzed. High- precision, high-stability and big-current filament transformer has been designed, it provides a stable current source for the tube filament.
(2) High-precision filament steady current system has been designed. According to the requirement for the stability and the adjustability of the filament current, the steady current plate that can control the measurement of the filament current has been designed by adjusting the voltage at the primary side of the filament transformer. The output voltage of the SRC can be arranged from 300V to 380V according to the principle that the output voltage of the SRC is determined by the control signal. The control signal uses PID to make sure that the control signal equals the given signal, to make the control signal adjustable.
(3) The characteristics of the components in the grid of the electronic tube have been studied. According to the requirements of the current and signal filter in the grid, the current-limiting resistance, the signal filtering inductance and the protecting circuit have been designed. The result of the filtering inductor has been simulated by PSpice.
(4) A cooling system has been designed for the electronic tube. The air-cooling and water-cooling systems have been designed by analyzing on the heat loss of the electronic tube. The air-cooling system is employed for the peripheral circuit and the water-cooling system is used for the interior. In the water cooling system, the impact of water quality on the RF power supply also has been analyzed.
The quality and stability of high RF power supply which this thesis developed directly affects the output laser power and beam quality of the RF slab CO_2 laser.
引文
[1]丘军林.我国高功率CO_2激光器的发展—回顾与展望.应用激光, 2002, 22(2): 1~2
[2] Johnson K I. Current and future developments of the plasma, laser and electron beam processing. Proc Int Power Beam Cenf, San Diego, USA, 1998, 5(2-4): 1~10
[3] Mefferd. RF excited CO_2 slab waveguide laser. U.S.A, Pat.5,283,179, February 1, 1994. 1~10
[4]魏在福,程兆谷.高功率横流CO_2激光器大体积放电研究,光学学报, 1994, 14(7): 673~677
[5] W.Schock, Th.Hall, E.Wildernuth. Compact transverse flow CO_2 laser with RF excitation, SPIE. 1988, 1031 GCL: 76~81
[6]胡孝勇.气体放电及其等离子体. (第一版).哈尔滨:哈尔滨工业大学出版社, 1994. 25~30
[7]陈海清.射频激励CO_2激光器电源的研究: [硕士学位论文].武汉:华中科技大学图书馆, 2007
[8]隋锡安,尤巩沂.电视转播技术讲座(IV).电视技术, 1991, 5(9): 35~40
[9]胡英,廖永君.雷达发射技术现状与发展方向.中国雷达, 1999, 2(2): 15~16
[10]逮贵祯.射频电路的分析与设计. (第一版).北京:北京广播学院出版社会, 2003. 112~121
[11]唐霞辉.高功率横流CO_2激光器及其应用. (第一版).武汉:华中科技大学出版社, 2008. 86~129
[12] Youmans D.G. Phase Locking of Adjacent Channel Leaky Waveguide CO_2 Laser. Appl. Phys. Lett., 1984, 44(4): 365~367
[13]廖斐.大功率射频激光电源功率控制技术研究: [硕士学位论文].武汉:华中科技大学图书馆, 2010
[14] V. S. Soualian, G.T. Park, C.T. Abdallah, et al. Iterative Learning Control Applications to High Power Microwave Tubes. Albuquerque: University of New Mexico, 2000. 5~8
[15] Vishnu Srivastava. Microwave Tubes: A Necessity for High Power Applications. In:IEEE. Microwave Tubes Division. India: CEERI, 2009. 183~184
[16]张悦英.电子管E类大功率射频放大器的研究: [硕士学位论文].郑州:郑州大学图书馆, 2006
[17]刘继舒.大功率射频激光电源仿真设计: [硕士学位论文].武汉:华中科技大学图书馆, 2009
[18]陈邦缓.射频通信电路. (第一版).北京:科学出版社, 2002. 200~210
[19] Giuseppe Di Gregorio, Maria Grazia La Rosa, Biagio Russo. Checkers for RF Matching Networks on an Automatic Test Board. in: IEEE Computer Society. Proceedings of the Eighth IEEE International. France: IEEE, 2002. 170~173
[20]胡树豪.实用射频技术. (第一版).北京:电子工业出版社, 2004. 103~105
[21]曹锋光,张德玲,王新兵等.射频电源中阻抗匹配研究.应用激光, 2005, 25(2): 101~102
[22] R.L.Sinclair, J.Tulip. parameters Affeeting the performance of a RF exeited CO_2 WaVeguide Laser. APPI.Phys. 1984, 56(9): 2498~2501
[23]刘玉华,唐令西,阮双深.影响RF激励CO_2波导激光器高效运转的因素.激光与红外, 1999, 29(3): 157~16
[24] Peter P.Vitruk, H.J.Baker, D.R.Hall. Similarity and Scaling in Diffusion-Coole RF-Excited Carbon Dioxide Lasers. IEEE Journal of Quantum Electronics, 1944, 7(30): 1623~1634
[25]王治辉.大功率发射电子管的使用与维护.西部广播电视, 2003, 10(07): 47~48
[26]张志,董强.大功率发射电子管灯丝电源的恒定功率供电.广播与电视技术, 1990, 16(01): 23~25
[27] S.T.Alves. Heater Power Consideration in High-Power RF Electorn Tubes. IEEE Conference Record of the Seventeenth Power Modulator Symposium, 1986, pp: 114~1116
[28]谭明磊.高功率CO_2激光器射频电源分析和设计: [硕士学位论文].武汉:华中科技大学图书馆, 2008
[29]张志,曹玉玺,王著锋.单相电源供电的平滑加电灯丝电路.电视技术, 1994, 3(04): 47~48
[30]于长新.电工基础与电工技术. (第三版).济南:山东科学技术出版社, 1999. 61~70
[31] Roger Hedding. IEEE Guide for Protective Relay Applications to Power Transformers. New York: The Institute of Electrical and Electronics Engineers, 2000. 8~42
[32]周秉功.自适应变压器热过载保护.电站设备自动化, 2002, 2(04): 38~39
[33]谢毓城.电力变压器手则. (第一版).北京:机械工业出版社, 2003. 580~680
[34] Y.Suzuki, K.Yamasawa, A.Hirayabayashi. Analysis of a Zero-Flux Type Current Sensor Using a Hall Element. IEEE Translation Journal On Magnetics In Japan, 1994, 9(1): 165~170
[35] S.Lloyd, B.Sc, Ph.D, et al. A Thyristor Regulator Circuit for SCR Deflection. Broadcast and Television Receivers, 2007, 122(12): 1425~1430
[36] Reinhold Ludwig, Pavel Bretchko. RF Circuit Design Theory and Application. Publishing House of Electronics Industry, 2003. 15~20
[37]陶瑞莲. OrCAD PSpice在电子线路实验仿真研究.通信电源技术, 2010, 27(02): 27~29
[38]李树仑.过电压保护气体放电管的进展及其应用.真空电子技术, 1994, 3(04): 30~36
[39]史美中,王中铮.热交换原理与设计. (第四版).南京:东南大学出版社, 1989. 1~10
[40]胡金鹏,崔国民,胡向柏.板翅式全热交换器的结构优化.华工进展, 2010, 29(S1): 650~652
[41]李冠成,康永林,李明.水在电场、磁场作用下物理性质变化及其影响.现代物理知识, 2001, 10(02): 30~31
[2] Johnson K I. Current and future developments of the plasma, laser and electron beam processing. Proc Int Power Beam Cenf, San Diego, USA, 1998, 5(2-4): 1~10
[3] Mefferd. RF excited CO_2 slab waveguide laser. U.S.A, Pat.5,283,179, February 1, 1994. 1~10
[4]魏在福,程兆谷.高功率横流CO_2激光器大体积放电研究,光学学报, 1994, 14(7): 673~677
[5] W.Schock, Th.Hall, E.Wildernuth. Compact transverse flow CO_2 laser with RF excitation, SPIE. 1988, 1031 GCL: 76~81
[6]胡孝勇.气体放电及其等离子体. (第一版).哈尔滨:哈尔滨工业大学出版社, 1994. 25~30
[7]陈海清.射频激励CO_2激光器电源的研究: [硕士学位论文].武汉:华中科技大学图书馆, 2007
[8]隋锡安,尤巩沂.电视转播技术讲座(IV).电视技术, 1991, 5(9): 35~40
[9]胡英,廖永君.雷达发射技术现状与发展方向.中国雷达, 1999, 2(2): 15~16
[10]逮贵祯.射频电路的分析与设计. (第一版).北京:北京广播学院出版社会, 2003. 112~121
[11]唐霞辉.高功率横流CO_2激光器及其应用. (第一版).武汉:华中科技大学出版社, 2008. 86~129
[12] Youmans D.G. Phase Locking of Adjacent Channel Leaky Waveguide CO_2 Laser. Appl. Phys. Lett., 1984, 44(4): 365~367
[13]廖斐.大功率射频激光电源功率控制技术研究: [硕士学位论文].武汉:华中科技大学图书馆, 2010
[14] V. S. Soualian, G.T. Park, C.T. Abdallah, et al. Iterative Learning Control Applications to High Power Microwave Tubes. Albuquerque: University of New Mexico, 2000. 5~8
[15] Vishnu Srivastava. Microwave Tubes: A Necessity for High Power Applications. In:IEEE. Microwave Tubes Division. India: CEERI, 2009. 183~184
[16]张悦英.电子管E类大功率射频放大器的研究: [硕士学位论文].郑州:郑州大学图书馆, 2006
[17]刘继舒.大功率射频激光电源仿真设计: [硕士学位论文].武汉:华中科技大学图书馆, 2009
[18]陈邦缓.射频通信电路. (第一版).北京:科学出版社, 2002. 200~210
[19] Giuseppe Di Gregorio, Maria Grazia La Rosa, Biagio Russo. Checkers for RF Matching Networks on an Automatic Test Board. in: IEEE Computer Society. Proceedings of the Eighth IEEE International. France: IEEE, 2002. 170~173
[20]胡树豪.实用射频技术. (第一版).北京:电子工业出版社, 2004. 103~105
[21]曹锋光,张德玲,王新兵等.射频电源中阻抗匹配研究.应用激光, 2005, 25(2): 101~102
[22] R.L.Sinclair, J.Tulip. parameters Affeeting the performance of a RF exeited CO_2 WaVeguide Laser. APPI.Phys. 1984, 56(9): 2498~2501
[23]刘玉华,唐令西,阮双深.影响RF激励CO_2波导激光器高效运转的因素.激光与红外, 1999, 29(3): 157~16
[24] Peter P.Vitruk, H.J.Baker, D.R.Hall. Similarity and Scaling in Diffusion-Coole RF-Excited Carbon Dioxide Lasers. IEEE Journal of Quantum Electronics, 1944, 7(30): 1623~1634
[25]王治辉.大功率发射电子管的使用与维护.西部广播电视, 2003, 10(07): 47~48
[26]张志,董强.大功率发射电子管灯丝电源的恒定功率供电.广播与电视技术, 1990, 16(01): 23~25
[27] S.T.Alves. Heater Power Consideration in High-Power RF Electorn Tubes. IEEE Conference Record of the Seventeenth Power Modulator Symposium, 1986, pp: 114~1116
[28]谭明磊.高功率CO_2激光器射频电源分析和设计: [硕士学位论文].武汉:华中科技大学图书馆, 2008
[29]张志,曹玉玺,王著锋.单相电源供电的平滑加电灯丝电路.电视技术, 1994, 3(04): 47~48
[30]于长新.电工基础与电工技术. (第三版).济南:山东科学技术出版社, 1999. 61~70
[31] Roger Hedding. IEEE Guide for Protective Relay Applications to Power Transformers. New York: The Institute of Electrical and Electronics Engineers, 2000. 8~42
[32]周秉功.自适应变压器热过载保护.电站设备自动化, 2002, 2(04): 38~39
[33]谢毓城.电力变压器手则. (第一版).北京:机械工业出版社, 2003. 580~680
[34] Y.Suzuki, K.Yamasawa, A.Hirayabayashi. Analysis of a Zero-Flux Type Current Sensor Using a Hall Element. IEEE Translation Journal On Magnetics In Japan, 1994, 9(1): 165~170
[35] S.Lloyd, B.Sc, Ph.D, et al. A Thyristor Regulator Circuit for SCR Deflection. Broadcast and Television Receivers, 2007, 122(12): 1425~1430
[36] Reinhold Ludwig, Pavel Bretchko. RF Circuit Design Theory and Application. Publishing House of Electronics Industry, 2003. 15~20
[37]陶瑞莲. OrCAD PSpice在电子线路实验仿真研究.通信电源技术, 2010, 27(02): 27~29
[38]李树仑.过电压保护气体放电管的进展及其应用.真空电子技术, 1994, 3(04): 30~36
[39]史美中,王中铮.热交换原理与设计. (第四版).南京:东南大学出版社, 1989. 1~10
[40]胡金鹏,崔国民,胡向柏.板翅式全热交换器的结构优化.华工进展, 2010, 29(S1): 650~652
[41]李冠成,康永林,李明.水在电场、磁场作用下物理性质变化及其影响.现代物理知识, 2001, 10(02): 30~31