大功率射频CO_2激光器激励特性研究
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摘要
射频激励大功率CO_2激光器是目前国际上大功率激光切割或焊接应用的主力光源及重要发展方向。本文系统地理论分析及试验研究了大功率射频激励CO_2激光器的激励电源、射频传输、射频气体放电等离子体、气体放电均匀性以及射频功率调制特性。论文主要研究工作如下。
(1)分析设计了30kW自激式射频激光电源。选择RS3041CJ电子管组成电容三点式谐振电路,分析了电子管的静态和动态工作参数;计算了屏极谐振槽路和栅极反馈回路的元件参数;建立了电子管振荡放大电路的仿真模型。仿真结果表明,该电源电路可以获得功率为30kW、频率为83MHz的射频功率输出。
(2)提出了大面积射频板条放电的二维电压分布理论模型。计算分析了40mm×500mm电极在2kW注入功率下,和200mm×1000mm电极在30kW注入功率下的二维电压分布函数曲线,其二维电压波动最大值分别为25%和65%;提出了一种在纵向采用并联谐振电感、横向采用终端并联电抗元件的理论模型,以解决放电电压二维分布不均匀性。
(3)建立了维持气体均匀放电的二维均压理论模型并验证了射频激励气体放电均匀性。当纵向射频馈入为中间馈入、横向分别采用中间馈入和电极侧面馈入时,分别采用电极侧面对称和不对称并联电感,以获得电压分布均匀。对于40mm×500mm电极和200mm×1000mm电极,当采用中间馈入和电极侧面馈入时,前者可分别获得波动小于1.5%的和2%的二维电压分布;后者可分别获得波动小于2.5%和3%二维电压分布。实验研究了气体放电辉光强度随注入功率和气压的变化规律,发现均压电感分布对气体放电均匀性的影响规律与理论模型基本一致。
(4)研究了射频电源传输及负载匹配特性。分析计算了40mm×500mm电极和200mm×1000mm电极的放电气体等效阻抗及射频传输匹配网络;采用Π型和L型匹配,利用Smith圆图法,推导出负载变化时匹配网络参数的变化规律,得出了最佳匹配网络类型和元件选择;并通过自适应匹配调节装置,保持驻波比小于1.2。
(5)试验研究了射频板条激光器的功率调制与控制特性。分析了激光器的点火、维持、连续、脉冲等调制脉冲参数;开发了DSP脉宽调制器硬件电路及相关软件,获得了符合大功率射频激光器功率控制及脉冲调制特性要求的波形输出。
(6)研究了大功率射频注入功率对光腔镜片热变形、激光光束输出畸变的影响关系。利用有限元分析法对光腔反射镜的热变形和温度分布进行仿真,建立了射频注入功率变化与镜片同步加热补偿的关系曲线,获得了反射镜曲率形变小于0.02%的热补偿效果。
论文研究工作对于攻克大功率射频激励CO_2气体激光器关键技术,促进我国装备制造业急需的大功率激光器的不断发展,具有较为重要的理论意义和实用价值。
Radio-frequency (RF) excited high power CO_2 laser is the main light source and shows an important trend for the high power laser welding and cutting equipment in the world nowadays. In the thesis, systematically theoreticl analysis and experimental researches were done on the aspect of the exciting power supply, RF transmission, RF excited gas discharge plasma, uniformity of RF excited gas discharge and characteristics of RF power modulation of high power RF excited CO2 laser. The main research contents of the thesis are as flows:
(1) The 30kW self resonant oscillated RF power supply was analysed and designed. The oscillating circuit with three-point capacitance was designed based on the RS3041 RF vacuum tube. The static and dynamic parameters were analysed. The component parameters of the anode resonant circuit and the grid feedback circuit were calculated. And the simulation model of the RF vacuum tube oscillating and amplifying circuit was established. The simulation result showed that 30kW output power with 83MHz RF output can be obtained by the power supply circuit.
(2) A 2-dimensional theory model of voltage distribution for large area RF-excited slab discharge was presented. The 2-D function curves of voltage distribution based on 40mmx500mm electrodes at 2kW input RF power and 200mm×1000mm electrode at 30kW input RF power were calculated. The result showed that the maximum voltage fluctuations were 25% and 65% respectively. Further more, in order to resolve the nonuniformity of the 2-D voltage distribution, a theory model of installing parallel resonant inductors in the longitudinal direction and reactance components in the transverse direction was presented.
(3) Theory model of making the 2-D votage distribution of the large area gas discharge uniform was established and experiments were done to verify the uniformity of RF excited gas discharge. When RF energy was injected at the middle in the longitudinal direction, and at the middle or the side in the transverse direction, uniform voltage distribution was obtained by using symmetricl or asymmetricl parallel inductors on the two sides of the transverse direction. For the electrodes of 40mm×500mm and 200mm×1000mm, when the middle feed point and side feed point were adopted respectively on the transvers direction, the voltage fluctuations of the former were 1.5% and 2% respectively, and the voltage fluctuation of the latter were 2.5% and 3% respectively. Experiments were done to study on how the intensity of the glow discharges varying with the input RF power or the gas pressure. And the influence of the parallel inductors on the uniformity of the gas discharge was found to accord with the theory model.
(4) Transmission of the RF power and impedance matching characteristics of the load were studied. Equivalent impedance of gas discharge on electrodes of 40mm×500mm and 200mm×1000mm, and RF transmission impedance matching network were ananysed and calculated. WhenΠ-shaped or L-shaped matching network was adopted, the variation rules of the parameters of the impedance matching network with the load were deduced by using the Smith circle-diagram method. The best matching network type and parameters of the components were determined. And the voltage standing wave ratio is controlled within 1.2 by using a self-adaptive adjusting installation.
(5) The power modulation characteristics of the RF slab laser were studied. Parameters of the modulation pulse on ignition, maintenance, continuous mode and pulse mode were analysed. The output waveform according to the requirement of high power RF laser was obtained by developing the hardware circuit and software program of the DSP pulse width modulator.
(6) Influence relation between the distortion of the resonator mirror and the output laser beam with the change of the input RF power was studied. Relation curve of the synchronously heating compensation for the mirror with the variation of the input RF power was established by simulating and analyzing the temperature distribution and distortion of the reflecting mirror using the method of finite element analysis. And compensation result of the curvature rate distortion less than 0.02% of the reflecting mirror was obtained.
The research contents of the thesis has important theoretical significance and practical value to conquer the key technology of the RF excited high power CO_2 laser and to meet the urgent need for the development of the high power laser on equipment manufacturing industry in our country.
(1)分析设计了30kW自激式射频激光电源。选择RS3041CJ电子管组成电容三点式谐振电路,分析了电子管的静态和动态工作参数;计算了屏极谐振槽路和栅极反馈回路的元件参数;建立了电子管振荡放大电路的仿真模型。仿真结果表明,该电源电路可以获得功率为30kW、频率为83MHz的射频功率输出。
(2)提出了大面积射频板条放电的二维电压分布理论模型。计算分析了40mm×500mm电极在2kW注入功率下,和200mm×1000mm电极在30kW注入功率下的二维电压分布函数曲线,其二维电压波动最大值分别为25%和65%;提出了一种在纵向采用并联谐振电感、横向采用终端并联电抗元件的理论模型,以解决放电电压二维分布不均匀性。
(3)建立了维持气体均匀放电的二维均压理论模型并验证了射频激励气体放电均匀性。当纵向射频馈入为中间馈入、横向分别采用中间馈入和电极侧面馈入时,分别采用电极侧面对称和不对称并联电感,以获得电压分布均匀。对于40mm×500mm电极和200mm×1000mm电极,当采用中间馈入和电极侧面馈入时,前者可分别获得波动小于1.5%的和2%的二维电压分布;后者可分别获得波动小于2.5%和3%二维电压分布。实验研究了气体放电辉光强度随注入功率和气压的变化规律,发现均压电感分布对气体放电均匀性的影响规律与理论模型基本一致。
(4)研究了射频电源传输及负载匹配特性。分析计算了40mm×500mm电极和200mm×1000mm电极的放电气体等效阻抗及射频传输匹配网络;采用Π型和L型匹配,利用Smith圆图法,推导出负载变化时匹配网络参数的变化规律,得出了最佳匹配网络类型和元件选择;并通过自适应匹配调节装置,保持驻波比小于1.2。
(5)试验研究了射频板条激光器的功率调制与控制特性。分析了激光器的点火、维持、连续、脉冲等调制脉冲参数;开发了DSP脉宽调制器硬件电路及相关软件,获得了符合大功率射频激光器功率控制及脉冲调制特性要求的波形输出。
(6)研究了大功率射频注入功率对光腔镜片热变形、激光光束输出畸变的影响关系。利用有限元分析法对光腔反射镜的热变形和温度分布进行仿真,建立了射频注入功率变化与镜片同步加热补偿的关系曲线,获得了反射镜曲率形变小于0.02%的热补偿效果。
论文研究工作对于攻克大功率射频激励CO_2气体激光器关键技术,促进我国装备制造业急需的大功率激光器的不断发展,具有较为重要的理论意义和实用价值。
Radio-frequency (RF) excited high power CO_2 laser is the main light source and shows an important trend for the high power laser welding and cutting equipment in the world nowadays. In the thesis, systematically theoreticl analysis and experimental researches were done on the aspect of the exciting power supply, RF transmission, RF excited gas discharge plasma, uniformity of RF excited gas discharge and characteristics of RF power modulation of high power RF excited CO2 laser. The main research contents of the thesis are as flows:
(1) The 30kW self resonant oscillated RF power supply was analysed and designed. The oscillating circuit with three-point capacitance was designed based on the RS3041 RF vacuum tube. The static and dynamic parameters were analysed. The component parameters of the anode resonant circuit and the grid feedback circuit were calculated. And the simulation model of the RF vacuum tube oscillating and amplifying circuit was established. The simulation result showed that 30kW output power with 83MHz RF output can be obtained by the power supply circuit.
(2) A 2-dimensional theory model of voltage distribution for large area RF-excited slab discharge was presented. The 2-D function curves of voltage distribution based on 40mmx500mm electrodes at 2kW input RF power and 200mm×1000mm electrode at 30kW input RF power were calculated. The result showed that the maximum voltage fluctuations were 25% and 65% respectively. Further more, in order to resolve the nonuniformity of the 2-D voltage distribution, a theory model of installing parallel resonant inductors in the longitudinal direction and reactance components in the transverse direction was presented.
(3) Theory model of making the 2-D votage distribution of the large area gas discharge uniform was established and experiments were done to verify the uniformity of RF excited gas discharge. When RF energy was injected at the middle in the longitudinal direction, and at the middle or the side in the transverse direction, uniform voltage distribution was obtained by using symmetricl or asymmetricl parallel inductors on the two sides of the transverse direction. For the electrodes of 40mm×500mm and 200mm×1000mm, when the middle feed point and side feed point were adopted respectively on the transvers direction, the voltage fluctuations of the former were 1.5% and 2% respectively, and the voltage fluctuation of the latter were 2.5% and 3% respectively. Experiments were done to study on how the intensity of the glow discharges varying with the input RF power or the gas pressure. And the influence of the parallel inductors on the uniformity of the gas discharge was found to accord with the theory model.
(4) Transmission of the RF power and impedance matching characteristics of the load were studied. Equivalent impedance of gas discharge on electrodes of 40mm×500mm and 200mm×1000mm, and RF transmission impedance matching network were ananysed and calculated. WhenΠ-shaped or L-shaped matching network was adopted, the variation rules of the parameters of the impedance matching network with the load were deduced by using the Smith circle-diagram method. The best matching network type and parameters of the components were determined. And the voltage standing wave ratio is controlled within 1.2 by using a self-adaptive adjusting installation.
(5) The power modulation characteristics of the RF slab laser were studied. Parameters of the modulation pulse on ignition, maintenance, continuous mode and pulse mode were analysed. The output waveform according to the requirement of high power RF laser was obtained by developing the hardware circuit and software program of the DSP pulse width modulator.
(6) Influence relation between the distortion of the resonator mirror and the output laser beam with the change of the input RF power was studied. Relation curve of the synchronously heating compensation for the mirror with the variation of the input RF power was established by simulating and analyzing the temperature distribution and distortion of the reflecting mirror using the method of finite element analysis. And compensation result of the curvature rate distortion less than 0.02% of the reflecting mirror was obtained.
The research contents of the thesis has important theoretical significance and practical value to conquer the key technology of the RF excited high power CO_2 laser and to meet the urgent need for the development of the high power laser on equipment manufacturing industry in our country.
引文
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